More Related Content Similar to 1.雙層鉬薄膜cigs太陽能電池之影響 陳宣亦 Similar to 1.雙層鉬薄膜cigs太陽能電池之影響 陳宣亦 (10) More from Zih-Ming Yang (20) 1.雙層鉬薄膜cigs太陽能電池之影響 陳宣亦5. 實驗參數 單層 Mo 薄膜濺鍍於玻璃基材之參數 表 陽極 陰極 載台 基材 靶材 氬 (Ar) 離子 濺鍍原理示意圖 Film type Mo Temperature (℃) 25 Pre – sputtering pressure (torr) 5×10 -6 Sputtering pressure (torr) 2.9×10 -3 5.4×10 -3 1.4×10 -2 Sputtering Ar gas flow (sccm) 10 40 70 DC power (W) 50 Pre – sputtering time (min) 3 Sputtering time (min) 35.1 31.6 20.1 Film thickness (nm) 1000 1000 1000 7. 實驗參數 Ar : 70 sccm - 750 nm Ar : 10 sccm - 250 nm Sample A Ar : 70 sccm - 500 nm Ar : 10 sccm - 500 nm Sample B Ar : 70 sccm - 250 nm Ar : 10 sccm - 750 nm Sample C 本文堆疊示意圖 雙層 Mo 薄膜濺鍍於玻璃基材之參數 表 Film type Mo Temperature (℃) 25 Pre – sputtering pressure (torr) 5×10 -6 Sputtering pressure (torr) 2.9×10 -3 1.4×10 -2 Sputtering Ar gas flow (sccm) 10 70 DC power (W) 50 Pre – sputtering time (min) 3 Sputtering time (min) 8.7 / 17.4 / 26.3 5 / 10 / 15.1 Film thickness (nm) 250 / 500 / 750 250 / 500 / 750 10. 結果與討論 ( 續 ) 不同氬流量濺鍍雙層鉬之 臨界負載力 微米刮痕儀示意圖 5.0º 載台 Mo 11. 實驗步驟 ( 續 ) CIGS -2000 nm 本文堆疊示意圖 CIGS - 2000nm CIGS - 2000nm CIGS 薄膜濺鍍於 雙層 Mo 之參數 表 Ar : 70 sccm - 750 nm Ar : 10 sccm - 250 nm Sample A Ar : 70 sccm - 500 nm Ar : 10 sccm - 500 nm Sample B Ar : 70 sccm - 250 nm Ar : 10 sccm - 750 nm Sample C Film type CIGS Temperature (℃) 25 Pre – sputtering pressure (torr) 5×10 -5 Sputtering pressure (torr) 7.4×10 -3 Sputtering Ar gas flow (sccm) 50 DC power (W) 20 Pre – sputtering time (min) 3 Sputtering time (min) 73.2 Film thickness (nm) 2000