1. 1No.1408-001 August 1st 2014Confidential for Skyworks onlySkyworks Panasonic Filter Solutions Singapore Pte. Ltd.
Dicing Nozzle Angle Fine Tune:
Shower Nozzle
Front Nozzle
Rear Nozzle
Spray Nozzle
5.30 to the blade surface
Hypothesis:
If shower nozzle not in the correct angle blade contaminant could not clean properly by the water, so cutting quality will bad due to
trend mode defects.
The water should contact
with surface of work
Purpose:
F&R nozzle: Blade cooling Shower nozzle: Blade cleaning Spray nozzle: Spray water to wafer surface

2. 2No.1408-001 August 1st 2014Confidential for Skyworks onlySkyworks Panasonic Filter Solutions Singapore Pte. Ltd.
Dicing Correct Nozzle Angle Adjustment Method:
Adjustment method:
Supply water to Nozzle 2.0L/min by using I/O screen.
Nozzle angle adjust to bottom of water curtain 1 mm under
overall diameter of the dicing blade.
Surface of the work
Center of the Nozzle Hall
Blade
Blade
Under line of the water curtain
7.5mm
The contact point of water to blade is 15 degree which is
5.30 o’clock in the blade. The spread of water will contact to
the work surface
Purpose is to clean the debris before cutting.
Unstable Issue for water Curtain:
Water curtain twisted sometimes. In this case, we have to adjust
the nozzle and showered water to blade equally.
Blade
Water
Curtain
O X X X

3. 3No.1408-001 August 1st 2014Confidential for Skyworks onlySkyworks Panasonic Filter Solutions Singapore Pte. Ltd.
92.00%
93.00%
94.00%
95.00%
96.00%
97.00%
98.00%
99.00%
100.00%
2014/09/07
2014/09/08
2014/09/09
2014/09/10
2014/09/11
2014/09/12
2014/09/13
2014/09/14
2014/09/15
2014/09/16
2014/09/17
2014/09/18
2014/09/19
2014/09/20
2014/09/21
SideFaceYield(%)
Date
WD-6 Side Face Yield (%)
86.00%
88.00%
90.00%
92.00%
94.00%
96.00%
98.00%
100.00%
2014/09/05
2014/09/06
2014/09/07
2014/09/08
2014/09/09
2014/09/10
2014/09/11
2014/09/12
2014/09/13
2014/09/14
2014/09/15
2014/09/16
2014/09/17
2014/09/18
2014/09/19
SideFaceYield(%)
Date
WD-17 Side Face Yield (%)
Trial of Shower Nozzle Angle Fine Tune Investigation:
EFSD831MS1B7 S14912N1A
Dicer no.: WD-06
VI yield: 84.70% ; Lowest Wafer yield: 2.47%
EFSD897MS2A9 S14914D27
Dicer no.: WD-06
VI yield: 96.11% ; Lowest Wafer yield: 95.15%
Nozzle Angle fine tune
Found Low yield wafer
EFSD897MP3J9 S64909D2X
Dicer no.: WD-17
VI yield: 96.60% ; Lowest Wafer yield:
95.45%
EFSD897MS2D9 S14904D16
Dicer no.: WD-17
VI yield: 88.43% ; Lowest Wafer
yield: 50.23%
0.9
0.92
0.94
0.96
0.98
1
Anova of WD-17 SF yield before afted fine tune performance
GrandMean Mean Before After After outliers
P < 0.05 Significant improve
For both machine.
Confident level 95%
0.945
0.95
0.955
0.96
0.965
Anova for WD-06 SF yield Before after fine tune performance
GrandMean Mean Before After

4. 4No.1408-001 August 1st 2014Confidential for Skyworks onlySkyworks Panasonic Filter Solutions Singapore Pte. Ltd.
Simulation Test for Shower Nozzle Angle to VI
Yield Rate (%)
76.40%
91.91%
94.33%
95.66%
80.94%
94.66%
96.66%
98.58%
83.48%
96.89% 96.88%
99.23%
R² = 0.722
70.00%
72.00%
74.00%
76.00%
78.00%
80.00%
82.00%
84.00%
86.00%
88.00%
90.00%
92.00%
94.00%
96.00%
98.00%
100.00%
3 o'clock 4 o'clock 4.30 o'clock 5.30 o'clock
DicingYieldPerformance(%)
Nozzle Angle (Follow Clock Rule)
Shower Nozzle Angle Yield Comparison
VI Yield (%) SFYield (%) FA Yield (%) Linear (FA Yield (%))
0.7
0.75
0.8
0.85
0.9
0.95
1
B O X P L O T B E T WE E N 3 O 'C L O C K T O 5 .3 0
O 'C L O C K Y IE L D C O M P A R IS ON
GrandMean Mean
Wafer Map
P Value < 0.05 , Significant Improvement.
Effect: 13.70% improvement impact from 3 to 5.30
95% Confident Level of this improvement
R² = 0.1893
0.00%
0.50%
1.00%
1.50%
2.00%
2.50%
3.00%
3.50%
4.00%
Chipping
Crack
RoughSurface
RainbowColor
Residue
Chipping
Crack
Chipping
Crack
RoughSurface
RainbowColor
Residue
Chipping
Crack
Chipping
Crack
RoughSurface
RainbowColor
Residue
Chipping
Crack
Chipping
Crack
RoughSurface
RainbowColor
Residue
Chipping
Crack
CH01 / CH02 Top/Bottom CH01 / CH02 Top/Bottom CH01 / CH02 Top/Bottom CH01 / CH02 Top/Bottom
3 o'clock 4 o'clock 4.30 o'clock 5.30 o'clock
DefectiveRate(%)
Defects Mode
F A D E F E C T I V E R A T E ( % )
Shower Nozzle Angle activity mainly is to improve
the overall dicing machine stability. Therefore, it will
minimize the trend mode and overall defects.
Mainly on Chipping, crack & rainbow.

5. 5No.1408-001 August 1st 2014Confidential for Skyworks onlySkyworks Panasonic Filter Solutions Singapore Pte. Ltd.
Nozzle Angle Adjustment Effect
Adjusted Machine at 9-Oct : WD03, 05, 06, 09, 14, 15, 16, 18, 20,
23, 24 (Final)
Adjusted begin at 16-Sept: WD01, 02, 04, 07, 08, 10, 11, 12, 13, 17, 19, 21,
22 (Phase 1)
3.52%
3.01%
0.00%
1.00%
2.00%
3.00%
4.00%
5.00%
6.00%
BOX PLOT COMPARISON SHOWER NOZZLE
ADJUSTMENT (PHASE 1)
Mean Before After
Nbefore = 4934 NAfter = 2934
3.15%
2.68%
0.00%
1.00%
2.00%
3.00%
4.00%
5.00%
6.00%
BOX PLOT COMPARISON SHOWER NOZZLE
ADJUSTMENT (FINAL)
Mean Before After
Nbefore = 3233 NAfter = 2822
Significant Improve, P value < 0 .05
Effect: 0.51% Confident Level: 95%
Significant Improve, P value < 0.05
Effect: 0.47% Confident Level: 95%
1.28
0.85
0.49
0.46
0
0.5
1
1.5
2
Wk 39 Wk 42
DefectiveRate(%)
Date
Defective Rate Comparison Trend
Chipping Crack
Effect: -0.03%
Effect: -0.43%
Total Effect: -0.46%
3.88%
3.19%
3.87%
4.91%
4.90%
4.15%
4.90%
4.94%
3.34%
2.86%
2.00%
2.50%
3.00%
3.50%
4.00%
4.50%
5.00%
5.50%
Jan Feb Mar Apr May Jun Jul Aug Sep Oct
Side face Reject Each Month Trend %
New 2014 Model Implement
Conclusion: Hypothesis Proven. Correct shower nozzle angle able to clean the blade contaminant and reduce dicing defects
Effect: -0.48%
By Nozzle Angle Adjustment