Semiconductor/Microelectronics Cleaning

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Semiconductor/Microelectronics Cleaning
Published on November 2010

Report Summary

The global market for microelectronics cleaning equipment, consumables, and services was worth about $2.9 billion in 2009. This
figure is projected to reach $3.4 billion in 2010 and $8 billion by 2015, a compound annual growth rate (CAGR) of 18.5% between
2010 and 2015.

Cleaning chemicals, gases and other consumables such as ultrapure water accounted for 62% of the market in 2009. This sector is
worth an estimated $2.1 billion in 2010 and is expected to increase at a 19.1% compound annual growth rate (CAGR) to reach $5
billion in 2015.

Equipment sales accounted for 29% of the total microelectronics cleaning equipment market in 2009. This sector is valued at an
estimated $1 billion in 2010 and is expected to reach $2.4 billion in 2015, a compound annual growth rate (CAGR) of 19.1%.

STUDY BACKGROUND

Electronics cleaning refers to the processes or steps that are employed to ensure that a semiconductor or other microelectronic
device remains free from contaminants or other foreign materials that could have an adverse impact on its proper functioning and
performance. New requirements are being placed on electronics cleaning technologies and products, because as device geometries
continue to shrink and die sizes grow, microcontaminants such as particles, metallic impurities, and trace organic contaminants will
have an ever-increasing detrimental impact on device yield and reliability.

Various other factors are contributing to the current dynamism of the electronics cleaning market. Process trends such as the
movement to single-wafer processing pose new challenges for cleaning technology. Economic and environmental concerns are also
causing users of electronics cleaning products to look for ways of reducing their chemicals consumption and substituting more
environmentally benign chemicals for the harsh chemistries used in traditional 'wet' process cleaning.

STUDY GOALS AND OBJECTIVES

In such a dynamic environment, technologies and markets for electronics cleaning are continually evolving. This report is an update
of a report published by BCC Research in May 2006.

The goal of this updated study is to provide the reader with an understanding of recent developments in electronics cleaning
applications, technologies, and products that will influence the future size and structure of the market for cleaning equipment and
consumables.

Specific objectives include identifying segments of the electronics cleaning market with the greatest commercial potential in the near
to mid-term (2010 to 2015), identifying and, where possible, quantifying the key demand drivers, projecting future demand for cleaning
equipment and supplies, and evaluating the challenges that must be overcome for each segment to realize its potential.

INTENDED AUDIENCE

The report is intended especially for vendors of electronics cleaning equipment, chemicals, gasses and other consumables. Other

Semiconductor/Microelectronics Cleaning (From Slideshare) Page 1/13


readers who should find it particularly useful include entrepreneurs, investors, venture capitalists and other readers with a need to
know where the electronics cleaning market is headed over the next 5 years.

The report should also be of interest to users of electronics cleaning products such as semiconductor manufacturers. Finally,
members of technical and professional organizations such as the Semiconductor Industry Association should find the report useful.

SCOPE AND FORMAT

The report addresses the global market for electronics cleaning equipment, chemicals and other consumables, and cleaning-related
services during the period from 2009 through 2015. It covers the entire range of products that are used to ensure that the wafer or
other microelectronic device is free of contaminants and other unwanted foreign materials as it goes through the fabrication process,
including:

Cleaning equipment
Solvents and other chemicals
Gases
Miscellaneous other consumables
Engineering, management, and maintenance services related to cleaning equipment and supplies.

The report format includes the following major elements:

Executive summary
Technology trends
Products and manufacturers
Key patents and patent analysis
Major applications in which electronics cleaning products are used (e.g., semiconductor, LCD display fabrication)
Market drivers
Global trends in the market for electronics cleaning products by technology, product type, application, and geographical region, 2009
to 2015
Electronics cleaning product manufacturer market shares.

METHODOLOGY AND INFORMATION SOURCES

The findings and conclusions of this report are based on information gathered from industry sources, including manufacturers and
users of electronics cleaning equipment and chemicals. Interview data were combined with information gathered through an
extensive review of secondary sources such as trade publications, trade associations, company literature, and on-line databases to
produce the market projections contained in this report.

The base-year for analysis and projection is 2009. With 2009 as a baseline, market projections were developed for 2010 through
2015. These projections are based on a combination of a consensus among the primary contacts combined with our understanding of
the key market drivers and their impact from a historical and analytical perspective. The analytical methodologies used to generate
the market estimates are described in detail in the section on detailed market projections.

All dollar projections presented in this report are in 2009 constant dollars, unless otherwise noted.

ANALYST CREDENTIALS

Andrew McWilliams, the author of this report, is a partner in the Boston-based international technology and marketing consulting firm,



43rd Parallel LLC. He is also the author of several BCC Research reports on related subjects, such as CHM045A Global
Technologies for Lithographic Chemicals, SMC048A Semiconductor Microlithography: Materials and Markets, and SMC021C
Ultrapure Materials for the Semiconductor Industry (co-author).

Table of Content

Chapter- 1: INTRODUCTION -- Complimentary

STUDY BACKGROUND 1
STUDY GOALS AND OBJECTIVES 1
INTENDED AUDIENCE 2
SCOPE AND FORMAT 2
METHODOLOGY AND INFORMATION SOURCES 3
ANALYST CREDENTIALS 3
RELATED BCC RESEARCH REPORTS 3
BCC ONLINE SERVICES 4
DISCLAIMER 4

Chapter-2: EXECUTIVE SUMMARY

SUMMARY TABLE GLOBAL SALES OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLIES AND SERVICES SALES,
THROUGH 2015 ($ MILLIONS) 5
SUMMARY FIGURE GLOBAL SALES OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLIES AND SERVICES SALES,
2009-2015 ($ MILLIONS) 6

Chapter-3: CLEANING PROCESS OVERVIEW

GENERAL DESCRIPTION 7
DEFINITIONS 7
Cleaning 7
Stripping 7
Ashing 7
Etching 7
Front End of Line (FEOL) 8
Back End of Line (BEOL) 8
HISTORICAL NOTE 8
IMPORTANCE OF CLEANING TO THE ELECTRONICS INDUSTRY 9
GENERAL IMPORTANCE OF CLEANING 9
Device Processing Yield 9
Device Performance 10
Device Reliability 10
TYPES OF CONTAMINATION 10
Particles 10
Inorganic Chemicals 11
Organic Chemicals 11
Dissolved Organics and Bacteria 11



SOURCES OF CONTAMINATION 11
SPECIFIC APPLICATIONS 12
INTEGRATED CIRCUITS 12
PHOTOMASKS 13
PRINTED CIRCUIT BOARDS 14
Removal of Flux Residues from PCB Assemblies after Soldering 14
Removal of Solder Paste or Adhesive from Stencils or Misprints 15
HARD DISK DRIVES 15
Read/Write Heads 15
Storage Media 16
MEMS 16
FLAT PANEL DISPLAYS 17
IMAGE SENSORS 17
DEVELOPMENTS THAT MAY INFLUENCE MARKET FOR CLEANING TECHNOLOGIES 17
SHRINKING FEATURE SIZES 17
NEW MATERIALS 18
High-K Dielectrics 18
New Salicides 18
Copper 19
PROCESS-RELATED DEVELOPMENTS 19
Trend towards Single-Wafer Processing 19
Multiple-Use Tools 20
ITRS 20
TABLE 1 CLEANING PARAMETERS INFLUENCING DEVICE YIELD 20
ITRS (Continued) 21

Chapter-4: CLEANING TECHNOLOGIES, EQUIPMENT, CHEMICALS AND SERVICES

SUMMARY 22
TECHNOLOGIES, EQUIPMENT, AND CHEMICALS 22
WET PROCESS CLEANING 22
Technologies 22
Wet Cleaning Systems 23
Batch Immersion Cleaning Systems 23
Batch Spray Cleaning Systems 23
Single-Wafer Immersion Systems 24
Single-Wafer Spray Systems 24
Cleaning Chemistries 25
RCA Cleaning Chemistry 25
Piranha 26
Dilute Chemistries 26
Aqueous and Semi-Aqueous Chemistries 27
Single-Wafer Cleaning Chemistries 28
Dilute Sulfuric Peroxide, Plus (DSP+) 28
Applied Materials AM1 28
Dilute HF with Ozonated Water (SCROD) 28
Direct Application of Gaseous Ozone 29
Aqueous Foam 29



Ultrapure Water 29
Reverse Osmosis Systems 30
Deionization 30
Ion-Exchange Systems 30
Electrodialysis/Electrodialysis-Reversal (ED/EDR) Systems 31
Filtration 31
Applications 32
Semiconductor Manufacturing 32
Current Applications 32
Emerging Applications 33
Other Applications 33
Advantages and Disadvantages 34
Overall Advantages and Disadvantages of Wet Cleaning 34
Advantages and Disadvantages of Specific Wet Cleaning Technologies 35
Batch Immersion Systems 35
Batch Spray Systems 36
Single-Wafer Immersion Systems 36
Single-Wafer Spray Systems 37
Products and Manufacturers 37
Wet Cleaning Equipment 37
TABLE 2 WET CLEANING EQUIPMENT MANUFACTURERS 38
FIGURE 1 GLOBAL WET CLEANING EQUIPMENT MARKET SHARES, 2009 (%) 38
Wet Cleaning Chemicals 39
TABLE 3 WET CLEANING CHEMICAL MANUFACTURERS 39
FIGURE 2 GLOBAL WET CLEANING CHEMICAL MARKET SHARES, 2009 (%) 40
Water Purification Systems 40
TABLE 4 WATER PURIFICATION EQUIPMENT MANUFACTURERS 41
FIGURE 3 GLOBAL ULTRAPURE WATER MARKET SHARES, 2009 (%) 42
Patent Analysis 42
FIGURE 4 U.S. PATENTS ISSUED SINCE 1976 RELATING TO WET CLEANING TECHNOLOGIES (%) 43
Wet Cleaning Equipment 43
FIGURE 5 U.S. PATENTS ISSUED SINCE 1976 RELATING TO WET CLEANING EQUIPMENT, BY TYPE OF EQUIPMENT* (%) 44
TABLE 5 WET CLEANING EQUIPMENT IP PORTFOLIOS (NUMBER OF U.S. WET CLEANING EQUIPMENT PATENTS) 45
Wet Cleaning Chemicals 45
FIGURE 6 U.S. PATENTS ISSUED SINCE 1976 RELATING TO WET CLEANING CHEMICALS, BY TYPE OF CHEMICAL* (%) 45
FIGURE 6 (CONTINUED) 46
Ultrapure Water 46
FIGURE 7 U.S. PATENTS ISSUED SINCE 1976 RELATING TO ULTRAPURE WATER, BY TYPE OF PRODUCTION
TECHNOLOGY* (%) 47
DRY PROCESS CLEANING 47
Technologies 47
Dry Cleaning Systems 48
Plasma Cleaning 48
FIGURE 8 TYPICAL (CAPACITIVE) RF PLASMA SYSTEM 48
Cryogenic Aerosol Cleaning 49
Laser Resist Stripping 49
Ultraviolet/Ozone Cleaning 50
Dry Cleaning Gases 50



TABLE 6 DRY CLEANING GASES 50
Applications 51
Products and Manufacturers 52
Equipment 52
TABLE 7 DRY CLEANING EQUIPMENT MANUFACTURERS 52
FIGURE 9 GLOBAL DRY CLEANING EQUIPMENT MARKET SHARES, 2009 (%) 53
Consumables 53
TABLE 8 DRY CLEANING GAS MANUFACTURERS 54
FIGURE 10 GLOBAL DRY CLEANING GAS MARKET SHARES, 2009 (%) 54
Patent Analysis 55
FIGURE 11 U.S. PATENTS ISSUED SINCE 1976 AND PATENT APPLICATIONS PENDING THAT RELATE TO DRY PROCESS
CLEANING (%) 55
EMERGING ELECTRONICS CLEANING TECHNOLOGIES 56
Supercritical Co2 Process 56
Technology 56
Applications 57
Manufacturers 58
TABLE 9 SUPERCRITICAL CO2 CLEANING EQUIPMENT MANUFACTURERS 58
Patent Analysis 59
FIGURE 12 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SCCO2 CLEANING (%)
59
Anhydrous SO3 Cleaning 60
Technology 60
Applications 60
Developers and Manufacturers 61
Patent Analysis 61
FIGURE 13 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SO3 CLEANING (%) 61
Laser-Induced Shockwave Cleaning (LSC) 62
Technology 62
Applications 62
Manufacturers 63
Patent Analysis 63
Other Technologies 63
Nanoprobe Cleaning 63
New Cryogenic Aerosols 63
Vapor Cleaning 64
CONTAMINATION DETECTION TECHNOLOGIES 64
TECHNOLOGY 64
TABLE 10 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES 65
Laser Backscattering 65



Optical Microscopy 66
Other Technologies 66
ADVANTAGES AND DISADVANTAGES 66
TABLE 11 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES ADVNATAGES AND DISADVANTAGES 66
MANUFACTURERS 67
TABLE 12 MANUFACTURERS OF CONTAMINANT DETECTION SYSTEMS 67
FIGURE 14 CONTAMINANT DETECTION SYSTEM MARKET LEADERS, 2009 (PERCENT OF TOTAL SALES) 68
PATENT ANALYSIS 68
FIGURE 15 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION
DETECTION SYSTEMS, BY TYPE OF TECHNOLOGY 69
FIGURE 16 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION
DETECTION SYSTEMS, BY ASSIGNEE (%) 70
CLEANING-RELATED CONTRACT SERVICES 70
TABLE 13 COMPANIES PROVIDING OUTSOURCED MICROELECTRONICS CLEANING SERVICES 71

Chapter-5: GLOBAL MARKET FOR ELECTRONICS CLEANING EQUIPMENT, SUPPLIES AND SERVICES, 2009â''2015

SUMMARY 72
OVERALL MARKET 72
TABLE 14 GLOBAL SALES OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLIES AND SERVICES, THROUGH 2015 ($
MILLIONS) 72
FIGURE 17 MICROELECTRONIC CLEANING EQUIPMENT AND SUPPLIES MARKET TRENDS, 2009'2015 ($ MILLIONS) 73
FIGURE 18 SALES OF MICROELECTRONICS CLEANING EQUIPMENT VS. SUPPLIES MARKET BY TYPE OF PROCESS, 2009
AND 2015 (PERCENT OF GLOBAL ELECTRONICS CLEANING SALES) 74
MARKET BY TYPE OF TECHNOLOGY 75
FIGURE 19 MICROELECTRONICS CLEANING MARKET BY TYPE OF PROCESS* (PERCENT OF GLOBAL ELECTRONICS
CLEANING SALES) 75
MARKET BY TYPE OF APPLICATION 76
FIGURE 20 MICROELECTRONICS CLEANING MARKET BY TYPE OF APPLICATION, 2009'2015 (PERCENT OF GLOBAL
ELECTRONICS CLEANING SALES) 76
MARKET BY REGION 77
FIGURE 21 MICROELECTRONICS CLEANING MARKET SHARES BY REGION, 2009'2015 78
DETAILED ESTIMATES AND PROJECTIONS 79
WET PROCESS MARKET 79
2009 Sales 79
FIGURE 22 GLOBAL SALES OF WET CLEANING EQUIPMENT, CHEMICALS, AND ULTRAPURE WATER, 2009 (%/$ MILLION) 79
Equipment 80
FIGURE 23 SALES OF WET CLEANING EQUIPMENT BY TYPE OF EQUIPMENT, 2009 (%/$ MILLION) 80
Chemicals 81
FIGURE 24 CONSUMPTION OF WET CLEANING CHEMICALS BY TYPE OF CHEMICAL, 2009 ($ MILLIONS/% 81
Ultrapure Water 82
Market Drivers 82
Trends in Global Semiconductor Production 82
TABLE 15 GLOBAL SEMICONDUCTOR PRODUCTION, THROUGH 2015 ($ BILLIONS) 83
FIGURE 25 TRENDS IN GLOBAL SEMICONDUCTOR PRODUCTION, 2009'2015 ($ BILLION) 83
Growing Complexity of Semiconductors 84
FIGURE 26 TRENDS IN FEOL VS. BEOL CLEANING STEPS, 2009 AND 2015 (% OF ALL CLEANING STEPS) 84
Trend Towards 450 mm Wafers 85



TABLE 16 SALES OF SINGLE WAFER CLEANING TOOLS, THROUGH 2015 ($ MILLIONS) 86
FIGURE 27 TRENDS IN SALES OF SINGLE-WAFER CLEANING EQUIPMENT, 2009'2015 86
New Interconnect Materials 87
TABLE 17 SALES OF LOW-K DIELECTRIC MATERIALS USED IN SEMICONDUCTOR PRODUCTION, THROUGH 2015 ($
MILLIONS) 87
FIGURE 28 TRENDS IN SALES OF LOW-K DIELECTRIC MATERIALS USED IN SEMICONDUCTOR PRODUCTION, 2009-2015 ($
MILLIONS) 87
Diversification of Wet Cleaning Chemistry Suppliers 88
Growing Importance of Non-Semiconductor Applications 88
FIGURE 29 TRENDS IN SEMICONDUCTOR VS. NON-SEMICONDUCTOR APPLICATIONS FOR WET CLEANING EQUIPMENT,
2009 AND 2015 (%/$ BILLION) 88
Projected Market, 2010'2015 89
Summary 89
TABLE 18 SALES OF WET PROCESS CLEANING EQUIPMENT AND CHEMICALS, THROUGH 2015 ($ MILLIONS) 90
Equipment 90
TABLE 19 SALES OF WET PROCESS CLEANING TOOLS, 2009'2015 ($ MILLIONS) 90
TABLE 20 SALES OF WET PROCESS CLEANING CHEMISTRIES, THROUGH 2015 ($ MILLIONS) 91
FIGURE 30 TRENDS IN WET CLEAN EQUIPMENT MARKET SHARES, 2009 AND 2015 (%) 92
Chemicals 93
TABLE 21 SALES OF ULTRAPURE WATER, THROUGH 2015 ($ MILLIONS) 94
FIGURE 31 TRENDS IN WET CLEAN CHEMISTRY MARKET SHARES, 2009'2015 (%) 94
Ultrapure Water 95
DRY PROCESS MARKET 96
2009 Sales 96
FIGURE 32 GLOBAL SALES OF DRY CLEANING EQUIPMENT AND CHEMICALS, 2009 ($ MILLIONS) 96
Equipment 96
FIGURE 33 SALES OF DRY CLEANING EQUIPMENT BY TYPE OF EQUIPMENT, 2009 ($ MILLIONS) 97
Gases 98
FIGURE 34 CONSUMPTION OF DRY CLEANING GASES BY TYPE OF GAS, 2009 ($ MILLIONS) 98
Market Drivers 99
Overall Resist Consumption 99
TABLE 22 SALES OF RESIST MATERIALS, THROUGH 2015 ($ MILLIONS) 100
FIGURE 35 TRENDS IN GLOBAL MARKET FOR RESIST MATERIALS, 2009'2015 ($ MILLIONS) 100
Use of New Resist and Semiconductor Materials 100
Overall Sales of Ozone Generation Systems 101
TABLE 23 SALES OF OZONE TECHNOLOGY, THROUGH 2015 ($ MILLIONS) 101
FIGURE 36 TRENDS IN GLOBAL MARKET FOR OZONE TECHNOLOGY ($ MILLIONS) 102
Projected Market, 2010'2015 102
Summary 102
TABLE 24 SALES OF DRY PROCESS CLEANING EQUIPMENT AND GASES, 2009'2015 ($ MILLIONS) 102
Equipment 103
TABLE 25 SALES OF DRY PROCESS CLEANING TOOLS, THROUGH 2015 ($ MILLIONS) 103
Gases 103
TABLE 26 SALES OF DRY CLEANING PROCESS GASES, THROUGH 2015 ($ MILLIONS) 104
FIGURE 37 TRENDS IN DRY STRIP TECHNOLOGY MARKET SHARES, 2009 AND 2015 (%) 104
FIGURE 38 TRENDS IN DRY STRIP TECHNOLOGY MARKET SHARES, 2009 AND 2015 (%) 106



MARKETS FOR EMERGING CLEANING TECHNOLOGIES 107
Supercritical Carbon Dioxide (SCCO2) 107
2009 Sales 107
Market Drivers 107
Trend towards Advanced and Next Generation Lithography (NGL) Technologies 107
FIGURE 39 TRENDS IN SALES OF NGL VS. OTHER PHOT0RESIST TYPES, 2009'2015 ($ MILLIONS) 108
Projected Market, 2010 to 2015 109
Equipment 109
TABLE 27 SALES OF SCCO2 CLEANING TOOLS, THROUGH 2015 ($ MILLIONS) 109
Carbon Dioxide 109
TABLE 28 CARBON DIOXIDE CONSUMPTION BY SCCO2 CLEANING TOOLS, THROUGH 2015 ($ MILLIONS) 110
Other Emerging Cleaning Technologies 110
MARKETS FOR CLEANING-RELATED SERVICES 110
2009 Sales 110
FIGURE 40 MARKET FOR CLEANING-RELATED SERVICES, 2009 (%) 111
Market Drivers 111
Semiconductor Industry Purchases of Outside Services 111
FIGURE 41 RECENT TRENDS IN U.S. SEMICONDUCTOR INDUSTRY PURCHASES OF SELECTED CONTRACT SERVICES,
1997-2007 ($ MILLIONS/PERCENT OF TOTAL SHIPMENT VALUE) 112
Projected Market, 2010 to 2015 112
TABLE 29 SALES OF CLEANING-RELATED CONTRACT SERVICES, THROUGH-2015 ($ MILLIONS) 113
MARKETS FOR CONTAMINANT DETECTION SYSTEMS 113
FIGURE 42 SEMICONDUCTOR AND OTHER MICROELECTRONICS INSPECTION SYSTEM SALES, 2009 ($ MILLIONS) 114
TABLE 30 SALES OF SEMICONDUCTOR AND OTHER MICROELECTRONICS INSPECTION SYSTEMS, THROUGH 2015 ($
MILLIONS) 115
OTHER FACTORS THAT MAY INFLUENCE THE MARKET FOR CLEANING EQUIPMENT AND SUPPLIES 115
ENVIRONMENTAL, HEALTH AND SAFETY ISSUES 115
Environmental, Health and Safety Issues Continued) 116

Chapter-6: INDUSTRY STRUCTURE

NUMBER/SIZE OF FIRMS 118
FIGURE 43 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURERS BY ANNUAL SALES LEVEL, 2009 ($
MILLIONS/%) 118
CLEANING PRODUCT SPECIALIZATION 119
TABLE 31 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SALES OF CLEANING EQUIPMENT VS. TOTAL
SALES ($ MILLIONS) 119
FIGURE 44 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SPECIALIZATION RATIOS, 2009 (CLEANING
EQUIPMENT SALES AS PERCENTAGE OF TOTAL SALES) 120
NATIONALITY 121
FIGURE 45 NATIONALITY OF MICROELECTONICS CLEANING EQUIPMENT MANUFACTURERS (%) 121
OWNERSHIP TRENDS 122

Chapter-7: VENDOR PROFILES



AIR PRODUCTS AND CHEMICALS, INC. 123
AKRION, INC.6330 HEDGEWOOD DRIVE, #150 123
APPLIED MATERIALS INC. 123
ATMI INC 124
AUSTIN AMERICAN TECHNOLOGY 125
AXCELIS TECHNOLOGIES INC. 125
AXIC INC. 126
AZ ELECTRONIC MATERIALS 126
THE BOC GROUP PLC 126
CANON U.S., INC. 127
CYANTEC INC. 127
DONGJIN SEMICHEM KGIT 23RD FLOOR 128
DONGWOO FINE CHEMICALS CO., LTD. 128
DUPONT ELECTRONIC TECHNOLOGIES 129
EV GROUP 129
FMC INDUSTRIAL CHEMICALS 129
FSI INTERNATIONAL INC 130
GENERAL CHEMICAL CORP. 130
HITACHI LTD. 130
HONEYWELL ELECTRONIC MATERIALS 131
JEOL LTD. 131
KANTO CORP. 131
KLA-TENCOR CORP. 132
L'AIR LIQUIDE SA 132
LAM RESEARCH CORP. 132
LEICA MICROSYSTEMS AG 133
LOTUS SYSTEMS GMBH 133
MACDERMID, INC. 133
MALLINCKRODT BAKER INC. 133
MATHESON TRI-GAS, INC. 134
MATTSON TECHNOLOGY, INC 134
MERCK KGA 134
MICELL TECHNOLOGIES, INC 135
MITSUBISHI CHEMICAL CORP. 135
MKS INSTRUMENTS, INC 136
NANOMETRICS, INC. 136
NIKON CORP. 136
NOVASCAN TECHNOLOGIES, INC. 137
NOVELLUS SYSTEMS, INC. 137
OLYMPUS CORP. 137
OSRAM SYLVANIA INC. 138
PENTAGON TECHNOLOGIES INC. 138
PRAXAIR, INC. 139
PSK, INC. 139
QUANTUMCLEAN, INC. 139
RD CHEMICAL 140
ROHM AND HAAS COMPANY 140



SAMCO, INC. 140
SHIBAURA MECHATRONICS CORP. 141
SOLVAY S.A. 141
STOELTING 141
SUMITOMO CHEMICAL CO. LTD. 142
SÜSS MICROTEC AG 142
TOYO NIPPON SANSO CORP. 142
TEPLA AG 143
TOKYO ELECTRON LTD. 143
TOKYO OHKA KOGYO CO., LTD. 144
WAKO PURE CHEMICAL INDUSTRIES, LTD. 144
ZESTRON CORP. 144


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