This document discusses Tayhwa Tech Co., Ltd and their products for precise positioning including piezo actuators, sensors, stages, drive and control systems. It summarizes key characteristics of piezo actuators like hysteresis, creep, generated force and displacement reduction. It also describes different sensor types, stage structures using hinge mechanisms and FEM analysis, as well as drive and control block diagrams. The document provides details on various precise stage and objective lens positioner products and their specifications.

1. TAYHWA TECH CO.,LTD
TAYHWA TECH CO.,LTD.
http://www.tayhwa.com.tw
『Attitude for Precise Positioning of
Nano Control Co., LTD』
2008.9.22

2. TAYHWA TECH CO.,LTD
1. Piezo Actuators
Hysteresys・Creep・Generated Force・Displacement Reduction
2. Sensor
Capacitive Sensor・Strain Gauge Sensor
3. Stages
Hinge Mechanisms・ＦＥＭ Analysis
4. Drive and Control
Block Diagram of Positioning System
5. Products
・Precise Stages: Short Stroke, Long Stroke, Elevating Z,
Highly Rigid Type, Ultra Precise Machining Use,
Objective Lens Positioners
・Controller Drivers
・Technical Data
Contents

3. TAYHWA TECH CO.,LTD
Merits of Piezo Actuators
A piezo actuator is a solid
state actuator which induces
strain by applying voltage.
One Layer Thickness : 100μｍ
Applied Voltage : 150V
Displacement : 10μm / 10mm Length
Force : 850N / 5mm × 5mm
Resolution : 60nm / 1V・10mm Length
Response : μsec～msec
The above specification is typical data. It’s depends on a
actuator size.

4. TAYHWA TECH CO.,LTD
Characteristics of Piezo Actuators①
Hysteresis
The figure shows a displacement
of piezo actuator.
Increasing applied voltage, the
displacement becomes larger.
And displacement hysteresis is
occurred in case of increasing
and decreasing applied voltage.
Hysteresis modification using
sensor is necessary due to precise
positioning.

5. TAYHWA TECH CO.,LTD
Characteristics of Piezo Actuators②
Creep
A displacement of piezo actuator
increase little by little, even if the
actuator is applied constant
voltage. This phenomenon is
called creep, which is caused by
polarization of piezo ceramics.
It is necessary feed back control
by using a displacement sensor to
suppress the creep due to precise
positining.

6. TAYHWA TECH CO.,LTD
Characteristics of Piezo Actuators③-1
The piezo actuator is elastic construction.
（Elastic coefficient≒4.4×1010N/m2)
Therefore, a piezo actuator is shrinked under constant loaded and
reference position of displacement goes down.
But by being established the position as a renewed reference, a rated
displacement can be obtained by measuring from the the renewal
reference position.

7. TAYHWA TECH CO.,LTD
Sensors
Displacement sensors
Sensors below are used in nano positioning.
･Capacitive Sensor : Detecting capacity change, non-contact type
･Strain Gauge Sensor : Detecting resistance change, contact type
･Linear Sensor : Detecting lattice pattern on a glass scale, LD and PD
For long travel rage use (expensive）
･Laser interferometer : Using laser interference
For long travel range use (expensive）
A capacitive or strain sensors are installed in stages. These sensors have high
resolution and high stability, and more have high cost performance on strain
gage sensor. In case of using strain gage senor, positioning to several several
nanometer is provided in low cost. In case of using capacitive sensor, nanometer
resolution and high stability are available.
Sensor signal is faint, and is required to amplify and calibrate by a
displacement sensor amplifier for linearity.

8. TAYHWA TECH CO.,LTD
Structure of Precise Stages①
■Hinge Mechanism
Roughness of backlash and friction on a cross roller and a linear guide
disturbs preciseness in nano positioning. Therefore hinge mechanisms are
adopted for our products. For example, the stage which is consist of hinges
and magnification mechanisms can be realized long travel range and precise
motion characteristics even though high resolution is maintained.

9. TAYHWA TECH CO.,LTD
Structure of Precise Stages② Analisys
■Finite Element Method
A stage is consist of hinges and
magnification mechanisms. These
mechanisms are simulated by
using FEM.
Characteristics of stages travel
range, internal stress and strain
etc. can be analyzed using FEM.
Therefore, reliable and optimized
stages can be designed efficiently.

10. TAYHWA TECH CO.,LTD
FEM Analysis of precise Stages

11. TAYHWA TECH CO.,LTD
Block Diagram of Positioning System
Servo Mode
Serial/
Parallel Board
（Options）
Sensor Amp. Piezo Driver
Sensor
Input
P I D
Piezo
Output
Sensor
Monitor
Analog
Input
Error/
Imposition
Signal
Piezo
Monitor Reset
Serial/Parallel
Interfaces
PID Control
Piezo ActuatorSensor
Stage
Controller Driver

12. TAYHWA TECH CO.,LTD
Example Connection on Positioning System

13. MeritsMerits
Nano Servo StagesNano Servo Stages
・・Travel RangeTravel Range 1515μμmm ～～ 500500μμmm
・・ResolutionResolution 1nm1nm ～～
・・SensorsSensors Capasitive SensorCapasitive Sensor
Strain Gauge SensorStrain Gauge Sensor
・・Highly Rigid and PreciseHighly Rigid and Precise
Mechanisms using MonolithicMechanisms using Monolithic
ConstructionsConstructions
・・Positioning in quick ResponcePositioning in quick Responce
Precise Stage SeriesPrecise Stage Series
High ResolutionHigh Resolution・・Large ForceLarge Force
・・Quick ResponseQuick Response
Capacitive SensorCapacitive Sensor ・・Strain Gauge SensorStrain Gauge Sensor
Optimized Design by MagnificationOptimized Design by Magnification
and Preload Mechanismsand Preload Mechanisms

14. TAYHWA TECH CO.,LTD
Variety of Nano Servo Stages
Short Travel
Range
Elevating Z Axis Long Travel
Range
ＸＹ Axes Stage
Highly Rigid Type Highly Rigid
Elevating Z Axis
For Ultra Precise
Machines

15. TAYHWA TECH CO.,LTD
Stroke (Open Loop)
■Stroke
A displacement of piezo actuator is measured by applying voltage from
0 to an operating voltage in constant interval for five times. The
difference between maximum and minimum value in the fifth
displacement cycle is defined as a stroke of the actuator.

16. TAYHWA TECH CO.,LTD
Resonant Frequency
■Resonant Frequency
The impedance of piezo actuator
which is installed in the stage is
measured by impedance analyzer.
And the frequency at minimum
impedance is defined resonant
frequency.

17. TAYHWA TECH CO.,LTD
Resolution
■Resolution
The stage is positioned in
step which can be visible by
applying a bit step voltage
more than five times. And
the value of the difference
between maximum and
minimum position divided by
number of steps is defined
as a resolution.

18. TAYHWA TECH CO.,LTD
Repeatability
■Repeatabilty
A stage is positioned at an
optional point in one direction
seven times. The half of a
difference between maximum
and minimum position with ±
is defined as a repeatability.
The repeatability is measured
at the center of stage travel
range ordinary and more is
measured at both side of the
range depending on
requirement.

19. TAYHWA TECH CO.,LTD
Response
Input
Signal
Sensor
Monitor
Error
（Input Signal－Sensor Signal）

20. TAYHWA TECH CO.,LTD
使用Stage於AFM的特點
1. Stage平整度高
2. 大幅擴充AFM掃描的行程
3. 改善使用tube scanner遲滯的影響
數字標準片

21. Objective Lens PositionerObjective Lens Positioner
・・StrokeStroke 1515μμmm、、100100μμmm、、200200μμmm
・・ResolutionResolution 2nm2nm ～～
・・Easy Attachment for Microscope RevolverEasy Attachment for Microscope Revolver
・・ Movement of Focal Plane in Quick ResponseMovement of Focal Plane in Quick Response
Focusing SeriesFocusing Series
Revolver PositionerRevolver Positioner
MeritsMerits
・・Travel Range : 100Travel Range : 100μμmm
・・Resolution : 2nmResolution : 2nm
・・Optimized Design for Motorized RevolverOptimized Design for Motorized Revolver
・・Focus Adjustment for Microscope RevolverFocus Adjustment for Microscope Revolver
MeritsMerits
High ResolutionHigh Resolution・・Large ForceLarge Force
・・Quick ResponseQuick Response
Capacitive SensorCapacitive Sensor・・Strain Gauge SensorStrain Gauge Sensor
Optimized Design for MagnificationOptimized Design for Magnification
and Preload Mechanismsand Preload Mechanisms

22. TAYHWA TECH CO.,LTD
FEM Analysis of an Objective Positioner

23. TAYHWA TECH CO.,LTD
Installed Piezo Actuator
and Sensor
Fixed Part
Moving Part
Piezo Cable
Sensor Cable
Lens goes up and down.
Revolver
Attachment
Objective Positioners

24. TAYHWA TECH CO.,LTD
搭配物鏡式AFM探針頭，可大幅擴充AFM掃描的深度，可應
用於較大尺寸之光電元件表面輪廓掃描
BEF 導光板
使用Z-axis actuator 於AFM的特點

25. ・・Travel Range : 30Travel Range : 30μμm, 80m, 80μμmm
・・Resolution : 2nmResolution : 2nm ～～
・・ BacklashBacklash--free and Quick Responsefree and Quick Response
・・Optimized Design for positioning ofOptimized Design for positioning of
Diamond bytes, Spindles and WorksDiamond bytes, Spindles and Works
・・High Rigidity, High Resonant FrequencyHigh Rigidity, High Resonant Frequency
Precise Stages for Ultra PrecisePrecise Stages for Ultra Precise
MachinesMachines
Precise Stage SeriesPrecise Stage Series
MeritsMerits
･･Large ForceLarge Force・・Quick ResponseQuick Response
･･Capacitive SensorCapacitive Sensor・・Strain Gauge SensorStrain Gauge Sensor
･･High Rigidity, Monolithic PreloadHigh Rigidity, Monolithic Preload
MechanismMechanism・・Guide MechanismGuide Mechanism

26. TAYHWA TECH CO.,LTD
Resolution：2nm
バイト取付時
Characteristics of Stages for Ultra Precise Machines
Attached for inclinedAttached for inclined--shaft type spindleshaft type spindle
WorkSpindle
A Stage for Ultra Precise MachinesA Stage for Ultra Precise Machines
Diamond Byte

27. Precise Stage SeriesPrecise Stage Series
Nano Servo ControllerNano Servo Controller
Precise PositioningPrecise Positioning
by using Power Amplifier withby using Power Amplifier with
Low Noise and High StabilityLow Noise and High Stability
MeritsMerits
・・Enough Power Capacity for DrivingEnough Power Capacity for Driving
Piezo ActuatorPiezo Actuator
・・PID ControlPID Control
・・Analog and Digital InterfaceAnalog and Digital Interface
・・Controller Driver for One Axis, Multi AxesController Driver for One Axis, Multi Axes

28. TAYHWA TECH CO.,LTD
Controller
Stage
Sensor Cable（2m）
Piezo Cable（2m）
Piezo Output
Sensor Input
Applied
Voltage to
Piezo Actuator
Sensor Signal
Output
S Stage
Stage + Controller (Closed Loop)

29. TAYHWA TECH CO.,LTD
Driver
Stage
（Sensor Cable is not
necessary）
Piezo Cable（2m）
Piezo Output
Applied Voltage
to Piezo Actuator
Stage + Controller (Open Loop)

30. TAYHWA TECH CO.,LTD
Function
Generator
PC + D/A
DC Supply
D/A
0～10V
How to Use Analog Interface

31. TAYHWA TECH CO.,LTD
Serial Cable
(D-Sub9Pin)
PC
Serial（RS232C）
Interface
Paralell
Interface
Options
How to Use Digital Interface

32. TAYHWA TECH CO.,LTD
For Positioning from point to point
For Continuous positioning
Sin Wave Triangular Wave
A point B point C point
D point
E point
Digital control by communicating
commands by PC is suitable.
Analog control by applying from 0 to
10V analog input signal is suitable.
Digital and Analog Interfaces

33. TAYHWA TECH CO.,LTD
MV X100 : To move 100nm in X axis
MR X30 : To move 30nm from present position in X axis
MR Y-70 : To move -70nm from present position in Y axis
PS? X : To read present position in X axis
Example of Commands on Serial Interface

34. TAYHWA TECH CO.,LTD
Thank You for Your
Attention