MEMS: Biosensors and Nanosensors

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MEMS: Biosensors and Nanosensors
Published on February 2011

Report Summary

BCC estimates the global market for microsensors at nearly $5.2 billion in 2010, increasing to nearly $5.9 billion in 2011 and $12
billion in 2016, a compound annual growth rate (CAGR) of 15.3% between 2011 and 2016.

MEMS sensors account for the bulk of the microsensor market. This sector is projected to be worth nearly $3.2 billion in 2011 and is
expected to increase at a 15.5% compound annual growth rate (CAGR) to reach $6.5 billion in 2016.

Nanosensors' share should increase from 0.1% of the market to 0.3%. While this is the smallest market share, this sector represents
the greatest growth rate. This market is projected to be worth $6.5 million in 2011 and $38 million in 2016, a 42.7% compound annual
growth rate (CAGR).

INTRODUCTION

STUDY BACKGROUND

This report is an update of an earlier BCC Research report published in 2008. MEMS, biochips, and nano-sensors (referred to
collectively in this report as microsensors) make up one of the fastest-growing technology areas, with sales of nearly $5.2 billion in
2010 and expected to grow at a compound annual growth rate (CAGR) of 15.5% between 2011 and 2016.

Microsensors have proven to be a key enabling technology of developments in sectors such as transportation, telecommunications,
and healthcare, but the range of microsensors applications covers nearly every sector. The most significant advantage of
microsensors is their ability to communicate easily with semiconductor chips. Other advantages include microsensors' compact size,
reduced power consumption, lower cost, and increased reliability. The growth in the use of microsensors has also led to the creation
of supporting industries in areas such as design software, design services, specialty fabrication equipment, and fabrication facilities.

BCC has surveyed individual segments of the microsensor industry previously; for example, in its recent (2010) studies of the global
market for microelectromechanical systems or MEMS, automotive sensors, medical device sensors, and environmental sensors. BCC
initiated the present study to bring together these related markets as well as update the findings and conclusions of the earlier reports.

The range of microsensor products and applications has grown rapidly in the past few years, but it is important to avoid 'hyping' their
prospects. Although some types of microsensors (airbag accelerometers, for example) have had great commercial success, other
types (such as most types of nanosensors) have enjoyed less success. Still other technologies are still at the discovery and
developmental stages, and their eventual commercialization will require the commitment of substantial resources, with long payback
periods and substantial financial risk.

To the extent that hype results in exaggerated investor expectation, it can divert investment from microsensor technologies that have
real commercial potential. In the worst case, disappointed expectations can lead to a drying-up of investment funds, similar to the one
that occurred in the dot-com sector after 2000. This report takes a hard look at the market for microsensors and tries to provide a road
map to the technologies and applications that are likely to enjoy the greatest commercial success in the years through 2016.

GOALS AND OBJECTIVES

MEMS: Biosensors and Nanosensors (From Slideshare) Page 1/18


The goal of this report is to provide investors and others with information on the commercial potential of various microsensor
technologies and applications to assist them in making the key business decisions that lie ahead. Specific objectives include
identifying segments of the microsensor market with the greatest commercial potential in the near to mid-term (2011 to 2016),
projecting future demand in these segments, and evaluating the challenges that must be overcome for each segment to realize its
potential.

INTENDED AUDIENCE

While it contains descriptions of microsensor technologies, this report is intended especially for microsensor marketing executives and
other executives charged with asset allocation and corporate strategy, as well as entrepreneurs, investors, venture capitalists, and
other readers with a need to know where the market for microsensors is headed in the next 5 years. The report is written primarily for
lay readers rather than technologists, but it should also be useful to readers in the research and development community who seek to
anticipate future flows in R&D funding. Officials of related government programs such as the U.S. National Nanotechnology Initiative
should also find the report interesting.

SCOPE OF REPORT

The report addresses the global market for microsensors, including the following:

MEMS: Sensing devices that integrate mechanical elements, sensors, actuators, and electronics on a common silicon substrate, and
typically have dimensions in the 1-micron to 100-micron range (1 micron = 1 millionth of a meter).
Biochips: Silicon chip-based detection devices that integrate a living organism or product derived from living systems (e.g., an enzyme
or an antibody) and a transducer to provide an indication, signal, or other form of recognition of the presence of a specific substance
in the environment. (Biological detection devices that do not generate an analytical signal, such as pregnancy tests or conventional
glucose test strips, do not meet this report's definition of sensors.)
Nanosensors: Sensors that are nanoscale or incorporate nano-engineered structures such as nanotubes.

The study format includes the following major elements:

Executive summary
Definitions
Milestones in the development of microsensors
Current and developmental microsensor technologies and applications
Microsensor technologies and applications with the greatest commercial potential through 2016
Global microsensor market trends, 2010'2016
Microsensor market shares and industry structure

METHODOLOGY AND INFORMATION SOURCES

The methodologies and assumptions used to develop the market projections in this report are discussed at length in the detailed
market estimates and projections for each microsensor technology. The report carefully documents data sources and
assumptions. This way, readers can see how the market estimates were developed and, if they so desire, test the impact on the final
numbers of changing assumptions such as price.

This section makes some general observations concerning the report's approach to estimating the market for developmental
technologies whose commercial potential has not been demonstrated, which is always a challenging task. BCC used a multi-phase
approach to identify the microsensor technologies with the greatest commercial potential and quantify the market for these
applications, as described below.



In the first phase of the analysis, BCC identified a 'long list' of potential microsensor technologies (including technologies that are still
under development) and mapped them against potential applications and end-user industries, such as information
technology/electronics, biotechnology, and healthcare.

In the second phase, BCC eliminated those microsensor technologies that appear to have little likelihood of making it into commercial
production in the next 5 years, through a literature review and statements by industry sources. The result of phase two was a 'short
list' of technologies and applications with the greatest near to mid-term commercial potential.

The third phase focused on quantifying the potential market for each short-listed microsensor technology and identifying the main
prerequisites for commercial success.

The base year for analysis and projection is 2010. At the time this report was prepared in early 2011, full-year 2010 data were not yet
available for all market segments. In such cases, BCC estimated the market for 2010 based on historical trends and other available
data.

With 2010 data (actual or estimated) as a baseline, market projections were developed for 2011 to 2016. These projections are based
on a combination of a consensus among the primary contacts combined with BCC's understanding of the key market drivers and their
impact from a historical and analytical perspective.

Table of Content

Chapter- 1: INTRODUCTION

STUDY BACKGROUND 1
GOALS AND OBJECTIVES 2
INTENDED AUDIENCE 2
SCOPE OF REPORT 2
METHODOLOGY AND INFORMATION SOURCES 3
ANALYST CREDENTIALS 4
RELATED BCC RESEARCH 4
BCC ONLINE SERVICES 5
DISCLAIMER 5

Chapter-2: EXECUTIVE SUMMARY

SUMMARY TABLE GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2016 ($ MILLIONS) 6
SUMMARY FIGURE GLOBAL MICROSENSOR MARKET PROJECTIONS, 2010'2016 ($ MILLIONS) 7

Chapter-3: MICROSENSORS OVERVIEW

GENERAL DESCRIPTION 8
DEFINITIONS 8
Sensors 8
Microsensors 9
MEMS 9
Biochips 9



Nanosensors 10
HISTORICAL PERSPECTIVE 10
MICROSENSOR TECHNOLOGIES AND APPLICATIONS 11
TABLE 1 MAJOR MICROSENSOR TECHNOLOGIES AND APPLICATIONS 11
TABLE 1 (CONTINUED) 12
ACCELEROMETERS 12
GYROSCOPES 13
PRESSURE MICROSENSORS 13
CHEMICAL AND GAS MICROSENSORS 14
THERMAL MICROSENSORS 14
BIOCHIPS 14
NANO-CHEMICAL SENSORS 15
NANO-BIOSENSORS 16
NANO-RADIATION SENSORS 16
NANO-THERMAL SENSORS 17
MICROSENSOR MARKETS 17
TABLE 2 GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2016 ($ MILLIONS) 17
TABLE 2 (CONTINUED) 18
FIGURE 1 PROJECTED GLOBAL MICRO MARKET TRENDS, 2010'2016 ($ MILLIONS) 18
TABLE 3 PROJECTED RANKING OF THE LARGEST SELLING TYPES OF MICROSENSORS, 2010 VS. 2016 19
TABLE 4 GLOBAL MARKET PROJECTIONS FOR MICROSENSORS BY END USE, THROUGH 2016 ($ MILLIONS) 19
FIGURE 2 PROJECTED TRENDS IN THE GLOBAL MICROSENSOR MARKET BY END-USER SEGMENT, 2010'2016 (PERCENT
OF TOTAL SALES) 20

Chapter-4: ENABLING TECHNOLOGIES FOR MICROSENSORS

MATERIALS TECHNOLOGIES 21
FIGURE 3 GLOBAL MARKET SHARE PROJECTIONS FOR MICROSENSOR MATERIALS TECHNOLOGIES BY TYPE, 2010 AND
2016 (PERCENT OF TOTAL MEMS SHIPMENTS) 21
FIGURE 3 (CONTINUED) 22
SILICON 22
POLYMERS 22
METALS 23
NANOMATERIALS 23
Nanoparticles 23
Carbon Nanotubes 23
Graphene 24
Nanoribbons 24
Nanowires 25
Nanoceramics 26
Other Nanostructured Materials 26
MANUFACTURING TECHNOLOGIES 26
MICROMACHINING 27
Surface Micromachining 27
FIGURE 4 SACRIFICIAL LAYER ETCHING 28
Bulk Micromachining 29
LIGA 29
FIGURE 5 LIGA PROCESS DIAGRAM 30



Wafer Bonding 30
Anodic Bonding 31
Intermediate-Layer Assisted Bonding 31
Direct Bonding 31
Flip-Chip Bonding 31
ETCHING 32
Wet Anisotropic Etching 32
FIGURE 6 ISOTROPIC VS. ANISOTROPIC ETCHING 32
Dry Etching 32
Reactive Ion Etching 32
Deep Reactive Ion Etching 33
LASER MICROFABRICATION 33
Laser Micromachining 34
Laser-Assisted Chemical Etching 35
Laser Assisted Deposition 35
Stereolithography 35
Laser Surface Modification 36
Laser-Assisted Manipulation and Assembly 36
Laser Microbending 36
Physical Manipulation of Parts 36
Laser Joining 37
NANOPATTERNING 37
Nanoimprint Lithography 38
Hot Embossing Lithography 38
Ultraviolet Nanoimprint Lithography 39
Microcontact Printing 40
Dip Pen Nanolithography 40
Dip Pen Nanolithography (Continued) 41
Laser-Based Particle Deposition 42
Other Technologies 43
Powderblasting 43
Micromolding 43

Chapter-5: ACCELEROMETERS

TECHNOLOGIES 44
OPERATING MECHANISM 44
TABLE 5 MAJOR MEMS ACCELEROMETER TECHNOLOGIES 45
Capacitive 45
Electromagnetic 46
Piezoelectric 46
Piezoresistive 47
Optical 48
Tunneling 48
Thermal 49
AXES OF MEASUREMENT 49
LOW-G ACCELEROMETERS 50
APPLICATIONS 50



TABLE 6 COMMERCIAL ACCELEROMETER APPLICATIONS 50
AUTOMOTIVE APPLICATIONS 51
Airbag Actuation 51
Stability Systems 51
Vehicle Navigation 51
LIFE SCIENCES 52
Rate-Responsive Heart Pacemakers 52
Actigraphs 52
ENERGY 52
Oil and Gas Exploration 53
MILITARY/AEROSPACE 53
INFORMATION TECHNOLOGY 54
Hard Disk Drop Protection 54
CONSUMER PRODUCTS 54
'Smart' Sporting Goods 54
Personal Electronics 55
MISCELLANEOUS APPLICATIONS 56
ACCELEROMETER MARKET 56
SUMMARY 56
TABLE 7 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS, THROUGH 2016 ($ MILLIONS) 57
FIGURE 7 GLOBAL MEMS ACCLEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010'2016
(PERCENT OF TOTAL SHIPMENTS) 57
TABLE 8 GLOBAL MARKET PROJECTIONS FOR ESTABLISHED AUTOMOTIVE ACCELEROMETER APPLICATIONS, THROUGH
2016 ($ MILLIONS) 58
Airbag Sensors 59
TABLE 9 PROJECTED GLOBAL SHIPMENTS OF AIRBAG MODULES, THROUGH 2016 (MILLION UNITS) 59
FIGURE 8 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF AIRBAG MODULES, 2010'2016 (MILLION UNITS) 60
TABLE 10 GLOBAL MARKET PROJECTIONS FOR AIRBAG SENSORS IN MOTOR VEHICLES, THROUGH 2016 (MILLION
UNITS/$ MILLIONS) 61
Vehicle Stability Control Systems 61
TABLE 11 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH STABILITY CONTROL SYSTEMS, THROUGH
2016 (MILLION VEHICLES) 61
FIGURE 9 PROJECTED TRENDS IN GLOBAL SALES OF LIGHT VEHICLES WITH STABILITY CONTROL SYSTEMS, 2010'2016
(MILLION VEHICLES) 62
TABLE 12 GLOBAL MARKET FOR LOW-G ACCELEROMETERS USED IN VEHICLE STABILITY CONTROL SYSTEMS,
THROUGH 2016 (MILLION UNITS/$ MILLIONS) 63
Navigation Systems 63
TABLE 13 PROJECTED GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION SYSTEMS WITH INTEGRATED INS,
THROUGH 2016 (MILLION VEHICLES) 63
FIGURE 10 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION SYSTEMS, 2010'2016
(MILLION SYSTEMS SHIPPED) 64
TABLE 14 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS USED IN VEHICLE NAVIGATION SYSTEMS,
LIFE SCIENCES APPLICATIONS 65
TABLE 15 GLOBAL MARKET FOR ESTABLISHED ACCELEROMETER APPLICATIONS IN THE LIFE SCIENCES, THROUGH 2016
($ MILLIONS) 65



Rate-Responsive Heart Pacemakers 65
TABLE 16 GLOBAL SALES PROJECTIONS FOR CARDIAC PACEMAKERS, THROUGH 2016 (THOUSANDS OF PACEMAKERS)
66
FIGURE 11 PROJECTED TRENDS IN GLOBAL SALES OF CARDIAC PACEMAKERS, 2010'2016 (THOUSAND UNITS) 66
TABLE 17 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN RATE RESPONSIVE HEART PACEMAKERS,
THROUGH 2016 (THOUSAND UNITS/$ MILLIONS) 67
Activity Monitoring Systems 67
TABLE 18 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN ACTIGRAPHS, THROUGH 2016 (THOUSAND
ENERGY 68
Seismic Detection Systems 68
TABLE 19 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN SEISMIC DETECTION EQUIPMENT,
TABLE 20 PROJECTED GLOBAL SALES OF GPS SYSTEMS FOR MILITARY/AEROSPACE APPLICATIONS, THROUGH 2016 ($
MILLIONS) 69
FIGURE 12 PROJECTED TRENDS IN GLOBAL MILITARY/AEROSPACE MARKET FOR GPS SYSTEMS, 2010'2016 ($ MILLIONS)
70
TABLE 21 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN MILITARY/AEROSPACE APPLICATIONS,
INFORMATION TECHNOLOGY 71
TABLE 22 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2016 ($
MILLIONS) 71
Hard Disk Drive Drop Protection 71
TABLE 23 GLOBAL MARKET PROJECTIONS FOR HARD DRIVE-EQUIPPED LAPTOP COMPUTERS, THROUGH 2016 (MILLION
UNITS) 72
FIGURE 13 PROJECTED GLOBAL TRENDS IN SALES OF HARD DRIVE-EQUIPPED LAPTOP COMPUTERS, 2010'2016
(MILLION DEVICES) 72
TABLE 24 GLOBAL MARKET PROJECTIONS FOR LAPTOP COMPUTER HARD DRIVE DISK PROTECTION APPLICATIONS,
Hard Disk Read/Write Head Tracking Mechanism 73
TABLE 25 GLOBAL MARKET FOR MEMS ACCLEROMETERS IN HARD DISK READ/WRITE HEAD TRACKING SYSTEMS,
2010'2016 (MILLION UNITS/MILLION $) 74
TABLE 26 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2016 ($
MILLIONS) 74
Mobile Phone User Interface 75
TABLE 27 GLOBAL MARKET PROJECTIONS FOR MOBILE PHONE HANDSETS, THROUGH 2016 (MILLIONS OF HANDSETS) 75
FIGURE 14 PROJECTED TRENDS IN GLOBAL SALES OF MOBILE PHONE HANDSETS, 2010'2016 (MILLIONS OF HANDSETS)
75
TABLE 28 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN MOBILE PHONE HANDSETS, THROUGH
2016 (MILLION UNITS/$ MILLIONS) 76
Electronic Gaming User Interface 76
TABLE 29 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN HANDHELD GAMING DEVICES, THROUGH
2016 (MILLION UNITS/$ MILLIONS) 77
Digital Camera Image-stabilization Systems 77
TABLE 30 PROJECTED GLOBAL DIGITAL CAMERA SALES, THROUGH 2016 (MILLION CAMERAS) 77
FIGURE 15 PROJECTED GLOBAL UNIT SALES OF DIGITAL CAMERAS, 2010'2016 (MILLION UNITS) 78



TABLE 31 GLOBAL MARKET PROJECTIONS FOR MEMS ACCLEROMETERS IN DIGITAL CAMERA IMAGE-STABILIZATION
SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS) 78
'Smart' Sporting Goods 79
TABLE 32 GLOBAL MARKET PROJECTIONS FOR MEMS ACCLEROMETERS IN 'SMART' SPORTING GOODS, THROUGH 2016
(THOUSAND UNITS/$ MILLIONS) 79
OTHER APPLICATIONS 79
TABLE 33 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN OTHER NON-MILITARY APPLICATIONS,

Chapter-6: GYROSCOPES

TECHNOLOGIES 81
TABLE 34 MAJOR MEMS GYROSCOPE TECHNOLOGIES 82
TUNING FORK GYROSCOPE 82
WINE GLASS RESONATOR GYROSCOPES 83
RING RESONATOR GYROSCOPES 83
VIBRATING WHEEL 83
SPINNING WHEEL GYROSCOPE 84
MICRO-OPTICAL-ELECTROMECHANICAL SYSTEMS (MOEMS) GYROS 84
Interferometric MOEMS Gyroscope 84
APPLICATIONS 84
TABLE 35 GYROSCOPIC MEMS APPLICATIONS 85
AUTOMOTIVE 85
Vehicle Stabilization Systems 85
Rollover Detection 86
Vehicle Navigation Systems 86
LIFE SCIENCES 86
Personal Transportation Devices 87
Robotic Toys 87
Household Robots 88
Mobile Industrial/Service Robots 88
GYROSCOPE MARKET 89
SUMMARY 89
TABLE 36 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES, THROUGH 2016 ($ MILLIONS) 89
FIGURE 16 GLOBAL MEMS ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010'2016 (%
OF TOTAL SHIPMENTS) 90
AUTOMOTIVE 90
TABLE 37 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MEMS IN AUTOMOTIVE APPLICATIONS, THROUGH 2016 ($
MILLIONS) 91
Stability Control 91
TABLE 38 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN VEHICLE STABILITY CONTROL SYSTEMS,
Rollover Detection 92
FIGURE 17 PROJECTED TRENDS IN GLOBAL SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, 2010'2016



(MILLION UNITS) 92
TABLE 39 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSOCPES USED IN VEHICLE ROLLOVER DETECTION
Navigation Systems 93
TABLE 40 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN VEHICLE NAVIGATION SYSTEMS,
TABLE 41 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MEMS IN CONSUMER PRODUCTS, THROUGH 2016 ($
MILLIONS) 94
TABLE 42 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN DIGITAL CAMERA IMAGE-STABILIZATION
Personal Transportation Devices 95
FIGURE 18 PROJECTED GLOBAL SALES OF SEGWAY HUMAN TRANSPORTERS, 2010'2016 (UNITS) 96
TABLE 43 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN SEGWAY HUMAN TRANSPORTERS, THROUGH
2016 (THOUSAND UNITS/$ MILLIONS) 97
TABLE 44 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN MILITARY/AEROSPACE APPLICATIONS,
OTHER APPPLICATIONS 97
Mobile Industrial/Service Robots 98
FIGURE 19 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, 2019'2016 UNITS) 98
TABLE 45 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN MOBILE INDUSTRIAL/SERVICE ROBOTS,
THROUGH 2016 (UNITS/$ MILLIONS) 99

Chapter-7: PRESSURE SENSORS

TECHNOLOGY 100
APPLICATIONS 100
TABLE 46 ESTABLISHED PRESSURE SENSING MEMS APPLICATIONS, 2010 100
Manifold Absolute Pressure (Map) Sensors 101
Tire Pressure Sensors 101
LIFE SCIENCES APPLICATIONS 101
Blood Pressure Monitors 101
Appliance Pressure Sensors 102
PRESSURE SENSOR MARKET 102
SUMMARY 102
TABLE 47 GLOBAL MARKET PROJECTIONS FOR MEMS PRESSURE SENSOR APPLICATIONS, THROUGH 2016 ($ MILLIONS)
102
FIGURE 20 PROJECTED GLOBAL MEMS PRESSURE SENSOR MARKET SHARES BY APPLICATION SEGMENT, 2010'2016
(PERCENT OF TOTAL SHIPMENTS) 103
AUTOMOTIVE 103
TABLE 48 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE MEMS PRESSURE SENSOR APPLICATIONS, THROUGH 2016
($ MILLIONS) 104
Manifold Absolute Pressure Sensors 104



TABLE 49 GLOBAL MARKET PROJECTIONS FOR MEMS MANIFOLD ABSOLUTE PRESSURE SENSORS, THROUGH 2016
(MILLION UNITS/$ MILLIONS) 104
Tire Pressure Sensors 105
TABLE 50 GLOBAL MARKET PROJECTIONS FOR MEMS TIRE PRESSURE MONITORING SYSTEMS, THROUGH 2016
LIFE SCIENCES 106
Blood Pressure Monitors 106
TABLE 51 GLOBAL MARKET PROJECTIONS FOR MEMS BLOOD PRESSURE SENSORS, THROUGH 2016 (MILLION UNITS/$
MILLIONS) 106
Appliance Pressure Sensors 106
TABLE 52 GLOBAL MARKET PROJECTIONS FOR MEMS PRESSURE SENSORS IN HOME APPIANCES, THROUGH 2016

Chapter-8: CHEMICAL AND GAS SENSORS

TECHNOLOGIES 108
ELECTROCHEMICAL SENSORS 108
MASS SENSORS 108
Optical Sensors 109
APPLICATIONS 109
TABLE 53 MEMS CHEMICAL AND GAS SENSOR APPLICATIONS 110
AUTOMOTIVE 110
Exhaust and Cabin Air Quality Sensors 110
LIFE SCIENCES 110
Blood Gas Monitors 110
ENVIRONMENTAL PROTECTION 110
Portable/Personal Air Quality Detectors 110
MILITARY/PUBLIC SAFETY 111
Chemical Agent Detectors 111
Industrial Leak Detection and Process Control 111
MARKETS 111
TABLE 54 GLOBAL MEMS CHEMICAL AND GAS SENSOR MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH
2016 ($ MILLIONS) 112
FIGURE 21 GLOBAL MEMS CHEMICAL AND GAS SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT,
2010'2016 ((PERCENT OF TOTAL SHIPMENTS) 112
AUTOMOTIVE 113
TABLE 55 GLOBAL MARKET PROJECTIONS FOR MEMS GAS SENSORS USED IN AUTOMOTIVE APPLICATIONS, THROUGH
2016 ($ MILLIONS) 113
Exhaust Gas and Cabin Air Quality Sensors 114
TABLE 56 PROJECTED NUMBER OF CATALYTIC CONVERTER-EQUIPPED VEHICLES PRODUCED WORLDWIDE, THROUGH
2016 (MILLION UNITS) 114
FIGURE 22 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH CATALYTIC CONVERTERS, 2010'2016
(MILLION VEHICLES) 115
LIFE SCIENCES 116
Blood Gas Monitors 116



TABLE 57 PROJECTED GLOBAL SALES OF BLOOD GAS MONITORS, THROUGH 2016 (UNITS) 116
FIGURE 23 PROJECTED TRENDS IN GLOBAL SALES OF BLOOD GAS MONITORS, 2010'2016 (UNITS) 116
TABLE 58 GLOBAL MARKET PROJECTIONS FOR MEMS BLOOD GAS SENSORS, THROUGH 2016 (UNITS/$ MILLIONS) 117
ENVIRONMENTAL PROTECTION 117
Air Quality Monitoring 117
TABLE 59 GLOBAL SALES OF AIR POLLUTION MONITORING EQUIPMENT, THROUGH 2016 ($ BILLIONS) 118
FIGURE 24 PROJECTED GLOBAL AIR POLLUTION MONITORING AND SENSING EQUIPMENT MARKET TRENDS, 2010'2015 ($
BILLIONS) 118
TABLE 60 GLOBAL MARKET PROJECTIONS FOR MEMS USED IN PORTABLE/PERSONAL AIR QUALITY MONITORS,
THROUGH 2016 (UNITS/$ MILLIONS) 119
Chemical Agent Detectors 119
TABLE 61 GLOBAL MARKET PROJECTIONS FOR MEMS USED IN PORTABLE CW AGENT DETECTORS, THROUGH 2016
(THOUSAND UNITS/$ MILLIONS) 120
PROCESS INDUSTRIES 120
Industrial Process Control and Leak Detection 120
TABLE 62 GLOBAL MARKET PROJECTIONS FOR OTHER TYPES OF MEMS INDUSTRIAL CHEMICAL AND GAS SENSORS,
THROUGH 2016 ($ MILLIONS) 121

Chapter-9: THERMAL SENSORS

TECHNOLOGIES 122
THERMOCOUPLES 122
THERMORESISTORS 122
MICROBOLOMETERS 123
MICROCANTILEVERS 123
OTHER TECHNOLOGIES 124
APPLICATIONS 124
AUTOMOTIVE 124
OTHER 125
MARKETS 126
TABLE 63 GLOBAL MARKET PROJECTIONS FOR OPTICAL MEMS IN INFRARED SENSORS BY APPLICATION SEGMENT,
FIGURE 25 GLOBAL MEMS IR SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010'2016 (% OF
TOTAL SHIPMENTS) 127
TABLE 64 GLOBAL MILITARY/PUBLIC SAFETY MARKET FOR INFRARED MEMS SENSORS, THROUGH 2016 (THOUSAND
AUTOMOTIVE 128
Night Vision Systems 128
TABLE 65 GLOBAL AUTOMOTIVE MARKET PROJECTIONS FOR INFRARED MEMS SENSORS, THROUGH 2016 (THOUSAND
TABLE 66 GLOBAL MARKET FOR INFRARED MEMS SENSORS IN OTHER APPLICATIONS, THROUGH 2016 ($ MILLIONS) 130

Chapter-10: BIOCHIPS



TECHNOLOGIES 131
SAMPLE MANIPULATION TECHNOLOGIES 131
Microchannels 131
Micropumps 132
Mechanical Micropumps 132
Piezoelectric Pumps 132
Pneumatic Pumps 133
Thermopneumatic Pumps 133
Electrostatic Pumps 133
Non-Mechanical Pumps 133
Capillary Pumps 133
Electrohydrodynamic Pumps 134
Electrokinetic Pumps 134
Magneto-Hydrodynamic Pumps 134
Phase Difference Pumps 134
Micronozzles 135
Microvalves 135
Passive Microvalves 135
Active Microvalves 136
Micromixers 136
Active Mixers 136
SAW Mixers 136
Magneto-Hydrodynamic Mixers 136
Passive Mixers 136
Microreactors 137
SENSING MEDIATOR 137
Enzyme Biochips 137
Affinity Biochips 138
TRANSDUCER 138
APPLICATIONS 138
TABLE 67 BIOCHIP APPLICATIONS 139
LIFE SCIENCES 139
Chemical and Biological Agent Detectors 140
Food Quality Testing 140
MARKETS 141
TABLE 68 GLOBAL BIOCHIP MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2016 ($ MILLIONS) 141
FIGURE 26 GLOBAL BIOCHIP MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010'2016 (% OF TOTAL
SHIPMENTS) 142
LIFE SCIENCES 142
TABLE 69 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN THE LIFE SCIENCES BY APPLICATION, THROUGH 2016 ($
MILLIONS) 143
Life Sciences Research 143
TABLE 70 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN LIFE SCIENCE RESEARCH APPLICATIONS, THROUGH
2016 ($ MILLIONS) 143
Diagnostic Biochips 143
TABLE 71 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN LOC DIAGNOSTIC DEVICES, THROUGH 2016 ($ MILLIONS)



144
TABLE 72 GLOBAL MARKET PROJECTIONS FOR MICROFLUIDIC BIOCHIPS USED IN CBW SENSORS, THROUGH 2016 ($
MILLIONS) 145
Food Testing 145
TABLE 73 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN FOOD TESTING APPLICATIONS, THROUGH 2016 ($
MILLIONS) 145

Chapter-11: NANO-CHEMICAL SENSORS

TECHNOLOGIES 146
TABLE 74 NANO-CHEMICAL SENSOR TECHNOLOGIES 146
NANOTUBES 147
Carbon Nanotubes 147
Other Types of Nanotubes 148
NANORIBBONS 149
NANOWIRES 149
NANO-CANTILEVERS 150
NANO-PARTICLES 151
NANOCERAMICS 152
APPLICATIONS 153
TABLE 75 NANO-CHEMICAL SENSOR APPLICATIONS 153
LIFE SCIENCES 154
Respiratory Monitoring 154
Leak Detection 155
MARKET 155
TABLE 76 GLOBAL SALES PROJECTIONS OF NANOCHEMICAL SENSORS BY APPLICATION SEGMENT, THROUGH 2016 ($
MILLIONS) 155

Chapter-12: NANO-BIOSENSORS

TECHNOLOGIES 156
TABLE 77 NANO-BIOSENSOR TECHNOLOGIES 156
SILICON NANOWIRES 157
NANO-CANTILEVERS 157
FIBER OPTIC 158
NANOTUBES 158
NANOSTRUCTURED MEMBRANE 159
PHOSPHOLIPIDS 159
DNA-SENSITIZED GRAPHENE VAPOR SENSORS 160
NANOGAP SENSOR ARRAY 161
APPLICATIONS 161
TABLE 78 NANO-BIOSENSOR APPLICATIONS 161
LIFE SCIENCES 162
Molecular Diagnostics 162
Blood Analysis 162



MARKETS 163
LIFE SCIENCES 163
TABLE 79 PROJECTED GLOBAL SALES OF NANO-BIOSENSORS TO THE LIFE SCIENCES MARKET, THROUGH 2016 ($
MILLIONS) 163
Molecular Diagnostics 163
FIGURE 27 GLOBAL MARKET SHARE PROJECTIONS FOR IN VITRO MOLECULAR DIAGNOSTIC EQUIPMENT VS.
CONSUMABLES, 2010 (%) 164
TABLE 80 GLOBAL MARKET PROJECTIONS FOR NANO-BIOSENSOR POINT- OF-CARE MOLECULAR DIAGNOSTIC
EQUIPMENT, THROUGH 2016 ($ MILLIONS) 165
Glucose Monitoring 165

Chapter-13: NANO-RADIATION SENSORS

TECHNOLOGIES 166
NANOCANTILEVER SENSORS 166
GRAPHENE SENSORS 167
APPLICATIONS 167
TABLE 81 NANO-RADIATION SENSOR APPLICATIONS 167
MARKET 168

Chapter-14: NANO-THERMAL SENSORS

TECHNOLOGIES 169
NANOPOWDER-BASED SENSORS 169
MARKETS 169
APPLICATIONS 170
TABLE 82 NANO-THERMAL SENSOR APPLICATIONS 170

Chapter-15: INDUSTRY CHARACTERISTICS

CHAPTER FIFTEEN: INDUSTRY CHARACTERISTICS 171
NUMBER/SIZE OF FIRMS 171
FIGURE 28 GLOBAL MICROSENSOR INDUSTRY CONCENTRATION, 2009 (PERCENT OF TOTAL MICROSENSOR
SHIPMENTS) 171
MARKET SHARES 172
FIGURE 29 OVERALL GLOBAL MICROSENSOR MARKET SHARES BY COMPANY, 2009 (PERCENT OF TOTAL MICROSENSOR
SHIPMENTS) 173

Chapter-16: APPENDIX I: COMPANY PROFILES

AFFYMETRIX, INC. 175
ANALOG DEVICES, INC. 175
ARCHANGEL SYSTEMS, INC. 176
ROBERT BOSCH GMBH 176
BOSTON MICROSYSTEMS, INC. 177
CALIPER LIFE SCIENCES 177



CEPHEID THERAPEUTICS 178
COLYBRYS SA 178
COMBIMATRIX CORP. 178
CONTINENTAL AG 179
CUSTOM SENSORS AND TECHNOLOGIES 180
DELPHI AUTOMOTIVE, LLP. 180
ENDEVCO CORP. 180
ENZO LIFE SCIENCES 181
EUROGENTEC 181
FEBIT AG 181
FLIR SYSTEMS, INC. 182
FREESCALE SEMICONDUCTOR, INC. 182
GE SENSING 182
GENETIX, LTD. 183
GMA INDUSTRIES, INC. 183
ICX PHOTONICS 184
INTEGRATED NANO-TECHNOLOGIES, LLC 184
I-STAT CORP. 184
KIONIX, INC. 185
KNOWLES ELECTRONICS 185
LOCKHEED MARTIN CORP. 185
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 186
M-BIOTECH, INC. 186
MEASUREMENT SPECIALTIES, INC. 187
MEMSIC, INC. 187
MICROCHEMICAL SYSTEMS SA 187
MOLECULAR NANOSYSTEMS, INC. 188
MURATA MANUFACTURING CO., LTD. 188
NANOMIX, INC. 189
NIPPON DENSO CORP. 189
OMRON CORP. 190
ROCHE NIMBLEGEN, INC. 190
SENSONOR AS 190
SILICON DESIGNS, INC. 191
SILICON SENSING SYSTEMS 191
SONY CORP. 191
SPHERE MEDICAL, LTD. 192
STMICROELECTRONICS 192
SYNKERA TECHNOLOGIES, INC. 192
TOSHIBA CORP. 193
ULIS 193
VTI TECHNOLOGIES OY 194
XEOTRON CORP. 194

Chapter-17: APPENDIX II: PATENT ANALYSIS

PATENTS BY TYPE OF MEMS 195
FIGURE 30 RECENT U.S. MICROSENSOR-RELATED PATENTS BY TYPE OF SENSOR (PERCENT OF PATENTS ISSUED



SINCE JANUARY 1, 2005) 195
MEMS PATENT ASSIGNEES 196
LARGEST PATENT HOLDERS 196
TABLE 83 LARGEST U.S. MICROSENSOR HOLDERS (NUMBER OF PATENTS ISSUED BETWEEN 1/1/2005 AND 1/15/2011) 196
PATENT HOLDERS BY NATIONALITY 197
FIGURE 31 U.S. MICROSENSOR PATENTS BY NATIONALITY OF MICROSENSOR ASSIGNEE (PERCENT OF PATENTS
ISSUED BETWEEN 1/1/2005 AND 1/15/2011) 197


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