1. Precision Air Conditioner Air-cooled type
Temperature control type
PAU-300S
Printing machines, solar cell manufacturing process, PAU-AR800S
PAU-AR1400S
precision measuring equipment PAU-AR2600S
Temperature control type
Temperature accuracy ± 0.1°C ~
(Energy-saving type)
PAU-AN1700SE
h ttp ://pau.apist e.co.jp PAU-AN2800SE
PAU-A5000S
Humidity accuracy ± 1% ~
Temperature & humidification control type
PAU-300S-HC
PAU-A920S-HC
PAU-A1400S-HC
PAU-A2600S-HC
PAU-A3500S-HC
Hot air & humidification control type
PAU-H3200-6KHC
Temperature & dehumidification control type
(Super dehumidification type)
PAU-1300S-DR
Hot air & humidification control type
PAU-AZ2000SE-DR
Temperature control type
(Wide-range temperature control type)
PAU-800RW
Temperature control type
(International standard compliant type)
PAU-820S-CU
PAU-1300S-CU
PAU-A820S-CE
PAU-1300S-CE
PAU-AR2623-CE
Thermal management of
3-D measuring equipment
Thermal management of
■ For details of the products, contact Apiste head office. printing machine
The models, specifications, and other descriptions are subject to change without prior notice.
APISTE CORPORATION
Head Office: Aqua-Dojima, 1-4-16, Dojimahama, Kita-ku, Osaka 530-0004 Japan To improve your factory environment,
Tel: 81-6-6343-0722 Fax: 81-6-6343-0723 visit us at:
Tel: 81-6-6343-0515 Fax: 81-6-6343-0729 Email: support@apiste.co.jp
http://pau.apiste.co.jp
This catalog is printed
with soy ink.
P057E-ID-KW-003-03-1107

2. PAU -series Digest Catalog
Apiste’s Cleaning & Precision Air-Conditioning System Plays Important
Roles in the Production Line Fan filter unit
A clean environment with high-quality temperature/humidity control is required
in manufacturing, inspection, testing, and research processes
in certain industries especially semiconductors,
LCD manufacture, electronics components,
precision equipment, chemicals, and Precision
pharmaceuticals. conditioned air
Apiste provides in-depth consulting to meet
your needs for controlling temperature,
humidity, and cleanliness based on our
"Local Cleaning & Air-Conditioning"
concept.
Clean booth Precision air-conditioning
system PAU unit
Temperature control
± 0.1°C and up
The high-precision air-conditioning system PAU unit
offers advanced temperature control.
Humidity control
± 1% and up
The PAU unit is also capable of ultra-precise humidity
control, previously thought to be incredibly demanding.
A selection of units is available to meet any
requirements, from low-humidity to high-humidity
environments.
Cleanliness control
Class 10000 – Class 10
The fan filter unit, which comes with an integrated HEPA
filter, captures 99.97% of particles even as miniscule as
0.3µ, producing an improved level of cleanliness in any
environment.
Precision Air-Conditioning Unit
Temperature control type
Clean Fan Filter Unit Clean Bench
PAU-Air Cooling Series
PAU-300S PAU-AR800S
Air-cooled precision
Temperature & humidity control type
air-conditioning unit
Outside air is used for the heat exchange in the
cooling cycle. The fan motor for the heat
PAU-01FFU PAU-03FFU radiating coil discharges hot air to the outside.
Since there is no need to install cooling water
piping for heat exchange, the installation work
is relatively easy. (*Models with humidifiers
require piping for the humidifying water.)
PAU-05FFU PAU-A11FFU
PAU-A14FFU
PAU-A17FFU
PAU-A1400S-HC
1 2

3. PAU -series Digest Catalog
Why Apiste Insists on Local Cleaning & Local Air-Conditioning
General Local
air-conditioning air-conditioning
Clean, high-quality air-conditioning is essential Air-conditioning in necessary spaces only: PAU Series product line up Notice the differences!
for current manufacturing processes. Lower investment
Necessary
PAU Unit vs. General Air-conditioning
The requirements of maintaining high quality for all With the "PAU Series" local air-conditioning unit, Apiste space only
products and materials are increasing in all processes provides an air-conditioning system suitable for your specific PAU unit General air-conditioning
in all industries, especially electronic components, applications. You pick out the equipment, processes, and Temperature control
Approx. ±0.05 to 0.5°C ±2 to 5°C
error
LCDs, semiconductors, and precision equipment. spaces for which high-quality and precise
Consequently, ever higher levels of process control temperature/humidity control is really required. Humidity control error ±2% RH or less ±5 to 10% RH
and environment improvement are required. Air-conditioning is implemented only for those spaces which Lower
need it, eliminating excessive investment and maintenance. initial cost
Initial cost Low High
Changes can be made to only the spaces which require it,
instead of the entire area. As a result, both the installation and Running cost Low High
construction costs can be significantly reduced. Precise local air-conditioning unit
Maintenance Easy Intensive
The PAU Series air-conditioning unit offers two product lines:
the PAU-S Series, a compact and lightweight air-cooled type
High accuracy Individual unit control Possible Impossible
Air-conditioning in limited spaces: refrigeration system for easy installation; and the PAU-W
and Series, a water-cooled type refrigeration system intended for
Weak points of conventional cleanrooms More accurate and reliable operation medium-to-large spaces offering silent and clean operation
quality without discharging air or heat immediately outside the
• Excessive cleaning and heavy investment Naturally, the more the air-conditioned space is limited, the controlled zone. PAU Unit vs. Home Air-conditioner
The models can also be divided into two types according to
A cleanroom is designed to control all air within that higher the accuracy of temperature/humidity control in the control target: Temperature control only or temperature and PAU unit Home air-conditioner
room. As a result, the same air-conditioning level is space is achieved. Moreover, the influence of outside air and humidity control. The humidity controlling model can further
Low-pressure High-pressure
maintained for all production processes in that space. ambient temperature/humidity is minimized, so Apiste makes be divided into humidifying, dehumidifying, and both. Refrigeration cycle
Temperature/ Wide range of models are available according to the
refrigeration cycle refrigeration cycle
The result, however, is sometimes excessive cleaning it easy to create a space with extremely stable and reliable humidity/ application and environment, from a compact, small air Simplified inverter
because the standard must be set for the equipment air-conditioning. volume model (1 m3/min) to a large-sized, large air volume Control method PID control
control
cleanliness model (120 m3/min).
or process requiring the highest cleanroom class in
that space. In reality, some equipment or processes Defrosting *1 Not provided Provided
in a cleanroom require higher, and some lower, Warm/cool air Manual switching between
classes of cleanroom. Therefore, total Flexible system makes it easy to manage Temperature control simultaneous control cooling and heating
air-conditioning of a production space requires change demands Flexible Temperature control
±0.05 to 0.5°C ±2 to 3°C
unnecessarily heavy investment. error
system
The manufacturing environment around equipment and
expansion Installation Easy Difficult
• Outside air condition processes needs to be flexible to satisfy the fast-changing
In general, a cleanroom takes fresh air in from the production line demands for manufacturing quality. With a
Fan replacement Possible Impossible
outside to the amount of at least 15 to 20% of the local air-conditioning system, a range of changes and needs
*1: Defrosting
entire air volume. Consequently, the air-conditioning can be addressed easily and quickly, from cleaning and Clean fan unit When a refrigerator is continuously operated for a certain amount of time, the
conditions in the room greatly depend on the outside temperature control to system expansion, increased quality The PAU-FFU Series clean fan unit is available in a range of cooling coil may freeze. To prevent this, a typical air-conditioner includes a
air conditions, i.e. the ambient temperature and temperature/humidity control, and stricter cleanliness. Quick sizes from compact, small air volume models (1 to 5 m3/min) circuit to prevent frost.
implementation to bigger, large air volume models (11 to 17 m3/min). The
humidity in the factory. The larger the space is, the PAU-FFU Series includes a newly developed, special wind
more difficult it is to maintain the same temperature speed sensor for the clean fan unit as well as a microcomputer PAU Unit vs. Home Humidifier
PCB with clogging alarm.
and humidity as the seasons change.
Easy disassembly, transportation, The user-friendly design allows easy replacement of HEPA PAU unit Home humidifier
Even in a cleanroom, the temperature and humidity filters. Of course, these fan units can be easily connected with
control may not be reliable enough to satisfy the
and installation the precision air-conditioning unit. Control method PID control ON/OFF control
requirements of some equipment or processes. Easy
Since every item is an independent unit for a specific purpose, Vaporization method Electrical Ultrasonic/electrical
• Operating cost such as temperature/humidity/cleanliness or clean space, it installation
Condensation,
A cleanroom requires significant labor cost for can be easily disassembled, transported, and reinstalled Humidity control Fine vapor temperature fluctuation
continuous maintenance as well as various operating anywhere as necessary.
Water particle size Small Large
costs such as electrical power and HEPA filters. Anyone can establish a precision cleaning and
air-conditioning system anytime without the need for expert
Humidity control error ±2% RH or less ±10 to 20% RH or less
knowledge. Disassembly/
Significant reinvestment is required
to match rapid changes transportation Capacity setting As desired No or limited setting
possible
Generally, products and materials in leading edge Minimum maintenance and utility costs Installation Direct installation
Direct installation
impossible
industries are replaced every two to three years. Such
Electricity charges are less compared with a cleanroom or Clean booth & clean bench Water supply Automatic Manual
improvements in the quality of products and
general air-conditioning system. The maintenance costs for Apiste's original standard clean booth is available in various
manufacturing pose a double risk to companies: high Lower sizes in multiples of 50 cm2. Custom sizes are also available
replacing expensive HEPA filters can also be reduced. Fan replacement Possible Impossible
repeated investment and increased manufacturing operating
for special needs. We also offer different types of clean
Furthermore, the maintenance and operating costs for benches and air showers on a custom order basis.
costs. costs In addition, there are essential peripheral parts such as sets of
air-conditioning and other units can be reduced. Anti-scaling measures Automatic drainage No drainage mechanism
It is a fact that full-scale general air-conditioning flexible ducts, connection boxes, discharge chamber, return
chamber, and diffuser. * These tables show approximate comparisons for your reference. Details vary
systems such as cleanrooms incur significant costs depending on the individual model.
for their installation, construction, and renovation.
3 4

4. PAU -series Digest Catalog
Application Examples 1
Electric machinery/
LCD/Semiconductor
Temperature and
Temperature and humidity control for
humidity control for spin coaters or other
cream soldering printers coating systems
If the inside temperature or
Cream solder is greatly affected by the
humidity fluctuates in a coating or
fluctuation in temperature and humidity,
resulting in changes in viscosity. Improperly bonding system used for the
controlled temperature may cause smears, manufacturing line of DVD,
drip, or fade; and improperly controlled CD-R/RW, or other recording
humidity may cause splash or static electricity medium, the application of resist
charges to build up. The air in the system material or adhesive and the
must be precisely controlled throughout the viscosity of coating material
year. change accordingly. Year-round
high-quality air-conditioning is
required to ensure uniform and
stable film thickness.
Preventing static electricity in
glass panel process
In the LCD manufacturing process,
static electricity may cause serious
problems. In processes prone to
electrostatic failures, problems can
be prevented by maintaining high
humidity.
Relationship between ambient
humidity and static electricity
Withstand voltage (kV)
3
2
Temperature and 1
humidity control for
0
LCD/PCB stepper 40 60 80
Breakdown rate of ICs by month
100 %
Breakdown rate index
and lithography 5
4
Before humidification
Fluctuation in the temperature and 3
2
humidity in the system may cause
1
expansion or contraction of the mask.
0
High-quality, continuous air-conditioning Apr May Jun Jul Aug Sep Oct Nov Dec Jan Feb Mar
is required. Humidity vs. Breakdown rate of ICs
6
Breakdown rate index
4
2 * Static electricity is easily generated in winter when air is dry or in other low
humidity environments. These graphs clearly show that breakdown rate,
0 electrostatic discharge (ESD) and related problems can be reduced by
50 60 70 80 90 % keeping humidity at or above a certain level.
5 6

5. PAU -series Digest Catalog
Application Examples 2
Electric machinery/ Other
LCD/Semiconductor
Temperature control for
developer
When the material expands or contracts due
to temperature change, the pattern may
become misaligned.
Temperature control for electron Temperature and humidity control
microscopes, chromatographs, for medicinal pill machines or
and other analytical instruments molding presses
With normal air-conditioning, the measurement accuracy of When the powder molding process such as for ceramics or
a mass/component analyzer, such as an electron medicines is subject to high humidity, defective products with
microscope or a gas chromatograph, is susceptible to breaks or cracks may result. It is vital to maintain low
seasonal variations or other disturbances. To ensure higher humidity inside the system.
analytic accuracy, it is necessary to improve the temperature
management of the facility environment and to maintain a
stable air-conditioned environment year round.
Temperature and humidity Air-conditioning for 3D Maintaining constant temperature and
control of storage cabinets measuring instruments low humidity within
In a cabinet which temporarily stores IC or
Image processing equipment precision mold
or 3D measuring instruments storage lockers
other electronic components and materials,
are easily affected by
specific levels of temperature and humidity
changes in ambient The PAU Series is installed
should be maintained according to the
temperature, resulting in the in the existing storage locker
contents.
expansion or contraction of to prevent molds from
jigs or fluctuations in rusting.
measurement accuracy.
Air-conditioning for tensile Air-conditioning for laser measuring
testing machines machines
The material and the A characteristic of laser
measurement conditions based measuring systems is
may change due to the that they are prone to errors
fluctuation in temperature due to temperature changes
and humidity. because the wavelength of
the system changes
Temperature control for accordingly.
ultra-precision processing
machinery Desktop air-conditioning for testing Air-conditioning during environmental or
In an ultra-precision process which requires
accuracy on the submicron order, minute
material characteristics temperature performance
changes in temperature causes expansion or The change in material testing of batteries
contraction of the equipment or workpiece, characteristics due to the
The life and performance of
seriously affecting the product quality. change in temperature and
a battery change depending
humidity can be prevented.
on temperature.
Temperature evaluation can
be conducted easily from
laboratory to laboratory.
7 8

6. PAU -series Digest Catalog
Precision Air-Conditioning & Cleaning Products
Innovative heater-free heating coil
Precision Air-Conditioning Unit PAU Series Reuses exhaust heat produced during the cooling cycle
Most accurate temperature and Heater-free design significantly reduces Significantly reduces exhaust
humidity control in its class energy consumption by up to 40% when heat by 40% compared with
compared with conventional models conventional models
Air-conditioning accuracy, which Apiste values most, has been improved While conventional precision air-conditioning systems use a By using waste heat for temperature control, the
further with a new control PCB and sensors developed by Apiste. heater to control temperature during reheating, the PAU-AZ2000SE-DR reduces heat exhaust from the
Various new and more precise control functions have been added. PAU-AZ2000SE-DR reuses the exhaust heat produced during condenser by up to 40%.
heat exchange in the cooling cycle. This fully heater-free The PAU-AZ2000SE-DR reduces the influence on
Temperature and humidity control accuracy: design achieves a significant 40% reduction in energy surrounding manufacturing conditions and test
consumption when compared to conventional models. Not environments, and is able to suit any environment.
±0.1°C or ±0.2°C and ±2% RH only is it eco-friendly, but the running costs are significantly
Newly developed temperature and humidity sensor Dual CPU reduced as well.
Precision Precision
controlled air
40%
controlled air Reduction
A newly developed, compact sensor is incorporated to detect in energy
Heating unit
Cooler
both temperature and humidity. Its small head reliably detects Newly developed ISC use:
conditions surrounding the target. Even in an environment
40%
with high-velocity airflow, with high error rates among Intelligent Sensing Control Reduction
conventional models, the innovative body design eliminates Heating unit in exhaust
Compressor
detection errors to the greatest extent possible. The design heat:
and the advanced sensing circuit incorporating a 12-bit A/D Newly developed high-speed
converter have achieved accuracies
of ±0.2°C/±2% RH. This sensing automatic calibration
Radiator
circuit also supports a platinum
Cooler
First in industry
resistance thermometer, enabling
Electronically
control with ±0.1°C accuracy. controlled
* The platinum resistance thermometer is optional. valve
Cooler
Various self-diagnosis functions Low-pressure refrigeration method Real-time arithmetic processing High stability and reliable controllability
The low-pressure refrigeration method provides constant Dual CPU Newly developed ISC
and excellent operability stable control because the method is independent of the
effects of air volume and ambient temperature changes.
Multitasking that utilizes a complete 32-bit CPU with built-in DSP ISC (Intelligent Sensing Control) is our newly developed original product which
and a high-speed co-processor to perform arithmetic processing uses dedicated PID control (a basic program for general-purpose temperature
This allows the precision air-conditioner to run sequentially of large volumes of data immediately in real time. The latest control) for precision air-conditioning. Algorithms for the control system have
Newly designed operation panel with "Multi-indicators". via non-defrosting operation (without having to periodically technologies required for high-precision and high stability, such been developed based on a huge amount of accumulated data. The overshoot
More variety of diagnosis functions to ensure safety and suspend operation to remove frost). as newly developed high-speed auto-tuning and Intelligent pattern of the conventional PID control is dramatically enhanced, and provides
reliability Sensing Control, can be processed at extremely high speed. more stability and controllability than ever before.
Optimal low-temperature range
Measured
value
Advanced self-diagnosis functions & Overshoot
alarm functions Conventional
Set value
Small air
Multi LED indicators show volume fan motor ISC
operating status at a glance
High-pressure refrigeration method
Time
When refrigerant pressure is increased, the temperature 10 times the arithmetic processing
Large LED display with inside the refrigeration coil becomes extremely low.
character height of 15 mm Therefore, if the refrigeration coil does not receive large speed of conventional models First in industry Prevented excess overshoot
volumes of air, it may freeze up. In addition, ambient Newly developed high-speed auto-tuning Newly developed two-step humidity control
temperature change may also cause frosting. The above
Dual processor configuration, containing both a CPU with built-in 32-bit DSP Water temperature inside the humidifier is monitored constantly.
reasons are generally the cause of necessary down-time
Reliable operation and a high-speed co-processor. Configured to perform arithmetic processing If the water temperature reaches a certain temperature, the PID
(operation suspended) to remove frost.
by several hundred steps at once to dramatically reduce the time required for control starts. Unlike with general methods, this prevents
auto-tuning. Even if sample data is unstable due to outside disturbances, the excess overshoot and provides stable humidity control.
Excess-cooling low-temperature range optimal PID value is determined immediately based on the observed waveform.
Conventional temperature control Two-step humidity control
Auto-tuning under environments with many disturbances
Conventional Threshold (%)
Auto- Auto- Auto- Auto- Auto- Auto-
tuning ERROR tuning ERROR tuning ERROR tuning ERROR tuning ERROR tuning
Threshold (%)
A-Type Preset temperature
Auto- Auto- Com- of water inside the tank (%)
tuning ERROR tuning ERROR plete Reliable auto-tuning
Large air volume fan motor Data retention Data retention Autocorrelation calculation
Time t t
9 10