Wafer pre aligners are a very vital component in the manufacturing of wafers. The positioning precision highly affects the exposure accuracy of the wafer and efficiency of the work in the whole manufacturing system. Just read out the PPT you will come to know reasons and features that why wafer pre aligners is an important part of the wafer transmitting system.

1. Wafer Pre Aligner- A Crucial Part of
the Wafer Transmitting System

2. Introduction
Wafer pre aligners are a very vital component in the manufacturing of
wafers. It positions the wafers precisely before they are actually transferred
onto the exposure platform. The positioning precision highly affects the
exposure accuracy of the wafer and efficiency of the work in the whole
manufacturing system.

3. Position The Wafers With Wafer-Pre Aligner
These cs are used to accurately place the silicon wafers before photo-etching. As
the precision requirement of machining is more than that of transportation of
wafer, there is the need to position the wafers with wafer-pre aligner to balance
the position error produced during the transportation. Due to the improvement of
the manufacturing system of the wafer, it demands greater accuracy and speedy
alignment of the wafer-pre aligner system.

4. Features
Kensington automation offers high-speed type, non-contact type, a built-in
controller, compact design, and provides one-chuck system wafer pre-aligners that
are ready to meet the various client demands for the exterior colors and materials.
• Rotational Accuracy < 2 arc sec
• Centration Accuracy < 0.002” (0.051 mm)
• Supports Transparent Substrates
 Glass and Quartz
 Plastic
 SiC
• Throughput of up to 450 WPH
• Accurately measures location and orientation in a single
rotation for high throughput
• All combinations of SEMI standard wafers are supported
• Station Self Teach Functionality

5. Classification
The pre-aligners are classified into two different types namely mechanical and
optical.
In the mechanical type, it utilizes the mechanical structure to place the center
of wafers, and its precision is too low to meet the high accuracy demands of
today.
On the other hand, the optical type is highly used in the pre-alignment of the
wafers as it offers great position accuracy and satisfies the high precision
requirements. As the optical type uses optical sensors as well as mechanical
structure to meet the high accuracy position of a wafer that’s why it provides
greater precision.

6. Kensington Laboratories is one of the finest laboratories based in Dublin, CA,
selling the best products since 1976.It is a leading supplier of wafer handling
robots, precision motion control, linear stages, rotary stages and integrated stages
designed to meet the most demanding requirements.
Conclusion

7. Contact Us
Kensington Laboratories, LLC
6200 Village Parkway
Dublin , CA 94568
www.kensingtonlabs.com
510.324.0126
510.324.0130