SURAGUS develops non-destructive testing solutions for sheet resistance mapping as well as layer thickness measurment of functional thin-films.

1. DATA SHEET - EddyCus® TF map 4040SR
Sheet Resistance Mapper
The EddyCus® TF map 4040SR is a
for
system for fast mapping of sheet
specific applications. If required, the
resistance or layer thickness of various
system comes with adapted parameter
conductive materials. The system allows
sets for defining the scan area for each
a
impedance
tested material. The system is easy to
spectroscopy for high spatial resolution
handle and supported by user-friendly
mapping of resistive and dielectric
software for fast real-time evaluation.
properties.
conduct
The device comes with pre-configured
significantly
parameter sets for different testing
applications
tasks. Hence users can quickly obtain
fast,
user-friendly
It
enables
measurements,
which
expands
its
field
of
to
various
material
sheet
of thicker thin-film on glass, wafer and
foils. The device uses sensors sets with
SURAGUS GmbH
Maria-Reiche-Str. 1
01109 Dresden
Germany
E-Mail: info@suragus.com
Phone: +49 (0) 351 273 598 01
Fax:
+49 (0) 351 329 920 58
www.suragus.com
www.sheet-resistance-measurement.com
Testing of
conductive layers.
without specific knowledge on the
technology.
sensitivities
and
spatial
resolutions, which could be customized
mapping
and
allowing to monitor quality parameters
different
resistance
systems
results
Certified
ISO 9001

2. DATA SHEET
EddyCus® TF map 4040SR – Sheet Resistance Mapper
EddyCus® TF map 4040SR
Sheet resistance measurement
Substrate thickness measurement
Scanning area
Non-contact eddy current sensor
On request
400 x 400 mm²
Max Sample thickness
(defines distances)
5 / 15 / 25 / 45 / 60
(defined by the thickest sample)
Sheet resistance range
0.001 – 10 Ohm/sq < 2 % accuracy
10 – 100 Ohm/sq < 3 % accuracy
100 – 1,000 Ohm/sq < 5 % accuracy
Scanning time @ 1mm measurement pitch
100 x 100 mm² less than 3 minutes
200 x 200 mm² less than 5 minutes
400 x 400 mm² less than 15 minutes
Thickness measurement of thin-films (e.g. cooper)
In accordance with sheet resistance
Sample rate
3,000 samples per second
Scanning Speed
200 mm /s
Scanning pitch
0,025 – 2,5 mm
Device dimension
Height of work area
Weight
750 / 1,090 / 1,140 mm (w/h/d)
780 mm
65 kg
SHEET RESISTANCE ANALYZER

Easy to use software for configuration and data review

Graphical display of mapping

Review of histograms

Comprehensive tools perform details data analysis

Various export functions

Evaluation with color coding

Extensive filtering capabilities
SURAGUS GmbH | Maria-Reiche-Str. 1 | D-01109 Dresden | Germany | Phone +49 351 273 598 - 01 | Fax + 49 351 329 920 - 58 | info@suragus.com | www.suragus.com