This presentation discusses the design of a Y-axis SOI-MEMS gyroscope with a zigzag-shaped Z-electrode supported by three-dimensionally-intersected Z-beams. The gyroscope aims to improve sensitivity, full-scale range, and linearity. Key aspects of the design include the zigzag Z-electrode configuration and supporting Z-beams, which are intended to enhance performance parameters like selectivity, resolution, accuracy and dynamic range. Experimental results are presented but not detailed. The presentation is given by Chun-You Liu at National Tsing Hua University and covers introduction, principles, purpose, design concept, experiment results and conclusions.

1. NATIONAL TSING HUA UNIVERSITY
A Y-AXIS SOI-MEMS GYROSCOPE WITH A
ZIGZAG-SHAPED Z-ELECTRODE
SUPPORTED BY THREE-DIMENSIONALLY-
INTERSECTED Z-BEAMS
Presenter : Chun-You Liu (劉峻佑)
Instructor : Cheng-Hsien Liu (劉承賢)
Midterm Project Presentation
Presentation I
April 14, 2014
National Tsing Hua University
HsinChu, Taiwan

2. NATIONAL TSING HUA UNIVERSITY
Outline
 Introduction
 Principle
 Purpose
 Design concept
 Experiment result
 Conclusion

3. NATIONAL TSING HUA UNIVERSITY
Outline
 Introduction
 Principle
 Purpose
 Design concept
 Experiment result
 Conclusion

4. NATIONAL TSING HUA UNIVERSITY
Introduction
• Automobile application

5. NATIONAL TSING HUA UNIVERSITY
Introduction
• Smart phone application

6. NATIONAL TSING HUA UNIVERSITY
Outline
 Introduction
 Principle
 Purpose
 Design concept
 Experiment result
 Conclusion

7. NATIONAL TSING HUA UNIVERSITY
Principle
• Important parameters in sensors
 Selectivity
 Resolution
 Accuracy
 Dynamic range

8. NATIONAL TSING HUA UNIVERSITY
Outline
 Introduction
 Principle
 Purpose
 Design concept
 Experiment result
 Conclusion

9. NATIONAL TSING HUA UNIVERSITY
Purpose
• Gyroscope
 Sensitivity
 Full-scale range
 Linearity

10. NATIONAL TSING HUA UNIVERSITY
Outline
 Introduction
 Principle
 Purpose
 Design concept
 Experiment result
 Conclusion

11. NATIONAL TSING HUA UNIVERSITY
Design concept
• Important parameters in sensors

12. NATIONAL TSING HUA UNIVERSITY
Outline
 Introduction
 Principle
 Purpose
 Design concept
 Experiment result
 Conclusion

13. NATIONAL TSING HUA UNIVERSITY
Outline
 Introduction
 Principle
 Purpose
 Design concept
 Experiment result
 Conclusion