3. EE42/100, Spring 2006 Week 15, R. White 3
Polla dimension slide
Carbon Nanotube
~2 nm diameter
The Macro to Nano World
Things Natural
(Carbon Chemistry)
Things Manmade
(Silicon Chemistry)
DNA
~2-1/2 nm diameter
Fly ash
~ 10-20 mm
Human hair
~ 70-100 mm wide
Ant
~ 5 mm
Quantum corral of 48 iron atoms on copper surface
positioned one at a time with an STM tip
Corral diameter 14 nm
Atoms of silicon
spacing ~tenths of nm
Head of a pin
1-2 mm
Microworld
1 nanometer (nm) 1 micrometer (mm) 1 millimeter (mm)
10-2 m
10-3
m
10-4
m
10-5
m
10-6
m
10-7
m
10-8
m
10-9
m
10-10
m
Visible
Nanoworld
Infrared
Ultraviolet Microwave
Soft x-ray
Dust mite
200 mm
MicroElectroMechanical devices
10 -100 mm wide
Macroworld
Transistor gate
60 nm
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Will Device Size Keep Shrinking?
Carbon nanotubes
1
10
100
1000
10000
Transistor
Size
(nm)
2040
2020
2000
1980
Year
Optical Lithography
Extreme UV
?
DNA
DNA
Nanowires
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Early MEMS (Micro-Electro-Mechanical Systems)
structures and devices
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Early micromachined device: Ink-jet nozzle –
A thin-film heater behind each nozzle
vaporizes the ink and ejects a droplet of ink
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Micro-guitar from Cornell University
(the strings actually vibrate when plucked)
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Laser scanning micromachine
with electrostatic motors, gears, and mirror
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Micromachine: Safety lock for nuclear bomb
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Digital Light Projector (Texas Instruments)
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16-micron-square tilting mirrors built over CMOS drive circuit
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5. MEMS Are Reliable
DLP™ projection systems display an
original-quality picture time and time
again with zero hassle and minimal
maintenance. With more than 5
million systems shipped to more than
75 manufacturers since 1996, DLP™
technology has a proven track record
for outstanding dependability.
The physical fatigue and failure mechanisms
that govern mechanical behavior in macro-
scale materials don’t seem to be as prominent
in MEMS devices. Some of these
devices have been cycled up and down 1016
times without failure.
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18. EE42/100, Spring 2006 Week 15, R. White 18
Microstructures etched in Teflon
-- useful in BioMEMS applications
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Size Benefits of MEMS
Transistor
Chips
Quartz
Crystal
IF Filter
(SAW)
Inductors
Capacitors
Resistors
IF Filter
(SAW)
RF Filter
(ceramic)
MEMS
Technology
Single-Chip
Transceiver
Inductor
IF Filter
Reference
Resonator
RF Switch
RF Filter
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20. EE42/100, Spring 2006 Week 15, R. White 21
Where Do We Go From Here?
Nanoelectromechanical Systems (NEMS)
NEMS are like MEMS, only one or more key enabling
components or structures has a physical dimension
of less than 1 micrometer in size and can be
integrated with another dissimilar components.
NEMS is the integration of sensors, actuators,
electronics, photonics, energy, fluidics, chemistry,
and biology into a meaningful system enabled by
sub-micrometer science and engineering precision.
We are now beginning the Age of NEMS.
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