1. Research-educational and innovation
complex MIET
Zelenograd Innovation
Moscow Institute of Electronic Technologies Center
Technology (Technical
University)
Special Economic RUSNANO
Russian corporation of
Zone
nanotechnologies
in Moscow

2. Moscow Institute of Electronic Technology (Technical University)
Staff
• Number of employees – 1840 Currently studying 6100 students
• Professors – 450 Annual number of graduates is more then
• Research fellows – 550 1000 highly-skilled specialists with the
• PhD – 116 highest level of demand on labor market
• MBA – 334
• Candidates – 300
Among Officers
State prize laureates - 50
RF President’s Prize laureates - 4
RF Government’s Prize in the field of
education laureates - 2
Cutting edge instructional General education and research activities
technologies applied in
Research-educational and
innovation complex MIET allow to •Automation and control
train world standard specialist in •Nanotechnology
•Electronics and microelectronics •Material science and technology
microelectronics and •Applied mathematics
nanotechnology, electronic •Nano and MEMS
•Computer-aided design systems •Standardization, certification and metrology
instrument engineering and •Quality control
telecommunications. •Informatics and computer engineering
•Radio-engineering •Management and economics
•Telecommunications •Municipal management
•Bio-medical electronics •Linguistics and intercultural communication

3. Research-educational and innovation complex MIET
End-to-end innovative cycle of staff training and manufacturing electronics,
microelectronics, nano and MEMS production
High accuracy
Designing and assembling, pac
Designing Design and Manufacturing Designing and
modeling kaging and
ICs, micro- and manufacturing of ICs, micro- and manufacturing
equipment and measurement of
nanosystems photomasks nanosystems printed boards
devices radio-electronic
devices
НИИСИ РАН
ИППМ РАН
ИСП РАН
Ангстрем
Specialists Research Designing Manufacturing Commercialization

4. MIET - National research university
Peopleware and scientific support for high-technology sector of Russian economy
Instructional setting Scientific environment
postgraduate studies and doctorate Scientific research laboratories
Faculties 7
Competence Technological center
Chairs MIET
forming centers
Scientific research institutes
Research-educational
centers development laboratories
Base
Chairs
High-skilled specialist training jointly with RUSNANO
Russian corporation of nanotechnologies finances the realization
of advanced programs of professional training in MIET. These
programs are oriented on investment projects in design and
manufacturing of VLSI with the topological rules up to 90 nm

5. Customers – subjects of innovation activities in electronics, microelectronics,
nano- and MEMS.
Plant facilities
Ангстрем
Residents of SEZ «Zelenograd»
Scientific ИППМ РАН НИИСИ РАН
organizations (Воронеж) «НИИ Компонент»
НИИ ФП
ИСП РАН (Зеленоград)
НИИ «Субмикрон»
Small and medium «Нанотех-Актив»
companies
«МЭШ плюс» «МКС Плюс»
Оптолинк «ЭСТО-Вакуум»
Foreign companies

6. JSC «Zelenograd Innovation Technologies Center» -
- key element of innovation infrastructure MIET
Was established in 1998 in the context of interdepartmental programm «The activation of innovational activity in scientific and technical sphere in RF» with the participation of
Ministry of Education and Science and The Foundation for assistance to small innovative enterprises
Since 2006 Zelenograd ITC is a resident in SEZ “Zelenograd”
Activity categories of Zelenograd ITC
- Implementation of R&D with the subsequent organization manufacturing of created
scientific and technical production.
- Support of small innovative companies by means of rendering innovation
infrastructure and services including technological service on the base the network of
Multi-access centers.
Key parameters:
• Staff – 176 employees, including 6 PhD and 16 MBA.
• Sales in 2009 – 9,1 million dollars.
• Research-and-production and office-laboratorial areas - 25 000 sq.m.
• 7 Multi-access centers serving about 3000 innovative companies, including more than
100 Zelenograd companies.
• 85 innovative companies, which are integrated into innovation activity.
• Companies’ annual sales – 98 million dollars.
• Widespread complex projects are implementing.
Partners:
The Activity of ZITC is accomplishing with a support of:
MIET
JSC « Concern « Sitronics » Ministry of Education and Science RF
JSC «NIIME and plant «MIKRON» The Foundation for assistance to small innovative enterprises
«Roselektronika» Ministry of economic development
Federal agency of atomic energy
JSC «Plant «Proton-MIET»
Federal agency of industry
Cadence Design Systems (USA)
Russian Union of Innovation and technology centres
Synopsys Inc. (USA)

7. JSC «Zelenograd Innovation Technologies Center» -
- key element of innovation infrastructure MIET
Innovative companies
95 companies Partners and customers
Special Economic Zone «Zelenograd» – preferential development
conditions

8. Multi-access centers MIET
Total square - 6 000 sq.m.
MAC «Microsystem MAC «Measurement
technics and electronic and control»
component base»
MAC «Center of designing,
prototyping and manufacturing MAC «Machining process and
photomasks» packaging of electronic frames»
Assembly section of electronic
component base and Microsystem
technics
MAC «High-accuracy
MAC «High accuracy assembling of electronic
printed boards» components»

9. Complex innovative projects
Complex
innovative projects
Projects parties: MIET, Zelenograd ITC, Ministry of Education and Science RF, Small and medium
companies.

10. Wireless system for calculation of heating and energy resources
System
components:
Domestic display
Local
concentrator
Domestic
concentrator
The following advantages were detected by results of beta testing:
 Economy on heating resources and water – 15-20%
 Economy on heating resources at night – 13%
 Economy on cold and hot water consumption – 25-30% Water-temperature
sending unit
The further realization of pilot projects is planned to take place in Chelyabinsk , Voronezh , Yaroslavl,
Moscow and other regions where the letter contract with public authorities was achieved.
A commercialization of a project is realizing by «ZITC energy efficient technologies» inc. Intellectual
transformer

11. The development of medical equipment of new generation
Automatic smart external defibrillators
It was Venin and Gourvich, Russian scientists, who could realize electropulse with probability of
successful defibrillation 0.9 after the first impact, regardless of the electric resistance of the
patient ‘s thoracic cage .
AED-H for use in housetops AED-K
Branch out – 2010 year for clinical usage
Smart dialytic device
It is the first domestic smart dialytic device , that not only corresponds to
A prototype of
world standards, but also may substitute foreign analogs . developed dialytic
device
Branch out – 2011 year
A portable device to assist circulation of left ventricle of heart
Technical characteristics of the workable device correspond to world standards. An estimated value of domestic device is 1.0 million roubles
, that is 7 times
lower than the value of INCOR device , the nearest analog
The developed implantable
Branch out – 2012 year electromechanical blood pump
A commercialization of a project is realizing by «ZITC medical equipment »

12. Development of high-performance systems-on-chip
Main products
16-bit microcontroller
К1894ВГ1Т Low consuming 16-bit microcontroller
К1894ВГ2Т
16-bit microcontroller
LSI accelerometer
1894ВЦ1У
With mask program memory
LSI wireless transceiver
IC Smoke detector IPS101
LSI Hall sensor
A commercialization of a project is realizing by «CJSC «IDM+»

13. Development of microsystem sensors
Elements of extensional and surface micromechanics:
Technological air Sensetive
chamber Чувствительные
resistance elements on
fine (0,2 mkm) post
dielectric bridges
One of 4 fine (10mkm)
Inertia mass silicon balks
Micronozzles for injection of bio preparations
(aperture size – 20 mkm)
The development of modern microsystem devices :
Optic fiber gyroscopes MEMS-gyroscopes MEMS- accelerometer
Fields
of application: Commercial and sport Missile systems Space
Military aeronautics
aviation
A commercialization of a project is realizing by «Nanotechnology laboratory» Ltd.

14. Development of microsensorics and fiber optics
technologies
Activity categories : designing and manufacturing Integrated optics components on lithium niobate and silicon
Market segment: navigation systems and optical fiber communication systems.
Major developments: Major technological operations:
I. Integrated optics phase modulator on lithium niobate for fiber- I. Metals and dielectrics
deposition.
optical gyroscope. II. Plasmachemical etching.
II. Manufacturing of optical fiber supporting radiation polarization. III. Optical photolithography.
III. Fiber optical gyroscope. IV. Diffusion.
IV. Micromechanical gyroscope. V. Optical measurements and fibre
V. Integrated electro-optic channel switch on lithium niobate for joining.
spectral compression systems (DWDM) in optical fiber VI. Assembling.
communication lines.
A commercialization of a project is realizing by «Optolink» Ltd

15. Development strategy of Zelenograd ITC
Realization of project «The establishment
of Nanotechnology Center «Nano- and
Microelectronic devices»
A microelectronic center with the
project rules up to 90 nm will be the
first to be established in Russia
Specialized
retraining
center
Technology transfer
center
Innovation center
Commercialization of R&D results
Microelectronic Holding
State corporations Foreign customers
enterprises companies

16. The development of innovative infrastructure of Zelenograd ITC
Indices of existing infrastructure:
•7 branch-wise multi-access centers;
•Research-and-production areas – 6900 sq.m.;
•Office-laboratorial areas–18 000 sq.m.;
•Equipment cost of multi-access centers – 0,7 billion rubles;
•Annual production sales of multi-access centers – 800 million roubles
•A considerable part of office-laboratorial areas is corresponded to the world standards. These areas are appropriate for innovation activity and it is let on
hire for innovative companies which develop high-technology products.
•7 branch-wise multi-access centers have 6,9 sq.m. territory. MACs provide access to modern equipment and technologies for research teams and Start-ups.
Operation factors of research-and-production areas construction
3-rd stage: research-and-production areas – 900 sq.m. Function – the development of multi-access center «Machining process
and packaging of electronic frames». Deadline - 2010.
4-th stage а: research-and-production areas – 900 sq.m. Function – the development of multi-access center «Microsystem
technics and electronic component base». Deadline - 2011.
4-th stage b: research-and-production areas – 2600 sq.m. Function – the development of multi-access center «High accuracy
printed boards». Deadline – 2012. Operator– Resident of SEZ JSC «Plant PROTON-MIET».
- Treatment facilities developments SEZ - Implemented areas ZITC Projects under construction ZITC
Treatment facilities 4-th stage b
4-th stage а
3-rd stage
Total area will be
31 000 sq.m. by 2012

17. The development of Multi-access centers network
Area MIET
Available Estimated
MAC indices MACs MACs Total
Project implementation period 2003-2009 2010-2013 Since 2014
Areas, sq.m. 6 900 3 500 10 400
Number of employees 165 60 225
Equipment cost of multi-access centers, billion rubles 4,7 1,8 6,5
Lineup, types 800 450 1250
Production sales, million rubles/year 740 800 1540
Number of customers More than 3000

18. Group of buildings: innovation center, specialized retraining center,
center of technology transfer
Peopleware for Center of nanoelectronics
«Nanoelectronics» field
(MIET, ZITC, RUSNANO) Training and retraining of Research-and-production areas–
2000 sq.m.
Area – 3000 sq.m. highly skilled Office-laboratorial areas– 2300
personnel sq.m.
Area – 7300 sq.m.
Innovation Organization of area
companies for technology
placement transfer
Area – 6700 sq.m. Area – 3800 sq.m.
Implementation is
planned on Parking places:
Total area – 27 000 sq.m. carport 125 places
2015 plaza – 138 places
Project appraisal is completed, land clearing is in progress. It is provided to mobilize
investment to build the object.

19. Project of establishment of
Nanotechnological center «Nano- and
microsystem technics»
Project is oriented to the development of innovation activity
and to manufacturing of competitive nanotechnological
products with the participation of small and medium science
intensive companies

20. Project of establishment of Nanotechnological center «Nano- and
microsystem technics»
Training of Commercialization of
personnel technologies
Nanotechnological
center
Equipage with high-
Start-ups
technology equipment
incubation
Scientific and production
Investment
areas
generation

21. Project of establishment of Nanotechnological center «Nano- and
microsystem technics»
Key Project Results
1. A suite of modern equipment for microelectronics .
2. Basic process for mass production of electronic sensors on the base of nano- and micro
systems.
3. Mass production of NEMS and MEMS physical quantity sensors, biological quantity sensors,
chemical quantity sensors and devices, based on these sensors.
4. Establishment of Start-ups and small innovative companies in nanotechnology and assistance for
their development
Commercialization
Incubation of 10 Start-ups annually Rendering of technological and и
engineering service
Technology transfer
Will be created more than 500 new workplaces in nanotechnology field

22. PROJECT:
«Center of designing, prototyping and manufacturing of
photomasks for the production of ICs with the project rules
up to 90 nm»

23. Center of designing, prototyping and manufacturing of
photomasks for the production of ICs with the project rules up to 90 nm
A specialized center for manufacturing of photomasks with the project rules up to
90 nm will be the first to be established in Russia.
Equipment -
securing of technical
processes at the level of
project rules up to 90 nm
Infrastructure - overstability of
securing of technological process
parameters
Information protection
against improper access provides
guarantee of confidentiality and
information integrity

24. Center of designing, prototyping and manufacturing of
photomasks for the production of ICs with the project rules up to 90 nm
Photo masks consumers
Microelectronic enterprises JSC «NIIME and JSC «Angstrem» JSC «Roselektronika»
plant «MIKRON»
Photo masks manufacturing
process flow
Clean rooms Class
10 - 10 000
Preparation of control information
Photomask production
Photomask control and rectification
First stage – 2007-2008
Technology level 350 nm
Second stage – 2010-2011
Technology level 180 nm
Third stage – 2012-2013
Technology level 90 nm

25. Thank you for your attention
JSC «Zelenograd Innovation Technologies Center»
Contact telephone number: +7(499)720-69-17