1. Dust Mitigation Project:
An Experimental Evaluation of the Metal Fluoride Trap
Curtis Koelling
A senior thesis submitted to the faculty of
Brigham Young University
in partial fulfillment of the requirements for the degree of
Bachelor of Science
Scott Bergeson, Walter Gillespie, Janine Kardokus, Advisors
Department of Physics and Astronomy
Brigham Young University
June 2015
Copyright © 2015 Curtis Koelling
All Rights Reserved

2. ABSTRACT
Dust Mitigation Project:
An Experimental Evaluation of the Metal Fluoride Trap
Curtis Koelling
Department of Physics and Astronomy, BYU
Bachelor of Science
We present a method for evaluating the dust trapping efficiency of a gas filtering system, also
a method for the generation of a consistent dusty flow of gas. An original experiment performed
at Cymer Inc concerning the evaluation of an excimer laser subsystem known as the MFT (Metal
Fluoride Trap). We show that the latest change in the MFT configuration has significantly increased
its trapping efficiency.
Keywords: Dust Removal, Florine Metal Dust, Excimer Laser