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PacTec 2nd Source Cymer Parts List

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PacTec 2nd Source
PacTec 2nd Source

PacTec 2nd Source optical filter replacements used on Cymer systems.

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PacTec OEM Model OEM Part Description Image Part Part Number Number ASML 5500/300/350/50 0/550/700/750 04-06044-0 Cymer Cymer Beam Splitter, 248nm 82007 Cymer OP-99-0606 ELS-5610 5300, 5310 5400, 5410 ASML 5500 /300/350/500/550 05-06168-001 /700/750 Cymer 20% Reflective, Cymer EC623-98 82008 248nm 248P80 AR Cymer ELS-5610 Cymer 10% Reflective Cymer 04-06051 82021 Output Coupler Page 1 Confidential Ed West (360) 719-1822 11/17/2011

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PacTec 2nd Source Cymer Parts List

  • 1. PacTec OEM Model OEM Part Description Image Part Part Number Number ASML 5500/300/350/50 0/550/700/750 04-06044-0 Cymer Cymer Beam Splitter, 248nm 82007 Cymer OP-99-0606 ELS-5610 5300, 5310 5400, 5410 ASML 5500 /300/350/500/550 05-06168-001 /700/750 Cymer 20% Reflective, Cymer EC623-98 82008 248nm 248P80 AR Cymer ELS-5610 Cymer 10% Reflective Cymer 04-06051 82021 Output Coupler Page 1 Confidential Ed West (360) 719-1822 11/17/2011