The Everhart-Thornley detector, a secondary electron detector, is an essential component in scanning electron microscopy (SEM). SEM is a powerful imaging technique that uses a focused beam of electrons to generate high-resolution images of a sample's surface. The Everhart-Thornley detector is specifically designed to detect secondary electrons produced during this process.
6. • The detector is above and close to the sample.
• A collector electrode is placed in front of the aluminium-coated scintillator.
• A voltage is applied to the collector to create an electric field that collects
secondary electrons.
• The guided secondary electrons hit the scintillator, causing light emission.
• The light guide tube directs the emitted light to a PMT.
• In the PMT, the light is converted into electrons again, then multiplied.
• The multiplied electrons reach the PMT anode, generating a voltage signal
amplified by an electric circuit connected to the PMT.
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8. Use in High-Resolution SEM:
• In high-resolution SEM, where the specimen is placed inside or close to the
objective lens, the ET detector is positioned inside the microscope column.
• This positioning allows for collecting secondary electrons generated in or entering
the objective lens.
• The ET detector is known for its high response speed, allowing for fast scanning
or movement of the specimen stage without blurring or time lag.
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