1. P1270-P1271 TWCCB Forum Team Charter 2015-2016
Chartering group Sponsor Team Chair Co-chair Kick-off date Sunset date
VF TWE GLs;
xCCB
Tuval, Yarin Tigler, Tevora Start of
Technology
P1270-1271 End
of Technology
Mission
To provide our customers timely disposition of Test Wafers
changes while ensuring Intel’s interests are met.
Professionally review, consult, implement and track all changes
that affect Test Wafers within the 1270-1271 Environment.
Guiding principles
The TWCCB Team ensures:
All changes are CE with in the VF.
Routes are in compliance with other supporting systems
(SPECTRA, TWDE).
The TWCCB Team provides technical guidance to guarantee the
following:
Route flows are robust and efficient.
Intel’s quality standards are met.
The most cost-effective approach to Intel is employed.
SO#1:
Optimize the meeting efficiency
To optimize the meetings efficiency the following is validated:
Change was approved by Module’s SLF.
Change was approved by AM.
Stakeholders are listed in the WP and on the xCCB
environment.
Appropriate stakeholders are involved, bought-in to the
changes, and are listed in the approval flow (E.g. FMO for Si.
restriction; Regen FT for Regen changes; Fab modules
impacted by the change).New routes creation.
WPs are written on the latest Rev.
Route flow diagram is attached to the WP:
o It includes feedbleed routes.
o It includes current change vs. future state.
o Route changes in the description section match the
route flow diagram.
Approved LotPlan is attached to the WP.
The change is in compliance with TWDE requirements.
Checklist in the WP has been completed.
SPECTRA is updated (increasing TW volume requires 1270-
1271 program cost manager’s approval).
Implementation plan in place (non-gating):
o Disposition of LOTs on existing routes.
o MCCB distribution.
o RCT updates for supporting modules (Regen,
PreProcess).
If one of the core team represents WP and AR is given, WP is
not approved until AR is verified completed by the core team.
2. SO#2
All routesLotPlans are CE across the VF.
Tactics
1. TWCCB chair documents approved WPs in the TWCCB
tracker.
2. WP deployment is within one week from WP approval
(horizon number assigned). The cause for any WP that cannot
be implemented within a week must be documented in the
comment section of the TWCCB tracker.
3. Originating site is the first to deploy the change; rest of the
sites follow within one week.
4. TWCCB Forum chairperson tracks and report-out WP
deployment status by site on a weekly basis.
a. Target: WP deployment status of 90% at all times.
All Site Specific (non-CE) changes must have approve WP,
and be documented in the TWCCB tracker.
All Pilot WPs must be time-bounded and documented in
separate sheet in the TWCCB Tracker.
SO#3
Zero Quality issues with routes post
deployment.
Tactics:
1. Only WPs submitted to the xCCB environment are reviewed
by the team.
2. TWCCB Forum representatives review and approve all
changes pertaining Test Wafers.
3. WPs approved by the TWCCB Forum are documented in the
TWCCB tracker.
4. Only approved WPs with Horizon number are implemented.
a. Therefore... the link in the tracker forwards to the WP
environment in the xCCB WEB site (rather than
directly to the Word document itself).
5. Route changes in the description section in the WP must
match the route flow diagram.
6. Changes in routes in MES must match the changes in WP.
7. All new routes or routes that change pre-processprocess
operations must have LotPlan, with the following exceptions:
a. It is not necessary to build LotPlan for routes that are
comprised of 1 operation only, as long as it is NOT a
Pre-Process operation (i.e.
TWRTWITWDTWPALT RTESTG only).
b. In the case of more than one route with similar
operations, it is enough to construct LotPlan for one
route only, to validate PFC Pass, assuming that the
rest of the routes with similar operations will have
passed the PFC as well.
IMPORTANT: TWE validates that the description of
the route matches its purpose.
c. It is not necessary to build LotPlan for routes with
Metrology operations (PrePost) that don’t have any
PreProcess operations.
d. RG routes should not have LotPlan.
8. In order to prevent potential quality issues, the TWCCB forum
is responsible for validating the following:
3. a. Starting routes must have the proper Silicon
documented in the WP.
b. Appropriate Silicon Restrictions are associated to
each route (where relevant). Those restrictions must
be approved by FMO.
c. Silicon restrictions must be documented in SPECTRA
(as a comment).
d. The start of route is correctly configured:
i. Appropriate Start Routes Y/Z are associated
with each route.
ii. Appropriate Bank is associated with each
route.
The bank start route is added to the
appropriate alternate route table.
iii. Appropriate Start operation is associated with
the start route (NCuCuC4, VT
StartSupplied Start).
e. SPECTRA update:
i. New Main Routes are entered into
SPECTRA.
ii. Any consumption change in existing route,
change in RegenMax value, Pre-Process
additionreduction, and use count changes
(wafer-based) must be updated in SPECTRA.
iii. The TWCCB representative of the WP’s
originating site is responsible for making sure
SPECTRA is updated.
iv. IMPORTANT: Any change in consumption
must be approved by Cost manager.
Responsibility: The originator of the WP.
f. The flow of route is correctly configured and matches
WP.
i. Routes meet TWDE requirements (Test wafer
route structure standards rev3).
ii. Accurate appended routes are associated with
the routes.
iii. Accurate alternate routes are associated with
the routes.
iv. RG routes are properly configured.
1. Go to OperationRoute.
2. Return to OperationRoute.
3. RegenMax1/2 are accurately set.
v. The End of Life of a route is correctly
configured: BankReclaimScrap.
9. TWCCB Forum representatives validate that routes that need
to be terminated, are terminated in the MES system in their
sites, and documented in the TWCCB tracker.
10. LotPlans are shipped to the VF by originating site, and
4. documented in the TWCCB tracker.
11. Any TWCCB approval of WP requiring Automation change
must be documented in the implementation plan in Section 5
in the WP.
12. Site TW Engineers co-work with their customers to deploy the
changes, and validate clear communication to the customers
throughout the entire deployment process.
CSI
1. All routesLotPlans are CE across the VF.
2. Zero quality/structural issues with routes post deployment.
3. No misalignment between SPECTRA and MES.
4. WP deployment status of 90% at all times.
Partners (VF)
Core Team
D1C: Annamalai, Anita; Heuer, Don.
F32: Tigler, Tevora.
F28: Tuval, Yarin.
Stakeholders
P1270 TW Eng., Regen FT, FECMBECM (Integration),
Automation, D1D Cost Program (Leanne Jones).
Customers
P1270 Process EngineersTool Owners, WP originators, FMO,
AFO.
Scope
Boundaries
The forum reviews P1270 White Papers pertaining to Test Wafers
or systems that impact the Test Wafers process.
In Scope
1. Ensure appropriate stakeholders are involved and bought-in to
the changes. (E.g. FMO for Si. restriction; Regen for Regen
changes; Fab modules impacted by the change).New routes
creation.
2. New LotPlan creation.
3. Shipping of LOT Plans to the VF.
4. Route changes:
a. Description.
b. Regen flow; RG loop; RegenMax12 changes.
c. Operations.
d. Silicon.
e. Bank starts.
f. Route EOL.
5. Termination of routes.
6. BankCost impact on Fab level.
7. Spectra changes.
a. Adding new routes.
b. Changes of existing routes.
c. Template Changes.
d. Consumption changes.
e. Regen loop counters
f. TW Use count.
g. Reticle changes.
h. Si. Type changes.
i. Route EOL.
8. MCCB changes (review only, and per PEAutomation
request).
9. Make sure that wafers EOL where they should and allowed.
a. Send to bank what we can.
b. Reclaim what can’t be sent to bank
5. c. Scrap what we must (E.g. Pattern wafer will be
scrapped - IP).
Out of Scope
1. Process flow aspects (owned by Integration).
a. The team doesn’t determine which reticles are used.
2. Automation changes (owned by Automation. E.g.: Auto-proc).
3. Regen process flow issues (owned by Regen FT).
4. Non-Test Wafers routes.
5. The TWCCB forum is not required to provide solutions to
issues in WP. It’ll be done off-line with the site TWE.
Meeting
Schedule Wednesdays, 09:00AM PST
Frequency Weekly, except for Intel holidays.
Participants
TWCCB core team.
The originator of the WP (or representative (TWE can be a
representative)).
FMORegenAFO or any other representative (per need).
Mode of Operation
Only WPs submitted to the xCCB environment are reviewed
by the team.
Agenda is comprised of pending WP in the xCCB
environment.
Exception: per request the forum may review WPs listed on
the next meeting.
Originatorsrepresentatives are expected to attend the TWCCB
meeting and present their WP.
The team may still review WPs even if not represented, but
their priority is lower than the WPs which have representation.
First to attend is first to present.
Exception: Priority to presenters from Fab28 (who attend
during NPT, and need to swiftly be release back to their
families).
Solution to issues and concerns raised by the forum will
become ARs. The solution to the concerns may be provided
during the meeting.
Decision
Making
Forum 3/3 TWCCB representatives from each of the three P1270 site.
Quorum
2/3 TWCCB representatives from each of the three P1270 site.
One of the representatives must be xCCB admin.
D1C TWCCB representative must be present for any P1271
changes.
Contingency
Emergency changes will be reviewed by at least two TWCCB
representatives off-line.
R&Rs TWCCB Chairperson
Chair the meeting.
Appoint backup chairperson when can’t attend a meeting.
Distribute meeting minutes.
Update approved WPs in the xCCB environment.
Enter ARs into the xCCB environment.
Update approved WPs in the TWCCB Tracker.
Track and report-out WP deployment status by site.
Update the TWCCB tracker when WP has received Horizon
number.
6. Setup TWCCB meetings in the calendar.
TWCCB Chairperson
backup
Be available to chair the meeting when the chairperson is
absent.
Assume the responsibility of the chairperson when absent.
TWCCB core team
Attend the TWCCB meetings.
Ensure that we review and disposition WPs per Mode of
Operation.
Look at opportunities to improve the TWCCB process.
Site TWE
Prior to WP submission:
o Professionally consult PE on TW-related
issuessolutions.
o Assist in building the WP and the route flow diagram
(per need).
o Validate latest revision was used for the WP.
o Validate the route flow diagram is embedded in the
WP.
Prior to approval:
o Support Originator’s AR closure by providing
clarifications and guidance.
Prior to deployment (once WP is approved):
o Validate Horizon number has been assigned to the
WP.
o Verify that the originating site has deployed the WP.
Deploy the WP.
Sign the WP in the TWCCB Tracker after deployment.
Customers
Prior to WP submission:
o Submit WP on the latest TW WP template Rev.
o Validate Route Flow Diagram exists in the WP.
o Validate SLF approval for the WP.
o Validate AM approval for the change.
o Meet with Site TW Eng. to validate change requested
is “airtight” as needed.
Attend the meeting or appoint representative.
Post approval:
o Close all ARs prior to implementation, unless
otherwise stated.
o Work with site TWE for clarification on any ARs and
implementation clarifications.
How decisions are communicated?
ApproveDeferredReject decisions and ARs are:
o Documented in the xCCB environment.
o Documented in the meeting minutes.