Gasonics novellus equipment spare parts may 20th 2020

1. 1 00‐674505‐00 Novellus, Ring, Ceramic Clip
2 00‐680909‐00 / RAM BELLOWS ASSY,PRESSURE PLATE,SPUTTER / NOVELLUS SYSTEMS INC
3 01‐13231 / PLATE,KAKIZAKI FOSB DOOR ASSEMBLY / NOVELLUS SYSTEMS INC
4 0125‐112096 / MODEL OEMC‐04‐02 NOVELLUS CONTROL MODULE / ICS
5 0125‐739223 / IPEC 0125‐739223 EP/676 COMPUTER W/SOFTWARE ASSY / NOVELLUS 676
6 01628727 / PIGTAIL #94‐06,GAS PANEL,DISS 728,ETG 04496,PT‐HPM‐728‐FC / NOVELLUS
7 017‐0483‐01 / BROOKS RELIANCE FOR NOVELLUS VECTOR; CVD; ROBO / BROOKS AUTOMATION
8 02‐00012‐00 / PNEUMATICS PANEL ASSEMBLY FOR C1 / NOVELLUS SYSTEMS INC
9 02‐00064‐00A / ASSY, LWR, SPINDLE, FERROFLUIDIC, WITHOUT GENEVA / NOVELLUS SYS
10 02‐00072‐00 / ASSY,NITRIDE TERM,PNL W/ EXCHANG! / NOVELLUS SYSTEMS INC
11 02‐00094‐00 / ASSY,PNEUMATIC CONTROL PANEL 34VLV WITH EXCHANGE/ NOVELLUS SYSTEMS
12 02‐00215‐00 / ASSY,GENEVA DRIVE (200MM) WITH EXCHANGE / NOVELLUS SYSTEMS INC
13 02‐00221‐03 / ASSY,PIN MEC PED 5 & BLNK OFF / NOVELLUS SYSTEMS INC
14 02‐00269‐00 / ASSY,ONE ARM ROBOT ARM SET ONLY WITH EXCHANGE / NOVELLUS SYSTEMS
15 02‐00315‐00 / ASSY,SENSE PIN PCB W/ EXCHANG! / NOVELLUS SYSTEMS INC
16 02‐00374‐00 / ADAPTORR ACR‐26S02, CONTROLLER W/ EXCHANG! / NOVELLUS SYSTEMS INC
17 02‐00374‐00 / PCA,TERMINAL PANEL C1 NG (ALL) W/ EXCHANG! / NOVELLUS SYSTEMS INC
18 02‐034310‐00 / ASSY,MOD CONTROLLER,P100/16M / NOVELLUS SYSTEMS INC
19 02‐057547‐00 / HOIST CONTROL PCB PCA 27‐057546‐00 / NOVELLUS SYSTEMS INC
20 02‐109467‐00 / ASSY,INTLK,HDP SIOC SPEED 0 INTERLOCK / NOVELLUS SYSTEM INC
21 02‐112046‐00 ASSY, ESC, 150MM, DS‐1, NOVELLUS
22 02‐127162‐00 / ASSY,MC2,HANDLER CNTRL, 06‐01391800‐405, 02‐126405‐00 / NOVELLUS
23 02‐128733‐00,03‐12785‐00 SIOC CONTROLLER ASSY PVD‐MOD SIOC 1 NOVELLUS
24 02‐134263‐00 ESC, 200MM, Novellus
25 02‐134264‐00 ASSY, ESC, 200MM, JEIDA, MC , NOVELLUS
26 02‐142639‐00 Rev A Flow Monitor / sensor Novellus Systems Inc.
27 02‐153028‐00 / ASSY,HOIST,LOCK,VECTOR / NOVELLUS SYSTEMS INC
28 02‐157910‐00 / ASSY, ETHERNET,HUB BOX, LOTO / NOVELLUS SYSTEMS INC
29 02‐159684‐00/ NOVELLUS PEDESTAL 300MM WCVD,PREHEAT ASSY / NOVELLUS
Email us to check the availability pls. 1 of 108 sales@semistarcorp.com
ID:OEME 1 of 108 sales@semistarcorp.com

2. 30 02‐162351‐00 / ASSY,BELLJAR,HI PWR,C2SPD‐S / NOVELLUS
31 02‐168925‐00N / ASSY,PEM,300MM,SABRE XT(SABRE NON 3D) / LAM / NOVELLUS SYSTEMS
32 02‐252395‐00/ASSY,HDSIOC0,VECTOR/NOVELLUS SYSTEMS INC
33 02‐255013‐00 / MATCH, RF NOVELLUS REV C / NOVELLUS SYSTEMS INC
34 02‐255634‐00 / FOUP CALIBRATION FIXTURE 38740D TRESCAL 777‐2 / NOVELLUS
35 02‐258799‐00 / ASSY,HEATER BLOCK,2&3KW,6FORKS,SEQUEL /NOVELLUS
36 02‐259457‐00 / SPINDLE ASSY,300MM,C3VCTR, 50RGS4H14‐270 CAMCO / NOVELLUS
37 02‐262664‐00 / ASSY,CUP,296MM,PPS(SABRE NON 3D) / NOVELLUS SYSTEMS
38 02‐263840‐00 /STAGE ASSY.SINGLE HEATER 200MM/ NOVELLUS
39 02‐264143‐00 / ASSY,HD‐SIOC / SIOC, PCA, CONTROLLER VERSION 4.72 / NOVELLUS
40 02‐264189‐00 / HPD SIOC HDP 1 REV‐A FIRMWARE VERSION 4.72 / NOVELLUS SYSTEMS
41 02‐264833‐00 / SESIOC WTS 0 REV‐A FIRMWARE VERSION 4.72 / NOVELLUS
42 02‐268027‐00/HEATED DOME/REMOTE PLASMA CLEAN MODULE REV‐A/NOVELLUS SYSTEMS INC
43 02‐275643‐00 / HDSIOC E84 AWC REV‐AFIRMWARE VERSION 4.72 / NOVELLUS SYSTEMS INC
44 02‐282622‐00_A / HDP SIOC 0 REV‐A FIELD CONNECT DIGITAL DYNAMICS / NOVELLUS
45 02‐283805‐00 / ESC REV‐C 300MM / NOVELLUS
46 02‐285001‐00 / FESTO 13036645/048 FIRMWARE VERSION 4.63 / NOVELLUS SYSTEMS
47 02‐288189‐00 / 2ND GEN 300MM LIFT PIN ACUATOR / NOVELLUS SYSTEMS INC
48 02‐293421‐01 / C3 RF MATCH 300MM REV‐A 0806 103006 / NOVELLUS
49 02‐309899‐00, 61‐285456‐00 / FESTO DSW‐75‐12.7‐P‐A PMAX 10BAR/145PSI / NOVELLUS
50 02‐313956‐00 Novellus / Ped Assy / 200mm STD D.3,
51 02‐324753‐00 / LEVEL 3 ALTUS/VECTOR SPINDLE /NOVELLUS SYSTEMS INC
52 02‐32566‐0001 / CONDOR GPC40‐24 OPEN FRAME POWER SUPPLY, OUTPUT 24V / NOVELLUS
53 02‐347924‐00 / ASSY,ELECTRICAL,ILDS DIRECT DIVERT(C3 VECTOR) / NOVELLUS
54 02‐364187‐00 / 02‐373416‐00 12" VECTOR PEDESTAL HEATER FOR 300MM / NOVELLUS
55 02‐377211‐00 / SRD FOUR STAGE RF ASSY WITH BNC / NOVELLUS 200159110 200182041
56 02‐381649‐02 / ASSY,PEM 2,300MM,POR,SR,SBR‐XT(SABRE NON 3D) / LAM / NOVELLUS
57 02‐392712‐00 / ASSY,SIDE TRACK,SBR‐3D FI(SABRE 3D) / NOVELLUS SYSTEMS INC
58 02‐418545‐00 / ASSY,PLATING CELL,NEXT(SABRE NON 3D) / NOVELLUS SYSTEMS/ LAM
Email us to check the availability pls. 2 of 108 sales@semistarcorp.com
ID:OEME 2 of 108 sales@semistarcorp.com

3. 59 02‐428979‐01 / ASSY,IRIS CELL,CELL1(SABRE NON 3D) / NOVELLUS SYSTEMS / LAM
60 02‐429577‐00 / PEDESTAL ASSY STA 2‐4 FORK VXL / NOVELLUS 02‐429577‐00 PEDESTAL
61 02‐437198‐00 / ASSY,MIXING BOWL,E38,BD,VXT(VECTOR EXTREME) / NOVELLUS / LAM
62 02‐451607‐00 / ASSY,AC DISCONNECT SWITCH BOX,SFEM(PLATFORM) / NOVELLUS / LAM
63 02‐463840‐00 / ASSY,PUMP DOSE,3 CHEM,BATH 2(SABRE 3D) / NOVELLUS SYSTEMS / LAM
64 0275‐103753 / TRANSDUCER,FLOW VELOCITY / NOVELLUS SYSTEMS INC
65 02‐8146121‐03 / COVER, TOP / NOVELLUS
66 0‐2‐ANNEAL,76‐135065‐00 / SABRE XT ANNEAL FRONT END / NOVELLUS
67 03‐00123‐04 / CABLE ASSY,CA17 / NOVELLUS SYSTEMS INC
68 03‐00148‐00 USED, C/A, MONITOR, NOVELLUS
69 03‐00224‐00 / FLEXIBLE PCB / NOVELLUS SYSTEMS INC
70 03‐034917‐00 USED, CABLE, NOVELLUS
71 03‐042805‐02 USED, CABLE, NOVELLUS SYSTEM
72 03‐046399‐00 USED, CABLE, NOVELLUS
73 03‐121130‐00 USED, CABLE, NOVELLUS
74 03‐137898‐00 USED, CABLE, NOVELLUS
75 03‐141851‐04 USED, CABLE, NOVELLUS SYSTEM
76 03‐141851‐05 USED, CABLE, NOVELLUS SYSTEM
77 03‐171636‐00 USED, CABLE, NOVELLUS SYSTEM
78 03‐251808‐01 USED, CABLE, NOVELLUS
79 03‐257222‐00 USED, CABLE, NOVELLUS
80 03‐258372‐05 USED, CABLE, NOVELLUS SYSTEM
81 03‐263834‐00 / RF GENERATOR INTERFACE PDP/MSSD, C3SPD REV‐A / NOVELLUS SYSTEMS
82 03‐273366‐00 USED, CABLE, NOVELLUS SYSTEM
83 03‐274553‐00 / LOWER DISTRIBUTION PCB NEXT HPD 300 / NOVELLUS SYSTEMS
84 03‐277089‐00 / PCB CONTROLLER PROCESS MODULE C3SPD PDP / NOVELLUS SYSTEMS INC
85 03‐288081‐00 USED, CABLE, NOVELLUS SYSTEM
86 03‐294282‐00 / DC DISTRIBUTION PCB F47 NEXT SEMI‐SR / NOVELLUS SYSTEM
87 03‐46750‐00 USED, C/A, NOVELLUS
Email us to check the availability pls. 3 of 108 sales@semistarcorp.com
ID:OEME 3 of 108 sales@semistarcorp.com

4. 88 04‐0050 / TUBE, PLASMA,CERAMIC, 8.66 LONG/NOVELLUS SYSTEMS INC
89 04‐269057‐00, TOOL KIT, C3ALT, WHEEL BLOCK REMOVAL,NOVELLUS
90 04‐306477‐00 / KIT,SPINDLE,XPRS,YASKAWA YSC‐02D04B02S / NOVELLUS SYSTEMS INC
91 04‐308076‐00 / KIT, ATH SHIELD, CELL 3, 300MM(SABRE NON 3D) / NOVELLUS / LAM
92 04‐448048‐00 / CABLE KIT,EIOC 0,TM,SOLA,MACH I(PLATFORM)/ NOVELLUS SYSTEMS / LAM
93 04‐706590‐01 USED, CABLE, NOVELLUS
94 04‐714049‐02 /SHIELD,DARK SPACE,04‐714049‐02,3290/ NOVELLUS
95 05‐00023‐00 / PM KIT, SEMI‐ANNUAL / NOVELLUS SYSTEMS INC
96 05‐0234 / FLANGE, PLATEN FEEDTHRU, ALUMINUM OBSOLETE USE 16207‐01 / GASONICS
97 05‐119299‐01 / MONITOR, MAINT, LCD UPGRADE KIT/ NOVELLUS
98 05‐120669‐00 / KIT,RETRO,ANTI‐DFLCT FORK / NOVELLUS
99 06‐2640 or 06‐2545 / SPOOL,PLASMA,QUARTZ,PEP‐1(WONIK) REV A / NOVELLUS
100 0720‐106699 / RING,FLOATING DR200MM 0720‐106699 / NOVELLUS SYSTEMS INC
101 0860‐103461 / SHOE,CASS LOAD STAT SHUTTLE SENSOR / NOVELLUS SYSTEMS INC
102 10 Novellus 011005‐002‐101104, 962977 Rev. A, Insulator.
103 10 Novellus 24‐10257‐00 BRG. Gate Valve New Style 1/4ID X 7/, Needle Bearing
104 10 Novellus 73337‐01 Oring, Gasket Flange Lift Cylinder, VITON, Gasonics,
105 10‐00360‐00 / TUBE ASSY,DEGAS BY‐PASS / NOVELLUS SYSTEMS INC
106 1006143 /VERITY INSTURMENTS ENDPOINT CONTROLLER MODEL /NOVELLUS
107 10076 NOVELLUS CABLE ASSEMBLY, 102347 0912 03‐409637‐00
108 1011 NOVELLUS RING , ANODE , GRIT , HCM PVD300, 02‐268740‐01 16‐251447‐00
109 10‐132658‐00/TUBE ASSY ISSLD DELIVERY MO/ NOVELLUS 10‐132658‐00 GETSPARES.COM
110 10220 NOVELLUS HEATER PEDESTAL 02‐384125‐00
111 10221 NOVELLUS HEATER PEDESTAL 02‐384123‐00
112 10268 NOVELLUS RING, ANODE, GRIT, HCM, PVD300 02‐268740‐02
113 10430‐000 / GASONICS SPOOL / COOLED 3500 / LTD MATERIALS LLC
114 10‐430544‐00 / THERMOCOUPLE / NOVELLUS SYSTEMS INC
115 110 NOVELLUS TOOL WAFER CENTERING FEI, 300MM, 20‐186598C01 04‐141677‐01
116 12 new HBC‐558 solid state relay opto 22 480D45‐12‐NOV120 novellus 61‐338317‐00
Email us to check the availability pls. 4 of 108 sales@semistarcorp.com
ID:OEME 4 of 108 sales@semistarcorp.com

5. 117 12Novellus 372‐45070‐1 Spacer Rings, 125mm x.003
118 13038 NOVELLUS ASSEMBLY, L‐TYPE INSERT 46X236 02‐149998‐00
119 15‐00003‐02 / C1 PLATE,TOP,PROCESS 150MM / NOVELLUS SYSTEMS INC
120 15‐00475‐00 INSULATOR GAS FEED THRU TOP PLATE CERAMIC NOVELLUS
121 15‐00477‐00 / PLATE,BTM,1.25 TOP / NOVELLUS SYSTEMS INC
122 15‐00534‐00 / FLANGE, BRAKE / NOVELLUS
123 15‐00558‐02 / SHIELD,HTR STRAP,2.75 LG / NOVELLUS SYSTEMS INC
124 15‐00703‐00 / FORK, TOP PLATE/ NOVELLUS
125 15‐01101‐00 / HUB,INDEXER / NOVELLUS
126 15‐01139‐00 RING, WINDOW, NOVELLUS
127 15‐01142‐00 WINDOW,ROUND,NOVELLUS
128 15‐01147‐00 NOVELLUS PART
129 15‐029544‐00 / CHMBR,SPD‐S / NOVELLUS SYSTEMS INC
130 15‐032014‐00 Window, Quartz, Etch Resistant, Novellus Concept 1 and Concept 2
131 15‐032014‐01 /QTZ WINDOW,ETCH RESISTANT,FUSED SI / NOVELLUS
132 15‐046348‐01 / CVD, DOME, LOW POWER, 300MM / NOVELLUS SYSTEMS INC
133 15‐053394‐01 FORK FINGER, CERAMIC NOVELLUS
134 15‐053394‐02 FORK FINGER, NOVELLUS
135 15‐100263‐00 /ROBOT BLADE 200MM HI PURITY / NOVELLUS
136 15‐10720‐00 NOVELLUS PART
137 15‐11030‐00 / CLAMP,RING,FEEDTHRU / NOVELLUS SYSTEMS INC
138 15‐110411‐00 Window, Sapphire, for Novellus Concept 1 and Concept 2 Sequel Altus
139 NOVELLUS PCB ASSY, LIQ SOURCE INTRFC 03‐10639‐00
140 15‐11606‐00 INSULATOR GAS DIST, NOVELLUS
141 15‐118122‐00, Novellus, LAM, INSULATOR TARGET, NEW, SEALED
142 15‐118123‐00, Novellus, LAM, RING INSULATOR ANODE, NEW, SEALED
143 15‐122731‐01 / NOVELLUS HDP RF DISTRIBUTION PLATE 300MM / NOVELLUS
144 15‐129181‐00 / WINDOW HATCH COVER 300HDP / NOVELLUS SYSTEMS INC
145 15‐136486‐01 / CHAMBER RING WATER COOLED / NOVELLUS
Email us to check the availability pls. 5 of 108 sales@semistarcorp.com
ID:OEME 5 of 108 sales@semistarcorp.com

6. 146 15‐139579‐00 / WEIGHT CLAMP/NOVELLUS
147 15‐151335‐00 / LVR SCRN ROUND HDP 300 LOUVERED / NOVELLUS
148 15‐157960‐01 / ARM,END EFF MTG,R L/LK,VCTR / NOVELLUS SYSTEMS INC
149 15‐158185‐00 INJECTOR TUBE, NOVELLUS
150 15‐183816‐00 / SHWRHD,CONST DENSITY,IALD(C3 FFW) / NOVELLUS SYSTEMS INC / LAM
151 1520 NOVELLUS TERMINAL PANEL CONTROLLER 02‐252197‐00
152 15‐251544‐00 / 300MM SHOWERHEAD / NOVELLUS 15‐251544‐00 SHOWERHEAD DOME CAP BOWL
153 15‐251847‐00 / INJECTOR TUBE, CLOSE, LINCH / NOVELLUS SYSTEMS INC
154 15‐256677‐00 / END EFFECTOR 300MM CERAMIC / NOVELLUS
155 15‐256677‐00 / END EFFECTOR 300MM CERAMIC / NOVELLUS
156 15‐278968‐00 / TOSOH WET CLEAN KIT CERAMIC STAR HEAD SHORT INJECTOR/ NOVELLUS
157 15‐278978‐00 /TOSOH WET CLEAN KIT CERAMIC CHAMBER PEDES / NOVELLUS
158 15‐280354‐00 / CERAMIC PEDESTAL GUARD RING EXT CATHODE LMT C3SPD NEXT / NOVELLUS
159 15‐287491‐00 / SHIELD,CYLINDER,13.52 / NOVELLUS SYSTEMS INC
160 15‐291416‐00 / SHIELD, 2‐GAP ESC, ARC S, 300MM / NOVELLUS
161 15‐303364‐00 / NOVELLUS CERAMIC PEDESTAL LINER RING / NOVELLUS SYSTEMS INC
162 15‐309288‐00 CERAMIC FORK FINGER, NOVELLUS
163 15‐313661‐00 / WTS CERAMIC ROBOT BLADE REV‐B / NOVELLUS SYSTEMS INC
164 15‐336373‐00 / TOSOH WET CLEAN KIT CERAMIC GAS FLOW INSULATOR / NOVELLUS
165 15‐403898‐00 / PLATE,CLEAR,TOP,VXL SSM(VECTOR EXCEL) / NOVELLUS SYSTEMS INC
166 15414 GASONICS/IPC PCB, PWA INTERLOCK & DRIVER, 16383‐01 16384‐01
167 15‐415059‐00 / PLATE,HRVA,SPIRAL,6431,EXPANDED(SABRE 3D) / NOVELLUS / LAM
168 15451 NOVELLUS BELL JAR ‐ DOME W/ 15‐045101‐02 15‐255728‐00
169 15452 NOVELLUS BELL JAR ‐ DOME W/ 15‐045101‐04 02‐258341‐00
170 154523 / ROBOT RELIANCE DRIVE ARM ‐ 8‐04 NOVELLUS27‐35305‐00 BROOKS AUTOMATION
171 15‐japan power supply / C1 SPECIAL JAPAN 5V 14.8V / NOVELLUS SYSTEMS INC
172 16‐144557‐00 / SHIELD, BARREL, GRIT, PVD, 300MM / NOVELLUS SYSTEMS INC
173 16‐271392‐00, C3, 300mm, 12inch Shower head, Novellus
174 16‐327424‐01,RING, LIFT PIN, SPLIT, LEFT, PVD 300MM, Novellus, PIN‐HOLDER
Email us to check the availability pls. 6 of 108 sales@semistarcorp.com
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7. 175 16‐455989‐00 / DUCT, EXHAUST, UV ENCL FACIL, ALUM (SOLA EXCEL) / NOVELLUS
176 16‐464109‐00 / TUBE,EXHAUST,VV AMPDS,VXL(VECTOR EXCEL) / NOVELLUS SYSTEMS INC
177 16898‐01 / LOCATOR, WAFER 8 INCH / NOVELLUS SYSTEMS INC
178 17002023 / RIPPLE RACK 3XXX with PCBs / NOVELLUS
179 17‐055801‐00 NOVELLUS PART
180 17‐10318‐00 NOVELLUS PART
181 17‐10644‐00 NOVELLUS PART
182 17‐121827‐00 NOVELLUS HIB FRAME ONLY
183 17‐291419‐00 / SHIELD, TOPHAT, ARC SPRAY, PVD / NOVELLUS
184 17‐291420‐00 / SHIELD, BOTTOM FRONT, ARC SPRAY, 300MM / NOVELLUS
185 17‐291421‐00 / SHIELD, BOTTOM BACK, ARC SPRAY, 300MM / NOVELLUS
186 17‐291673‐00 / SHIELD, .090 THK, PASSTHRU, ARC SPR / NOVELLUS
187 17‐323902‐00 / SHIELD, PEDESTAL, ARC SPRAY, PV / NOVELLUS
188 17‐323903‐00 / SHIELD, BARREL, ARCS, PVD, 300MM / NOVELLUS
189 182 NOVELLUS ANODE RING 300MM, 02‐262202‐00 16‐262201‐00
190 183 NOVELLUS RING, ANODE, GRIT, HCM PVD300, 02‐254040‐01 16‐251447‐00
191 19‐00122‐00 / PCB, RAM/EPROM MEMORY (SLOT 3) REPAIR W/ EXCHANGE / NOVELLUS
192 19‐00128‐00 /PCB, CPU W/JUMPERS, SLOT 2,** W/EXCHANGE **/NOVELLUS
193 19‐00128‐01 / PCB, CPU, 8086‐2 TEOS OPTION W/ EXCHANG! / NOVELLUS SYSTEMS INC
194 19‐00130‐00 / PCB, SERIAL I/O SBX351 W/ EXCHANG! / NOVELLUS SYSTEMS INC
195 19‐00136‐00 / ASSY,PCB,ANA.OUT W/JUMP / NOVELLUS SYSTEMS INC
196 19‐00154‐00 / HEATER BLK,2KW, 2KW 8 200MM, NON SLOTTED / NOVELLUS
197 19‐00154‐00 / HEATER BLK,2KW, 2KW 8 200MM, NON SLOTTED / NOVELLUS
198 19‐00155‐01 /HEATER,BB 150MM BLOCK/ NOVELLUS SYSTEMS INC
199 19‐00156‐00 / PCB SLOT 4, DIGITAL I/O 519A #1 / NOVELLUS C1 MULTIBUS PCB
200 19‐00161‐00 / MOTOR‐EXT W/DRIVER / NOVELLUS SYSTEMS INC
201 19‐00268‐01 / LIFT Motor 90V C‐TYPE NOVELLUS C1 / NOVELLUS 19‐00268‐01
202 19‐032015‐01 / HEATER BLK,150MM 6"OD PINNED / NOVELLUS SYSTEMS INC
203 19‐045209‐00 / ASSY,MANOMETER,100M TORR / NOVELLUS
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8. 204 19‐137359‐00 / PWR SPLY,6 PHASE,ESC / NOVELLUS SYSTEMS INC
205 1Novellus 0710‐717386 Nylon or Plastic Dowel Pin 1/2" x 1/4" dia
206 1Novellus 0730‐727009 Bushing Spacer
207 1Novellus 372‐15134‐1 RevB Spacer, ss
208 1Novellus 372M‐35083 PTFE Gasket
209 1Novellus 952799 Gasket Index Table
210 2 ADTEC RF GENERATOR AX‐2000EU, Novellus 27‐286651‐00, AX‐2000EU‐N
211 2 GaSonics A90‐031‐03 PCB Plasma/Lamp Failure Detection
212 2 Keyence FS‐V1 Novellus Ipec Speedfam 956289 Keyence sensors
213 2 Leybold Mag 2000 Turbo pumps, one MAG Turbo controller + 2 cables, Novellus
214 200MM 8” Wafer Vacuum Chuck Thermal Heater AMAT LAM Novellus
215 20‐291878‐00 / SEAL PLATE DN250 PENDULUM VALVE ISOLATION / NOVELLUS SYSTEMS INC
216 22‐027510‐00 MTR5 DUAL,ARM NOVELLUS C2
217 22‐120289‐00 / XDCR TRANSDUCER MODEL:223,VAC‐100,4‐20MA,M‐M / NOVELLUS
218 22‐146276‐00 / VALVE,PNEU,DIAPH,2WY,125PSIG / NOVELLUS
219 22‐186871‐00 / 10 SLIM GAS‐C2H2 RANGE‐10000 AERA FC‐D981C / NOVELLUS SYSTEMS INC
220 22‐192810‐00 / AERA PI‐98 SERIES MFC GAS‐N2 / NOVELLUS SYSTEMS INC
221 27‐00082‐00 /DRIVER,MOTOR,CX/ NOVELLUS
222 27‐00117‐01 / CONTROLLER TEMP R 818S / NOVELLUS
223 27‐00141‐00 /THROTTLE VALVE CONTROLLER AC‐4S02 ADAPTORR TYLAN GENERAL/ NOVELLUS
224 27‐029507‐00 / PCA,PMT H/V CONT,DUAL CH / NOVELLUS SYSTEMS INC
225 27‐032653‐00 / TRAZAR MATCH 5KW W/ARC SENSOR AMU2‐1 / NOVELLUS
226 27‐034223‐00 /TRAZAR 10E‐1MATCH 5KW 150MMSPD / NOVELLUS
227 27‐052211‐00 /RF MATCH / NOVELLUS
228 27‐053660‐00 / PWR SPLY,SIOC,+/‐15V POWER SUPPLY / NOVELLUS SYSTEMS INC
229 27‐121645‐00 / MATCH,TRAZAR,SEQ,IMP COOLING / NOVELLUS SYSTEMS INC
230 27‐143752‐00 / PWR SPLY,52VDC,125W,COSEL UAW125S‐N / NOVELLUS
231 27‐160698‐00 / ROBOT,ARM,ATR7,300,RABBIT MAP(SABRE NON 3D) 002‐6640‐39/ NOVELLUS
232 27‐255798‐00N, 3152603‐010 / E‐WAVE POWER SUPPLY / NOVELLUS
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9. 233 27‐274809‐00, 27‐105447‐00/GHW‐85A,GEN,HF,ENI,8KW,GHW80A‐13DF2L0‐001 / NOVELLUS
234 27‐290521‐00 / GENERATOR, PLASMA, 3.0KW, LITMAS, 1.9‐3.2MHZ / NOVELLUS
235 27‐293802‐00 / DIGITAL DYNAMICS I/O CONTROLLER SW VERSION IOC V.4.21 / NOVELLUS
236 27‐370236‐00 / PWR SPLY,DC PLATING,150V,5A,BI‐DIRECTION(SABRE NON 3D) / NOVELLUS
237 27‐372675‐00 10240101 / RF PLASMA GENERATOR / NOVELLUS AD TEC
238 2805‐103420 / ASSY, SLURRY FEED PRIMARY BELOW TBL / NOVELLUS SYSTEMS INC
239 2805‐104071 / ASSY,DRAIN VALVE UNLOAD 2805‐10471 / NOVELLUS SYSTEMS INC
240 2808‐106043,0102‐106044, GBL‐UHEAT,ASSY, PRINTER CIRCUIT UNIVERSAL HX NOVELLUS
241 2848 Novellus 02‐292391‐00A Heater Pedestal Block
242 2850‐739458 / ROBOT IPEC 676 GENMARK GB4 / NOVELLUS
243 2851 NOVELLUS SYSTEMS BALLROOM I, 17" IMM ASSY 02‐274070‐00
244 2944 Novellus P/N: 01‐07223‐001
245 2948 Novellus Cover
246 2‐F8‐8684 / LOAD LOCK SST FINGERS FOR ROBOT / NOVELLUS
247 2x Novellus/VAT 80642‐R1 Industrial Leaf Spring w/Guide Bearing Unit w/Case
248 3 Compact QJM97‐3143‐B, 60‐162879‐00 Lift Assembly, Novellus 02‐152880‐00
249 3 Greene Tweed 5641‐0854‐SSE38, CPD E38, Novellus 12‐128529‐21, Oring
250 3 Lambda 48‐48, Power Supply, 48V, 20.5A, LFS4848 Novellus QT330136
251 3 NEW Fluorosilicone 2‐030, AS568‐030, Blue, 70, Novellus 22‐373614‐00
252 3 NEW Fluorosilicone 2‐177, AS568‐177, Blue, 70, Novellus 22‐373618‐00
253 3 NEW Fluorosilicone 22.50 x 1.29 Oring, Blue, 70, Novellus 22‐373622‐00
254 3 New Novellus 15‐120130‐00
255 3 Novellus 0175‐7000066, Square D, MG24427, Circuit breaker, 1P 3A
256 3 Novellus 03‐104547‐01 Interface Cable
257 3 Novellus 22‐149793‐00 Magnetic Coupling for Actuator, Load Lock, Vector
258 3 Renco Encoders 79992‐032, RCH20, Polish Arm Drive Motor, Novellus 33‐278384‐00
259 30‐000956‐00 CHAMBER , TOP PC 2300 MTL/PL REPAIR NOVELLUS
260 3004 ENI Plasmaloc 2‐HF ( Novellus P/N: 27‐00073‐00) Low Frequency Generator
261 300MM 12” Wafer Vacuum Chuck AMAT LAM Novellus TEL Accretech
Email us to check the availability pls. 9 of 108 sales@semistarcorp.com
ID:OEME 9 of 108 sales@semistarcorp.com

10. 262 33‐153940‐00 / MOTOR, ZETA STEPPER, EXT/ROT / NOVELLUS
263 33‐153941‐00 / MOTOR, ZETA STEPPER, LIFT / NOVELLUS
264 3364 ELECTRO‐OPTICAL SYSTEMS NOVELLUS SPEED CONTROLLER 27‐054088‐00
265 34‐130130‐00 / TC,SPRING‐LOADED / NOVELLUS SYSTEMS INC
266 3505 Novellus P/N: 02‐033134‐00N Heater Pedestal
267 3506 Novellus P/N: 02‐033134‐00N Heater Pedestal
268 372‐15050‐1 / ASSY, THRU BEAM SENSOR / NOVELLUS SYSTEMS INC
269 372‐72564‐2 / BLOCK,V‐NOTCH,POLISH ARM / NOVELLUS SYSTEMS INC
270 372M‐29011‐1 / 472,SLURRY DISPENSE TUBE,FINAL / NOVELLUS SYSTEMS INC
271 372M‐29012‐1 / MOUNT,SLURRY TUBES / NOVELLUS SYSTEMS INC
272 372M‐37051‐1 / ASSY, BRAIN BOARD ANALOG RAIL 0 / NOVELLUS SYSTEMS INC
273 372M‐37059‐1 / ASSY, BRAIN BD DIGITAL RAIL#4 372M‐37059 / NOVELLUS SYSTEMS INC
274 3750 Cal Weld/Novellus P/N: 10‐00337‐03 Rev. E Tube Assy
275 3844 ADEK INDUSTRIAL INDUSTRIAL PC NOVELLUS PN:04‐165498‐00 MKS PN:133 P6JD8380I
276 3851 Novellus 02‐021383‐01 Rev. B DLCM‐Lite Local Power Box B/O Board
277 3857 Novellus 02‐021383‐03 Rev. B DLCM‐Lite Local Power Box B/O Board
278 3885 VAT GATE VALVE ACTUATOR, NOVELLUS 02‐115278‐00 03109‐NA24‐AJX1
279 4 Browning 20XLB037 Gearbelt Pulley, 372‐72586, IPEC, Speedfam, Novellus
280 4 Count Novellus Part # 22‐00236‐00 O ‐ Ring 7.45" X 0.275", VITON, 150M
281 4 EAO 61‐8420.22/.25 Switching Element, Contact Block, Novellus PB020033
282 4 ECI Technologies TQ503298, Flow Switch Assy, 100ml/min Novellus 34‐160330‐00
283 4 NEW COSEL PAA150F Power supply 12V, 13A, Novellus 27‐169458‐00, PAA150F‐12‐N
284 4 NEW COSEL UAW125S Power supply 52V, 125W, Novellus 27‐143752‐00
285 4 Novellus 0175‐111414 Entrelec LR88297 GMU 15U 15A Circuit Breaker
286 4 Novellus 0710‐106576 Coupling, Helical Flexible Shaft
287 4 Novellus 71004‐61 Oring, 6.734 ID x 0.139 W, VITON, Gasonics
288 4 units of Novellus orings 22‐120429‐00
289 5 new BAL SEAL 316HB‐309 Canted Spring Seal foNovellus AC2714A1
290 5 New Novellus 15‐130760‐00 Screw, Flat, Hex, 6‐32x
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ID:OEME 10 of 108 sales@semistarcorp.com

11. 291 5 Novellus 71004‐76 Oring, 10.984 ID X .139 W, VITON, Gasonics
292 5321‐0243‐6190 / TOSOH WET CLEAN KIT SAPPHIRE LONG INJECTOR / NOVELLUS
293 5683 NOVELLUS FORK, CERAMIC, C2SEQ‐X (LOT OF 2) (NEW) 15‐277460‐00
294 5688 PARKER/NOVELLUS VALVE, DIAPH, 2 PORT, NC PNEUMATIC, CASY‐2039/61‐308597‐00
295 5736 NOVELLUS PCB LOWER DISTRIBUTION, NEXT, HDP 300 26/03/76‐274553‐00
296 5Novellus 372‐45071‐1 125mm Spacer Rings
297 6 NEW Fluorosilicone 2‐011 Oring, AS568‐011, Blue, 70, Novellus 22‐373607‐00
298 6 NEW Novellus 03‐122255‐00 Cable assy, OEPD, SIG ITF, ALT
299 6 NEW Novellus 0850‐103478 new brackets, rev A
300 6 NEW Novellus 15‐136756‐00, 300 PVD plunger ESC, W/O post, Ceramic
301 6 Novellus 01‐4905 Pin, Aligner, Vespel, Sierra
302 6 Novellus 15‐271403‐00, Insulator, RF Break, KF16‐KF16, C2SEQX
303 6 Novellus 71003‐13 Oring, .612 ID X .103 W, VITON, Chemraz, Gasonics
304 6 Novellus 71004‐60 Oring, 75 Dur, Viton, 505, Chemraz, Gasonics
305 60‐00012‐00 Novellus Cylinder, Pneumatic, Cassette Door. Brand new
306 60‐10317‐00 / HEATED THROTTLE VALVE(MDVHX‐100B) / NOVELLUS SYSTEMS INC
307 60‐320626‐00 / VALVE ANGLE KF 16 PNEUM BACK SEAL / NOVELLUS SYSTEMS INC
308 61‐344687‐00 / COMPUTER EC1 QNX 4/6 NEXUS MODULE / NOVELLUS SYSTEMS
309 7 units of Novellus 372‐45064‐1 spacer, .004 thick
310 71‐153266‐03 / METAL BRACKET / NOVELLUS 71‐153266‐03
311 71‐252989‐00 / WAFER CARBON 300 CALIBRATION NO NOTCH / NOVELLUS
312 73016‐09 / FILTER UV‐23,313NM+4NM / NOVELLUS SYSTEMS INC
313 7x Novellus/VAT 80642‐R1 Industrial Leaf Spring w/Guide Bearing Unit
314 8 new novellus 22‐121782‐00, viton oring chamber to DLCM, 200 mm 337V75, 2‐377
315 878 NOVELLUS SYSTEMS PCB, PCA, LAB FAILURE DETECT W/ SENSOR ASSY, P32011 90‐1080
316 90‐1064 Gasonics Driver Bd
317 90‐1071 / PCA, LAMP CURRENT CONTROLLER (89‐1071) / GASONICS
318 90‐2590 / PCB, GASONICS I/O INTERFACE, NEW STYLE BOARD / GASONICS
319 90‐2608 / PCA LOAD LOCK INTERFACE BOARD / GASONICS INTL CORPORATION
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ID:OEME 11 of 108 sales@semistarcorp.com

12. 320 90‐2705 / FRAME, PWA, JUNCTION, MAIN FRAME / NOVELLUS SYSTEMS INC
321 94‐3374/860 VACUUM ARM ASSEMBLY RND QTZ 811948/NOVELLUS/
322 950180 / ADAPTER PLATE,PAD CONDITIONER / NOVELLUS SYSTEMS INC
323 95‐0537 / GAS BOX, MINI CONTROLLER / GASONICS
324 950972 / INPUT MODULE 24V,32PT / NOVELLUS SYSTEMS INC
325 951480 / AURIGA, AUTO F., LOAD FLIPPER MOTOR CABLE / NOVELLUS SYSTEMS INC
326 951655 / CABLE BLACK / NOVELLUS SYSTEMS INC
327 951657 / 4 P6 BLACK CABLE / NOVELLUS SYSTEMS INC
328 951837 / BASE M10 5 SLOT / NOVELLUS SYSTEMS INC
329 95‐2421 / LIGHT BOX ASSEMBLY / GASONICS
330 952570 / IONIZER / NOVELLUS SYSTEMS INC
331 95‐2992 / POWER SUPPLY GASONICS MWAVE PWR / GASONICS
332 95‐3153 / GAS BOX / GASONICS
333 95‐3155 / CLUSTER MISC CONTROLLER GASONICS PEP3510 PEP‐3510
334 953381 / FLIPPER BOX ARM'S / NOVELLUS SYSTEMS INC
335 95‐3458 / GAS MIN CONTROLLER ASSY / GASONICS INTL CORPORATION
336 954 NOVELLUS ELECTROSTATIC CHUCK, 200MM, 15‐118976‐00 (PARTS) 02‐134263‐00
337 956094 / AURIGA, MAIN POLISH, FAN MOTOR CONTACTOR / NOVELLUS SYSTEMS INC
338 956305 / AURIGA,VACUUM TANK,CHECK VALVE, 1/2 FNPT / NOVELLUS SYSTEMS INC
339 958682‐A / CABLE 958682‐A / NOVELLUS SYSTEMS INC
340 958683 / CABLE 958683 / NOVELLUS SYSTEMS INC
341 962691, S3410071, AURIGA DISC ATI 10IN NOVELLUS
342 965406 / SHAFT, GUIDE, LOWER / NOVELLUS SYSTEMS INC
343 965513‐R / AURIGA, VACUUM PUMP REBUILD KIT. K294A / NOVELLUS SYSTEMS INC
344 99‐00127‐01 / DAS INDEXER ‐ VERITY INSTRUMENTS 2‐00127‐001B / NOVELLUS
345 A90‐031‐03 / PCB PLASMA/LAMP FAILURE DETECTION / GASONICS
346 A95‐070‐01 / AURA A1000, TRANSFORMER / GASONICS
347 AA2076A1 / SCRUBBER PEDESTAL / NOVELLUS SYSTEMS INC
348 AC2185A1 / LIGHT TOWER / NOVELLUS SYSTEMS INC
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ID:OEME 12 of 108 sales@semistarcorp.com

13. 349 AC2749A1 / AURIGA, PAD COND. DOWN FORCE LOAD CELL / NOVELLUS SYSTEMS INC
350 AC‐2S02 ADAPTORR PRESSURE CONTROLLER NOVELLUS 27‐00009‐00 GETSPARES.COM
351 ACE Novellus S33‐2025 200mm Shower head Assembly
352 Acess I/O Products ID1‐48 rev A4, I/O board for novellus 27‐166887‐00
353 Actuator BIMBA FT‐092‐3RM Novellus 210033 FLAT II dual action cylinder
354 Adtec AX‐2000EUII RF Plasma Generator, Novellus 27‐286651‐00
355 ADTEC AX‐2000EUII‐N RF Generator Novellus 27‐286651‐00 Tested Not Working As‐Is
356 ADTEC AX‐2000EUII‐N RF Generator Novellus 27‐286651‐00 Used Tested Working
357 ADTEC AX‐2000III RF Plasma Generator Novellus 27‐307431‐00 Tested Working Spare
358 Adtec AX‐3000 III RF Plasma Generator, Novellus 27‐176875‐00, 13.56Mhz
359 Adtec AX‐3000 III RF Plasma Generator, Novellus 27‐176875‐00, 13.56Mhz
360 Adtec AX‐3000III RF Plasma Generator, Novellus 27‐176875‐00
361 ADTEC AXR‐2000III Plasma Generator Novellus 27‐360919‐00 Exceeds Current As‐Is
362 ADTEC AXR‐2000III RF Plasma Generator Novellus 27‐360919‐00 RF Trip Tested As‐Is
363 ADTEC AXR‐2000III RF Plasma Generator Novellus 27‐360919‐00 Used Tested Working
364 Advanced Energy 3150073‐001 AE RF‐10S, RF Generator, 1000W Novellus G19‐10071‐00
365 Advanced Energy 3152603‐005 RF Generator, Novellus 27‐260607‐00, E'wave
366 Advanced Energy 3152603‐005 RF Generator, Novellus 27‐260607‐00, E'wave
367 Advanced Energy 3152603‐005 RF Generator, Novellus 27‐260607‐00, E'wave
368 Advanced Energy 3152603‐010 RF Generator, Novellus 27‐255798‐00, E'wave
369 ADVANCED ENERGY 3152603‐012 E‐WAVE POWER SUPPLY. NOVELLUS 27‐260607‐00
370 Advanced Energy 3152603‐012 RF Generator, Novellus 27‐260607‐00, E'wave
371 Advanced Energy AE 3150273‐005, RF Match, Mercury 10013, Novellus
372 Advanced Energy AE 3152603‐010 RF Power Supply, Novellus 27‐255798‐00N
373 Advanced Energy AE 3152603‐010 RF Power Supply, Novellus 27‐255798‐00N
374 Advanced Energy AE 3152603‐010 RF Power Supply, Novellus 27‐255798‐00N
375 Advanced Energy AE 3152603‐010 RF Power Supply, Novellus 27‐255798‐00N
376 Advanced Energy AE 3155162‐037 Navigator RF Match, Novellus 27‐368450‐00
377 Advanced Energy AE 3155162‐037 Navigator RF Match, Novellus 27‐368450‐00
Email us to check the availability pls. 13 of 108 sales@semistarcorp.com
ID:OEME 13 of 108 sales@semistarcorp.com

14. 378 Advanced Energy Aera FC‐7800CD MFC, 2 SLM, N2 gas, Novellus 22‐126240‐00
379 Advanced Energy Aera FC‐7800CD, 1 SLM, N2 gas, Novellus 22‐109676‐00
380 Advanced Energy Aera FC‐7800CD, 50 SCCM, CF4(0.424) gas, Novellus 22‐170369‐00
381 Advanced Energy Aera FC‐7800CD, 500 SCCM, CF4(0.424) gas, Novellus 22‐190958‐00
382 Advanced Energy Aera FC‐PA7810C MFC, 20 SLM, N2 gas, Novellus 22‐308816‐00
383 Advanced Energy Aera PI‐98 22‐372689‐00 MGMR UFS‐500 SCCM Novellus
384 Advanced Energy Aera PI‐98 MGMR 10000 SCCM / N2 MFC Novellus
385 Advanced Energy Aera PI‐98 MGMR 30000 SCCM / N2 MFC Novellus
386 Advanced Energy Aera PI‐98 MGMR 51000 SCCM / N2 MFC Novellus
387 Advanced Energy Aera PI‐98 Pressure Insensitive MFC H2 Gas 30000 SCCM Novellus
388 Advanced Energy Aera PI‐98 Pressure Insensitive MFC H2 Gas 30000 SCCM Novellus
389 Advanced Energy Aera PI‐98 Pressure Insensitive MFC SiF4 Gas 1000 SCCM Novellus
390 Advanced Energy Aera TC FC‐PA7800C MFC, 100 SCCM, Ar Gas, Novellus 22‐268957‐00
391 Advanced Energy Aera TC FC‐PA7810C MFC, 50 SLM, O2 gas, Novellus 22‐109958‐00
392 Advanced Energy Aera TC FC‐PA7820C MFC, 100 SLM, Ar gas, Novellus 22‐186489
393 Advanced Energy Aera TC‐FC‐PA7810C MFC, 30 SLM, N2 Gas, Novellus 22‐190947‐00
394 Advanced Energy MN3150272‐006 Mercury 1013 RF Match Novellus 1912078700
395 ADVANCED ENERGY PCB, RFG 3K NOVELLUS CONTROL 2305617‐B
396 Advanced Energy PDX 2500 RF Generator 3156012‐101, Novellus 27‐047499‐00
397 Advanced Energy PDX 2500 RF Generator 3156012‐105A Novellus 27‐047499‐00
398 Advanced Energy PDX 2500 RF Generator 3156012‐201, Novellus 27‐293621‐00
399 Advanced Energy PDX 2500 RF Generator, 3156012‐101 Novellus 27‐047499‐00
400 Advanced Energy PDX 2500 RF Generator, 3156012‐101 Novellus 27‐047499‐00
401 Advanced Energy, AE 3150272‐005, Novellus 19‐111025‐00, RF Match Box
402 Advantech Industrial Computer 620 TIPC620BAR1001 Novellus Assy PC Gamma 2130
403 AE 3155162‐020 RF Match Novellus 27‐268661‐00 Navigator 10013‐L80
404 AE 3159273‐005 Mercury 10013 RF Match, Novellus 27‐256558‐00
405 AE Advanced Energy 3155162‐027 RF match Novellus 27‐306026‐00, Navigator 10013
406 AE Advanced Energy LF‐30 RF generator 2.5KW, Novellus R27‐032578‐00, paper work
Email us to check the availability pls. 14 of 108 sales@semistarcorp.com
ID:OEME 14 of 108 sales@semistarcorp.com

15. 407 AERA FC‐7800CD 50 SCCM CF4 (0.424) GAS Novellus 22‐170369‐00
408 Aera FC‐7800CD Mass Flow Controller MFC AR, 1 SLM, Novellus 22‐109672‐00
409 Aera FC‐7800CD Mass Flow Controller MFC N2 200 SCCM Novellus 19‐120538‐11
410 Aera FC‐7800CD Mass Flow Controller MFC N2 200 SCCM Novellus 19‐120538‐11
411 Aera FC‐7800CD Mass Flow Controller MFC N2 200 SCCM Novellus 19‐120538‐11
412 Aera FC‐7800CD Mass Flow Controller MFC N2 200 SCCM Novellus 19‐120538‐11
413 Aera FC‐7800CD Mass Flow Controller MFC N2 200 SCCM Novellus 19‐120538‐11
414 Aera FC‐7800CD Mass Flow Controller MFC N2 200 SCCM Novellus 22‐121928‐00
415 Aera FC‐7800CD Mass Flow Controller MFC N2 500 SCCM Novellus 22‐117948‐00
416 Aera FC‐7800CD Mass Flow Controller MFC, SiH4 1 SLM Novellus 22‐117947‐00
417 Aera FC‐7800CD Mass Flow Controller, MFC, HE, 5 SLM, Novellus
418 Aera FC‐7810CD Mass Flow Controller 20 SLM NH3 Novellus 22‐252794‐00 Refurbished
419 Aera FC‐7810CD Mass Flow Controller MFC 20 SLM He Novellus 22‐127300‐00 Working
420 Aera FC‐7810CD Mass Flow Controller MFC AR 10 SLM Novellus 22‐118135‐00
421 Aera FC‐7810CD Mass Flow Controller MFC AR 10 SLM Novellus 22‐118135‐00
422 Aera FC‐7810CD Mass Flow Controller MFC AR 15 SLM Novellus 22‐184450‐00
423 Aera FC‐7810CD Mass Flow Controller MFC AR 20 SLM Novellus 22‐118134‐00
424 Aera FC‐7810CD Mass Flow Controller MFC C2F6 5 SLM Novellus 22‐117957‐00
425 Aera FC‐7810CD Mass Flow Controller MFC C2F6 5 SLM Novellus 22‐117957‐00
426 Aera FC‐7810CD Mass Flow Controller MFC C2F6 5 SLM Novellus 22‐117957‐00
427 Aera FC‐7810CD Mass Flow Controller MFC C2F6 5 SLM Novellus 22‐117957‐00
428 Aera FC‐7810CD Mass Flow Controller MFC H2 20 SLM Novellus 22‐118138‐00
429 Aera FC‐7810CD Mass Flow Controller MFC HE 10 SLM Novellus 22‐117951‐00
430 Aera FC‐7810CD Mass Flow Controller MFC HE 10 SLM Novellus 22‐117951‐00
431 Aera FC‐7810CD Mass Flow Controller MFC N2 10 SLM Novellus 22‐117954‐00
432 Aera FC‐7810CD Mass Flow Controller MFC N2 10 SLM Novellus 22‐117964‐00
433 Aera FC‐7810CD Mass Flow Controller MFC N2, 20 SLPM Novellus 22‐117951‐00
434 Aera FC‐7810CD Mass Flow Controller MFC N2O 20 SLM Novellus 22‐117959‐00
435 Aera FC‐7810CD Mass Flow Controller MFC N2O 20 SLM Novellus 22‐117959‐00
Email us to check the availability pls. 15 of 108 sales@semistarcorp.com
ID:OEME 15 of 108 sales@semistarcorp.com

16. 436 Aera FC‐7810CD Mass Flow Controller MFC N2O 25 SLM Novellus 22‐118003‐00
437 Aera FC‐7810CD Mass Flow Controller MFC NF3 5 SLM Novellus 22‐117958‐00
438 Aera FC‐7810CD Mass Flow Controller MFC NF3 5 SLM Novellus 22‐117958‐00
439 Aera FC‐7810CD Mass Flow Controller MFC NH3 10 SLM Novellus 22‐117952‐00
440 Aera FC‐7810CD Mass Flow Controller MFC NH3 10 SLM Novellus 22‐117952‐00
441 Aera FC‐7810CD Mass Flow Controller MFC NH3 20 SLM Novellus 22‐117953‐00
442 Aera FC‐7810CD Mass Flow Controller MFC NH3 20 SLM Novellus 22‐117953‐00
443 Aera FC‐7810CD Mass Flow Controller MFC NH3 20 SLM Novellus 22‐252794‐00
444 Aera FC‐7810CD Mass Flow Controller MFC O2 20 SLM Novellus 22‐117956‐00
445 Aera FC‐7810CD Mass Flow Controller MFC, N2 10 SLM Novellus 22‐117954‐00
446 Aera FC‐7810CD Mass Flow Controller MFC, N2, 6 SLPM, Novellus
447 AERA FC‐7810CD MASS FLOW CONTROLLER Novellus 22‐117‐959‐00
448 AERA FC‐7810CD MASS FLOW CONTROLLER NOVELLUS 22‐118134‐00 20000 SCCM AR MFC
449 Aera FC‐7810CD Mass Flow Controller, MFC N2 10 SLM Novellus 22‐117954‐00
450 Aera FC‐7810CD Mass Flow Controller, MFC N2 10 SLM Novellus 22‐117954‐00
451 Aera FC‐7810CD MFC, 5 SLM range, NF3(0.500) gas, S6076, Novellus 22‐117957‐00
452 Aera FC‐7810CD MFC, mass flow controller 50 SLM 4% H2/N2, Novellus 22‐190955‐00
453 AERA FC‐7810CD, 25 SLM, N20 Novellus 22‐127297‐00
454 Aera FC‐D980C Mass Flow Controller MFC N2 300 SCCM Novellus 22‐136138‐00
455 Aera FC‐D980C Mass Flow Controller MFC NH3, 2 SLM, Novellus 22‐185670‐00
456 Aera FC‐D980C Mass Flow Controller MFC NH3, 2 SLM, Novellus 22‐185670‐00
457 Aera FC‐D980C Mass Flow Controller MFC O2 10 SCCM, Novellus 22‐187231‐00
458 Aera FC‐D980C Mass Flow Controller MFC SiH4 1 SLM, Novellus 22‐136138‐00
459 Aera FC‐D980C MFC, 5%B2H6/N2, 750 SCCM, Novellus 22‐185666‐00
460 Aera FC‐D980C MFC, 5%B2H6/N2, 750 SCCM, Novellus 22‐185666‐00
461 Aera FC‐D980C MFC, NF3(.500), 1.5 SLM, Novellus 22‐187311‐00
462 Aera FC‐D980C MFC, SiH4, 500 SCCM, Novellus 22‐116507‐01
463 Aera FC‐D980C MFC, WF6(.231), 500 SCCM, Novellus 22‐107735‐00
464 Aera FC‐D980CBF MFC, H2, 1.5 SLM, Novellus, FC‐D980C, 23‐2893
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ID:OEME 16 of 108 sales@semistarcorp.com

17. 465 Aera FC‐D980CBF MFC, H2, 1.5 SLM, Novellus, FC‐D980C, 23‐2893
466 Aera FC‐D980CBF MFC, H2, 1.5 SLM, Novellus, FC‐D980C, 23‐2893
467 Aera FC‐D980CBF MFC, H2, 1.5 SLM, Novellus, FC‐D980C, 23‐2893
468 Aera FC‐D981C Mass Flow Controller MFC AR, 15 SLM, Novellus 22‐185665‐00
469 Aera FC‐D981C Mass Flow Controller MFC AR, 15 SLM, Novellus 22‐185665‐00
470 Aera FC‐D981C Mass Flow Controller MFC AR, 20 SLM, Novellus 22‐165919‐00
471 Aera FC‐D981C Mass Flow Controller MFC AR, 25 SLM, Novellus 22‐185668‐00
472 Aera FC‐PA7800C, MFC, N2, 50 SCCM, Novellus 22‐268871‐00
473 Aera FC‐PA7800C, MFC, N2, 50 SCCM, Novellus 22‐268871‐00
474 AERA FC‐PA7810c Mass Flow Controller Novellus 22‐308816‐00
475 Aera FC‐PA7820C 100SLM Mass Flow Controller LAM RESEARCH NOVELLUS 22‐186488‐00
476 Aera FC‐PA7820C Mass Flow Controller, NOVELLUS 22‐186488‐00
477 Aera MFC, TC FC‐D980C SiH4 Gas, 750 SCCM, S25004, NOVELLUS 22‐189470‐00
478 Aera NOVELLUS TC FC‐PA7810c 10 SLM NF3 5000 sccm Mass Flow Controller
479 Aera PI‐98 Mass Flow Controller 22‐372845‐00 Novellus fcpi981c4vx9taa 1500SCCM
480 AERA PI‐98 MGMR MFC MASS FLOW CONTROLLER FCPI981C4VX9TAA 30000 SCCM NOVELLUS
481 AERA PI‐98 NOVELLUS FCPI981C4VX9TAA MGMR P/N 22‐407071‐00, 30,000 SCCM N2
482 Aera TC FC‐D980 MFC Mass Flow Controller 1 SLM Ar NOVELLUS
483 Aera TC FC‐D980 MFC Mass Flow Controller 1 SLM N2 NOVELLUS
484 Aera TC FC—D980C (N22‐134608‐00) Mass Flow Controller
485 Aera TC FC‐PA7800 MFC, mass flow controller, 100 sccm NH3, Novellus 22‐363308‐00
486 Aera TC FC‐PA7800C MFC 200 sccm H2 Novellus 22‐268761‐00
487 Aera TC FC‐PA7800C MFC, mass flow controller, 200 sccm He, Novellus 22‐268760‐00
488 Aera TC FC‐PA7810C MFC, mass flow controller, 50 SLM O2, Novellus 22‐190944‐00
489 AERA TRANSFORMER TC FC‐PAR7820C NOVELLUS 22‐407516‐65
490 AERA TRANSFORMER TC FC‐PAR7820C NOVELLUS 22‐407516‐65 MFC 100SLM N2
491 AGILENT L6281701 Pneumatic Angle Valve NW‐16‐A/0 Gasonics A‐2000LL Aura
492 aixcon / 94‐3075, Y2000 / RF Microwave Generator, 2KW, Novellus
493 ALD HDSIOC 0 NOVELLUS 02‐295367‐00 VERSION 5.0 REV. A
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ID:OEME 17 of 108 sales@semistarcorp.com

18. 494 AMAT 3750‐01014 Window, Quartz, Bottom 10" Dia, Gasonics A06‐801‐01
495 AMAT 3750‐01014 Window, Quartz, Bottom 10" Dia, Gasonics A06‐801‐01
496 AMAT 8100 K Analog Interface Unit, Novellus 01‐81912‐00
497 AMAT Applied Materials 02‐351965‐00 Positioning Robot Gasonics Aura 2000‐LL Used
498 AMAT Novellus 24‐10257‐00 BRG. Gate Valve 1/4ID X 7/ Needle Bearing
499 AMAT/novellus Comet 27‐445467‐00 Match 2KW 2000W CW 13.56 MHz
500 APPLIED CERAMICS INC. 1005‐08‐117 Novellus INJECTOR Dual Zone Modified to single
501 Applied Materials (AMAT) 30085‐000 CLAMP GASONICS MODIFIED
502 AquaTrap 120‐476 Regen controller, Novellus 27‐128714
503 As‐Is NOVELLUS SYSTEMS 03‐303221‐00 IO DISTRIBUTION,VERT LIFT,SBR‐XT
504 ASSY, PCB, Digital I/O #2, 19‐00157‐00, Concept one, C1, Novellus
505 ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60‐1016 GASONICS
506 ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60‐1016 GASONICS
507 ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60‐1016 GASONICS
508 ASTEX GERSERLING AGL C12872 FILAMENT TRANSFORMER 60‐1016 GASONICS
509 ASYST / NOVELLUS 860 VACUUM ARM EFFECTOR RND F20/ETCH – NON COPPER
510 Asyst 03330‐001 Theta Arm Transport Unit Hine Novellus 94‐1085 Aura 2000LL Used
511 Asyst 04290‐101 Load Lock Elevator GaSonics 94‐1119 Hine Design 06763‐005 Used
512 Asyst 04290‐101 Load Lock Elevator GaSonics 94‐1119 Hine Design 06763‐805 Used
513 Asyst 04290‐101 Load Lock Elevator Rev. 0 GaSonics 94‐1119 Hine Design Used
514 Asyst 04290‐101 Load Lock Elevator Rev. 1 GaSonics 94‐1119 Hine 06763‐005 Used
515 Asyst 04290‐101 Load Lock Elevator Rev. 1 GaSonics 94‐1119 Hine Design As‐Is
516 Asyst 04290‐201 Process Chamber Elevator GaSonics 94‐1118 Hine 06763‐005 Working
517 Asyst 04290‐201 Process Chamber Elevator GaSonics 94‐1118 Hine 06763‐805 Used
518 Asyst 04290‐201 Process Chamber Elevator Novellus 94‐1118 Nikon NSR‐S205C Used
519 Asyst 04290‐201 Process Chamber Elevator Rev. 0 GaSonics 94‐1118 Used Working
520 Asyst 04290‐201 process chamber elevator, Gasonics Novellus 94‐1118 Hine design
521 Asyst 04290‐201 process chamber elevator, Gasonics Novellus 94‐1118 Hine design
522 Asyst 04630‐003 Load Elevator Indexer Hine GaSonics 94‐1175
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ID:OEME 18 of 108 sales@semistarcorp.com

19. 523 Asyst 04630‐003 Load Elevator Indexer Hine GaSonics 94‐1175 Aura 2000‐LL As‐Is
524 Asyst 04630‐003 Load Elevator Indexer Hine GaSonics 94‐1175 Aura 2000‐LL Used
525 Asyst 04630‐003 Loader Elevator Top Indexer w/ Hine Design PCB, Gasonics 94‐1175
526 Asyst 04630‐004 Load Elevator Indexer Hine GaSonics 94‐1174 Aura 2000LL As‐Is
527 Asyst 853‐4290‐101 Load Lock Elevator GaSonics 94‐1119 Used Working
528 Asyst Hine Design 04630‐003 Ergo Loader Gasonics 94‐1175 Used Untested As‐Is
529 Asyst Hine Design 04630‐003 Load Elevator Indexer GaSonics 94‐1175 Used Working
530 Asyst Hine Design 04630‐004 Load Elevator Indexer Gasonics 94‐1174 As‐Is
531 Asyst Hine Design 04630‐004 Load Elevator Indexer Gasonics 94‐1174 Damaged As‐Is
532 Asyst Novellus 94‐1086 Theta Arm Assy w/ End‐Effector & 06764‐002 Arm Cntl PCB
533 Asyst Novellus Gasonics 95‐4406 Wafer Robot End Effector ‐ Lot of 2
534 Asyst Technologies 06764‐005 48V Control Board PCB GaSonics ABX‐78355‐26‐00 Used
535 Asyst/Novellus 94‐1086 2.3 Theta Arm Robotic/Robot Wafer Handling/Transfer ASSY
536 B114 NOVELLUS ISO BLANK OFF, ISO VALVE PORT BB10‐157659
537 B48 GASONICS LAMP CONTROL MODULE A3000 17447‐01 REV.A
538 Bay 8287‐03 Lift Motor Assembly Novellus 02‐160858‐00 Compact 60‐152879‐00 Used
539 Bay Advanced Tech Novellus 02‐156485‐00 BES 8317‐01 Solenoid Valve Assembly
540 BAY ADVANCED TECHNOLOGIES BES‐6804‐01 NOVELLUS PNEUMATIC MANIFOLD PANEL
541 BAY Automation 02‐160858‐00 for Novellus
542 Bay Humphrey Novellus 10 port Pneumatic Manifold W/ 6 HA040E1 Solenoid 02‐289551
543 Bay Novellus/ Compact Automation 60‐152879‐00 Lift cylinder 02‐117049‐00N
544 Bayside, right angle motor 100:1 ratio GR115‐K1E1B Novellus 0150‐111964
545 Bellows NW16 3.94L HPS 100314911 GASONICS A20‐038‐01
546 Belt (2 PKG) NOVELLUS 150026‐H COURROIE TOP LIFT PN:150026
547 Belt Novellus‐Gasonics 15‐2715 390‐5GT‐1B theta Axis
548 Bentek DC PC BOARD, reliance, 03‐188758‐00, Novellus
549 Berkeley Process Control TS‐3200‐BL Display MonitoNovellus
550 Berkeley Process Control TS‐4000‐BR Display MonitoNovellus
551 Berkeley Process Control USA4‐22‐35, Novellus Speedfam IPEC 951827, servo amp
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ID:OEME 19 of 108 sales@semistarcorp.com

20. 552 BERKELEY PROCESS CONTROLS M20 AWM 2464 CABLE ROT#3 NOVELLUS
553 BERKELEY PROCESS CONTROLS M20 AWM 2464 CABLE ROT#3 NOVELLUS
554 BERKELEY PROCESS CONTROLS M20 AWM 2464 CABLE ROT#3 NOVELLUS
555 BERKELEY PROCESS CONTROLS M20 AWM 2464 CABLE ROT#3 NOVELLUS
556 BERKELEY PROCESS CONTROLS M20 AWM 2464 CABLE ROT#3 NOVELLUS
557 BERKELEY PROCESS CONTROLS M20 AWM 2464 CABLE ROT#3 NOVELLUS
558 Berkeley Process Controls TS‐3200‐BR MonitoNovellus 966041
559 BIMBA CPT‐00568‐A Pneu‐Turn Rotary Actuator, Novellus 60‐10125‐00
560 BIMBA PNEU TURN CPT‐00568‐A,NOVELLUS 60‐10125‐00b
561 BIMBA PNEU‐TURN, ROTARY ACTUATOR, CPT‐00568‐A, NOVELLUS 60‐10125‐00B
562 BOC Edwards IM Vacuum System Novellus DLCM Interface Module A52844454
563 BOC Edwards QDP80 Dry Pump Assy w/ A30586905 Mechanical Booster Novellus
564 BOC Edwards QDP80 Dry Pump Assy w/ EH 1200 Mechanical Booster, Novellus
565 BOC Edwards QDP80 Dry Pump Assy w/ QMB1200F Mechanical Booster, Novellus
566 BOC Edwards TIM number U20000617 Novellus Process
567 BOC Edwards U20000346 Concept 2 DLCM Interface
568 BOC EDWARDS U20000617 NOVELLUS DLCM INTERFACE GREAT SHAPE USED
569 Boc Edwards U20000617 Novellus Process Interface Module
570 Boc Edwards U20000617 Novellus Process Interface Module, Used, SAME DAY SHIPPING
571 BOC EDWARDS U20000618 NOVELLUS DLCM INTERFACE GREAT SHAPE USED
572 BOC EDWARDS U20000618 NOVELLUS DLCM INTERFACE USED
573 Boc Edwards U20000618 Novellus Process Interface Module, Used, SAME DAY SHIPPING
574 BOC Edwards U2000618 Novellus DLCM Dual Load Cassette Module IM Interface Module
575 Bolt Novellus‐Gasonics A93‐023‐01 pkg 3 shoulder screw
576 Cable Assembly MKS CB652‐2‐6‐67 Novellus 03‐00225‐00 GES G7539
577 Cable Assy J2 CA‐180 Novellus 03‐00176‐02
578 Cable LAM ‐ GASONICS A96‐072‐01 CPU,J10‐J32
579 Cable NOVELLUS 02‐132362‐00 CU,ASSY,SNSR,EBR ARM AT EBR
580 Cable NOVELLUS 21‐602279‐010 INTERPOSER PCBA CMT
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ID:OEME 20 of 108 sales@semistarcorp.com

21. 581 Cable NOVELLUS 21‐602279‐013 INTERPOSER PCBA CMT
582 Cable NOVELLUS 21‐602279‐014 INTERPOSER PCBA CMT
583 Cable NOVELLUS Gasonics 96‐0235 CABLE ASSY, HIGH VOLTAGE TO MAGETRON
584 Cable NOVELLUS GASONICS A96‐094‐01 ASSY,CABLE,LL,CPU
585 Cable NOVELLUS Gasonics A96‐110‐01 Cable RF on Indicator
586 CABLE‐HIV, ESC CABLE, 03‐250458‐01, Novellus
587 Cajon Gasonics A69260D01 Gas Inlet Stand‐off
588 Cal‐Weld 10‐300748‐00/1 101081/016 649111‐910 Novellus 10‐300748‐00
589 Chamber fixture Assembly vertical lateral rotation of 300mm Novellus Lam or Amat
590 Clarostat L32001, Skan‐A‐Matic Sensor Assembly, Gasonics 73336‐01
591 Clarostat P32011, Skan‐A‐Matic Sensor Assembly, Gasonics 73336‐02
592 Clean Sciences 15‐262478‐00 PED Blankoff Novellus C3 Altus Copper Refurbished
593 Clean Sciences 15‐262478‐00 PED Blankoff Novellus C3 Altus Used Working
594 CLIPPARD 73849‐01 NOVELLUS 73849‐01 CILINDER, Universal Mount, Double Acting, Ro
595 COMDEL / CLX10K, FP1605RA / RF GENERATOR, NOVELLUS
596 Comdel CB5000 Novellus 27‐335415‐00 5000W High Frequency RF Power Supply Unit 3U
597 Comdel CB5000 RF Generator, Novellus 27‐335415‐00
598 COMDEL CLF‐5000 RF GENERATOR NOVELLUS P/N 27‐049867‐01
599 Comdel CMX30 RF Match Network 13.56 MHz 10kW PECVD Novellus 27‐265049‐00
600 Comdel CMX30 RF Match Network 13.56 MHz 10kW PECVD Novellus 27‐265049‐00
601 Comdel CMX30 RF Match Network 13.56 MHz 10kW PECVD Novellus 27‐265049‐00
602 Comdel CMX30 RF match network, 13.56 MHz, 10kW, PECVD, Novellus 27‐265049‐00
603 Comdel CPMX2500 Matching Network, Novellus 27‐282821‐00 R2
604 Comdel CPS‐1001/60 RF generator Novellus R04‐716707‐01, 3 phase, 50‐60 HZ 405569
605 Comdel CX‐16P DC Power Supply, Novellus 27‐257659‐00, Comdel FP6802R5
606 Comdel FP1215R2 2MHz RF Generator CLX‐1250 Novellus 27‐290674‐00 Tested Working
607 Comdel FP1339R4 CLX2500 RF Generator, Novellus 27‐287258‐00
608 COMDEL INC. CPMX‐2500, Match Pro, RF Matching Network, FP2307R1 Novellus 21‐2405
609 Comdel Match Network Pro CPMX‐2500 Novellus 27‐282821‐00 Rev:A
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ID:OEME 21 of 108 sales@semistarcorp.com

22. 610 Comet 20056053 Impedance Matching Network Novellus 27‐433872‐00 Working Spare
611 Comet matching network 2kw 13.56mhz AE RFPP amat 27‐352799‐00 novellus
612 Compact 60‐152879‐00 Lift Assembly Novellus 02‐160858‐00 ‐ Rebulit 03/2014
613 Compact Automation QS02‐309‐B Air Powered Guide Rod Cylinder Novellus 02‐136089‐
614 COMPACT LIFT ASSEMBLY NOVELLUS 02‐160858‐00 60‐152879‐00
615 Computer Accessory GASONICS 94‐3195 Memory Nodule 64MB SRAM
616 Computer Accessory track ball panel mount 2 button NOVELLUS ‐ Gasonics 68‐0002
617 Controller Novellus 02‐109472‐00 ASSY,INTLK,HDP SIOC 1 SPEED 1 Interlock
618 Controller novellus 02‐251649‐00
619 Controller Novellus 02‐8049241‐00 Dosing System Controller
620 Controller TRAZAR ECC1‐4F NOVELLUS 27‐153218‐00 ECC / ESC
621 Corman Technologies CT‐N108 PCB Card CorNet V2.8 Novellus Concept Two Working
622 COSEL PAA150F‐12 Power supply 12V, 13A, Novellus 27‐169458‐00
623 CTI Connect Tech 14808064 PCB Card INTELLICON FLEX‐8 Novellus Concept Two Spare
624 CV440030 / 472 SHUTTLE ASSEMBLY,OUTER MOUNTING SLID / NOVELLUS SYSTEMS INC
625 Cylinder C&V INC CC 700 Novellus 220156 Cylinder actuator
626 Dedicated Computing OEM‐A1811R Server PC 61‐381415‐00 Novellus 61‐381415‐00 Used
627 Deltron CV360D04 Power Supply 24VDC, 15A, Novellus 0150‐740129, New in box
628 Devar Loop Powered Alarm 18‐232A, Novellus 22‐048546‐00 ‐‐ New ‐‐
629 Dexter Magnetic, Novellus ‐‐ 688148 ‐‐ (Lot of 2) New
630 Digital dynamic I/O controller 27‐10157‐00 novellus
631 Digital Dynamics 02‐122156‐00 sioc Chassis Mezzanine Novellus 01‐133875‐00 Used
632 Digital Dynamics 02‐122156‐00N sioc Chassis Mezzanine Novellus 02‐109699‐00N
633 Digital Dynamics 27‐053659‐00 sioc Controller Module Novellus Used Working
634 Digital Dynamics 27‐053660‐00 sioc Power Supply Module Novellus Used Working
635 Digital Dynamics 27‐053660‐00N sioc Power Supply Module Novellus Used Working
636 Digital Dynamics 27‐109708‐00N sioc ALTUS 2 Interlock Module Novellus Used
637 Digital Dynamics 27‐134495‐00 sioc ANNEAL 4 Interlock Module Novellus Used
638 Digital Dynamics 27‐152970‐00N sioc Controller Module Novellus Used Working
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ID:OEME 22 of 108 sales@semistarcorp.com

23. 639 Digital Dynamics 27‐810157‐00 I/O Controller V3.02 Novellus Concept II Used
640 Digital Dynamics Controller Novellus 02‐252395‐00 REV D
641 Digital Dynamics G19‐10000‐00 ISIOC RF HCM PVD‐PVD Rack, Novellus
642 Digital Dynamics Inc. 27‐10157‐00 I/O Controller, Novellus, PCB, D2442
643 Digital Dynamics Inc. 27‐10157‐00 I/O Controller, Novellus, PCB, D2442
644 Digital Dynamics Inc. 27‐10157‐00 I/O Controller, Novellus, PCB, D2442
645 Digital Dynamics Inc. ALCVD SWM ISIOC2 NOVELLUS 02‐122570‐00 Controller Module
646 Digital Dynamics Novellus WTSO SIOC Field Connector Module 02‐106219‐00
647 Digital Dynamics Novellus WTSO SIOC Field Connector Module 02‐106219‐00
648 Digital Dynamics SESIOC 1 PVD Controller Novellus 02‐258471‐00 Used Working
649 DISCO EAUA‐479300 SET UP PCB, NOVELLUS
650 EATON NOVELLUS 372‐45020‐1 FLOATING DRIVE 200mm NEW
651 ECI Tech 2U0600 8 Way Dist. Valve, Syringe, Peek, Novellus 22‐153569‐00
652 ECI TECHNOLOGY NOVELLUS 2.5 ML ES GLASS SYRINGE LU70250 27‐260179‐00
653 ED090167 / 472, PLATEN, DEUBLIN ROTARY UNION / NOVELLUS SYSTEMS INC
654 Edwards 2XQ80‐QMB1200 Power Distribution Box Novellus Concept II Used Working
655 EDWARDS IPX500 / PUMP,DRY,60‐135046‐00 / NOVELLUS
656 Edwards QDP80/QMB1200 Control Box Novellus Concept II Altus Used Working
657 Edwards U20000346 im Interface Module NOVELLUS CONCEPT 2 DLCM Used Working
658 Edwards U20000346 im Interface Module TIM NOVELLUS LL Used Working
659 Edwards U20000617 Novellus Process Interface Module im Used Working
660 Edwards U20000618 Novellus DLCM Interface Module im Used Working
661 EDWARDS Y02601062 PCS ACTUATOR ROD EXTENSION BURN BOX NOVELLUS
662 E‐HDSIOC E84 AWC 02‐321482‐00 VERSION 1.407 / NOVELLUS SYSTEMS INC
663 E‐HDSIOC E84 AWC 02‐321482‐00 VERSION 1.407 / NOVELLUS SYSTEMS INC
664 Electrical Power plug 10A 250V Novellus 73254‐12 Gasonics
665 Electro Optical NTM500‐C A670‐100‐5010 (Novellus P/N: 27‐163243‐00) System
666 Electro Optical NTM500‐C, A670‐100‐5010 (Novellus P/N: 27‐163243‐00) System
667 ELECTRO‐OPTICAL SYSTEMS NOVELLUS NON‐CONTACT MEASUREMENT 02‐101176‐00 REV D
Email us to check the availability pls. 23 of 108 sales@semistarcorp.com
ID:OEME 23 of 108 sales@semistarcorp.com

24. 668 Emerson 6592 Motor & Gear Box, InverterNovellus, .50 HP
669 Emerson 6592‐A Motor & Gear Box, InverterNovellus
670 ENI ACG‐5‐01M14 RF Generator, Power Supply, ACG‐5, Novellus P61‐2337
671 ENI ACG‐5B‐01M14 RF Generator, Power Supply, Novellus 61‐2337
672 ENI DCG‐200Z Optima, Novellus R27‐299465‐00 RF Generator, Slave, 20KW
673 ENI GENESIS POWER AMPLIFIER GHW‐85A, NOVELLUS PN R27‐274812‐00
674 ENI HF LOW FREQUENCY GENERATOR, PL‐2HF‐11451‐55, NOVELLUS P/N 270019600
675 ENI MKS DCG‐200ZHC‐S02 Generator, Slave 20 kW DCG Novellus R27‐299485‐00
676 ENI Novellus Plasmaloc 2‐HF PL‐2HF‐11451‐54 RF Power Generator 27‐00073‐00
677 ENI Novellus Plasmaloc PL‐2HF
678 ENI OEM‐25 Solid State Power Supply
679 ENI OEM‐25‐01M5 Solid State Power Supply
680 ENI OEM‐25N‐01 High Frequency RF Generator, Novellus 27‐00157‐00
681 ENI OEM‐50 SOLID STATE POWER GENERATOR OEM‐50N‐01,NOVELLUS 27‐10341‐00 FREE SHIP
682 ENI OEM‐50 SOLID STATE POWER GENERATOR OEM‐50N‐11601 NOVELLUS 27‐00096‐00 FREE
683 ENI OEM‐50N‐11601 RF GENERATOR AND PLASMALOC PL‐2HF NOVELLUS 4 PIECES!!!
684 ENI PL‐2HF‐11451‐55 Plasmaloc 2‐HF RF Generator Low Frequency Novellus
685 ENI PL‐2HF‐11451‐55 RF GENERATOR NOVELLUS PLASMALOC 2‐HF 27‐00196‐00
686 ENI PLASMALOC 2‐HF LOW FREQ GEN, NOVELLUS P/N: 27‐00196‐00 PL‐2HF‐11451‐55
687 FESTO 61‐285456‐00.REV‐B‐14 DSW‐75‐12.7‐P‐A‐SA33504KR AIR CYLINDER FOR NOVELLUS
688 FESTO 61‐285456‐00.REV‐B‐142 DSW‐75‐12.7‐P‐A‐SA33504KR AIR CYLINDER FOR NOVELLUS
689 Festo 61‐285456‐00‐Rev B Novellus 02‐293401‐00 Rev.A Air Cylinder
690 Festo aircylinder for novellus 61‐285456‐00 DSW‐75‐12.7‐P‐N‐SA 33504KR, 145PSI
691 FESTO CPV‐10‐VI SOLENOID VALVE MANIFOLD NEW LAM RESARCH SPEEDFAM IPEC NOVELLUS
692 Festo DSW‐75‐12.7‐PA SA33504KR Air Cylinder Novellus 02‐285510‐00
693 Filmetrics F76‐LS‐V2 Light source F76Novellus 0225‐112090
694 Filter 50 SLM GasShield MOTT GSMM‐60‐050‐12 Surface Mount C‐Seal Novellus 22‐11
695 Fitting NOVELLUS 20‐0281‐01 FTG,CONNECTOR,MALE,1/4,IN,VCR,X,9/16‐18,
696 Flowmeter Gems 191055 Rotary GPM SS, TYPE: RFS, 24VDC Novellus 02‐142322‐00
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ID:OEME 24 of 108 sales@semistarcorp.com

25. 697 Flowmeter ROTARY 9 G/MIN SS GEM SENSOR 191055 Novellus 22‐142322‐00
698 GaSonics 9104 Quartz Chamber Plasma Asher 15698‐02, ENI OEM‐12B‐06 RF Generator
699 GASONICS LAMP CONTROLLER A3000 17447‐01 REV D
700 HAMILTON/ ECI TECHNOLOGY 2.5 ML ES GLASS SYRINGE LU70250 NOVELLUS 27‐260179‐00
701 Hardware (PKG 10) GRAINGER 19‐2651 NOVELLUS NYLON BUSHING / SHOULDER, 1/4
702 Hardware (PKG 10) GRAINGER 19‐2652 NOVELLUS NYLON BUSHING FOR GASONICS ASHER DOO
703 Hardware NOVELLUS 72‐123940‐00 LUBRICANT,CAM SHELL CYLINDER
704 Haskel Air Driven Fluid Pump, 53175 NIB, Gasonics Hipox reactor pump
705 HDSIOC ROLLER BRUSH NOVELLUS 02‐308058‐00 VERSION 4.72
706 HEATER MONITOR NOVELLUS 02‐10606‐REV
707 Heinemann AM2‐A8‐A Circuit Breaker, Gasonics 73185‐53, 15A, 50/50Hz, 250V
708 Hine 853‐4290‐002 Process Chamber Elevator GaSonics 94‐1118 06763‐005 Used
709 Hine 853‐4290‐002 Process Chamber Elevator GaSonics 94‐1118 06763‐805 Used
710 Hine Design 02423‐001 Arm Control Board PCB 06764‐001 GaSonics A‐2000LL Used
711 Hine Design 02423‐001 Arm Control Board PCB 06764‐002 GaSonics A‐2000LL
712 Hine Design 02423‐001 Arm Control Board PCB 06764‐002 GaSonics A‐2000LL
713 Hine Design 02423‐001 Arm Control Board PCB 06764‐002 GaSonics A‐2000LL Used
714 Hine Design 02423‐001 Arm Control Board PCB 778‐2I GaSonics Aura A‐2000LL
715 Hine Design 02423‐001 Arm Control Board PCB 778‐2I GaSonics Aura A‐2000LL Used
716 Hine Design 04290‐101 Load Lock Elevator GaSonics 94‐1119 Used Working
717 Hine Design 04290‐201 Process Chamber Elevator Gasonics 94‐1118 As‐Is
718 Hine Design 06764002 Arm Controller Board PCB GaSonics Aura A‐2000LL Used
719 Hine Design 08063‐001 08062 2‐Cassette Platforms w/Cables for Gasonics PEP‐3510
720 Hine Design 200mm Chamber Robot Assembly Gasonics Aura A‐2000LL Used Working
721 Hine Design 778‐2I Arm Control Board GaSonics Aura 2000‐LL Used Working
722 Hine Design 853‐4290‐001 Load Lock Elevator GaSonics 94‐1119 06763‐005 Used
723 Hine Design 853‐4290‐001 Load Lock Elevator GaSonics 94‐1119 810‐2140‐005A Used
724 Hine Design 860 Vacuum Arm Assembly Missing Screws GaSonics A‐2000LL Used
725 Hine Design 860 Vacuum Arm Assembly No End Effector GaSonics A‐2000LL Used
Email us to check the availability pls. 25 of 108 sales@semistarcorp.com
ID:OEME 25 of 108 sales@semistarcorp.com

26. 726 Hine Design 885‐2423 Arm Control Board PCB 778‐1I GaSonics Aura A‐2000LL Used
727 Hine Design Inner Chamber Transfer Robot Assembly Gasonics Aura A‐2000LL Used
728 Hine Design Inner Chamber Transfer Robot Gasonics Aura A‐2000LL Used Working
729 Hine Design Left Wafer Indexer Gasonics Aura 2000‐LL Used Working
730 Hine Design Process Chamber Elevator Asyst 04290‐201 Novellus P/N 94‐1118
731 Hine Design Right Wafer Indexer GaSonics Aura 2000‐LL Used Working
732 HNL Gasonics Aura 2000 LL Stripper RA93‐021‐04/C Magnetron Waveguide Asher Modul
733 Hoffman 84" Generator Rack for HDP300, Novellus 19‐260538‐00
734 Honeywell 9306479 Model SA Pressure Transducer, Gasonics 93‐2696
735 HPC‐20T160 / HPC‐20 CDG ADAPTER UNIT, MYKROLIS / NOVELLUS SYSTEMS INC
736 HS190002 / FLUID SENSOR‐PTFE ENCAP SENSOR H / NOVELLUS SYSTEMS INC
737 Hub Spindle Shaft Novellus 15‐032631‐00 (new)
738 Humphrey HMRGH20X18" I/O Door Vertical Cylinder Novellus 93‐0099 New Spare
739 Humprey H040‐4E1 Air Valve, Gasonics, 73248‐01
740 Hydra‐Electric Flow Control 83497, Novellus 20‐244101‐002 ‐‐ New ‐‐
741 IB‐IMD‐015CY108J00267 / INJECTOR IMD TUBE CERAMIC 2 IN PACKAGE / NOVELLUS
742 IB‐IMD‐015CY108L00126 / INJECTOR IMD TUBE CERAMIC PACKAGE OF 24 / NOVELLUS
743 IB‐IMD‐015CY108L00127 / INJECTOR IMD TUBE CERAMIC PACKAGE OF 12 / NOVELLUS
744 IB‐IMD‐015CY108L00128 / INJECTOR IMD TUBE CERAMIC PACKAGE OF SIX / NOVELLUS
745 Intel Mechanization PCB GaSonics 12N‐010‐13 Revision 8
746 ION SYSTEM INTERFACE MODULE 5200‐IM6T FOR NOVELLUS
747 IPEC Speedfam LAM Novellus 0800‐737690 Wave Generator Assy2‐0001
748 Ipec speedfam novellus , 040601‐006‐101104 AC3320A1 Sleeve
749 IPEC Speedfam Novellus 0710‐740679 Rubber Isolation Pads
750 IPEC Speedfam Novellus 0710‐772275 Clamp, Drain Cap, Right
751 IPEC Speedfam Novellus 0760‐727388 Pneumatic end effector housing SMC switch
752 IPEC Speedfam Novellus 0760‐727388 Rev. B Pneumatic End Effector New
753 IPEC Speedfam Novellus 0810‐106850 Plate Support Aspirator
754 IPEC Speedfam Novellus 0810‐110384 Splash Deck Center Adjust
Email us to check the availability pls. 26 of 108 sales@semistarcorp.com
ID:OEME 26 of 108 sales@semistarcorp.com

27. 755 IPEC Speedfam Novellus 1000‐107618M Ball Screw, Custom Translation With Supernut
756 IPEC Speedfam Novellus 1430‐106542 Spacer, Water Track
757 IPEC SpeedFam Novellus 2805‐103891 Assy, Platen Spindle Cooled Polisher
758 IPEC Speedfam Novellus 2805‐718814 relay, GAARD, opto iso M
759 IPEC Speedfam Novellus 2805‐719298 relay, GAARD, opto iso M
760 IPEC Speedfam Novellus 2850‐739458, Robot 676
761 IPEC Speedfam Novellus 372‐15141‐1 Support Damper pp1000
762 IPEC Speedfam Novellus 372‐15146‐1 Painted Steel Brackets
763 IPEC Speedfam Novellus 372M‐46093‐1 Flow Assembly with 2 BECO M442C2DFS‐HCAP‐36
764 Ipec Speedfam Novellus 4101‐112459 Industrial Computer
765 IPEC Speedfam Novellus 951532 cable assy, 20 pin round mini connector to 24 pin
766 IPEC Speedfam Novellus 951651 Trantorque Keyless Bushing 11.0mm i.d.
767 IPEC Speedfam Novellus 952363 Ball Valve, Mace Q4000
768 IPEC Speedfam Novellus 956043, Roller, Roller Box
769 IPEC Speedfam Novellus 956270 C6 Aux power ground for Control cable BAM
770 IPEC Speedfam Novellus 957687 Rail Wafer Support HF Bath
771 IPEC Speedfam Novellus 958260 Kit, jumpers WDLUC
772 IPEC Speedfam Novellus 959857 Manifold Block Track 3
773 IPEC Speedfam Novellus 960262 Arm, Assembly Rest.
774 IPEC Speedfam Novellus 961714 Arm Support Adjustable
775 IPEC Speedfam Novellus 962463, Ring, Probe Housing Adjustable Fin
776 IPEC Speedfam Novellus 966565 Bracket Camera Rest
777 IPEC Speedfam Novellus 971219‐014‐002547 Tube, 2400‐739682
778 IPEC speedfam novellus 972856, siemens 3TF32 11‐0BB4, contactor, 3ph, 24VDC
779 IPEC Speedfam Novellus 975521 Assy, Waferlock SRD
780 Ipec Speedfam Novellus 978327, Yamada PD15V5 Pressure Pulsation damper,
781 IPEC Speedfam Novellus AA2203A1 Bracket Assembly, Sensor Wafer Carrier
782 IPEC Speedfam Novellus AD2117B1 Thrust Cover
783 IPEC Speedfam Novellus AD2148D1 Plate Piston Unload Cup
Email us to check the availability pls. 27 of 108 sales@semistarcorp.com
ID:OEME 27 of 108 sales@semistarcorp.com

28. 784 IPEC Speedfam Novellus AD2590A1‐B Collar, Lock Carrier, Quick Release
785 Ipec Speedfam Novellus Berkeley ASM121‐A‐0/B‐22‐NB/10 Servo Motor
786 Ipec Speedfam Novellus Berkeley ASM121‐B‐0/B‐16‐NB/10 Servo Motor
787 Ipec Speedfam Novellus End effector DEND‐0014 with HAMA sensor kit DD‐50
788 IPEC speedfam Novellus PEEK Pin 010806‐003‐101104 975516
789 IPEC Speedfan Novellus 952363, Entegris Q4000 Ball Valve 9AV44 9SV29
790 IPEC Speedfan Novellus, DO‐1W2098, 0815‐71734, Plexiglass Panels, 7½"x14"
791 IPEC,Speedfam,Novellus,AvantGaard 676 Field Service Training Manual
792 ISIOC HCM APVD NOVELLUS 02‐276953‐00 REV. 1
793 ISIOC HI‐LO TRANSFER NOVELLUS 02‐131736‐00 REV.A
794 ISIOC PDL OXIDE 2 INTERLOCK NOVELLUS 02‐269177‐00, Rev1
795 ISIOC RF HCM PVD‐PVD RACK NOVELLUS 02‐124572‐00 REV. 1
796 ISOC HI‐LO TRANSFER NOVELLUS 02‐131736‐00 REV. A
797 Isolation valve Gasonics A2000 Aura. varian L6281701. NW‐16‐A/0. LVC00578
798 Iwaki CMD‐101 Magnet Pump Baldor Motor 350255R052G1 Novellus 19‐116970‐00 As‐Is
799 KALREZ 22‐177514‐00 Dupont O‐Ring K# 229 Compound 8575UP Novellus
800 Kashiyama / Novellus NV60N‐2 Dry Vaccum Pump
801 Kepco 0024782 Power supply, Novellus ipec speedfam 27‐0530701‐00 PECVD system
802 Kepco 26248 PVD Power Supply, Novellus 27‐272441‐00
803 Kepco 26248 PVD Power Supply, Novellus 27‐272441‐00
804 Kepco 26248 PVD Power Supply, Novellus 27‐272441‐00
805 Kepco 26248 PVD Power Supply, Novellus 27‐272441‐00
806 Kepco 26248 PVD Power Supply, Novellus 27‐272441‐00
807 Kepco 26372, Programmable Power Supply with 9 DC outputs, Novellus 27‐272441‐00
808 Keyence FS‐V11P Optic Sensor, Novellus 02‐147639‐02
809 KF 16 Centering Seal, Orifice 000 Novellus 02‐134129‐00
810 KF 16 Centering Seal, Orifice 014 Novellus 02‐134129‐14
811 KF 16 Centering Seal, Orifice 015 Novellus 02‐134129‐15
812 KF 16 Centering Seal, Orifice 016 Novellus 02‐134129‐16
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29. 813 KF 16 Centering Seal, Orifice 017 Novellus 02‐134129‐17
814 KF 16 Centering Seal, Orifice 018 Novellus 02‐134129‐18
815 KF 16 Centering Seal, Orifice 018 Novellus 02‐134129‐18
816 KF 16 Centering Seal, Orifice 019 Novellus 02‐134129‐19
817 KF 16 Centering Seal, Orifice 021 Novellus 02‐134129‐21
818 KF 16 Centering Seal, Orifice 022 Novellus 02‐134129‐22
819 KF 16 Centering Seal, Orifice 024 Novellus 02‐134129‐24
820 KF 16 Centering Seal, Orifice 025 Novellus 02‐134129‐25
821 KF 16 Centering Seal, Orifice 027 Novellus 02‐134129‐27
822 KF 16 Centering Seal, Orifice 028 Novellus 02‐134129‐28
823 KF 16 Centering Seal, Orifice 029 Novellus 02‐134129‐29
824 KF 16 Centering Seal, Orifice 030 Novellus 02‐134129‐30
825 KF 16 Centering Seal, Orifice 031 Novellus 02‐134129‐31
826 KF 16 Centering Seal, Orifice 032 Novellus 02‐134129‐32
827 KF 16 Centering Seal, Orifice 033 Novellus 02‐134129‐33
828 KF 16 Centering Seal, Orifice 034 Novellus 02‐134129‐34
829 KF 16 Centering Seal, Orifice 035 Novellus 02‐134129‐35
830 Kit 90 day PM Kit Novellus C2 Altus
831 Kit for NOVELLUS ALTUS Chamber Precleaned
832 Kit LAM 04‐293001‐00 NOVELLUS KIT,WINDOW, OPTO SENSOR PAIR
833 Kit NOVELLUS 15‐127251‐00 SPEED INJECTOR SET (36 PIECES)
834 Kollmorgen MT1506B1‐E2C1 Goldline Servo motor, Novellus 408944
835 Lam (Novellus) 05‐134264‐00 ASSY ESC, 200mm, Original New Part
836 Lam / Novellus 27‐034079‐00 ESC Power Supply ECC1‐1 Conteq
837 Lam / Novellus 27‐130310‐00 ESC Power Supply ECC1‐3 Trazar
838 LAM 685‐094680‐001 Light, Pen, Novellus
839 LAM 685‐094680‐001 Light, Pen, Novellus
840 LAM 857‐189084‐711 Kit, Showerhead, 300mm, WCVD, Novellus 16‐289070‐00
841 Lam Novellus 19‐00155‐01 150MM Heater Block
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30. 842 Lam Research 02‐112622‐00 Index Transfer Plate Novellus 15‐055437‐00
843 Lam Research 02‐112622‐00 Index Transfer Plate Novellus 15‐055437‐00 Used
844 Lam Research 02‐159684‐00 15" Heater Pedestal PED Assembly Novellus Working
845 Lam Research 02‐287781‐00 15" Heater Pedestal PED Assembly Rev. B Novellus Used
846 Lam Research 02‐287781‐00 15" Heater Pedestal PED Assembly Rev. C Novellus Used
847 LAM Research 04‐289663‐00 PM KIT,300MM,CYLINDER REBUILT // Novellus 22‐287767‐00
848 Lam Research 15‐350748‐00 NOVELLUS PART'S 15‐350748‐00 15‐340123‐00
849 Lam Research 15‐419957‐00 15" Heater Pedestal PED Assembly Novellus Surplus
850 Lam Research 16‐034139‐00 Injector Tube Novellus STI New Surplus
851 Lam Research 34‐373972‐00 Novellus Midas EC Cart MIDAS‐E‐TEO
852 Lam Research 849‐800096‐342 KIT, CLEAN, 2300, 300MM, METAL / Novellus
853 Lam Research Comet Novellus 660‐228191‐001 20080059
854 Lam Research Novellus Cable 03‐440939‐00
855 Lam Research Novellus GAMMA BELL JAR HERAEUS QUARTZ 12” GAMMA 716‐195745
856 Lam Research Novellus Shower Head 300mm TC Tapered Ebeam AHMn 16‐435080‐00 D
857 Lam Research YASKAWA, NOVELLUS SYSTEMS YSC‐02D04B02 SPINDLE 790‐205747‐001
858 Lam/Novellus 200mm Showerhead,16‐257038‐00, compatible with 16‐033931‐00
859 Lambda LFS‐48‐24 Power Supply, LSF4824, Novellus 0150‐700478
860 Lamp EVEREADY A39‐005‐01 LAMP 24V NOVELLUS SYSTEMS 1 (pkg 6)
861 Lamp GASONICS 24PSB LAMP, PILOT LIGHT PN 40.0048 (PKG 14)
862 Laser Filter 704NM Novellus P/N: 40‐155318‐00
863 L‐COM SP44199 Data Cable, 15p F ‐ 9p M, Celerity, RFC100 Novellus 38‐325183
864 Lens SAPPHIRE window 5.0E‐2IN, Novellus 15‐260932‐01
865 Lens Sapphire Window 8.0‐2in DIA, Novellus 15‐260932‐04
866 LINTELLE 02‐107788‐00 NOVELLUS LI6800 1299 003 Farmon ID
867 LINTELLE NOVELLUS PN:02‐150243‐00 LI6800 46 05 007
868 Load Lock Fixture for Degas PVD ‐ 103 Chamber Assembly AMAT LAM Novellus
869 LOT 3 NEW Novellus UNO‐1234 REV.1 Quartz Shower Head Gas Plates FREE SHIPPING
870 LOT Humphreys Bay BES‐4870‐PCB Pneumatic Rev P1 Manifold HAD40‐E41 Novellus
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ID:OEME 30 of 108 sales@semistarcorp.com

31. 871 LOT Humphreys Bay Pneumatic BES‐4870‐PCB Rev P1 Manifold HAD40‐E41 Novellus
872 LOT Novellus Humphreys Bay BES‐4870‐PCB Pneumatic Rev P1 Manifold HAD40‐E41
873 Lot NOVELLUS Reactor Center Door 95‐2700
874 LOT of 10: NOVELLUS Neoprene Mat, .062" THK. #51 C.I., 11‐1/4" ‐ NEW 0735‐722028
875 Lot of 10Novellus 0720‐738049 AI Hex Standoff 7/8" x 5/8" dia.
876 Lot of 196 Scew Bolts SKT HEX 1/4‐20 x 1 3/4 SS Novellus 21‐041270‐28
877 Lot of 1Novellus 0300‐7381013 3 Prong Locking Edge Connectors
878 Lot of 1Novellus 955653 Carrier 1 Coupling Assembly
879 Lot of 1Novellus AD2251A1 Clamp Screw Cover
880 Lot of 2 GaSonics A90‐031‐03 Industrial PCB Plasma/Lamp Failure Detection Cards
881 Lot of 2 Novellus 02‐140949‐00 REV C, Main system start stop module
882 Lot of 2 Novellus Systems Insulator, Gas Dist 15‐100603‐00
883 Lot of 2, Novellus 22‐185021‐00, SMC LVQ20‐Z07N‐8 Viper valve
884 LOT of 2: GASONICS 06‐0103, Quartz Probe Tip, 4" Optical Sensor
885 LOT of 2: GASONICS 06‐0123, CQuartz Coupling, 3‐Way, External Boiler
886 LOT of 2: GASONICS 07‐0051, Weldment, Process Purge 1
887 LOT of 2: NOVELLUS A‐3495‐000, VCR 316 Fitting, REV B, 990303B
888 Lot of 200 +/‐ Olander Novellus 1/4‐20 x 2 1/4 Soc Cap STNLS Bolts
889 Lot of 200 Brass Washers .281 id x .63 od Novellus 21‐055161‐00
890 Lot of 28 Novellus 0700‐700404, O'rings 2‐271 N70
891 Lot of 3 Novellus 16‐274114‐00 Vacuum Bellows Assembly
892 Lot of 30 Novellus IPEC Speedfam 2250‐700991 Fitting, JIC, Custom Rev D
893 Lot of 3Novellus 0720‐738049 AI Hex Standoff 7/8" x 5/8" dia.
894 LOT of 4: Gasonics 07‐0001 Rev. 1, 0.50 OD. x 0.035 W x 2.10 L
895 LOT of 4: Gasonics 07‐0002 Rev. 1, 0.50 OD. x 0.035 W x 1.75 L
896 LOT of 4: Gasonics 07‐0003 Rev. 1, 0.50 OD. x 0.035 W x 1.50 L
897 LOT of 4: GASONICS 07‐0026, Elbow Tube, Line 3, Heat Exchanger, 0.50" OD
898 LOT of 4: GASONICS 07‐0052, Elbow Tube, Chill Ring Return Line 1, 0.50" OD
899 LOT of 4: GASONICS 07‐0057, Elbow Tube, Pressure Relief #1, 0.50" OD
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ID:OEME 31 of 108 sales@semistarcorp.com

32. 900 LOT of 4: GASONICS 07‐0058, Elbow Tube, Pressure Relief #2, 0.50" OD
901 LOT of 4: GASONICS 07‐0059, Pressure Relief L‐Tube, 0.50" OD, 16.5"
902 LOT of 5: Gasonics 06‐0135, Quartz Puck Vacuum Sensor, BRU, 12/16" x 7/8"
903 Lot of 6 Gasonics 71005‐68 O‐Ring, 9.725 ID x .210 VITON, Novellus
904 Lot of 6 Novellus AC3705, Pacific Scientific E21SCHT‐LDN‐SS‐02, Bipolar stepper
905 Lot of 8 NEW Novellus DC Output Modules 38‐2900 3‐60Vdc out 4‐6 Vdc input
906 LOT of 8: Novellus 02‐134129‐11, ASSY, ORIFICE, .011 nw16, hdp
907 Lot of 9, Novellus 0710‐110673, Plastic Sleeve (Collar)
908 Lot of 95 Olander Novellus 21‐136441‐00 Crew Skt Hex M8x30 SS Bolts
909 Lot of Novellus 0730‐740252 Sleeve, DWO, Spraybox, MT
910 Lot of Novellus 0770‐100865 Spindle shaft
911 Lot of Novellus 956465, NERLITE 650‐400 Backlight,
912 LSA ANODIC / NOVELLUS STOP HEATER PIN PLATE BB‐101559‐32
913 MALEMA SENSORS M‐10000‐Y6061‐62‐002 NOVELLUS 61‐380455‐02 Used
914 Mallory SC110 Sonalert Audio Indicator, Gasonics 713353‐02
915 Manometer 100 TORR,COLD,CE Tylan General 21S06 NOVELLUS 60‐054373‐00
916 Manuals for Gasonics AE2001
917 manuals for Gasonics Aura A‐1000
918 Martin P36‐8M‐30‐SH‐SS, HTS Sprocket. For Novellus IPEC Speedfam 0710‐717681
919 MDC 687000 LIFTER BEARING FOR ASHER (GASONICS)
920 MDC Roughing Valve KAV‐100‐P for Novellus
921 Mectrol M24‐2265:1 Dojen Speed Reducer, Zero Backlash IPEC polish Novellus 96032
922 MFC AERA NOVELLUS TRANSFORMER MASS FLOW CONTROLLER TC FC‐PAR7800C
923 Millipore CDLD‐21S06E Manometer, 0‐100 Torr, Novellus 60‐054373‐00
924 Millipore CDLD‐21S06E Manometer, Novellus 60‐054373‐00, 0‐100 Torr
925 Millipore CDLD‐21S06E Manometer, Novellus 60‐054373‐00, 0‐100 Torr
926 Millipore CDLD‐21S06E Manometer, Novellus 60‐054373‐00, 0‐100 Torr
927 Millipore CDLD‐21S06E Manometer, Novellus 60‐054373‐00, 0‐100 Torr
928 Millipore CDLD‐21S06E Manometer, Novellus 60‐054373‐00, 0‐100 Torr
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ID:OEME 32 of 108 sales@semistarcorp.com

33. 929 Millipore CDLD‐21S06‐EMC Manometer, Novellus 60‐054373‐00, 0‐100 Torr
930 Millipore CDLD‐21S06‐EMC Manometer, Novellus 60‐054373‐00, 0‐100 Torr
931 Millipore CDLD‐21S06‐EMC Manometer, Novellus 60‐054373‐00, 0‐100 Torr
932 Millipore CDLD‐21S06‐EMC Manometer, Novellus 60‐054373‐00, 0‐100 Torr
933 Millipore CDLD‐21S06‐EMC Manometer, Novellus 60‐054373‐00, 0‐100 Torr
934 Millipore WG2F02PS1 Inline Gas Filter 1/4" Swagelok Novellus 20‐102707‐00
935 Millipore WG2F02PS1 Inline Gas Filter 1/4" Swagelok Novellus 20‐102707‐00 408909
936 MKS 109070029CE Convection Pressure Transducer 907CE Novellus 60‐325975‐00
937 MKS 253B‐11247, Valve, Throttle, 2" KF50, Novellus 27‐00148‐01
938 MKS 9515‐0356 Heater Vacuum Line Jacket, Novellus 27‐130826‐00
939 MKS Astron Generator, AX7651 (Novellus FI20656‐1)
940 MKS Baratron Transducer 750B 12TCE2GK 100T for Novellus
941 MKS HPS 9315‐0131 Insulator, NW40 Clamp, Heater Jacket, Novellus
942 MKS NOVELLUS FLOW RATIO CONTROLLER DELTA 2 DLT2A2‐28258 22‐352113‐00
943 MKS, HPS 99B1242, Clamp, SGL, Claw, NW‐200, Novellus 60‐10151‐00
944 MOOG 001‐6618‐02, DC Motor, Gasonics 3510 Robot Assy Motor
945 Motion Engineering Inc. SA‐NOV 4‐Axis Motor Controller Novellus
946 MOTOR,FAN,115V,FFU,C3WTS, 33‐328329‐00, Novellus
947 Mott 19‐053642‐00 Gasshield Hi‐Purity Gas Diffuser, Novellus
948 NATIONAL ELECTRONICS NL10250‐38 NOVELLUS WATER COOLED * FACTORY SEALED *
949 NeNovellus Tube 971219‐002‐002547, 2400‐739682
950 NEW (10) NOVELLUS 10‐00072‐00 PFE GASLINE 6 1/4"L 1/4"ID 3/8"OD GAS DISTRIBUTION
951
New (Other)
952
New (Other)
953 NEW AE Aera MFC FC‐D986C, NH3 gas, 20 SLM range, novellus 22‐140012‐00
954 NEW AE Aera, TC FC‐D986CY‐BF, MFC, 5 SLM, NF3, Novellus 22‐140276‐00
955 NEW Aera FC‐980C MFC, 1.5 SLM, N2O gas, novellus 22‐278256‐00
956 NEW Aera FC‐D980C MFC, TC FC‐D980C, 5 SLM, N2, Novellus 22‐023879‐00
957 NEW Aera FCPIDA980C4V/PI‐980 NF3 Mass Flow Controller, Novellus PN: 22‐355046‐00
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ID:OEME 33 of 108 sales@semistarcorp.com

34. 958 NEW Aera TC FC‐PA7810C 20 SLM Mass Flow Controller Novellus PN: 22‐324850‐00
959 NEW ASYST 04600‐001 Rotator assy, send side, ergo, Novellus 94‐1173
960 NEW Bronkhorst / Porter MFC NVL‐001F, TEOS 0.2 ml/min, Novellus 22‐00654‐00
961 NEW Brooks 002‐8904‐02 End effector assy, 2 piece, 13.08, Novellus 20‐155073‐00
962 NEW Brooks 5965S MFC, O2 gas, 30 SLM range, novellus 22‐148117‐00
963 NEW Brooks GF125C‐922317/GF125CXXC Mass Flow Controller, Novellus 22‐422347‐00
964 NEW Brooks GF125C‐922325/GF125CXXC Mass Flow Controller, Novellus 22‐422361‐00
965 NEW Brooks GF125CXXC/GFC125C‐893970 Mass Flow Controller, Novellus 22‐384424‐00
966 NEW Brooks GF125CXXC/GFC125C‐923421 Mass Flow Controller, Novellus 22‐427469‐00
967 NEW Brooks SLA7950S1EGG1B2A1 Ar Mass Flow Controller, Novellus PN: 22‐191538‐00
968 NEW Brooks SLA7950S1EGG1B2A1 Ar Mass Flow Controller, Novellus PN: 22‐287808‐00
969 NEW Brooks SLA7950S1EGG1B2A1 N2 Mass Flow Controller Novellus PN: 22‐287809‐00
970 NEW Brooks SLA7950S1EGG1B2E1 750 sccm Mass Flow Controller Novellus 22‐191971‐00
971 NEW Brooks SLA7950S1EGG1B2E1 Ar Mass Flow Controller, Novellus PN: 22‐189383‐00
972 NEW Brooks SLA7950S1EGG1B2E1 B2H6/N2 Mass Flow Controller Novellus 22‐189374‐00
973 NEW Brooks SLA7950S1EGG1B2E1 N2 Mass Flow Controller, Novellus PN: 22‐192015‐00
974 NEW Brooks SLA7950S1EGG1B2E1 NF3 Mass Flow Controller Novellus PN: 22‐189370‐00
975 New Cup/Bus 196mm Low Pro Assy Novellus 02‐130754‐00 Rev B Ceramic Ring CoorsTek
976 NEW Festo VTOC‐H‐V1‐SA Valve Terminal Manifold Block, Novellus PN: 61‐384620‐00
977 NEW Fujikin FPR‐NSD‐21‐6.35UGC‐PA#A 2‐Way IGS NC Valve, Novellus 60‐285020‐00
978 NEW Fujikin FPR‐NSDT‐21‐6.35UGC‐PA#A 2‐Way IGS NC Valve, Novellus 60‐285021‐00
979 NEW Furon saint gobain RV3‐4Novellus, Regulator valve, RV 3/16
980 NEW GENUINE OEM NOVELLUS GAS DISP PLATE ADJUSTER KIT 02‐00008‐00
981 NEW Hitachi SAM 2480G1MC‐AGL0 Ar Mass Flow Controller MFC Novellus 22‐384497‐00
982 NEW Hitachi SAM 2480G1MC‐AGL0 NF3 Mass Flow Controller MFC Novellus 22‐384493‐00
983 NEW Hitachi SAM SFC1480FMC‐4VL24 Mass Flow Controller MFC Novellus 22‐193529‐00
984 NEW Hitachi SAM SFC1480FMC‐4VLZ24 Mass Flow Controller MFC Novellus 22‐193560‐00
985 NEW Hitachi SAM SFC1482FPFMC‐4VLN24 Mass Flow Controller Novellus 22‐188118‐00
986 NEW Horiba‐STEC SEC‐Z512MGX 10 SLM Mass Flow Controller, Novellus 22‐399262‐27
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ID:OEME 34 of 108 sales@semistarcorp.com

35. 987 NEW Horiba‐STEC SEC‐Z513MGX 100 sccm N2 Mass Flow Controller, Novellus 1011728
988 NEW HVA 21210‐0256Z‐002 Novellus 19‐147080‐00, 2.5" High temp gate vale
989 NEW HVA 21250‐0306Z‐001 Novellus 19‐147081‐00, 3' High temp gate vale
990 NEW Kalrez 373 Oring 2‐373, plasma 8575 UP Novellus 22‐177446‐00
991 NEW Kollmorgan MT1506B1‐E2C1 Goldline servo motor, 968601, Novellus
992 NEW Kollmorgen 12‐939600 Actuator, Novellus/ASM/KLA?
993 NEW LAM RESEARCH NOVELLUS 16‐262201‐00 ANODE RING 300mm
994 NEW LAMBDA LFS‐42‐28‐Novellus QT330174, 28V, 5A power supply
995 NEW MKS PFC‐60/piMFC P6A007502HAT0 Mass Flow Controller, Novellus 22‐273582‐00
996 NEW Mykrolis FC‐2902MEP‐T, NH3 gas, 20 SLPM, S3004 Novellus 22‐159378‐00
997 NEW Mykrolis FC‐2902MEP‐T, SiH4 gas, 500 SCCM, novellus 22‐157425‐00
998 NEW Mykrolis FC‐2902MEP‐T‐4V, SiH4 gas, 1.5 SLPM, novellus 22‐161384‐00
999 NEW Novellus 00‐686124‐00 Ion Gauge 075 Huntington IK‐100
1000 NEW Novellus 00‐686124‐00 Ion Gauge 075 Huntington IK‐100
1001 NEW Novellus 02‐259216‐00 Assembly, plating control box, conan, R02‐259216‐00
1002 NEW Novellus 02‐324753‐00 300mm Vector Spindle Assembly Bodine Camco Ferguson
1003 NEW Novellus 03‐028169‐07 cable assy, power, 132" IEC‐IEC
1004 NEW Novellus 03‐103583‐01 RF cable assy
1005 NEW Novellus 03‐128704‐00, Cable assy
1006 New NOVELLUS 03‐155888‐00 PCA, RF CURRENT SENSOR
1007 NEW Novellus 03‐161293‐00, 208V Power cable
1008 New Novellus 03‐322451‐00 New cable, ESC supply to Seal plate
1009 New Novellus 10‐189321‐00 VCR 90 Degree Connection
1010 NEW Novellus 10‐264953‐00 Gas line 1/4 inch VCO
1011 New Novellus 10‐293874‐00 rev A Valve
1012 NEW Novellus 150‐000‐057, 950827 Drive assy w ASM81‐B & Brecoflex T10/980 belt
1013 NEW Novellus 15‐104055‐00 Injector nozzle HDP 300
1014 NEW Novellus 15‐115209‐00 CALMAX Technology mounting block
1015 NEW Novellus 15‐152134‐02 mount motor left load lock, VCTR
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ID:OEME 35 of 108 sales@semistarcorp.com

36. 1016 NEW NOVELLUS 16‐444933‐00 Industrial Lift Pin Bellows Component Module
1017 NEW Novellus 27‐154966‐00 2 post mapper, Brooks Robot ATR7 wafer Mapper
1018 NEW Novellus 27‐270136‐00 Brooks 108965 mapper, Thrubeam, AQR8 robot automation
1019 NEW Novellus 40" Chain Drive MTR 00‐685508‐00 Rev. F
1020 NEW Novellus 60‐183488‐00 assy, Pneumatic bank #1, Festo, C3 SPD
1021 NEW NOVELLUS 7/8 CHANNEL GAS BOX INTLK PCB BOARD ASSY 02‐054128‐00
1022 NEW Novellus 90‐2728 Bottom Board, handler, PCA
1023 New Novellus 95‐4587 Arm Assy, vespel seirra
1024 NEW Novellus A01‐201‐01 Housing shower head, 8 inch
1025 NEW Novellus A95‐145‐01 Flushmount window assembly
1026 NEW Novellus G19‐10078‐00 Rev A with 25 Humphrey HA010E1 Air Valves
1027 NEW Novellus G33‐0000035 Pressure Regulator 30 PSI, TESCOM 24‐1A16AAHH‐010
1028 NEW Novellus Gasonics 90‐2686 PCA, MAIN SIDE DISTRIBUTION BOARD
1029 NEW Novellus Model No. 94‐1173 Send Rotator Asyst Part No. 04600‐001
1030 NEW NOVELLUS P/N: 10‐323959‐00 REV: B FREE SHIP
1031 NEW Novellus PN: 16‐131278‐00 200mm Heater Block, Low Contact Area 8"
1032 NEW Novellus PN: 27‐058374‐00 24/15/12/5/52 V DC Power Supply Vicor MP7‐99501
1033 NEW Novellus PN: 60‐186996‐00 C3 Altus Manifold Panel Assembly Pneucon
1034 NEW Novellus PN: 61‐389405‐00 15‐Channel Pneumatic Gas Box Assembly Festo
1035 New Novellus Style D Pedestal Adaptor 15‐042189‐00 ‐ Great Deal!
1036 NEW NOVELLUS SYSTEM INC. 10‐3000748 VACUUM FITTING
1037 NEW NOVELLUS SYSTEMS 01‐4435 PLATE COVER, BOTTOM STEEL
1038 NEW Novellus Systems 17‐117184‐00, BRKT, VALVE, BOT, VFLD, 1.25CC
1039 NEW Novellus/GaSonics 94‐1172 Rotator, Receive Asyst PN: 04600‐002 w/Arm Control
1040 NEW OLD STOCK! NOVELLUS 676/776 TOP KEYED PAD CONDITIONER 2805‐740555 / 104185
1041 NEW Perfection Metal / Novellus, Box, Exhaust, S2‐91 Gasbox, 16‐10508‐00
1042 NEW Precise sensors 70447‐100‐01‐GA‐4IM, novellus 02‐051791‐00A, 0‐100 PSIA
1043 NEW SAFC Hitech Enabling Technology/ASM/Novellus ALD Ampoule/Bubbler
1044 NEW Siemens micromaster 440 6SE6440‐2UC17‐5AA1, Novellus 27‐177089‐00
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ID:OEME 36 of 108 sales@semistarcorp.com

37. 1045 NEW SMC PA221Novellus 961704, process pump
1046 NEW Swagelok 6LV‐F1VD2DP‐AB Manifold Valve, Novellus PN: 22‐187575‐00
1047 NEW SWAGELOK 6LVV‐ALD6HFR4‐P‐CS‐NV Novellus 22‐323741‐00
1048 NEW Tescom 74‐3041KRW25‐102 3‐60 PSIG Regulator, Novellus PN: 22‐182766‐00
1049 NIPPON NOVELLUS SYSTEMS INTERLOCK BOX
1050 Nor‐Cal 950209‐2 Isolation Valve, Gasonics 22‐0138, KF‐50, NW50
1051 Nor‐Cal ESVP‐200‐99 Isolation Valve, Bellows, Gasonics 94‐3101
1052 Nordson 107589A Phase Board Cool Wave Power Supply C3 SOLA Novellus 63‐359611‐00
1053 Nordson 1601211 CW2 UV Cooling Wave Microwave Light Source, Novellus
1054 Nordson MPS‐610V CoolWave UV Curing System, 1067155, 610V, Novellus
1055 Nordson MPS‐610V, Novellus R27‐301990‐00, Cooling Wave UV Curing System
1056 Nordson MPS‐610V, Novellus R27‐301990‐00, Cooling Wave UV Curing System
1057 Novellus ‐‐ 04‐732501‐01 ‐‐ New
1058 Novellus ‐‐ 10‐178375‐00 ‐‐ New
1059 Novellus ‐‐ 10‐301567‐00 ‐‐ New
1060 Novellus ‐‐ 11‐259861‐00 ‐‐ New
1061 Novellus ‐ Opto Solid State Relay Switch ODC5 / 72‐999021‐00 *Sealed*
1062 NOVELLUS (LAM) 15‐032014‐00 WINDOW, QUARTZ W/AL2O3 CTG, ETCH RESISTANT
1063 NOVELLUS (LAM) 15‐100641‐00 WINDOW, SAPPHIRE, INNER
1064 NOVELLUS (LAM) 15‐110411‐00 WINDOW, THIN PURE SAPPHIRE CONCEPT 1/2
1065 NOVELLUS (LAM) 15‐11263‐02, VIEWPORT WINDOW STI SOLID SAPPHIRE
1066 NOVELLUS (LAM) 22‐100613‐00, BALL 3/16" DIA, SAPPHIRE
1067 NOVELLUS / APW 02‐127162‐00 ASSY,MC2, HANDLER CNTRL
1068 Novellus / CAL‐WELD Vacuum T Valve, 18" Inch Long, 2" Inch I.D., 10‐300748‐00
1069 Novellus / Gasonic / Asyst: Arm Controller Board Module 06764 FAB 06768‐001‐A
1070 Novellus / IPEC 0150‐700366, Wafer head gear motor right
1071 Novellus / IPEC 2805‐770376 Motion Control Assy w Warner Controller
1072 Novellus / Keyence 19‐147540‐12 Mod, Cmp, Fiber Optic Sns13 Appears Unused
1073 NOVELLUS / LAM MANF, RINSE, BRA PN: 131525500 / 1001037559
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ID:OEME 37 of 108 sales@semistarcorp.com

38. 1074 Novellus / LAM Research 0710‐717013 Rev‐D Clamp, Bearing Ring Avant Garde 679
1075 NOVELLUS / LSA ANODIC 04‐722691‐00 RING, TABLE STOP REV B
1076 NOVELLUS / LSA ANODIC 16‐116351‐00 ESC LIFT PIN ASSY REV B
1077 NOVELLUS / OMEGA ENGINEERING 27‐151439‐00 METER, SIGNAL CONDITIONER
1078 Novellus / Porter TDEAT Flow control assembly 0204956400 with NVL‐012 1mL MFC
1079 Novellus / Samsung, 16‐271392‐00, 300MM 13" Shower Head
1080 Novellus / Shields Mfg. CHUCK,PEM,SABRE,300mm O‐RING, 16‐270993‐00 Rev. C
1081 Novellus / SSI 01‐17423‐001 TPM CONTROLLER, 02‐15581, SSI‐ C186EB
1082 Novellus / SSI 01‐17423‐002 PROCESS MODULE, 02‐15581, SSI‐ C186EB PCB
1083 Novellus / SSI 01‐17423‐003 SYSTEM MODULE, 02‐15581, SSI‐ C186EB PCB
1084 Novellus / SSI 01‐22172‐001 PROCESS MODULE, C186EB, 02‐15581 PCB
1085 Novellus / Varian 3000 Series Master Controller 19‐113956‐00 ++
1086 Novellus 0010‐03342 Rev. 001, Lower Electrode Heate ASSY
1087 NOVELLUS 001‐9348‐04 REV : C, NEW
1088 NOVELLUS 001‐9354‐01 CABLE ASSY, CASSETTE PRESENT VCE‐4, NEW
1089 Novellus 002‐6640‐24 Robot Arm
1090 NOVELLUS 002‐7738‐01 SUP ID 4461, NEW
1091 NOVELLUS 002‐8166‐01 CABLE ASSY, WSO OVER RIDE LPM SMIF OPENER, NEW
1092 NOVELLUS 002‐8838‐04 ASSY, CABLE, CONTROLLER‐8 SIGNAL 15FT , NEW
1093 NOVELLUS 002‐9649‐03 REV : 04, NEW
1094 NOVELLUS 00‐670615‐00 ASPIRATOR PUMP
1095 Novellus 00‐672232‐00 Turnbuckle Assy. For 3000 Series Sputter System
1096 NOVELLUS 00‐680909‐00
1097 novellus 0100‐772457, ELMO SBA‐10/100EH, amplifier, brushless DC motor
1098 Novellus 01‐133875‐00 SIOC Anneal Controller Digital Dynamics 02‐134495‐00 Used
1099 NOVELLUS 01‐2839 rod chamber door
1100 NOVELLUS 01‐3422 ONTRACK MANIFOLD
1101 NOVELLUS 01‐3944 FLANGE, AL, PRESSURE P
1102 NOVELLUS 01‐4435 COVER, BOTTOM
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ID:OEME 38 of 108 sales@semistarcorp.com

39. 1103 Novellus 01‐4893 Arm, Wafer Clamp, Sierra
1104 Novellus 01‐5923 Casting Idler Drive Assembly with Dyna Axel
1105 NOVELLUS 01‐5923, CASTING, IDLER, DRIVE ASSY. BLADE, GAMMA
1106 NOVELLUS 01‐5978 SPACER, RING SCOPE
1107 NOVELLUS 01‐6037 CAP, CERAMIC PLASMA TUBE
1108 Novellus 0175‐111414 Entrelec LR88297 GMU 15U 15A Circuit Breaker
1109 Novellus 0175‐111414, Entrelec LR88297, GMU 15u, 15 Amp Circuit Breaker, 1 Pole
1110 Novellus 02‐00090‐00, Heater Filter, Board, FAB 27‐00074‐00, PCB Assy
1111 Novellus 02‐00093‐00R Baseplate for One Arm Robot, 02‐00093‐00
1112 NOVELLUS 02‐00105‐00 KIT,CAPAC. WITH JUMPER
1113 NOVELLUS 02‐00150‐00 PCB ASSY, MULTIBUS POWER BRD
1114 Novellus 02‐00194‐00 TEOS Liquid ENd Assembly PN: 81‐054172‐00
1115 Novellus 0200‐35325 ESC Ceramic Edge Ring 91/2"
1116 NOVELLUS 02‐028522‐00 P100 SYSTEM CONTROLLER 16 MEG
1117 Novellus 02‐028522‐00 P100 System Controller AS‐IS Missing Hard Drive
1118 NOVELLUS 02‐032374‐00 PCB, INTERLOCK BD, CVD‐D
1119 Novellus 02‐033134‐01 Heater *used working, 90 day warranty*
1120 Novellus 02‐033196‐00 Kit, Window, Sapphire, Single Port, 15‐110411‐00
1121 Novellus 02‐033493‐00, SP1493, Heater Chunk, Temp
1122 Novellus 02‐033493‐00, SP1493, Heater Chunk, Temp
1123 NOVELLUS 02‐034310‐00 ASSY,MOD CNTRL,P100/16M
1124 NOVELLUS 02‐034310‐00 ASSY,MOD CNTRL,P100/16M C2 Altus
1125 novellus 02‐034310‐00 MOD CONT, P100/16M
1126 Novellus 02‐034310‐00 Module Controller P100 Revision C PROM: V2.8
1127 Novellus 02‐034310‐00 Module Controller P100 Revision M 5/12/‐12VDC 1.8A
1128 Novellus 02‐034574‐00 Rev.H, 271220, Assy, Spindle, Seq.
1129 Novellus 02‐047200‐03 Compact RD118X114‐TBE
1130 NOVELLUS 02‐053644‐00N 60‐053275‐00 VALVE BOARD VAT NOVELLUS
1131 NOVELLUS 02‐054573‐00 MOER RING 2.4MM‐14/AL2O3 300MM CERAMIC
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ID:OEME 39 of 108 sales@semistarcorp.com

40. 1132 NOVELLUS 02‐056530‐00 RS232 monitoring cable
1133 Novellus 02‐057547‐00, Board, FAB# 27‐057546‐00 REV. B, SCH# 76‐057545‐00
1134 Novellus 02‐057891‐00 ARSU ADAC Board 8886800 *used working, 90 day warranty*
1135 NOVELLUS 02‐08449‐00, PCB ASSY, GAS PANEL BOARD
1136 NOVELLUS 02‐101176‐00 MEASURMENT PROBE
1137 NOVELLUS 02‐101176‐00 MEASURMENT PROBE
1138 NOVELLUS 02‐103960‐00 CONTROLLER P166 24V
1139 Novellus 02‐103960‐00 Controller Platform P166/64
1140 NOVELLUS 02‐103970‐00 ASSY, MOD_ CONT,P166, 24V CONTROLLER
1141 Novellus 02‐10500MOD_CNT, P166, 24 V, W/8_S23
1142 Novellus 02‐10500MOD_CNT, P166, 24 V, W/8_S23
1143 Novellus 02‐10500MOD_CNT, P166, 24 V, W/8_S23
1144 Novellus 02‐10500MOD_CNT, P166, 24 V, W/8_S23
1145 Novellus 02‐10511‐00 Module Controller 486/50/8M AS‐IS Missing Hard Drive
1146 Novellus 02‐105157‐00 Assy, Sys. Cont., P166/64, 24V
1147 Novellus 02‐105157‐00 Assy, Sys. Cont., P166/64, 24V
1148 NOVELLUS 02‐106217‐00 REVC, ASSY, WTS‐0 SIOC, CONTROLLER
1149 Novellus 02‐109864 Assy Cap Insulator Plasma
1150 Novellus 02‐111301‐00, Gas Box Distribution, Board
1151 Novellus 02‐116239‐01, 0104‐NV‐3115‐1
1152 Novellus 02‐117299‐00 Assy, Probe, Keyed, Chemic, 3, 6, 23, ATMI
1153 Novellus 02‐117299‐00 Assy, Probe, Keyed, Chemic, 3, 6, 23, ATMI
1154 Novellus 02‐117299‐00 Assy, Probe, Keyed, Chemic, 3, 6, 23, ATMI
1155 NOVELLUS 02‐118616‐00, ASSY LIGHT TOWER, 3CLR, MFG PN: FLUSH PATLITE WME‐FBEN
1156 Novellus 02‐120820 DEGAS Integrated LDS ASSY Module for Vacuum Degassing Chamber
1157 Novellus 02‐120820‐00 Assembly, DEGAS, Integrated, LDS
1158 Novellus 02‐120820‐00 Assembly, DEGAS, Integrated, LDS
1159 NOVELLUS 02‐121068‐11 ORIFICE, O‐RING.011
1160 NOVELLUS 02‐121068‐16 ORIFICE, O‐RING.016
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ID:OEME 40 of 108 sales@semistarcorp.com

41. 1161 NOVELLUS 02‐1212068‐11 ORIFICE, O‐RING,011 (LOT OF 20)
1162 Novellus 02‐123968‐00 WTS‐HV 1 SIOC
1163 Novellus 02‐127162‐00, ASSY, MC2, HANDLER, CNTRL
1164 NOVELLUS 02‐127164‐00, ASSY,MC2,SYSTEM CONTROLLER, APW PN 06‐01391800‐164
1165 NOVELLUS 02‐127164‐00, ASSY,MC2,SYSTEM CONTROLLER, APW PN 06‐01391800‐164
1166 NOVELLUS 02‐127707‐00 ASSY SYS CONT P166‐64‐24V
1167 NOVELLUS 02‐127707‐01 ASSY SYS CONT, P166 / 24V QNX4 CONTROLLER
1168 NOVELLUS 02‐130206‐00 ASSY,L‐TYPE INSERT
1169 NOVELLUS 02‐130206‐00 ASSY,L‐TYPE INSERT,46x236
1170 Novellus 02‐130617‐00, 300mm Vector Spindle ASM, 50RGS4H16‐300
1171 Novellus 02‐130617‐00N C3 Vector Spindle Assembly Rev. B No Motors Used Working
1172 Novellus 02‐130617‐00N C3 Vector Spindle Assembly Rev. D No Motors Used Working
1173 Novellus 02‐131736‐00 Rev.A, ISIOC HI‐LO Transfer Assembly
1174 Novellus 02‐132030‐00 ASSY,MOD,CTR,P166/64/QNX4 controller
1175 Novellus 02‐132030‐00 Module Controller P166/64 QNX4 AS‐IS Missing Hard Drive
1176 Novellus 02‐132030‐00, Assy,Mod_Cont,P166/64 Qnx4
1177 NOVELLUS 02‐132970‐00 ASSY,CUP,296,LOW PRO (NC) NEW
1178 NOVELLUS 02‐132970‐00 ASSY,CUP,296,LOW PRO (NC) USED
1179 NOVELLUS 02‐134263‐00 ESC, 200MM,
1180 Novellus 02‐134264 ESC 200mm
1181 Novellus 02‐140949‐00 Main system start‐stop module , S 1009
1182 Novellus 02‐140949‐00 REV C Main system start stop module
1183 NOVELLUS 02‐141488‐45 ASSY,INJECTOR,ANGLED,MOD
1184 NOVELLUS 02‐143079‐00 ASSY, SIOC 2 SIOC, Digital Dynamics 02‐122156‐00
1185 NOVELLUS 02‐144985‐00, WTS 3 FOUP, SIOC CONTROLLER, 27‐053659‐00
1186 NOVELLUS 02‐145223‐00 Controller, USED
1187 NOVELLUS 02‐147562‐00, PCB ASSY, HOIST ACTUATOR, SPEE
1188 Novellus 02‐147563‐00 Air Manifold Box Cover, 03‐152126‐00, 02‐147563‐00
1189 Novellus 02‐147563‐00 Bay Advanced Technologies 8086‐01 Air manifold assy
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ID:OEME 41 of 108 sales@semistarcorp.com