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• Hydrogen specific solid-state sensing technology that has both resistor
and capacitor circuits for H2 measurement/detection from 15ppm to
100% v/v.
• Palladium – Nickel alloy films provide high stability.
• Proprietary coating enables continuous operation in harsh
contaminant environments.
• Temperature control loop compensates for external fluctuations.
• Sensor capable of operation in N2, O2, other inert gas backgrounds
and multi-component, varying gas and liquid streams.
Technology Background
H2 Specific Resistor Circuit
• Pd catalyzes H2 (molecular) into 2H (atomic)
• Hydrogen absorbed - changes Bulk Resistivity
– Hydrogen Sensing Resistor (HRES) uses
this property to measure Hydrogen from
0.5% to multiple atmospheres.
– On-chip heater and temperature sensor
H2 Pd-Ni
H
Sqrt( % H2)
1000.5
∆R/R
HRES
H2 Specific Capacitor Circuit
Charge Density– Hydrogen Sensing Capacitor (HCAP) uses
this property to measure Hydrogen from 15 ppm to 0.5%
(in air).
HCAP
Pd-Ni
H2
H
Charge Density
varies with H2
Sensor Integration
Flexible circuit
Sensor Electronics
Protective screen
Sensor

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Technology background H2SCAN h600

  • 1. • Hydrogen specific solid-state sensing technology that has both resistor and capacitor circuits for H2 measurement/detection from 15ppm to 100% v/v. • Palladium – Nickel alloy films provide high stability. • Proprietary coating enables continuous operation in harsh contaminant environments. • Temperature control loop compensates for external fluctuations. • Sensor capable of operation in N2, O2, other inert gas backgrounds and multi-component, varying gas and liquid streams. Technology Background
  • 2. H2 Specific Resistor Circuit • Pd catalyzes H2 (molecular) into 2H (atomic) • Hydrogen absorbed - changes Bulk Resistivity – Hydrogen Sensing Resistor (HRES) uses this property to measure Hydrogen from 0.5% to multiple atmospheres. – On-chip heater and temperature sensor H2 Pd-Ni H Sqrt( % H2) 1000.5 ∆R/R HRES
  • 3. H2 Specific Capacitor Circuit Charge Density– Hydrogen Sensing Capacitor (HCAP) uses this property to measure Hydrogen from 15 ppm to 0.5% (in air). HCAP Pd-Ni H2 H Charge Density varies with H2
  • 4. Sensor Integration Flexible circuit Sensor Electronics Protective screen Sensor