Manipal Institute of Technology

process control process instrumentation process dynamics mems micro systems servo motors synchros cmos mems processes construction basics classification scaling laws of mems porcess instrumentation measurement systems modbus devices daq system labview simulink matlab data acquisition differentials transmitters operations theory feedback devices tacho generator servo mechanism servomotor model servo drivers load calculation specifications characteristics laws working principle of motors fem finite element analysis finite element method resistance issues on mems devices due to scaling spring constant stiffness cantilever fabrication example micro electronics fabrication cmos inverter cmos fabrication cmos logic gates logic gates wafer micro electronics why silicon mems materials mems characteristics mems history mems basics mems introduction uv lithography doping epitaxial growth crystal structures cvds czochralski technique pattern transfer metalization etching