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ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
SOLSTICE
Advanced Electroplating Tools
for the Rest of Us
1
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
The big equipment manufacturers
focus on big leading-edge 300mm tools —
which are too expensive for many users
Many users just need a good solid tool
that’s designed for ≤200mm substrates…
At a much more affordable price!
2
Addressing a major problem
in the equipment industry…
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
New Solstice plating systems address
those needs specifically
Utilizing today’s advanced technology
Addressing 200mm and smaller substrates
And with significantly reduced pricing —
Half compared with the Big Guys!
3
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
Three complementary Solstice tools:
Model LT
for Development
2 Chambers
4
Model S8
for Volume Production
4-6-8 Chambers
Model S4
for Production
4 Chambers
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
Solstice LT —
A powerful plating development tool
Manual wafer load/unload
Automated recipe execution
4-inch to 8-inch wafer capability
One or two chambers and chemistries
Chambers and software match S4/S8
5
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
Solstice S4 and S8 —
Automated volume production tools
Cassette-to-cassette automation
Up to 75wph throughput
Automated recipe execution
Up to 8 chambers and chemistries
4-inch to 8-inch wafer capability
6
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
Solstice gives major advantages
over wet bench plating
Better wafer uniformity
Less wafer-to-wafer variation
Reduced scrap
Less human exposure to chemicals
Faster plating rates
Higher yields
7
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
8
Solstice serves many market sectors
that use ≤200mm substrates
MEMS
LEDs
Sensors
Power
RF
Photonics
Wafer Level Packaging
Analog / Discrete
Automotive
And more…
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
Applying today’s technology to
today’s process needs
Ni, Cu, Au, Sn, Ag, Alloys
Cu RDL, Cu Pillar, Cu Damascene
TSV Fill, Cu or NiW
Au Pads and Contacts, Cyanide or Sulfite
Lead-free Solders
Indium, Permalloy, Exotics
Electrolytic, Electroless and Anodization
9
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
Solstice is Demonstrated at ClassOne’s world-class
applications and product development lab
10
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
Designed and driven by a world-class team of wet
processing professionals
11
Win Carpenter
VP, Sales
27+ yrs wet processing
Byron Exarcos
President
11+ yrs wet processing
Tim McGlenn
VP,
Development
26+ yrs wet processing
Kevin Witt
VP, Technology
11+ yrs wet processing
Dean Campbell
VP, Manufacturing
20+ yrs wet processing
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
Backed by world-wide sales and support
12
Atlanta, GA
Kalispell, MT London, UK
Singapore
Shanghai, China
Israel
ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us
Solstice: A unique new class
of plating tools that deliver…
The performance you need
At a price you can afford!
13

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Solstice Plating Introduction (Web Version)

  • 1. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us SOLSTICE Advanced Electroplating Tools for the Rest of Us 1
  • 2. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us The big equipment manufacturers focus on big leading-edge 300mm tools — which are too expensive for many users Many users just need a good solid tool that’s designed for ≤200mm substrates… At a much more affordable price! 2 Addressing a major problem in the equipment industry…
  • 3. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us New Solstice plating systems address those needs specifically Utilizing today’s advanced technology Addressing 200mm and smaller substrates And with significantly reduced pricing — Half compared with the Big Guys! 3
  • 4. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us Three complementary Solstice tools: Model LT for Development 2 Chambers 4 Model S8 for Volume Production 4-6-8 Chambers Model S4 for Production 4 Chambers
  • 5. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us Solstice LT — A powerful plating development tool Manual wafer load/unload Automated recipe execution 4-inch to 8-inch wafer capability One or two chambers and chemistries Chambers and software match S4/S8 5
  • 6. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us Solstice S4 and S8 — Automated volume production tools Cassette-to-cassette automation Up to 75wph throughput Automated recipe execution Up to 8 chambers and chemistries 4-inch to 8-inch wafer capability 6
  • 7. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us Solstice gives major advantages over wet bench plating Better wafer uniformity Less wafer-to-wafer variation Reduced scrap Less human exposure to chemicals Faster plating rates Higher yields 7
  • 8. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us 8 Solstice serves many market sectors that use ≤200mm substrates MEMS LEDs Sensors Power RF Photonics Wafer Level Packaging Analog / Discrete Automotive And more…
  • 9. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us Applying today’s technology to today’s process needs Ni, Cu, Au, Sn, Ag, Alloys Cu RDL, Cu Pillar, Cu Damascene TSV Fill, Cu or NiW Au Pads and Contacts, Cyanide or Sulfite Lead-free Solders Indium, Permalloy, Exotics Electrolytic, Electroless and Anodization 9
  • 10. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us Solstice is Demonstrated at ClassOne’s world-class applications and product development lab 10
  • 11. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us Designed and driven by a world-class team of wet processing professionals 11 Win Carpenter VP, Sales 27+ yrs wet processing Byron Exarcos President 11+ yrs wet processing Tim McGlenn VP, Development 26+ yrs wet processing Kevin Witt VP, Technology 11+ yrs wet processing Dean Campbell VP, Manufacturing 20+ yrs wet processing
  • 12. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us Backed by world-wide sales and support 12 Atlanta, GA Kalispell, MT London, UK Singapore Shanghai, China Israel
  • 13. ClassOne Technology: Advanced Wet Processing Equipment for the Rest of Us Solstice: A unique new class of plating tools that deliver… The performance you need At a price you can afford! 13