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Article URL : http://stacks.iop.org/0957-0233/8/i=5/a=009
Title : A laser measurement system for automatic calibration of a height-
setting micrometer
Authors : C Quan and G Xu
Year : 1997
Start Page : 520
Journal : Measurement Science and Technology
Volume : 8
Issue Num : 5
ISSN : 0957-0233
Abstract : We have constructed a laser measurement system for automatic
calibration of a height-setting
micrometer (HSM). The automation is accomplished by an interactive software tool
which performs
essential calibration functions. The instrument incorporates a double-frequency-
stabilized laser
whose operation is based on the heterodyne measurement technique. Positioning of
the HSM is
undertaken by using an X - Y stage driven by servo motors and calibration is
performed by combining
laser and electronic probe readings. Abbe offset error is eliminated by using a
double-path
interferometer scheme. The instrument has measurement range 0 - 350 mm,
resolution 40 nm and
expanded uncertainty of height measurement better than ##IMG##
[http://ej.iop.org/images/0957-0233/8/5/009/img1.gif] at the 95% confidence
level over the full
range. The whole calibration procedure can be completed in 2 h, making it much
more efficient than
the conventional method of gauge-block comparison. The instrument can also be
applied to various
linear measurements with high accuracy to reduce the measuring time.
------------------------------------------------------------------

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Io txt

  • 1. ------------------------------------------------------------------ Article URL : http://stacks.iop.org/0957-0233/8/i=5/a=009 Title : A laser measurement system for automatic calibration of a height- setting micrometer Authors : C Quan and G Xu Year : 1997 Start Page : 520 Journal : Measurement Science and Technology Volume : 8 Issue Num : 5 ISSN : 0957-0233 Abstract : We have constructed a laser measurement system for automatic calibration of a height-setting micrometer (HSM). The automation is accomplished by an interactive software tool which performs essential calibration functions. The instrument incorporates a double-frequency- stabilized laser whose operation is based on the heterodyne measurement technique. Positioning of the HSM is undertaken by using an X - Y stage driven by servo motors and calibration is performed by combining laser and electronic probe readings. Abbe offset error is eliminated by using a double-path interferometer scheme. The instrument has measurement range 0 - 350 mm, resolution 40 nm and expanded uncertainty of height measurement better than ##IMG## [http://ej.iop.org/images/0957-0233/8/5/009/img1.gif] at the 95% confidence level over the full range. The whole calibration procedure can be completed in 2 h, making it much more efficient than the conventional method of gauge-block comparison. The instrument can also be applied to various linear measurements with high accuracy to reduce the measuring time. ------------------------------------------------------------------