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Shyamsananth Madhavan
G. K. Ananthasuresh
Design of Force-amplifying Compliant Mechanisms
for Resonant Accelerometers
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 1
OUTLINE
COMPLIANT
MECHANISMS
(Force Amplification)
RESONANT
ACCELEROMETERS
Application
Prior works and Synthesis
Methods of FaCMs
Re-design of FaCMs with
Selection Maps
Structure of Resonant Sensor
Requirement of an FaCM
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139
Enhancement of Sensitivity of Resonant Accelerometer - Using an FaCM.
Improvement in amplification of FaCM with retaining the Topology.
2
Resonant Accelerometer and Principles
 Measure inertial loads, acting within the
specified operating range.
 Resonator beams actuated electro-statically at
resonance .
 An external acceleration on proof- mass shifts
the natural frequency of the resonator beam.
 Stress – stiffening effect or Axial –
stiffening effect in Resonator Beam.
 Frequency shift measured through feed back
circuit by detecting capacitance change.
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139
F
NEED FOR MECHANICAL AMPLIFICATION - MOTIVATION
Electronic Noise dominates compared to Mechanical Noise
Mechanical Signal is more sensitive for small changes of acceleration to be detected
3
4 2 2
4 2 2
( , ) ( , ) ( , )
0x
w x t w x t w x t
EI F A
x x t

  
  
  
Resonating Mode of the
sensor
Detect Capacitance
Change
Preliminary works on Force Amplification
 Initial Mechanical Amplifiers: DaCMs
 Initial Design – Lever of Second Type
Roessig(1995) and Su(2001).
 Multi-stage Lever –Su (2002).
 Pederson and Seshia (2004).
Adapted from Claus. B. W. Pederson & Ashwin. A. Seshia (2004)
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139
Adapted from Su and Yang (2001 and 2002 )
4
Synthesis Method of FaCM
 Method to synthesize FaCMs
 Topology Optimization
 Solid Modeling in CAD
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 5
 The axial force on the Resonant Beam to be Amplified for
Applied External Acceleration
 Our Objective : Maximize
 Gradient Based Optimization Algorithm is utilized.
out
in
F
F
Objective Formulation for FaCMs
Objective Function Sensitivity Analysis
 
min
Max Max
Max Max (1)
:
: 0 (2)
0 1
out
in
out out out
out
in in
T
specified
out out
in in
F
A
F
K U K
U
F F
subject to
V V
KU F
KU F

 
 
  
 
 
   
 

   
  


 

7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139
0
1
0
1
0
( )
( )
( )
penal
penal
penal Tout
out in
penal
penal












 

K k
k
k
U
U k U
Gradient Based Optimization Algorithm: Svanberg’s MMA or
Optimality Criteria.
6
In all Compliant Mechanisms, there are inherent stiffness present in Input and Output
ends of the continuum.
Models of FaCMs:
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139
DETF
Single
Beam
Lever1: Based on Su (2001)
Specifications:
Proof mass:1080 µm × 1030 µm
Suspension Beams: 100 µm × 12 µm
Thickness : 25 µm
7
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139
FaCM1
FaCM2
Minimum beam width: 2.5 µm
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139
FaCM3
FaCM4
Parameters FaCM1 FaCM2 FaCM3 FaCM4 Lever
nF 1.45 0.83 26 1.74 4.3
∆f (Hz) 4 1 37 4.2 6.2
MICRO FABRICATION : Prototype
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 10
Re-Design of CMs: Selection Map Technique
 Selection Map Technique
 GUI tool for design of SISO compliant
mechanisms.
 Considered as a black-box for users to
redesign mechanisms based on the
specifications.
 Involves resizing and reshaping the
geometry of mechanism, same
topology is retained.
 Alternative for shape and size
optimization procedure.
 Background of Map technique
involves determination (Spring-Lever)
SL constants.
 Predominantly used in DaCMs,
Inverters, Grippers, etc.
 Spring –Lever Model
 The kinetoelastic model of CMs.
 Relate the Force/Displacement at input
to Displacement/Force at output using
Intrinsic Stiffness parameter.
 Accounts the amplifying and force-
transmission features.
 Represent the static behavior of an
elastic structure by a single spring
SL model : Developed by Girish Krishnan and G.K.Ananthasuresh
Selection Map : Developed by Sudarshan Hegde and G.K.Ananthasuresh
ii io i i
T
io oo o o
K K Δx F
=
K K Δx F
     
     
     
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 11
Identification of Design Space in Resonant
Accelerometer
•Compliant Mechanism For
Redesign: FaCM3
•Input Port: Proof-mass and
FaCM interface
•Output Port: FaCM and
Resonator Interface
•Input Stiffness: Proof-mass
suspension stiffness
•External Stiffness:
Resonator Beam Stiffness
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 12
Add-in for Existing Selection Map Technique
 User-specifications in terms of force
and displacement
 In resonant sensor, user -specifications
 Sensitivity of sensor
 Base-frequency of sensor
 Proof-mass area
 External and input stiffness.
 Add-in: Transformation of frequency
inputs to force input.
 Specification variable: C
 Cm = C/Amass
 Specification Transformation
Procedure
0
f
f
C
g
 
 
 
       2
2 sin sinh 2 cosh cos 0ab T b a ab a b  
Remaining Specifications: Static
Analysis of the Structure
fl = f0 (Cg+1)
Use Exact Solution method for axially
loaded beam to determine the axial load
for given frequency.
Axial Force = Fout
External Stiffness = Axial Stiffness of
Resonator
•Resonator Beam: 180 μm × 4 μm × 25 μm,
• f0 - 1 MHz, - 40 Hz to 60 Hz
•Corresponding Fout
- 2 μN to 3 μN
f
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 13
Design Case - 1
Specification variables Min Max
Fin (N) 4e-7 6e-7
xin (m) 8e-10 10e-9
Fout (N) 2e-6 3e-6
xout (m) 1e-11 1.2e-11
Kin (N/m) 50 50
Kext(N/m) 0 0
Width Increased from 2.5 to 3.4 µm
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 14
Design Case - 2
Specification variables Min Max
Fin (N) 4e-7 6e-7
xin (m) 8e-10 10e-9
Fout (N) 2e-6 3e-6
xout (m) 1e-11 1.2e-11
Kin (N/m) 500 500
Kext(N/m) 0 0
Stretched 1.254 times in x-direction
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 15
Design Case - 3
Specification variables Min Max
Fin (N) 4e-7 6e-7
xin (m) 9e-9 10e-9
Fout (N) 2e-6 3e-6
xout (m) 1e-11 1.2e-11
Kin (N/m) 50 50
Kext(N/m) 86000 86000
Impractical
Specifications for
feasible mechanism.
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 16
Comparison of New Mechanisms
FaCM
Frequency
Shift (Hz)
Amplification
Factor
Original 37 26
Case1 48 28.17
Case2 44 27.32
FaCMs – CAD model and simulated.
Comparison of FaCMs based on sensitivity of the sensor using Pre-stressed
Eigen analysis.
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 17
Conclusion
 Need of an FaCM in resonant sensing, defined design
method and redesign method are presented.
 The synthesis of the mechanisms using topology optimization
and
 Performance of FaCMs is above the existing levers with factor
of Six.
 The redesign of the FaCM using the selection-map tool for a
given set of user specifications provides further enhancement.
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 18
References:
 G. Krishnan and G. K. Ananthasuresh, “A systematic method for the objective
evaluation and selection of compliant displacement amplifying mechanisms for
sensor applications,” Journal of Mechanical Design, Vol. 130, no. 10, pp.
102304:1-9, 2008.
 C. Pedersen, and A. A. Seshia, “On the optimization of compliant force amplifier
mechanisms for surface micromachined resonant accelerometers,” IOP Journal
of Micromechanics and Microengineering, Vol. 14, No. 10, pp. 1281-1293, 2004.
 X. P. S. Su and H. S Yang, “Single Stage micro- leverage mechanism
optimization in resonant accelerometer,” Structural Multidisciplinary Optimization,
Vol.21, pp.246-252, 2000.
 S. Madhavan and G. K. Ananthasuresh, “Force-amplifying compliant
mechanisms for micromachined resonant accelerometers,” The Proceedings of
IFToMM Asian Conference on Mechanism and Machine Science, pp. 250027: 1-
7, 2010.
 Hegde, S., and Ananthasuresh, G. K., “Design of Single-Input-Single-Output
Compliant Mechanisms for Practical Applications using Selection Maps,” Journal
of Mechanical Design, Vol. 132, August, 2010, pp. 081007:1-8, 2010.
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 19
THANK YOU
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 1
QUESTIONS???
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 21
Selection Map Procedure
User-specifications
Determine the SL constants
Generate the 2D Map
Represent the Existing Mechanism in
the map
Check the feasibility
of mechanism
Redesign of Mechanism
No
Required Mechanism
Yes
User Specifications
•Input Force:
•Input Displacement:
•Output Force:
•Output Displacement:
•Actuator Stiffness at Input:
•External Stiffness at Output:
inL in inHF F F 
inL in inHx x x 
outL out outHF F F 
outL out outHx x x 
aL a aHk k k 
extL ext extHk k k 
Determine SL Constants: kci kco n
in out a in ext out
ci
in
F nF k x nk x
k
x
  

out ext out
co
out in
F k x
k
x nx



Kci
Kco
n1
n2
7/2/2015
NaCoMM Presentation
Compliant Mechanisms_139 22

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NaCoMM Final

  • 1. Shyamsananth Madhavan G. K. Ananthasuresh Design of Force-amplifying Compliant Mechanisms for Resonant Accelerometers 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 1
  • 2. OUTLINE COMPLIANT MECHANISMS (Force Amplification) RESONANT ACCELEROMETERS Application Prior works and Synthesis Methods of FaCMs Re-design of FaCMs with Selection Maps Structure of Resonant Sensor Requirement of an FaCM 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 Enhancement of Sensitivity of Resonant Accelerometer - Using an FaCM. Improvement in amplification of FaCM with retaining the Topology. 2
  • 3. Resonant Accelerometer and Principles  Measure inertial loads, acting within the specified operating range.  Resonator beams actuated electro-statically at resonance .  An external acceleration on proof- mass shifts the natural frequency of the resonator beam.  Stress – stiffening effect or Axial – stiffening effect in Resonator Beam.  Frequency shift measured through feed back circuit by detecting capacitance change. 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 F NEED FOR MECHANICAL AMPLIFICATION - MOTIVATION Electronic Noise dominates compared to Mechanical Noise Mechanical Signal is more sensitive for small changes of acceleration to be detected 3 4 2 2 4 2 2 ( , ) ( , ) ( , ) 0x w x t w x t w x t EI F A x x t           Resonating Mode of the sensor Detect Capacitance Change
  • 4. Preliminary works on Force Amplification  Initial Mechanical Amplifiers: DaCMs  Initial Design – Lever of Second Type Roessig(1995) and Su(2001).  Multi-stage Lever –Su (2002).  Pederson and Seshia (2004). Adapted from Claus. B. W. Pederson & Ashwin. A. Seshia (2004) 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 Adapted from Su and Yang (2001 and 2002 ) 4
  • 5. Synthesis Method of FaCM  Method to synthesize FaCMs  Topology Optimization  Solid Modeling in CAD 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 5  The axial force on the Resonant Beam to be Amplified for Applied External Acceleration  Our Objective : Maximize  Gradient Based Optimization Algorithm is utilized. out in F F
  • 6. Objective Formulation for FaCMs Objective Function Sensitivity Analysis   min Max Max Max Max (1) : : 0 (2) 0 1 out in out out out out in in T specified out out in in F A F K U K U F F subject to V V KU F KU F                                7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 0 1 0 1 0 ( ) ( ) ( ) penal penal penal Tout out in penal penal                K k k k U U k U Gradient Based Optimization Algorithm: Svanberg’s MMA or Optimality Criteria. 6 In all Compliant Mechanisms, there are inherent stiffness present in Input and Output ends of the continuum.
  • 7. Models of FaCMs: 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 DETF Single Beam Lever1: Based on Su (2001) Specifications: Proof mass:1080 µm × 1030 µm Suspension Beams: 100 µm × 12 µm Thickness : 25 µm 7
  • 9. 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 FaCM3 FaCM4 Parameters FaCM1 FaCM2 FaCM3 FaCM4 Lever nF 1.45 0.83 26 1.74 4.3 ∆f (Hz) 4 1 37 4.2 6.2
  • 10. MICRO FABRICATION : Prototype 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 10
  • 11. Re-Design of CMs: Selection Map Technique  Selection Map Technique  GUI tool for design of SISO compliant mechanisms.  Considered as a black-box for users to redesign mechanisms based on the specifications.  Involves resizing and reshaping the geometry of mechanism, same topology is retained.  Alternative for shape and size optimization procedure.  Background of Map technique involves determination (Spring-Lever) SL constants.  Predominantly used in DaCMs, Inverters, Grippers, etc.  Spring –Lever Model  The kinetoelastic model of CMs.  Relate the Force/Displacement at input to Displacement/Force at output using Intrinsic Stiffness parameter.  Accounts the amplifying and force- transmission features.  Represent the static behavior of an elastic structure by a single spring SL model : Developed by Girish Krishnan and G.K.Ananthasuresh Selection Map : Developed by Sudarshan Hegde and G.K.Ananthasuresh ii io i i T io oo o o K K Δx F = K K Δx F                   7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 11
  • 12. Identification of Design Space in Resonant Accelerometer •Compliant Mechanism For Redesign: FaCM3 •Input Port: Proof-mass and FaCM interface •Output Port: FaCM and Resonator Interface •Input Stiffness: Proof-mass suspension stiffness •External Stiffness: Resonator Beam Stiffness 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 12
  • 13. Add-in for Existing Selection Map Technique  User-specifications in terms of force and displacement  In resonant sensor, user -specifications  Sensitivity of sensor  Base-frequency of sensor  Proof-mass area  External and input stiffness.  Add-in: Transformation of frequency inputs to force input.  Specification variable: C  Cm = C/Amass  Specification Transformation Procedure 0 f f C g              2 2 sin sinh 2 cosh cos 0ab T b a ab a b   Remaining Specifications: Static Analysis of the Structure fl = f0 (Cg+1) Use Exact Solution method for axially loaded beam to determine the axial load for given frequency. Axial Force = Fout External Stiffness = Axial Stiffness of Resonator •Resonator Beam: 180 μm × 4 μm × 25 μm, • f0 - 1 MHz, - 40 Hz to 60 Hz •Corresponding Fout - 2 μN to 3 μN f 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 13
  • 14. Design Case - 1 Specification variables Min Max Fin (N) 4e-7 6e-7 xin (m) 8e-10 10e-9 Fout (N) 2e-6 3e-6 xout (m) 1e-11 1.2e-11 Kin (N/m) 50 50 Kext(N/m) 0 0 Width Increased from 2.5 to 3.4 µm 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 14
  • 15. Design Case - 2 Specification variables Min Max Fin (N) 4e-7 6e-7 xin (m) 8e-10 10e-9 Fout (N) 2e-6 3e-6 xout (m) 1e-11 1.2e-11 Kin (N/m) 500 500 Kext(N/m) 0 0 Stretched 1.254 times in x-direction 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 15
  • 16. Design Case - 3 Specification variables Min Max Fin (N) 4e-7 6e-7 xin (m) 9e-9 10e-9 Fout (N) 2e-6 3e-6 xout (m) 1e-11 1.2e-11 Kin (N/m) 50 50 Kext(N/m) 86000 86000 Impractical Specifications for feasible mechanism. 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 16
  • 17. Comparison of New Mechanisms FaCM Frequency Shift (Hz) Amplification Factor Original 37 26 Case1 48 28.17 Case2 44 27.32 FaCMs – CAD model and simulated. Comparison of FaCMs based on sensitivity of the sensor using Pre-stressed Eigen analysis. 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 17
  • 18. Conclusion  Need of an FaCM in resonant sensing, defined design method and redesign method are presented.  The synthesis of the mechanisms using topology optimization and  Performance of FaCMs is above the existing levers with factor of Six.  The redesign of the FaCM using the selection-map tool for a given set of user specifications provides further enhancement. 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 18
  • 19. References:  G. Krishnan and G. K. Ananthasuresh, “A systematic method for the objective evaluation and selection of compliant displacement amplifying mechanisms for sensor applications,” Journal of Mechanical Design, Vol. 130, no. 10, pp. 102304:1-9, 2008.  C. Pedersen, and A. A. Seshia, “On the optimization of compliant force amplifier mechanisms for surface micromachined resonant accelerometers,” IOP Journal of Micromechanics and Microengineering, Vol. 14, No. 10, pp. 1281-1293, 2004.  X. P. S. Su and H. S Yang, “Single Stage micro- leverage mechanism optimization in resonant accelerometer,” Structural Multidisciplinary Optimization, Vol.21, pp.246-252, 2000.  S. Madhavan and G. K. Ananthasuresh, “Force-amplifying compliant mechanisms for micromachined resonant accelerometers,” The Proceedings of IFToMM Asian Conference on Mechanism and Machine Science, pp. 250027: 1- 7, 2010.  Hegde, S., and Ananthasuresh, G. K., “Design of Single-Input-Single-Output Compliant Mechanisms for Practical Applications using Selection Maps,” Journal of Mechanical Design, Vol. 132, August, 2010, pp. 081007:1-8, 2010. 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 19
  • 22. Selection Map Procedure User-specifications Determine the SL constants Generate the 2D Map Represent the Existing Mechanism in the map Check the feasibility of mechanism Redesign of Mechanism No Required Mechanism Yes User Specifications •Input Force: •Input Displacement: •Output Force: •Output Displacement: •Actuator Stiffness at Input: •External Stiffness at Output: inL in inHF F F  inL in inHx x x  outL out outHF F F  outL out outHx x x  aL a aHk k k  extL ext extHk k k  Determine SL Constants: kci kco n in out a in ext out ci in F nF k x nk x k x     out ext out co out in F k x k x nx    Kci Kco n1 n2 7/2/2015 NaCoMM Presentation Compliant Mechanisms_139 22