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Al-Induced Crystallization:
Cheaper, More Efficient
Solar Cells
PATRICK FURREY, ELISABETH MCCLURE, SETH HUBBARD
NANOPOWER RESEARCH LABS, ROCHESTER NY
What is a single junction solar cell?
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
¹ http://pveducation.org/pvcdrom/solar-cell-operation/solar-cell-structure ² William Shockley and Hans J. Queisser, "Detailed Balance
Limit of Efficiency of p-n Junction Solar Cells", Journal of Applied Physics, Volume 32 (March 1961), pp. 510-519; doi:10.1063/1.1736034
2
• Generation of light-generated carriers
• Collection light-generated carriers to
generate current
• Generation of large voltage across
solar cell
• Dissipation of power in load and
parasitic resistances
• Shockley-Queisser limit maximizes
single p-n junction with 1.34eV
bandgap at AM1.5 to be 33.7% ²
¹
What is a multi junction solar cell?
• III-V solar cells are direct bandgap
semiconductors, as opposed to Si and is are
great absorbers
• Multijunction cells can account for otherwise
lost photons
• Grown by MOCVD, GaInP/GaInAs/Ge cells can
reach 31.3% efficiency at AM1.5 and 41.6%
under concentration
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
3
History of AIC and its relation to our Goal
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
• AIC uses inexpensive techniques, such as
sputtering or thermal evaporation, to work
towards these kinds of efficiencies; however,
much work is still needed to make it
commercially viable.
• Polycrystalline materials have grain
boundaries which act as defects, whereas
small grains can lead to increased
nonradiative recombination that impedes
current generation.
4
Highly (111)-oriented Ge thin films on insulators formed by Al-induced crystallizationToko, K. and Kurosawa, M. and Saitoh, N. and Yoshizawa,
N. and Usami, N. and Miyao, M. and Suemasu, T., Applied Physics Letters, 101, 072106 (2012), DOI:http://dx.doi.org/10.1063/1.4744962
Our goal is to pick up whereToko, et al, left off
in exploring different variables for increasing
grains size and preferential orientation.
Our Process and Tools
• Started with 1 1 1 Si wafers
• RCA cleaned them to proceed to grow a 1-micron oxide layer
• Sputtered/thermally evaporated 50nm of Al
• Broke vacuum for 30 mins/remained under vacuum
• Sputtered/thermally evaporated 50nm of Ge
• Annealed for 10/20 hour
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
5
CVC 601 Sputter System Kurt J. Lesker PVD 75c Lindberg BlueTube Furnace
Si
SiO2
Al
Ge
Al2O3
Al2O3
Ge
Variable Time
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
6
Constants:
• 260 C anneal
• No Al2O3
• Sputtered
Pre anneal shows no Ge peak
meaning the Ge is amorphous
Both anneals showed Ge
peaks, meaning crystals
formed
20h Ge peak had a higher
intensity than the 10h,
showing a greater number of
crystals
Variable Time- SEM
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
7
Constants:
• 260 C anneal
• No Al2O3
• Sputtered
Pre anneal shows no Ge peak
meaning the Ge is amorphous
Both anneals showed Ge
peaks, meaning crystals
formed
20h Ge peak had a higher
intensity than the 10h,
showing a greater number of
crystals
20 hour anneal
10 hour anneal
Scherrer Equation
A formula that relates X-ray diffraction readings to grain sizes.
𝜏 =
𝐾𝜆
𝛽𝑐𝑜𝑠𝜃
K is a dimensionless shape factor that has a typical value of 0.9, varying with crystalline structure.
𝜆 is the X-ray wavelength.
The Scherrer Equation is applicable up to 0.1 to 0.2um.
A K of 0.9 and the 𝜆 of Cu, 1.541838 Å, was used.
8
Sample FWHM (𝛽) Bragg Angle (𝜃) Mean Size (or less)
10h, no Al2O3 0.230 27.2º 6 Å
20h, no Al2O3 0.226 27.1º 6 Å
Patterson, A. (1939). "The Scherrer Formula for X-Ray Particle Size Determination". Phys. Rev. 56 (10): 978–982. Bibcode:1939PhRv...56..978P.doi:10.1103/PhysRev.56.978.
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
With or Without Al2O3
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
9
Constants:
• 10h period
• 260 C anneal
• Sputtered
SinceAl2O3 acts as a
barrier, layer transfer
cannot occur at such a
low temperature and
the Ge remains
amorphous
As the Al tries to
diffuse, it is impeded
by the Al2O3 and
forms dendritic grains
With or Without Al2O3
– Nomarski Microscopy
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
10
Constants:
• 10h period
• 260 C anneal
• Sputtered
SinceAl2O3 acts as a
barrier, layer transfer
cannot occur at such a
low temperature and
the Ge remains
amorphous
The Al peak shift is
either an Al alloy
created or Al2O3
Without Al2O3
With Al2O3
Different Deposition Methods
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
11
Constants:
• 20h period
• 260 C anneal
• With Al2O3
Neither method
shows Ge crystals
formed
Sputtering shows
larger peaks
meaning bigger
crystals or more
uniform crystal
orientation
Different Deposition
Methods - SEM
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
12
Constants:
• 20h period
• 260 C anneal
Neither method
shows Ge crystals
formed
Sputtering shows
larger peaks
meaning bigger
crystals or more
uniform crystal
orientation
Thermal Evaporation with Al2O3
Sputter without Al2O3
Variable Temperature
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
13
Constants:
• 20h period
• With Al2O3
• Thermally Evaporated
The Al2O3 barrier is
overcome and layer
transfer can occur at 325
C.This results in 111 Ge
grains.
Variable Temperature –
Nomarski Microscopy
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
14
Constants:
• 20h period
• With Al2O3
• Thermally Evaporated
The Al2O3 barrier is
overcome and layer
transfer can occur at 325
C.This results in 111 Ge
grains.
325 C Anneal
260 C Anneal
Conclusions and Further Work
• THE THERMAL EVAPORATED SAMPLE AT 325 C SHOWED THE
BEST IMAGES THROUGH MICROSCOPY.
• THE 20H ANNEAL WITH NO VACUUM BREAK SHOWED THE
STRONGEST XRD PEAKS FOR 1 1 1 GERMANIUM.
• HYPOTHESIS IS THAT THE ALUMINUM GROWS DENDRITICALLY
AND THE GERMANIUM GROWS IN A MORE ROUNDED SHAPE.
• Changing the thicknesses ofAl and Ge
• More higher temperature anneals, >260 C, needed to find the “sweet
spot”
• Explore 20h anneal sputtered with Al2O3 layer.
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
15
Acknowledgements
• GEORGE NELSON
• MICHAEL SLOCUM, NATHAN COX, JASON STAUB
• ZAC BITTNER
• THE OFFICE OF NAVAL RESEARCH
Questions?
N00173-14-1-G011
Undergraduate Research Symposium 2015
August 7, 2015 Rochester, NY
16

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Furrey Undergraduate Research Symposium v3 Public

  • 1. Al-Induced Crystallization: Cheaper, More Efficient Solar Cells PATRICK FURREY, ELISABETH MCCLURE, SETH HUBBARD NANOPOWER RESEARCH LABS, ROCHESTER NY
  • 2. What is a single junction solar cell? Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY ¹ http://pveducation.org/pvcdrom/solar-cell-operation/solar-cell-structure ² William Shockley and Hans J. Queisser, "Detailed Balance Limit of Efficiency of p-n Junction Solar Cells", Journal of Applied Physics, Volume 32 (March 1961), pp. 510-519; doi:10.1063/1.1736034 2 • Generation of light-generated carriers • Collection light-generated carriers to generate current • Generation of large voltage across solar cell • Dissipation of power in load and parasitic resistances • Shockley-Queisser limit maximizes single p-n junction with 1.34eV bandgap at AM1.5 to be 33.7% ² ¹
  • 3. What is a multi junction solar cell? • III-V solar cells are direct bandgap semiconductors, as opposed to Si and is are great absorbers • Multijunction cells can account for otherwise lost photons • Grown by MOCVD, GaInP/GaInAs/Ge cells can reach 31.3% efficiency at AM1.5 and 41.6% under concentration Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 3
  • 4. History of AIC and its relation to our Goal Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY • AIC uses inexpensive techniques, such as sputtering or thermal evaporation, to work towards these kinds of efficiencies; however, much work is still needed to make it commercially viable. • Polycrystalline materials have grain boundaries which act as defects, whereas small grains can lead to increased nonradiative recombination that impedes current generation. 4 Highly (111)-oriented Ge thin films on insulators formed by Al-induced crystallizationToko, K. and Kurosawa, M. and Saitoh, N. and Yoshizawa, N. and Usami, N. and Miyao, M. and Suemasu, T., Applied Physics Letters, 101, 072106 (2012), DOI:http://dx.doi.org/10.1063/1.4744962 Our goal is to pick up whereToko, et al, left off in exploring different variables for increasing grains size and preferential orientation.
  • 5. Our Process and Tools • Started with 1 1 1 Si wafers • RCA cleaned them to proceed to grow a 1-micron oxide layer • Sputtered/thermally evaporated 50nm of Al • Broke vacuum for 30 mins/remained under vacuum • Sputtered/thermally evaporated 50nm of Ge • Annealed for 10/20 hour Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 5 CVC 601 Sputter System Kurt J. Lesker PVD 75c Lindberg BlueTube Furnace Si SiO2 Al Ge Al2O3 Al2O3 Ge
  • 6. Variable Time Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 6 Constants: • 260 C anneal • No Al2O3 • Sputtered Pre anneal shows no Ge peak meaning the Ge is amorphous Both anneals showed Ge peaks, meaning crystals formed 20h Ge peak had a higher intensity than the 10h, showing a greater number of crystals
  • 7. Variable Time- SEM Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 7 Constants: • 260 C anneal • No Al2O3 • Sputtered Pre anneal shows no Ge peak meaning the Ge is amorphous Both anneals showed Ge peaks, meaning crystals formed 20h Ge peak had a higher intensity than the 10h, showing a greater number of crystals 20 hour anneal 10 hour anneal
  • 8. Scherrer Equation A formula that relates X-ray diffraction readings to grain sizes. 𝜏 = 𝐾𝜆 𝛽𝑐𝑜𝑠𝜃 K is a dimensionless shape factor that has a typical value of 0.9, varying with crystalline structure. 𝜆 is the X-ray wavelength. The Scherrer Equation is applicable up to 0.1 to 0.2um. A K of 0.9 and the 𝜆 of Cu, 1.541838 Å, was used. 8 Sample FWHM (𝛽) Bragg Angle (𝜃) Mean Size (or less) 10h, no Al2O3 0.230 27.2º 6 Å 20h, no Al2O3 0.226 27.1º 6 Å Patterson, A. (1939). "The Scherrer Formula for X-Ray Particle Size Determination". Phys. Rev. 56 (10): 978–982. Bibcode:1939PhRv...56..978P.doi:10.1103/PhysRev.56.978. Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY
  • 9. With or Without Al2O3 Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 9 Constants: • 10h period • 260 C anneal • Sputtered SinceAl2O3 acts as a barrier, layer transfer cannot occur at such a low temperature and the Ge remains amorphous As the Al tries to diffuse, it is impeded by the Al2O3 and forms dendritic grains
  • 10. With or Without Al2O3 – Nomarski Microscopy Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 10 Constants: • 10h period • 260 C anneal • Sputtered SinceAl2O3 acts as a barrier, layer transfer cannot occur at such a low temperature and the Ge remains amorphous The Al peak shift is either an Al alloy created or Al2O3 Without Al2O3 With Al2O3
  • 11. Different Deposition Methods Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 11 Constants: • 20h period • 260 C anneal • With Al2O3 Neither method shows Ge crystals formed Sputtering shows larger peaks meaning bigger crystals or more uniform crystal orientation
  • 12. Different Deposition Methods - SEM Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 12 Constants: • 20h period • 260 C anneal Neither method shows Ge crystals formed Sputtering shows larger peaks meaning bigger crystals or more uniform crystal orientation Thermal Evaporation with Al2O3 Sputter without Al2O3
  • 13. Variable Temperature Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 13 Constants: • 20h period • With Al2O3 • Thermally Evaporated The Al2O3 barrier is overcome and layer transfer can occur at 325 C.This results in 111 Ge grains.
  • 14. Variable Temperature – Nomarski Microscopy Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 14 Constants: • 20h period • With Al2O3 • Thermally Evaporated The Al2O3 barrier is overcome and layer transfer can occur at 325 C.This results in 111 Ge grains. 325 C Anneal 260 C Anneal
  • 15. Conclusions and Further Work • THE THERMAL EVAPORATED SAMPLE AT 325 C SHOWED THE BEST IMAGES THROUGH MICROSCOPY. • THE 20H ANNEAL WITH NO VACUUM BREAK SHOWED THE STRONGEST XRD PEAKS FOR 1 1 1 GERMANIUM. • HYPOTHESIS IS THAT THE ALUMINUM GROWS DENDRITICALLY AND THE GERMANIUM GROWS IN A MORE ROUNDED SHAPE. • Changing the thicknesses ofAl and Ge • More higher temperature anneals, >260 C, needed to find the “sweet spot” • Explore 20h anneal sputtered with Al2O3 layer. Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 15
  • 16. Acknowledgements • GEORGE NELSON • MICHAEL SLOCUM, NATHAN COX, JASON STAUB • ZAC BITTNER • THE OFFICE OF NAVAL RESEARCH Questions? N00173-14-1-G011 Undergraduate Research Symposium 2015 August 7, 2015 Rochester, NY 16