MECAL provides vibration measurement and analysis services, as well as structural improvement and vibration isolation products for precision manufacturing facilities. Their product line includes fixed machine support frames, active isolation pedestals, active inertial dampers, and turn-key solutions. MECAL's services include vibration measurements, stiffness analysis, structural stiffening designs, and installation and verification of isolation products to meet customer specifications.

1. > Services and products
Services: Measurements / analysis
Structural improvement
Products: Fixed pedestals
Machine Support Frames (MSF)
Active isolation pedestals
Active inertial damper
MECAL Pantheon / Turn-Key Solutions

2. > Services and products
Services:
Measurements / analysis
Measurements
MECAL can perform vibration
measurements, stiffness
measurement and complete
modal building
measurements, with custom
designed measurements
systems MECAL SpecTest and
MECAL SpecGuard.
Real solutions
MECAL provides the whole
solution, from measurements to
design to production to installation
and verification.
Some solutions can be:
• Tracing and isolating the
vibration source
• Floor stiffening
• Active vibration isolation
Analysis
Measurements can be
compared with vibration
specification for different
machines.
MECAL uses frequently
measurement results, FEM
and dynamic calculations to
evaluate specific solutions
for the situation.
MECAL Pantheon / Turn-Key Solutions

3. > Services and products
Services:
Structural improvement
Building stiffness
Vibration levels depend on
the vibration sources (Force)
and the stiffness of the
building. By improving the
stiffness of a buiding or the
floor of the building, general
vibration levels will drop and
also the vibration levels due to
forces of the machines on that
floor will drop significantly.
Solutions that work
• MECAL provides the whole
solution, from measurement to
design to production to
installation and verification.
• MECAL has experience in
installing significant stiffening
of complete floor-fields in an
operating cleanroom, without
disturbing the cleanroom
processes.
MECAL Pantheon / Turn-Key Solutions

4. > Services and products
Products:
Fixed pedestals / Machine Support Frames (MSF)
Usage
High stiffness, concrete or
steel/concrete MSF becomes
a part of the fab-floor after
installation and provides the
same stiffness and low
vibration levels as the fab-
floor.
Precision inserts for machine
interface have been
integrated. Steel parts
provide space underneath
the MSF where needed.
Why MECAL MSF?
• MECAL provides the whole
project from assessment to
installation and verification.
• MECAL is the expert on
vibrations and dynamics and
can provide a solution for all
problems.
Project
MECAL will first asses if the
intended position for a
machine in the fab is
suitable by means of a site
survey. If the vibration level
and stiffness are good, a
MSF will be designed or
customized to the specific
machine and location.
The MSF will be produced,
engineered, installed and
verified by MECAL.
Verification measurements
will be realized to guarantee
the specifications, such as
vibration levels, stiffness and
dimensions.
MECAL Pantheon / Turn-Key Solutions

5. > Services and products
Products:
Active isolation pedestals
Usage
When vibration levels on the
fab floor are too high, an
active vibration isolation
Machine Support Frame can
be a solution. Especially
some metrology tools can
have very stringent vibration
specifications. A MECAL
active isolation MSF can
provide isolation from floor
vibrations in 6 degrees of
freedom with relatively good
stiffness.
Why MECAL active isolation
MSF?
• MECAL patented technology
provides industry-bests
isolation at low frequencies;
up to a factor 100.
• MECAL technology provides
good stiffness, which is
important for tools with
automatic wafer loading
systems.
• Very low vibration levels can
be achieved due to low noise
design of the system.
Project
MECAL will start with
measurements of the
vibration levels in the fab.
If it is possible, we will find
the vibration source and can
do suggestions to isolate the
source.
In case a vibration isolation
system is still needed, it will
be designed for the situation
with standard components.
MECAL Pantheon / Turn-Key Solutions

6. > Services and products
Products:
Active inertial damper
Usage
When vibration levels
are too high on a floor
(field), MECAL has a
‘drop-in’ solution. The
active inertial damper
is a small device, which
will dampen the
vibrations on the floor
in one direction on
that point. In practice
it is possible to lower
the vibration levels of
a whole floor field with
a factor 3 with only
two or three active
inertial dampers.
Why MECAL active inertial damper?
• Whole floor field will benefit
• Small space needed, easy installation.
• Suppression of floor vibration, without loss of stiffness
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1x1-30Hz original, max = 28.9 um/s
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1x1-30Hz shaker on, max = 5.5 um/s
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1x1-60Hz original, max = 12.7 um/s
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20 N
1x1-60Hz shaker on, max = 18 um/s
23 N
20 N
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Without active inertial damper With active inertial damper
MECAL Pantheon / Turn-Key Solutions
Floor
Vibrating
machine
Precision
machine
Floor
Vibrating
machine
Precision
machine
MECAL
Active
Inertial
Damper