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Virtual Project on the History of ALD: Introduction
•GOAL: generate a common view on the early evolution of ALD in a
collaborative project by the whole ALD community
•UNKNOWNS: ALD done under the name Molecular Layering (ML)
made in the Soviet Union starting from 1960’s
•INVITATION TO PARTICIPATE: www.aldpulse.com/node/189,
signed by Riikka L. Puurunen VTT, Aziz Abdulagatov NIST, Jonas
SundqvistFraunhofer IPMS-CNT, AnninaTitoffaldpulse.com

 Anyone welcome to join!
 Participation: read & comment on the significance of at least one
historical publication that interests you. You may also help
building a complete list of early publications, here.
 Different backgrounds of the participants beneficial
 Open for contributions until the end of 2013
 To be carried out in atmosphere of openness, respect and trust
“Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare

13.1.2014
How will the results be published?
• First: POSTER at the 12th Baltic ALD conference
• Helsinki, Finland, May 12-13, 2014, see
http://www.aldcoe.fi/bald2014/
•CONTENTS: Both the literature and the comments will be listed.
•AUTHORSHIP:
•Everyone, who contributed, will be an author
• 10 to 100 authors expected, and even more would be ok
• Author list will be alphabetical, on the basis of the last name, to
highlight that everyone’s contribution is of equal value
Full PUBLICATION PLAN in http://aldpulse.com/node/248, for example:
•

Poster at AVS-ALD 2014 in Kyoto, June 2014

•

Review article (open authorship!)

•

Updating Wikipedia

“Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare

13.1.2014
Additional material related to the
“virtual project on the history of ALD”

“Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare

13.1.2014
Timeline (1/2):
• Public discussions in LinkedIn in the group “ALD – atomic layer deposition”
• “ What are the "Molecular layering" papers by Koltsov from "early 1960's"? “

• Private discussions from May 2013 on by RiikkaPuurunen and Aziz Abdulagatov, soon
joined by Jonas Sundqvist and AnninaTitoff
• Planning how to realize a world-wide open effort

• ALD History LinkedIn subgroup created June 20, 2013
• 83 members as of 4.1.2014

• ALD History Mendeley group opened June 25, 2013
• Introduction and Invitation to participate published July 25, 2013, link
• Announcement of the project at ALD 2013, San Diego, July 30, 2013
•SlideShare for use August 18, 2013 (ALD 2013 presentation, link)

• First Comment by a visitor in the Google file August 24, 2013
•Introduction slides uploaded for free use in SlideShare August 31, 2013, link
• Includes description of the publication plan for BALD 2014

• Announcement of the project at MME 2013, Helsinki, Sept 2, 2013
• Announcement of the project at EuroCVD-19, Varna, Sept 5, 2013

• Wikipedia, “atomic layer deposition”, updated Oct 16, 2013
“Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare

13.1.2014
Timeline (2/2):
• Publication plan published in http://aldpulse.com/node/248 , Oct 18, 2013
• Presentation on the history of ALD in St Petersburg, Nov 15, 2013 (copy of slides
provided on request, please ask Riikka)
• Virtual Project on the History of ALD continues with RiikkaPuurunen, Jonas Sundqvist
and AnninaTitoff, Dec 10, 2013
• Publication Plan v2.0, link here, Jan 13, 2014
Collecting of authors for the posters at Baltic ALD in Helsinki and AVS-ALD 2014
in Kyoto is on-going.

 Interested to participate? Please contact RiikkaPuurunen and Jonas
Sundqvist, Riikka @vtt.fi and Jonas @cnt.fraunhofer.de (firstname.lastname@...)

“Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare

13.1.2014
About the logo of the “virtual project”
• Logo has been designed by RiikkaPuurunen (June 2013) for use in
the LinkedIn ALD History group as well as other communication
related to the virtual project
• The history of ALD is not black and white, but better described in
shades of grey; thus, the logo was made in shades of grey.
•With this virtual project, we are in practice (re-)writing the early
history of ALD on the ML works, so “history” is in a handwriting-type
font

“Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare

13.1.2014
About how to use this file
•This is a slide-formed introduction to the virtual project, to be kept
and updated in SlideShare at least during fall 2013.
• This is aimed for introducing the project in class, at conferences, …,
and can be used by anyone interested
• You may download a copy of the file and use it in the way you want
(e.g. remove the for-your-purpose unnecessary slides)
• If you see a need for change in the contents, please do not modify
the contents yourself, but leave a comment to the file in Slideshare in
the Comments section after this slide  we can make and upload an
improved version.
•When there is new significant info that should be made available in
this presentation, this slide set will be updated and re-loaded in
SlideShare
• Please consider the date indicated the “version number”

“Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare

13.1.2014

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ALD history project: open introduction

  • 1. Virtual Project on the History of ALD: Introduction •GOAL: generate a common view on the early evolution of ALD in a collaborative project by the whole ALD community •UNKNOWNS: ALD done under the name Molecular Layering (ML) made in the Soviet Union starting from 1960’s •INVITATION TO PARTICIPATE: www.aldpulse.com/node/189, signed by Riikka L. Puurunen VTT, Aziz Abdulagatov NIST, Jonas SundqvistFraunhofer IPMS-CNT, AnninaTitoffaldpulse.com  Anyone welcome to join!  Participation: read & comment on the significance of at least one historical publication that interests you. You may also help building a complete list of early publications, here.  Different backgrounds of the participants beneficial  Open for contributions until the end of 2013  To be carried out in atmosphere of openness, respect and trust “Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare 13.1.2014
  • 2. How will the results be published? • First: POSTER at the 12th Baltic ALD conference • Helsinki, Finland, May 12-13, 2014, see http://www.aldcoe.fi/bald2014/ •CONTENTS: Both the literature and the comments will be listed. •AUTHORSHIP: •Everyone, who contributed, will be an author • 10 to 100 authors expected, and even more would be ok • Author list will be alphabetical, on the basis of the last name, to highlight that everyone’s contribution is of equal value Full PUBLICATION PLAN in http://aldpulse.com/node/248, for example: • Poster at AVS-ALD 2014 in Kyoto, June 2014 • Review article (open authorship!) • Updating Wikipedia “Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare 13.1.2014
  • 3. Additional material related to the “virtual project on the history of ALD” “Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare 13.1.2014
  • 4. Timeline (1/2): • Public discussions in LinkedIn in the group “ALD – atomic layer deposition” • “ What are the "Molecular layering" papers by Koltsov from "early 1960's"? “ • Private discussions from May 2013 on by RiikkaPuurunen and Aziz Abdulagatov, soon joined by Jonas Sundqvist and AnninaTitoff • Planning how to realize a world-wide open effort • ALD History LinkedIn subgroup created June 20, 2013 • 83 members as of 4.1.2014 • ALD History Mendeley group opened June 25, 2013 • Introduction and Invitation to participate published July 25, 2013, link • Announcement of the project at ALD 2013, San Diego, July 30, 2013 •SlideShare for use August 18, 2013 (ALD 2013 presentation, link) • First Comment by a visitor in the Google file August 24, 2013 •Introduction slides uploaded for free use in SlideShare August 31, 2013, link • Includes description of the publication plan for BALD 2014 • Announcement of the project at MME 2013, Helsinki, Sept 2, 2013 • Announcement of the project at EuroCVD-19, Varna, Sept 5, 2013 • Wikipedia, “atomic layer deposition”, updated Oct 16, 2013 “Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare 13.1.2014
  • 5. Timeline (2/2): • Publication plan published in http://aldpulse.com/node/248 , Oct 18, 2013 • Presentation on the history of ALD in St Petersburg, Nov 15, 2013 (copy of slides provided on request, please ask Riikka) • Virtual Project on the History of ALD continues with RiikkaPuurunen, Jonas Sundqvist and AnninaTitoff, Dec 10, 2013 • Publication Plan v2.0, link here, Jan 13, 2014 Collecting of authors for the posters at Baltic ALD in Helsinki and AVS-ALD 2014 in Kyoto is on-going.  Interested to participate? Please contact RiikkaPuurunen and Jonas Sundqvist, Riikka @vtt.fi and Jonas @cnt.fraunhofer.de (firstname.lastname@...) “Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare 13.1.2014
  • 6. About the logo of the “virtual project” • Logo has been designed by RiikkaPuurunen (June 2013) for use in the LinkedIn ALD History group as well as other communication related to the virtual project • The history of ALD is not black and white, but better described in shades of grey; thus, the logo was made in shades of grey. •With this virtual project, we are in practice (re-)writing the early history of ALD on the ML works, so “history” is in a handwriting-type font “Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare 13.1.2014
  • 7. About how to use this file •This is a slide-formed introduction to the virtual project, to be kept and updated in SlideShare at least during fall 2013. • This is aimed for introducing the project in class, at conferences, …, and can be used by anyone interested • You may download a copy of the file and use it in the way you want (e.g. remove the for-your-purpose unnecessary slides) • If you see a need for change in the contents, please do not modify the contents yourself, but leave a comment to the file in Slideshare in the Comments section after this slide  we can make and upload an improved version. •When there is new significant info that should be made available in this presentation, this slide set will be updated and re-loaded in SlideShare • Please consider the date indicated the “version number” “Open Intro of the Virtual project on the history of ALD” by Riikka Puurunen in SlideShare 13.1.2014

Editor's Notes

  1. ALD is a fantastic technique that changes, for its part, the world we live in. As for any important technological invention, it is important and interesting to know, where ALD has come from. Most people present today are probably familiar with the invention by TuomoSuntola on Atomic Layer Epitaxy. This started the Finnish branch of ALD in 1974. In the first experiments, zinc sulfide was made from elemental precursors, in a rotary reactor (nowadays called “spacial ALD”). But how many are familiar with the work made by Aleskovskii and Kol’tsov on Molecular Layering in the Soviet Union, which started the Russian branch of ALD? These researchers worked in 1960’s, and they were there before Suntola. When exactly was ALD demonstrated there, and which was the first process? This is currently under discussion. Some people have also recently proposed that actually the nobelist Irvin Langmuir would have done ALD, much earlier – when and how, I think the details have not been brought up. Discussion on the history is popping up every now and then, because the history is poorly described. It would be valuable for the whole scientific ALD community, to have a widely accepted description of the early development of ALD. Creating such a description is a task is larger than any single individual can do, because we all look at the facts from our own background and narrow perspective. To create a common view on the history of ALD, we have started a totally open, collaborative project, where we hope to get scientists from different backgrounds participate and work together.We have been thinking how to realize such a project, and we think we have found a way that works. An open invitation to participate has recently been published at the internet site aldpulse.com.
  2. ALD is a fantastic technique that changes, for its part, the world we live in. As for any important technological invention, it is important and interesting to know, where ALD has come from. Most people present today are probably familiar with the invention by TuomoSuntola on Atomic Layer Epitaxy. This started the Finnish branch of ALD in 1974. In the first experiments, zinc sulfide was made from elemental precursors, in a rotary reactor (nowadays called “spacial ALD”). But how many are familiar with the work made by Aleskovskii and Kol’tsov on Molecular Layering in the Soviet Union, which started the Russian branch of ALD? These researchers worked in 1960’s, and they were there before Suntola. When exactly was ALD demonstrated there, and which was the first process? This is currently under discussion. Some people have also recently proposed that actually the nobelist Irvin Langmuir would have done ALD, much earlier – when and how, I think the details have not been brought up. Discussion on the history is popping up every now and then, because the history is poorly described. It would be valuable for the whole scientific ALD community, to have a widely accepted description of the early development of ALD. Creating such a description is a task is larger than any single individual can do, because we all look at the facts from our own background and narrow perspective. To create a common view on the history of ALD, we have started a totally open, collaborative project, where we hope to get scientists from different backgrounds participate and work together.We have been thinking how to realize such a project, and we think we have found a way that works. An open invitation to participate has recently been published at the internet site aldpulse.com.
  3. ALD is a fantastic technique that changes, for its part, the world we live in. As for any important technological invention, it is important and interesting to know, where ALD has come from. Most people present today are probably familiar with the invention by TuomoSuntola on Atomic Layer Epitaxy. This started the Finnish branch of ALD in 1974. In the first experiments, zinc sulfide was made from elemental precursors, in a rotary reactor (nowadays called “spacial ALD”). But how many are familiar with the work made by Aleskovskii and Kol’tsov on Molecular Layering in the Soviet Union, which started the Russian branch of ALD? These researchers worked in 1960’s, and they were there before Suntola. When exactly was ALD demonstrated there, and which was the first process? This is currently under discussion. Some people have also recently proposed that actually the nobelist Irvin Langmuir would have done ALD, much earlier – when and how, I think the details have not been brought up. Discussion on the history is popping up every now and then, because the history is poorly described. It would be valuable for the whole scientific ALD community, to have a widely accepted description of the early development of ALD. Creating such a description is a task is larger than any single individual can do, because we all look at the facts from our own background and narrow perspective. To create a common view on the history of ALD, we have started a totally open, collaborative project, where we hope to get scientists from different backgrounds participate and work together.We have been thinking how to realize such a project, and we think we have found a way that works. An open invitation to participate has recently been published at the internet site aldpulse.com.
  4. ALD is a fantastic technique that changes, for its part, the world we live in. As for any important technological invention, it is important and interesting to know, where ALD has come from. Most people present today are probably familiar with the invention by TuomoSuntola on Atomic Layer Epitaxy. This started the Finnish branch of ALD in 1974. In the first experiments, zinc sulfide was made from elemental precursors, in a rotary reactor (nowadays called “spacial ALD”). But how many are familiar with the work made by Aleskovskii and Kol’tsov on Molecular Layering in the Soviet Union, which started the Russian branch of ALD? These researchers worked in 1960’s, and they were there before Suntola. When exactly was ALD demonstrated there, and which was the first process? This is currently under discussion. Some people have also recently proposed that actually the nobelist Irvin Langmuir would have done ALD, much earlier – when and how, I think the details have not been brought up. Discussion on the history is popping up every now and then, because the history is poorly described. It would be valuable for the whole scientific ALD community, to have a widely accepted description of the early development of ALD. Creating such a description is a task is larger than any single individual can do, because we all look at the facts from our own background and narrow perspective. To create a common view on the history of ALD, we have started a totally open, collaborative project, where we hope to get scientists from different backgrounds participate and work together.We have been thinking how to realize such a project, and we think we have found a way that works. An open invitation to participate has recently been published at the internet site aldpulse.com.
  5. ALD is a fantastic technique that changes, for its part, the world we live in. As for any important technological invention, it is important and interesting to know, where ALD has come from. Most people present today are probably familiar with the invention by TuomoSuntola on Atomic Layer Epitaxy. This started the Finnish branch of ALD in 1974. In the first experiments, zinc sulfide was made from elemental precursors, in a rotary reactor (nowadays called “spacial ALD”). But how many are familiar with the work made by Aleskovskii and Kol’tsov on Molecular Layering in the Soviet Union, which started the Russian branch of ALD? These researchers worked in 1960’s, and they were there before Suntola. When exactly was ALD demonstrated there, and which was the first process? This is currently under discussion. Some people have also recently proposed that actually the nobelist Irvin Langmuir would have done ALD, much earlier – when and how, I think the details have not been brought up. Discussion on the history is popping up every now and then, because the history is poorly described. It would be valuable for the whole scientific ALD community, to have a widely accepted description of the early development of ALD. Creating such a description is a task is larger than any single individual can do, because we all look at the facts from our own background and narrow perspective. To create a common view on the history of ALD, we have started a totally open, collaborative project, where we hope to get scientists from different backgrounds participate and work together.We have been thinking how to realize such a project, and we think we have found a way that works. An open invitation to participate has recently been published at the internet site aldpulse.com.
  6. ALD is a fantastic technique that changes, for its part, the world we live in. As for any important technological invention, it is important and interesting to know, where ALD has come from. Most people present today are probably familiar with the invention by TuomoSuntola on Atomic Layer Epitaxy. This started the Finnish branch of ALD in 1974. In the first experiments, zinc sulfide was made from elemental precursors, in a rotary reactor (nowadays called “spacial ALD”). But how many are familiar with the work made by Aleskovskii and Kol’tsov on Molecular Layering in the Soviet Union, which started the Russian branch of ALD? These researchers worked in 1960’s, and they were there before Suntola. When exactly was ALD demonstrated there, and which was the first process? This is currently under discussion. Some people have also recently proposed that actually the nobelist Irvin Langmuir would have done ALD, much earlier – when and how, I think the details have not been brought up. Discussion on the history is popping up every now and then, because the history is poorly described. It would be valuable for the whole scientific ALD community, to have a widely accepted description of the early development of ALD. Creating such a description is a task is larger than any single individual can do, because we all look at the facts from our own background and narrow perspective. To create a common view on the history of ALD, we have started a totally open, collaborative project, where we hope to get scientists from different backgrounds participate and work together.We have been thinking how to realize such a project, and we think we have found a way that works. An open invitation to participate has recently been published at the internet site aldpulse.com.
  7. ALD is a fantastic technique that changes, for its part, the world we live in. As for any important technological invention, it is important and interesting to know, where ALD has come from. Most people present today are probably familiar with the invention by TuomoSuntola on Atomic Layer Epitaxy. This started the Finnish branch of ALD in 1974. In the first experiments, zinc sulfide was made from elemental precursors, in a rotary reactor (nowadays called “spacial ALD”). But how many are familiar with the work made by Aleskovskii and Kol’tsov on Molecular Layering in the Soviet Union, which started the Russian branch of ALD? These researchers worked in 1960’s, and they were there before Suntola. When exactly was ALD demonstrated there, and which was the first process? This is currently under discussion. Some people have also recently proposed that actually the nobelist Irvin Langmuir would have done ALD, much earlier – when and how, I think the details have not been brought up. Discussion on the history is popping up every now and then, because the history is poorly described. It would be valuable for the whole scientific ALD community, to have a widely accepted description of the early development of ALD. Creating such a description is a task is larger than any single individual can do, because we all look at the facts from our own background and narrow perspective. To create a common view on the history of ALD, we have started a totally open, collaborative project, where we hope to get scientists from different backgrounds participate and work together.We have been thinking how to realize such a project, and we think we have found a way that works. An open invitation to participate has recently been published at the internet site aldpulse.com.