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IEEE NSS/MIC
       SensL Exhibitor
       Presentation
       New products, technology and applications of Silicon
       Photomultipliers
       Carl Jackson – founder and CTO




October 23-29, 2011                    IEEE NSS-MIC 2011 Valencia   1
SensL’s Breakthrough


          SensL is the leading developer of Silicon Photomultiplier (SPM) technology
          manufactured in standard CMOS foundries to replace the industry standard
                                 Photomultiplier Tube (PMT)




                                     SensL Enables:
                                      Performance
                                       Uniformity
                                       Large Area
                                      Form Factor
                                        Low Cost                              SensL
                  Photomultiplier
                                                                     Silicon Photomultiplier
                   Vacuum Tube




October 23-29, 2011                     IEEE NSS-MIC 2011 Valencia                             2
The SensL SL Silicon Photomultiplier (SPM)
       2 nd Generation Low Light Detector
                                 microcell




           The SL SPM Array                                      8 inch SPM Wafer
     x4774 microcells per 3mm SPM                            x2600 3mm SPM per wafer


          SensL’s SL SPM optimizes; signal to noise, fill factor, PDE, low power,
           low voltage and uniformity while achieving critical OEM price targets
                                      IEEE NSS-MIC 2011 Valencia                       3
October 23-29, 2011
Introduction to SL
                      Silicon
                      SPM with improved Signal to Noise, market leading
                      uniformity and low cost for high volume applications




October 23-29, 2011                        IEEE NSS-MIC 2011 Valencia        4
Goal of SL Silicon

                      Improve Signal to Noise

                      • Process
                      • Architecture

                      Optimise active area

                      • Efficient use of available space

                      Increase uniformity

                      • Enable high volume applications

                      Highest Performance / Cost Ratio

                      • Provide the clear detector choice for OEM applications


October 23-29, 2011                         IEEE NSS-MIC 2011 Valencia           5
SL Typical Performance (30035 SPM Pixel)




                High PDE : 10-25%                                High gain of 2.5E6 (2V>Vbr)




                Low Dark Current : 3µA                           Low Temperature Dependence
                (2V>Vbr)                                         : 21mV/ºC
October 23-29, 2011                      IEEE NSS-MIC 2011 Valencia                            6
SL Operating Voltage Uniformity




                                                      • x800 ArraySL-4 in dataset
                                                      • x12,800 SL Pixels
                                                      • Operating voltage varied
                                                        by <±1% across dataset




October 23-29, 2011      IEEE NSS-MIC 2011 Valencia                                 7
SL Optical Uniformity Ratio (Max/Min)




                                                       • x800 ArraySL-4 in dataset
                                                       • x12,800 SL Pixels
                                                       • Single voltage applied to
                                                         each ArraySL-4
                                                       • Optical source correlated
                                                         to L(Y)SO pixel output
                                                       • Max and Min signal
                                                         recorded to calculate
                                                         optical uniformity


October 23-29, 2011       IEEE NSS-MIC 2011 Valencia                                 8
Comparison of SL Pixel Uniformity to the Multi-
       Anode PMT


                                   Maximum*




                                                                            • SensL SL SPM products
                                                                              provide industry leading
                                    Typical*                                  optical uniformity ratios




           *Multi-Anode PMT typical and maximum values are from manufacture datasheet
October 23-29, 2011                            IEEE NSS-MIC 2011 Valencia                                 9
SL Breakdown Voltage Uniformity
       Wafer Level Data


                                                                 Data taken from a single wafer run of
                                                                  un-binned SL Silicon Pixels
                                                                 >66k pixels in dataset
                                                                 Breakdown Voltage (Vbr) definition
                                                                  Vbr = V(100nA)
                                                                 Performance of all Pixels:
                                                                    267mV Vbr variation
                                                                    <1% Pixel to Pixel Vbr variation
                                                                      across all wafers




             NOTE: A Full Body PET System is ~50k SL Pixels.




October 23-29, 2011                     IEEE NSS-MIC 2011 Valencia                                   10
SL Optical Response Uniformity
       Wafer Level Data


                                                       Data taken from a single wafer
                                                        run of un-binned SL Silicon Pixels
                                                       >66k SL Pixels in dataset
                                                       Identical voltage applied to all
                                                        pixels and optical current
                                                        measured
                                                       ±10% Optical Uniformity
                                                        between all pixels




October 23-29, 2011      IEEE NSS-MIC 2011 Valencia                                      11
SL Application
                      Performance
                      Select review of SL SPM operating in typical Hazard and
                      Threat and Medical Imaging applications




October 23-29, 2011                       IEEE NSS-MIC 2011 Valencia            12
SL Application Performance
       Hazard and Threat Detection


              Detectors selected for review:




                      MicroSL-30035-X13                                ArraySL-4-30035-CER




October 23-29, 2011                       IEEE NSS-MIC 2011 Valencia                         13
SL Ideally Matched for CsI(Tl) Emission Profile




       *CsI(Tl) emission spectrum from Saint-Gobain datasheet

October 23-29, 2011                      IEEE NSS-MIC 2011 Valencia   14
Hazard and Threat Detection
       Radiation Detection (MicroSL-30035-X13)




          3mm SL SPM can resolve to 14keV due to SL improved S/N ratio

October 23-29, 2011                   IEEE NSS-MIC 2011 Valencia         15
Hazard and Threat Detection
       Radiation Detection (ArraySL-4-30035-CER)




                                                                • Output summed
                                                                   • (x16 channels into x1
                                                                      pre-amplifier)
                                                                • 30V SPM bias
                                                                • 20ºC Temperature
                                                                • 13.5x13.5x13.5mm3
                                                                  CsI(Tl) crystal
                                                                • 2µsec shaper
       Cs-137 spectra: 662keV (9.7% FWHM) and                   • Ortec MCA
       32keV lines


October 23-29, 2011                IEEE NSS-MIC 2011 Valencia                           16
Hazard and Threat Detection
       Radiation Detection (ArraySL-4-30035-CER)




                                                                • Output summed
                                                                   • (x16 channels into x1
                                                                      pre-amplifier)
                                                                • 30V SPM bias
                                                                • 20ºC Temperature
                                                                • 13.5x13.5x13.5mm3
                                                                  CsI(Tl) crystal
                                                                • 2µsec shaper
       Am-241 spectra: 59.5keV (26.45% FWHM) and                • Ortec MCA
       17keV lines


October 23-29, 2011                IEEE NSS-MIC 2011 Valencia                           17
Hazard and Threat Detection
       Radiation Detection (ArraySL-4-30035-CER)




     Co-60 spectra: 1.17, 1.33 Mev and               Extracted energy to ADC value shows
     summation peak 2.5Mev are visible               linearity to 2.5MeV




October 23-29, 2011                 IEEE NSS-MIC 2011 Valencia                             18
SL Application Performance
       Medical Imaging

              Detectors selected for review:




               ArraySL-4-30035-CER                           ArraySL-4p9-30035




October 23-29, 2011                  IEEE NSS-MIC 2011 Valencia                  19
L(Y)SO Readout with SL SPM
       SensL Laboratory Results

                                                                          Breakdown voltage = 27.5V
                                                                          Recommended operation
                                                                           voltage = 29.5V (Vbr+2V)
                                                                          Typical reference measurement
                                                                             3x3x15mm3 LYSO Pixel
                                                                             Teflon wrapped
                                                                             BC-630 grease coupled
                                                                             Na22 source
                                                                          Typical results
                                                                             14% Energy Resolution at
                                                                               511keV
                                                                             500ps Timing (electronics
                                                                               dependant)
                      Individual pixel readout                               Uniformity ±10%




October 23-29, 2011                              IEEE NSS-MIC 2011 Valencia                                20
High Density LYSO Crystal Block Readout
       Chris Thompson




       •    Designed for 7T PET/MIR
       •    1.67x1.67 LYSO crystals
       •    Dual crystal layers
       •    SensL products                                PET
              • ArraySL-4-30035-CER                       ring
              • ArraySL-4-PIXOUT
              • ArraySL-4-EVB

     * Images courtesy of Chris Thompson Poster M9-S46# 21
October 23-29, 2011                   IEEE NSS-MIC 2011 Valencia   21
PET/MRI
       Molecular Imaging Program at Stanford
                                                              1.5T RF OFF   1.5T RF ON




    PET/MRI
    • Readout through SPM modulated
      VCSEL over fibre
    • 2.14x2.14x20mm3 LYSO
    • All components selected for magnetic
      field compatibility



    * Images courtesy of Peter Olcott and Craig Levin Poster (MIC 14-8)
October 23-29, 2011                  IEEE NSS-MIC 2011 Valencia                          22
PET - High Density Signal Multiplexing
       West Virginia – Center for Advanced Imaging




                                                                   SensL Array4p9




        A 1.5mm LYSO Array flood map
        DOI and MR compatibility                       144:4 channel readout by AiT
        Multiplexing from 144:4 channels

     * Images courtesy of Stan Majewski (J2-3)
October 23-29, 2011                   IEEE NSS-MIC 2011 Valencia                      23
High Resolution PET System
       MD Anderson
                                                                                                                                                                      1
                                                                                                                                                                                    Collim
                                                                                                                                                                     0.9            Flood
                                                                                                                                                                                    Backg
                                                                                                                                                                     0.8

                                                                                                                                                                     0.7

                                                                                                                                                                     0.6




                                                                                                                                                           R Value
                                                                                                                                                                     0.5

                                                                                                                                                                     0.4

                                                                                                                                                                     0.3

                                                                                                                                                                     0.2

                                                                                                                                                                     0.1

                                                                                                                                                                      0
                                                                                                                                                                           0             5




                                                                                                              DOI function-Column 1 Row 5
                                                                            1                                                                                         1
                                                                                     Collimated Source                                                                              Collim
                                                                           0.9       Flood Calculation                                                               0.9            Flood
                                                                                     Background Calculation                                                                         Backg
                                                                           0.8                                                                                       0.8

                                                                           0.7                                                                                       0.7

                                                                           0.6                                                                                       0.6




                                                                 R Value




                                                                                                                                                           R Value
                                                                           0.5                                                                                       0.5

                                                                           0.4                                                                                       0.4

                                                                           0.3                                                                                       0.3


        Custom ASIC readout                                                0.2

                                                                           0.1
                                                                                                                                                                     0.2

                                                                                                                                                                     0.1

        2mm pitch, 30mm length LYSO array                                   0
                                                                                 0       5              10                15                20   25   30
                                                                                                                                                                      0
                                                                                                                                                                           0             5
                                                                                                                  Depth of Interaction

        2ns timing
        14% energy resolution
        3-4 Depth of Interaction

     * Images courtesy of Chad Birchner and Yiping Shao (MIC 7-3)
October 23-29, 2011                 IEEE NSS-MIC 2011 Valencia                                                                                                                 24
Conclusion

          SensL SL silicon is in mass production
          SL silicon provides
              –       High signal to noise
              –       Superior optical response uniformity of <1.2 (max/min)
              –       Superior Vbr uniformity of <1%
              –       Low voltage operation of 30V
              –       Low cost
          Proven performance in Hazard & Threat Detection and Nuclear
           Medicine applications




October 23-29, 2011                             IEEE NSS-MIC 2011 Valencia     25
Thank You
       To discuss your application please visit our booth
       28/29 during the show.
       We are always available at www.sensl.com




October 23-29, 2011                     IEEE NSS-MIC 2011 Valencia   26

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IEEE NSS/MIC SensL Exhibitor Presentation New SPM Products and Applications

  • 1. IEEE NSS/MIC SensL Exhibitor Presentation New products, technology and applications of Silicon Photomultipliers Carl Jackson – founder and CTO October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 1
  • 2. SensL’s Breakthrough SensL is the leading developer of Silicon Photomultiplier (SPM) technology manufactured in standard CMOS foundries to replace the industry standard Photomultiplier Tube (PMT) SensL Enables: Performance Uniformity Large Area Form Factor Low Cost SensL Photomultiplier Silicon Photomultiplier Vacuum Tube October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 2
  • 3. The SensL SL Silicon Photomultiplier (SPM) 2 nd Generation Low Light Detector microcell The SL SPM Array 8 inch SPM Wafer x4774 microcells per 3mm SPM x2600 3mm SPM per wafer  SensL’s SL SPM optimizes; signal to noise, fill factor, PDE, low power, low voltage and uniformity while achieving critical OEM price targets IEEE NSS-MIC 2011 Valencia 3 October 23-29, 2011
  • 4. Introduction to SL Silicon SPM with improved Signal to Noise, market leading uniformity and low cost for high volume applications October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 4
  • 5. Goal of SL Silicon Improve Signal to Noise • Process • Architecture Optimise active area • Efficient use of available space Increase uniformity • Enable high volume applications Highest Performance / Cost Ratio • Provide the clear detector choice for OEM applications October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 5
  • 6. SL Typical Performance (30035 SPM Pixel) High PDE : 10-25% High gain of 2.5E6 (2V>Vbr) Low Dark Current : 3µA Low Temperature Dependence (2V>Vbr) : 21mV/ºC October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 6
  • 7. SL Operating Voltage Uniformity • x800 ArraySL-4 in dataset • x12,800 SL Pixels • Operating voltage varied by <±1% across dataset October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 7
  • 8. SL Optical Uniformity Ratio (Max/Min) • x800 ArraySL-4 in dataset • x12,800 SL Pixels • Single voltage applied to each ArraySL-4 • Optical source correlated to L(Y)SO pixel output • Max and Min signal recorded to calculate optical uniformity October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 8
  • 9. Comparison of SL Pixel Uniformity to the Multi- Anode PMT Maximum* • SensL SL SPM products provide industry leading Typical* optical uniformity ratios *Multi-Anode PMT typical and maximum values are from manufacture datasheet October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 9
  • 10. SL Breakdown Voltage Uniformity Wafer Level Data  Data taken from a single wafer run of un-binned SL Silicon Pixels  >66k pixels in dataset  Breakdown Voltage (Vbr) definition Vbr = V(100nA)  Performance of all Pixels:  267mV Vbr variation  <1% Pixel to Pixel Vbr variation across all wafers NOTE: A Full Body PET System is ~50k SL Pixels. October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 10
  • 11. SL Optical Response Uniformity Wafer Level Data  Data taken from a single wafer run of un-binned SL Silicon Pixels  >66k SL Pixels in dataset  Identical voltage applied to all pixels and optical current measured  ±10% Optical Uniformity between all pixels October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 11
  • 12. SL Application Performance Select review of SL SPM operating in typical Hazard and Threat and Medical Imaging applications October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 12
  • 13. SL Application Performance Hazard and Threat Detection Detectors selected for review: MicroSL-30035-X13 ArraySL-4-30035-CER October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 13
  • 14. SL Ideally Matched for CsI(Tl) Emission Profile *CsI(Tl) emission spectrum from Saint-Gobain datasheet October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 14
  • 15. Hazard and Threat Detection Radiation Detection (MicroSL-30035-X13) 3mm SL SPM can resolve to 14keV due to SL improved S/N ratio October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 15
  • 16. Hazard and Threat Detection Radiation Detection (ArraySL-4-30035-CER) • Output summed • (x16 channels into x1 pre-amplifier) • 30V SPM bias • 20ºC Temperature • 13.5x13.5x13.5mm3 CsI(Tl) crystal • 2µsec shaper Cs-137 spectra: 662keV (9.7% FWHM) and • Ortec MCA 32keV lines October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 16
  • 17. Hazard and Threat Detection Radiation Detection (ArraySL-4-30035-CER) • Output summed • (x16 channels into x1 pre-amplifier) • 30V SPM bias • 20ºC Temperature • 13.5x13.5x13.5mm3 CsI(Tl) crystal • 2µsec shaper Am-241 spectra: 59.5keV (26.45% FWHM) and • Ortec MCA 17keV lines October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 17
  • 18. Hazard and Threat Detection Radiation Detection (ArraySL-4-30035-CER) Co-60 spectra: 1.17, 1.33 Mev and Extracted energy to ADC value shows summation peak 2.5Mev are visible linearity to 2.5MeV October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 18
  • 19. SL Application Performance Medical Imaging Detectors selected for review: ArraySL-4-30035-CER ArraySL-4p9-30035 October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 19
  • 20. L(Y)SO Readout with SL SPM SensL Laboratory Results  Breakdown voltage = 27.5V  Recommended operation voltage = 29.5V (Vbr+2V)  Typical reference measurement  3x3x15mm3 LYSO Pixel  Teflon wrapped  BC-630 grease coupled  Na22 source  Typical results  14% Energy Resolution at 511keV  500ps Timing (electronics dependant) Individual pixel readout  Uniformity ±10% October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 20
  • 21. High Density LYSO Crystal Block Readout Chris Thompson • Designed for 7T PET/MIR • 1.67x1.67 LYSO crystals • Dual crystal layers • SensL products PET • ArraySL-4-30035-CER ring • ArraySL-4-PIXOUT • ArraySL-4-EVB * Images courtesy of Chris Thompson Poster M9-S46# 21 October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 21
  • 22. PET/MRI Molecular Imaging Program at Stanford 1.5T RF OFF 1.5T RF ON PET/MRI • Readout through SPM modulated VCSEL over fibre • 2.14x2.14x20mm3 LYSO • All components selected for magnetic field compatibility * Images courtesy of Peter Olcott and Craig Levin Poster (MIC 14-8) October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 22
  • 23. PET - High Density Signal Multiplexing West Virginia – Center for Advanced Imaging SensL Array4p9 A 1.5mm LYSO Array flood map DOI and MR compatibility 144:4 channel readout by AiT Multiplexing from 144:4 channels * Images courtesy of Stan Majewski (J2-3) October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 23
  • 24. High Resolution PET System MD Anderson 1 Collim 0.9 Flood Backg 0.8 0.7 0.6 R Value 0.5 0.4 0.3 0.2 0.1 0 0 5 DOI function-Column 1 Row 5 1 1 Collimated Source Collim 0.9 Flood Calculation 0.9 Flood Background Calculation Backg 0.8 0.8 0.7 0.7 0.6 0.6 R Value R Value 0.5 0.5 0.4 0.4 0.3 0.3 Custom ASIC readout 0.2 0.1 0.2 0.1 2mm pitch, 30mm length LYSO array 0 0 5 10 15 20 25 30 0 0 5 Depth of Interaction 2ns timing 14% energy resolution 3-4 Depth of Interaction * Images courtesy of Chad Birchner and Yiping Shao (MIC 7-3) October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 24
  • 25. Conclusion  SensL SL silicon is in mass production  SL silicon provides – High signal to noise – Superior optical response uniformity of <1.2 (max/min) – Superior Vbr uniformity of <1% – Low voltage operation of 30V – Low cost  Proven performance in Hazard & Threat Detection and Nuclear Medicine applications October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 25
  • 26. Thank You To discuss your application please visit our booth 28/29 during the show. We are always available at www.sensl.com October 23-29, 2011 IEEE NSS-MIC 2011 Valencia 26