14. Semi F47-0606
F47-0606
Facilities
47- seq. number
06- month
Semiconductor
06- year
Equipment and
Materials
International
August, 2006 Sags Happen 14
15. Semi F47-0606
Primary focus of the specification is Process Equipment:
Etch Equipment (Dry & Wet)
Film Deposition Equipment (CVD & PVD)
Thermal Equipment
Surface prep and clean equipment
Photolithography Equipment (Scanners, Stepper & tracks)
Ion Implant equipment
Metrology equipment
Automated Test equipment
Chemical mechanical polishing/planarization equipment
Note: All process tools should be considered.
August, 2006 Sags Happen 15
16. Semi F47-0606
Secondary focus of the specification is subsystems:
Power Supplies
RF Generators
Ultrasonic Generators
Computers & communication systems
Robots & factory interfaces
AC contactor & relay coils
Chillers and cryo pumps
Pumps & blowers
Adjustable speed drives
Note: subsystems can cause primary tools to shut off due to interlocks
August, 2006 Sags Happen 16
18. What does it mean to:
USERS OEM’S FACILITIES
Best practice for tool uptime Mandated by user No shutdowns on Chillers,
Balance of cost vs. protection Ride-thru, no Batteries compressors, Vacuum pumps,
No damaged tools Market advantage exhaust fans
Increased Wafer Production Option: up charge $$$ Fewer internal complaints from
Less wafer rework Third Party Validation Reduced maintenance battery free
Improved quality Extended life on equipment: drives
power supplies, motors, ect…
August, 2006 Sags Happen 18
23. What is the I-Grid?
• Independent Web based power grid
monitoring network for Voltage Sags
• Over 2,500 monitors tracking voltage and
frequency in real time around the world
• Synchronized to GMT for absolute
“sequence of events” monitoring
• Linked to National Weather Service
August, 2006 Sags Happen 23
25. Power Quality is defined in Milliseconds
70
60
50 98% of events are
less than 2 seconds
40
30
20
10
0
<.1 sec <.25 sec <.5 sec <.75 sec < 1 sec < 1.5 sec < 2 sec < 5 sec < 15 sec
Significant power quality events (<80% nominal) from major I-Grid customers over the past 3 years (22,038 total events).
August, 2006 Sags Happen 25
27. Phoenix Metro Area (69% sag)
8 monitors recorded an event on 12/08/2004 within one tenth of a second
August, 2006 Sags Happen 27
28. Power Grid is Interconnected
August, 2006 Sags Happen 28
29. Close-up on the Grid: Coors Brewing
August, 2006 Sags Happen 29
30. Weather
During the recent Northeast Blizzard, 74 significant (< 80%) Voltage Sags were
recorded by I-Sense monitors ranging from Canada to Virginia
February 12, 2006 Northeast Blizzard Radar Image
Events occurred in Canada, New York, New Jersey, Delaware, Maryland and Virginia
August, 2006 Sags Happen 30
31. Example PQ Report – Auburn, AL – 2005
Summary of Events:
All Events Figure 1. Summary of Events: Multiple Monitor Average
- During the calendar year 2005, 3 manufacturing locations in the Auburn, AL
area recorded an average of 68 power disturbances per site.
2% - Of all the events, 96% could have been protected by the DYSC technology.
- Average disturbances per monitor are listed below:
2%
Average Disturbances per Monitor: 68
Events Less than Two Seconds 64.6 3 Monitors
96%
Within Greater
Events between 2 Seconds and 15 minutes 1.6 Auburn Area
Events Greater than 15 minutes 1.6
Figure 2. Summary of Events: Less than Two Seconds
-Of the average 64.6 disturbances per site that were below two seconds, it
is likely that 22.6 events did not impact production, 24 events were probable
Average Disturbances Per Monitor
production mishaps, and 18 events definitely caused production downtime. Less than Two Seconds
Event Impact Definition 25
OK: Typical automation equipment will not be affected by these
events. Some very sensitive equipment may be affected, but in 20 24
general, these events should not be counted as having an
impact on a typical automation system. 22.6 18
15
Probable: Typical automation equipment such as relays,
solenoids, contactors, PLCs, and HMI, screens will usually 10
“error out” or trip off during these events and many times are
blamed on faulty automation equipment. 5
Definite: Almost all automation equipment will be impacted by
0
August, 2006 few electrical devices live through an event
these events. Very
Sags Happen 80-88% 60% - 80% Below 60% 31
in this range except possibly the lights
OK Probable Definite
32. What Causes Voltage Sags?
Shouldn’t the Utilities Clean up their act?
August, 2006 Sags Happen 32
33. Did You Know…
Power Quality phenomena costs the continuous process and
fabrication industries in this country over $100B annually.*
Today’s automated factory has more computing power than the
average IT Department and factories don’t run well on “dirty power.”
Premium Power is not Clean Power
98% of all “dirty power anomalies” are voltage sags lasting less than
2 seconds
Voltage sags cause extensive unscheduled downtime
August, 2006 Sags Happen 33
