1. AccuSputter AW 4450-Brand New Perkin-Elmer Sputtering System Page 1 of 73
20 Years Proven True
"Work Horse" Sputter
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Sputtering Equipment AccuSputter AW 4450 Sputtering Deposition Systems-
Brand New
AccuSputter AW 4450 - Brand New
We rebuild brand new AccuSputter AW 4450 Series
Perkin-Elmer 4480 Sputtering Systems with our comparable integrated process
control system with PC, new electronic components to
Perkin-ELmer 4450 achieve the goal of giving our customers a production edge
with right cost.
Perkin-ELmer 4410
AccuSputter AW 4450 Sputtering System Highlights:
Perkin-ELmer 4400
Perkin-ELmer 2400-8SA z NEW Aadvanced Control System including
Perkin-Elmer 2400-8L Touch screen, Computer, proprietary
software package AW 4450 with GUI
z NEW Password control for various levels of
user access.
z NEW Manual, Semi-Automatic and Full-
Automatic one button system operation.
z NEWCustomer programming of recipe for
process parameters.
z NEW Process parameters recorded on
system computer.
z NEW Optional GEM/SECS II functions.
z NEW 24V DC control components instead of
orginal 110V AC control system
z NEW DC gear motors with encoder to run
table rotate/table up&down
z NEW DC gear motors run shutters/pallet
carriage moving
z NEW Vacuum gauge/vacuum control system
z NEW Gas control system
z NEW RF automatically matching network
z NEW DC power/RF generator are mounted in
the frame
z NEW Plumbing system
z NEW Cables/wires harness
z High rate delta DC magnetron sputtering:
Aluminum and aluminum alloys can be
sputter deposited at rates in excess of
1800 ? /min, with loads of thirty 3-inch or
thirteen 4-inch wafers.
z High throughput operation: Automated load
lock and controller sequences provide for
efficient pump-down and pallet transfer to
process chamber, maximizing throughput.
z High uniformity: +/-7% deposition uniformity
http://www.perkin-elmer-sputter.com/accusputter-aw-4450-sputter-system.htm 12/14/2012