NEMS (nanoelectromechanical systems) integrate electrical and mechanical functionality on the nanoscale, taking miniaturization a step further than MEMS (microelectromechanical systems). NEMS enable the integration of sensors, actuators, and other technologies through precision engineering at the sub-micrometer level. Approaches to fabricating NEMS include top-down methods using lithography and bottom-up methods relying on self-assembly of molecules. NEMS have applications in areas like nanobiotechnology, displays, and sensing and could further reduce device sizes and improve performance using materials like carbon. The development of NEMS promises new technological capabilities through continued miniaturization.

1. NANO ELECTRO MECHANICAL
SYSTEMS (NEMS)

2. What is NEMS?
 The term Nanoelectromechanical systems
or NEMS is used to describe devices
integrating electrical and mechanical
functionality on the nanoscale.
 NEMS form the logical next miniaturization
step from so-called microelectromechanical
systems, or MEMS devices.

3. NEMS - Definition
 NEMS is the integration of sensors, actuators,
electronics, photonics, energy, fluidics,
chemistry, and biology into a meaningful
system enabled by sub micrometer science
and engineering precision.

4. Nanowires
 Nanowires such as nanoLED arrays might enable a
new class of nanodisplays.
 But consider fabricating nanowires out of dissimilar
materials such as gallium arsenic on silicon.
 The ability to realize vertical nanowires composed of
metals, semiconductors, and insulators on silicon
and other substrates will enable new types of high
performance, heterogeneous micro- and
nanosystems.
 And they can be formed without the usual
considerations of lattice strain matching that occurs
in microscale dimensions.

5. Nanowires

6. NEMS in Nano Biotechnology
 NEMS will also enable other important new
opportunities in the emerging field of
nanobiotechnology.
 The ultrasensitive detection method could replace
complicated optical fluorophore tags and optical
readout methods routinely used by molecular
biologists with a simple electrically measured
parameter—frequency.
 A biocantilever diving board fabricated by Professor
Michael Roukes at CalTech has shown the ability to
detect small mass changes as low as 7 zeptograms,
which is roughly the mass of a single protein
molecule!

7. Nanoassembly
 The most important area of NEMS opportunity
arises— programmable self-assembly for
heterogeneous nanointegration.
 It is simply called as nanoassembly––a new
manufacturing paradigm that allows for the
directed self-assembly of components into
precise locations on a substrate.
 Nanoassembly might also be used to build
systems on non-planar or 3D surfaces where
traditional monolithic integration has failed.

8. Approaches to miniaturization
 Two complementary approaches to
fabrication of NEMS systems can be found.
 The top-down approach
 The bottom-up approach

9. Top-down approach
 The top-down approach uses the traditional
microfabrication methods, i.e. optical and
electron beam lithography, to manufacture
devices.
 Typically, devices are fabricated from metallic
thin films or etched semiconductor layers.

10. Bottom-up approach
 Bottom-up approaches, in contrast, use the
chemical properties of single molecules to
cause single-molecule components to
 (a) self-organize or self-assemble into some useful
conformation, or
 (b) rely on positional assembly
 This allows fabrication of much smaller
structures, albeit often at the cost of limited
control of the fabrication process.

11. Future of NEMS
 NEMS devices, if implemented into everyday
technologies, could further reduce the size of
modern devices and allow for better
performing sensors.
 Carbon based materials have served as prime
materials for NEMS use, because of their
highlighted mechanical and electrical
properties.

12. Conclusion
 In summary, the MEMS revolution that began
at DARPA in the early 1990s will continue to
bring new and more powerful microsystems
to the commercial world and defense
community.
 Therefore, there is no doubt that the Age of
NEMS will produce exciting new capabilities
we are only now beginning to imagine.

13. Thank You!!!
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