Precision Cleaning Path To Premier Presentation

Precision Cleaning – Path to Premier

22 October, 2008
Scott E. Mackler
Supervisor, Contamination Control

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Improved / Optimized Precision Cleaning Operation
– Issue: Existing facility was located offsite in leased space, material handling involved
multiple transfers, process equipment was outdated and lacked state-of-the art
analytical control.
– Action: ITT funded the design and build of a new leading-edge facility around an
optimized lean process flow, including all new critical cleaning process technology
(equipment and instrumentation).
– Benefits: New facility utilizes ITT-owned space and is aligned with the Footprint
Optimization Project for Space Systems Division. The new facility footprint is
approximately half the size of the former leased operation and provides double the
amount of throughput.
– Process improvements and new cleaning equipment are projected to increase first
pass yield from 78% to 98% avoiding $300K+/yr in rework costs
– Cost avoidance of $350K/yr will result from elimination of rent, IT services,
transportation, and decreased utility costs
– Savings due to reduced staff expected to net $4-500K/yr
– Improved personnel and hardware safety

Precision Cleaning - Path to Premier 22 October, 2008 2

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Leaning it Out – 3P Process

Decreased walking and parts transport distance
– Walking distance for small parts decreased by 21%
– Small parts transport distance decreased by 13%
Added a second verification line to assist in meeting customer demand based
on 2005 throughput
Improved employee working environment by minimizing the small parts going
through large car wash by adding a small parts washer
Eliminated need for clean room to dry parts by aligning the aqueous line and
dryer with the dog house directly into verification lab
Developed more robust wet benches to improve manual pre-clean process
Small Parts Process now requires one operator and two CC techs
– Decrease by three operators
– Increase one CC tech to meet customer demand
– Net decrease two FTEs (does not account for Large Parts Process)



Meeting Customer Expectations / 3P Takt Time

Cleaned 160,000 parts in 2005, and 60,000 were common
parts vault start-up inventory
Basis 100,000 parts (4,375 jobs) and 80% of jobs are
“small parts”, then expect 3,500 jobs/yr
Basis 230 work days/year, expect ~ 15 jobs per day
20,400 secs available work/day
Takt Time = 20,400 / 15 = approx. 22 minutes per job



Cleanroom Specifications
Large Parts Processing ( > 24”L x 16” W x 21” T )
Classification Dimension (feet) Total Area Ceiling Height
(Square Feet) (feet)

Car Wash 1517 Class 10,000 15 x 14 210 12

HLF 1531 Class 100 – 100,000 22 x 22 484 12

Small Parts Processing ( < 24”L x 16” W x 21” T )

Classification Dimension (feet) Total Area Ceiling Height
(Square Feet) (feet)

Frock Controlled 12 x 19 228 9

Pre Clean 1534 Controlled 32 x 37 1184 9

Gowning Class 10,000 8 x 22 176 8

Bag and Tag Class 100 14 x 13 182 8

CC Verification Class 100 16 x 22 343 8



Process Equipment by Room
Car Wash 1517
Class 10K cleanroom
Temperature and Humidity controlled environment
100% exhausted air flow
0.2 micron filtered CDA (Clean Dry Air)
Research Grade Nitrogen (99.9996% pure)
Heated RO/DI 1200 PSI pressure washer system
CO2 snow cleaning using Ultrapure Liquid CO2
Millipore Solvent Pressure spray system
Precision Steam cleaning with RO/DI water
Vacuum cleaning
2 ton mobile Gantry Crane
Real Time Airborne Particulate Monitoring

HLF 153 (Horizontal Laminar Flow)
Class 100 – Class 100K cleanroom (filter wall to rear of room)
10 ft tall by 20 ft wide HEPA filtered Horizontal Laminar Flow module
Vacuum cleaning
Precision Cleaning of large parts/assemblies
2 ton mobile Gantry Crane
Real Time Airborne Particulate and Molecular Contamination Monitoring



Car Wash



Horizontal Laminar Flow



Process Equipment by Room (cont’)
Pre Clean 1534

Controlled Not Classified
Vacuum cleaning
99.99% HEPA filtered, 100% exhausted solvent fume hood cleaning station, grounded & alarmed carboy liquid
collection system.
100% exhausted Precision Steam Cleaner with RO/DI water station
Heated RO/DI 40PSI Blackstone parts washer system
– 35 gallon heated (1400F) RO/DI capacity
– Stainless Steel 3600 rotating parts holder
– PLC programmable control system
– Pneumatically controlled safety lock out
– Air Knife part drying @ 45psi via filtered CDA
– Particulate and Oil (coalescing) process filtration



Pre Clean 1534 (cont’)

Blackstone Aqueous Ultrasonic cleaning system
– Four station Ultrasonic Cleaning system
– Wash
– Rinse 1
– Rinse 2, resisitivity controlled auto fill
– HEPA Drying 1,200 watts
– Three programmable cleaning frequencies 40, 72, or 140 kHz
– Programmable frequency power settings max 1,800 Watts
– Transducers are multiSONIK™ synchronized amplitude modulation with high frequency sweep
– Weir and surface spargers remove floating particulates prior to removing cleaned parts.
– Material Handling System Robot has a 200 pound capacity with speeds adjustable up to 20 feet per minute in
both horizontal and vertical travel. The Robotic arm is PLC controlled with multi-program capability
– Controls include an Allen-Bradley PLC and touch-screen operator interface with programmable menu control
to match the part to the process.
Blackstone Explosion Proof Solvent Ultrasonic cleaning system
– Approved for “Class I, Division I Group D, T3” locations per the National Electric Code
– Working Tank Dimensions 20” x 11 “ x 11”
– 480 Watts power, 40 kHz with Pulse and Sweep
– Programmable Operator interface
– Particulate filtration via 10µm filter cartridge, circulation by pneumatic diaphragm pump.



Pre-Clean



Bag and Tag
24 inch Bag Stainless steel sealer
– Programmable logic control system
– Vacuum pressure Nitrogen purged capability
– 25” hg vacuum pressure

CC Verification
White light and UV light visual (qualitative) inspection
Quantitative particulate and NVR verification per IEST 1246 D
Two complete optical microscope set-ups
– Olympus SZX7 stereo Microscopes
– Standard magnification Range 10X– 120X
– Reflective, Transmission and Dark field illumination capabilities
– Digital Video capability
– 8 Mega pixel digital camera



CC Verification (cont’)

Two complete vacuum oven set-ups w/cold plates and vented vacuum pumps for solvent boil-off (gravimetric)
verification
– Hazardous Location Rating: Class I, Division 2, Group C & D
– Temperature capability of 500° F (260° C)
– Constructed to withstand full vacuum and are leak tested to 150-mtorr.
RotoVap set-up for large volume liquid boil-offs
Lancer Laboratory Glassware Washer/Dryer
– Fully automatic RO/DI cleanroom glass washer
– Programmable logic control with 6 stored cycle programs and 26 user defined options
– HEPA filtered drying and cooling
– On-board chemical storage with liquid level sensors and Automatic dosing via peristaltic pump
DI water sink
100% exhausted solvent sink w/fully instrumented, grounded & alarmed carboy liquid collection system



Bag and Tag



Hardware and Facilities Cleanliness Verification
Capabilities
METHOD EQUIPMENT APPLICATION COMMENTS
Automated instrument to measure particles between 0.3um - 25um. Counts the
Silicon Wafers Surface Analysis System (SAS) Particle Fallout
entire wafer.

Uses reflection or dark field. Automated system to measure particles between 5um -
Scanning Optical Microscope
Silicon Wafers/Optical Coupons Particle Fallout 100um. Can be complimentary with SAS instrument giving a particle measuring
(200x)
range 0.3um - 100um.

200x Optical Microscope.
Tape Lift/Direct Inspection Particle Fallout Manually counted. Direct sample from hardware.
Gridded Oculars.

Automated system to measure particles between 5um - 100um. Completeness of the
Optical Coupons Optical Scanning Microscope Optical Fallout
data allows curve fitting and % obscuration calculations.

Silicon Wafers Ellipsometer NVR Measures thickness of molecular layer on Silicon Wafers. Measures down to A/100.

Micro-Balance. Hot Plate / Solvent flush that is gravimetrically analyzed. Accuracy a function of the balance
Stainless Steel Plates NVR
RotoVap / Vac Oven (usually +/- 0.01mg/ft2). Solvent dependent.

Micro-Balance. Hot Plate / Solvent wipe that is gravimetrically analyzed. Direct sampling of a surface.
Extracted Wipe NVR
RotoVap / Vac Oven Accuracy a function of the balance (usually +/- 0.01mg/ft2). Solvent dependent.

Lasair II or equivalent. Network
Monitors airborne particulate counts in clean areas. Alarm ranges can be set with
Particle Counters Drops. Real-time compiling Facility Monitoring
automatic page/email notification.
software.

AiM unit (SAW). Network
Monitors condensibles in clean areas. Alarm ranges can be set with automatic
Airborne Molecular Drops. Real-time compiling Facility Monitoring
page/email notification.
software.



Verification Lab



Additional Process Support Services

RO / DI WATER SYSTEM
– Type E-1 process water basis ASTM D 5127-99 water
– Single Digit Total Organic Carbon (TOC), 18 Megohm Resistivity
– System make-up flow rate 2 GPM
CENTRAL VAC SYSTEM
– Spencer Turbine SB-715B, 300 SCFM
– Vacuum pressure 8” hg
– Central Vacuum ports available in all rooms of the facility
N2 - Research grade Nitrogen, 99.9996% pure plumbed through stainless steel tubing
CO2 - Research grade liquid CO2 , 99.99999% pure plumbed through stainless steel
tubing (CO2 Sno cleaning)
CDA – Clean, dry air filtered thru 5.0 / 0.5 µm particulate, 0.5µm coalescing, 0.3 µm
carbon filtration, per ISO 8573-1:2001



RO/DI Water System



Required Airborne Testing
Type
Test Parameter Class

Cleanroom & Clean Tent
Installed Filter Leakage All Classes

Particle Count Test All Classes

Class 100 Unidirectional Cleanroom & Clean Tent
Airflow Parallelism
Only
Class 100 Unidirectional Cleanroom & Clean Tent
Velocity Uniformity
Only
Airflow Volume / Average Velocity All except Class 100

Cleanroom Only
Air Pressure Difference All Classes



O ptional Airborne testing

Test Param eter Class Type

Airflow Visualization Prim arily Class 100 Cleanroom & Clean Tent

Prim arily Cleanroom
Tem perature & Relative H um idity All Classes
O nly

Light Level and Uniform ity All Classes Cleanroom & Clean Tent

Noise Level All Classes Cleanroom & Clean Tent



Summary
While Process Development and characterization of new
processes continues, we have achieved better than 97%
first pass yield on over approximately 400 verifications
to-date.
The facility is running one full shift and we have capacity
for two additional shifts as demand requires. ITT can
provide cleaning, verification, and perform thermal
vacuum bake-out services for additional internal and
external customers who require predictable, reliable data-
driven precision cleaning process solutions.



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