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Basic Process 
Deposition Patterning Etching
– Deposition that happen because of a chemical reaction or 
physical reaction. 
– The pattern is transfer to a photosensitive material by selective 
exposure to a radiation source such as light. If the resist is 
placed in a developer solution after selective exposure to a 
light source, it will etch away. 
– Etching is the process of using strong acid to cut into the 
unprotected parts of a metal surface to create a design in. 
– There are two classes of etching processes: 
• Wet Etching 
• Dry Etching.

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Fabrication

  • 1. Basic Process Deposition Patterning Etching
  • 2. – Deposition that happen because of a chemical reaction or physical reaction. – The pattern is transfer to a photosensitive material by selective exposure to a radiation source such as light. If the resist is placed in a developer solution after selective exposure to a light source, it will etch away. – Etching is the process of using strong acid to cut into the unprotected parts of a metal surface to create a design in. – There are two classes of etching processes: • Wet Etching • Dry Etching.

Editor's Notes

  1. Wet Etching: where the material is dissolved when immersed in a chemical solution. Dry Etching: where the material is sputtered or dissolved using reactive ions or an etching agent.