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Differential Ring Resonator Project
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- 2. Resonators for Timingand Frequency Control • Quartz-crystal filters • Ceramic filters • SAW( surface acoustic wave) filters • Micromechanical filters
- 3. Silicon MEMS Resonators •Economic reasons • Substantial size and power reduction • Long term stability: crystalline material with a uniform, regular atomic structure • On-chip building blocks • Conceived capable of implementing virtually any signal processing function presently realizable via transistor circuits
- 4. A micromachined, single-crystal silicon,tunable resonator • A fully integrated, single-crystal silicon (SCS) micromachined tunable resonator • Natural resonant frequency of nominally 1 MHz • A room temperature quality factor approaching 10,000 in vacuum • Fully compatible with VLSI technology.
- 5. A micromachined, single-crystal silicon,tunable resonator
- 6. A 12MHz MicromechanicalBulk Acoustic Mode Oscillator • Longitudinal mode • Resonance frequency 12MHz • Q=180000 • d=1µm
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- 9. Square-Extensional Mode SCS MicromechanicalResonator • Resonance frequency around 13.1MHz • High quality factor: Q=130000 • High power handling capability: current output imax≈ 160µA • Vibration mode: a square plate zooming in and out thus preserving the original shape • T-type corner anchoring to minimize energy leak to the substrate
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- 11. MIDIS Process • MIDIS:MEMS Integrated Design for Inertial Sensors by Teledyne DALSA Semiconductor Inc. (TDSI) • 3 single crystal silicon wafers • TSVs: In-Situ Doped Polysilicon (ISDP) and silicon dioxide
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Editor's Notes
- #3 A crystal filter is very often found in the intermediate frequency (IF) stages of high-quality radio receivers. Cheaper sets may use ceramic filters built from ceramic resonators (which also exploit the piezoelectric effect), or tuned LC circuits. The use of a fixed IF stage frequency allows a crystal filter to be used because it has a very precise fixed frequency. Very high quality IF filters, called crystal ladder filters, can be constructed by using serial arrays of crystals.[1] In particular, quartz crystals can exhibit mechanical resonances with a very high Q factor (from 10,000 to 100,000 and greater — far higher than conventional resonators built from inductors and capacitors). The crystal's stability and its high Q factor allow crystal filters to have precise center frequencies and steep band-pass characteristics
- #4 This means in a high-purity sample there will be very few dislocations or cracks that would cause the material to change under loads and stressed that are below the plastic deformation. Crystalline silicon is strong but brittle,; it fractures rather than deforming plastically and the stress – strain curve is quite linear up to the fracture point. Low capacitance merging; not off-chip components that must interface with transistor functions at the board level, taking up a sizable amount of board space and comprising a sizable fraction of the parts and assembly cost
- #11 In which the square edges bend in antiphase preserving the plate volume.