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LETTERS
T
heamazingclimbingabilityof geckoshasattractedtheinterestof
philosophersandscientistsalikeforcenturies1–3
.However,onlyin
thepastfewyears2,3
hasprogressbeenmadeinunderstandingthe
mechanismbehindthisability,whichreliesonsubmicrometrekeratin
hairscoveringthesolesof geckos.Eachhairproducesaminisculeforce
≈10–7
N(duetovanderWaalsand/orcapillaryinteractions)butmillions
of hairs acting together create a formidable adhesion of ≈10 N cm–2
:
sufficienttokeepgeckosfirmlyontheirfeet,evenwhenupsidedownon
a glass ceiling. It is very tempting3
to create a new type of adhesive by
mimicking the gecko mechanism. Here we report on a prototype of
such‘gecko tape’made by microfabrication of dense arrays of flexible
plastic pillars, the geometry of which is optimized to ensure their
collective adhesion. Our approach shows a way to manufacture self-
cleaning, re-attachable dry adhesives, although problems related to
theirdurabilityandmassproductionareyettoberesolved.
In principle,any submicrometre object—whether it is the tip of an
atomic force microscope (AFM),a small piece of dust or a single gecko
hair—sticks to a solid surface with an adhesive force in the range 10 to
1,000 nN, depending on the exact geometry and materials involved2–6
.
In the case of hydrophilic materials, it is often an atomic layer of
absorbed water (capillary force) that is responsible for the adhesion4,5
.
ThecapillaryforcedecreaseswithdecreasingacharacteristicsizeRofan
object,and canbeestimatedas Fc ≈σRwhere σisthesurfacetensionof
water. On a submicrometre scale, van der Waals interaction is also no
longer negligible and can compete with the capillary force. A typical
valueofvanderWaalsforcesforasubmicrometreobjectis≈100nN,and
thisforcebecomesdominantinthecaseof hydrophobicsurfaces2–5
.Itis
interesting to note that diameters of gecko foot-hair (0.2 to 0.5 µm)
fall exactly in the range where the two forces become comparable3
.
This probably indicates that, in the course of evolution, geckos have
developed their foot hairs to be of the most appropriate diameter to
exploitboththevanderWaalsandcapillaryforces,andtoclimbsurfaces
of varioushydrophilicities.
Basedontheunderstandingof thegecko’sclimbingmechanism,an
AFM tip has been used to produce a set of dimples on a wax surface,
which was then used as a mould for making a number of mesoscopic
polymerpyramids3
.Withthehelpof anotherAFMcantileverwithaflat
tip,theadhesiveforcetoanindividualpyramidwasmeasured.Theforce
nature materials | ADVANCE ONLINE PUBLICATION | www.nature.com/naturematerials 1
Microfabricated adhesive mimicking
gecko foot-hair
A. K. GEIM*1
, S.V. DUBONOS1,2
, I.V. GRIGORIEVA1
, K. S. NOVOSELOV1
,A.A. ZHUKOV2
AND S.YU. SHAPOVAL2
1
Department of Physics &Astronomy,University of Manchester,Manchester M13 9PL,UK
2
Institute for MicroelectronicsTechnology,142432 Chernogolovka,Russia
*e-mail:geim@man.ac.uk
Published online:1 June 2003; doi:10.1038/nmat917 a
b
Figure 1Scanning electron micrographs of microfabricated polyimide hairs.
a,A small area near the edge of a 1 cm2
array of polyimide hairs.This array was later
used to evaluate macroscopic adhesive properties of the mimetic material.b,Bunching
is found to be one of the mechanisms responsible for the reduction of adhesive strength
of the artificial hair.This micrograph also demonstrates the high flexibility of polyimide
pillars.Both scale bars are 2 µm.
© 2003 Nature Publishing Group
LETTERS
2 nature materials | ADVANCE ONLINE PUBLICATION | www.nature.com/naturematerials
was found to be ≈200 nN,which is comparable to the average adhesive
forceestimatedperindividualgeckohair2,3
.
It would be natural to assume that large arrays of tip-like
submicrometre objects would mimic gecko’s foot-hair and provide a
similar adhesion. However, one has to take into account that real
surfacesareneverideallyflat.Infact,ourearlierattempts(unpublished)
to imitate gecko foot-hair by making large arrays of plastic tips (similar
to the pyramids reported previously3
) have failed. The reason was that
only a small fraction of tips based on a solid substrate could make
physicalcontactwiththeoppositesurface(seebelow).Thus,tocreatea
gecko adhesive, one also has to find a way to make hairs sufficiently
flexibleandtoplacethemonasoft,flexiblesubstrate,sothatindividual
tipscanactinunisonandattachtounevensurfacesallatthesametime.
To meet these non-trivial objectives, we have chosen to micropattern
thinpolyimidefilms,whicharebothrobustandflexibleandallowawide
rangeof microfabricationprocedures.
Figure 1 shows two examples of polyimide hairs microfabricated
usingelectron-beamlithographyanddryetchinginoxygenplasma(see
Methods). While searching for the most suitable design for such
artificialhairs,wefirsttestedhowtheiradhesiondependsongeometry.
To this end, we prepared ten relatively small (≈50 × 50 µm2
) arrays of
hairshavingdiametersDrangingbetween0.2and4µm,heightsHfrom
0.15 to 2 µm, and periodicity P from 0.4 to 4.5 µm (parameters of all
samplesaregiveninFig. 2).Then,wemeasuredtheperpendicularforce
F required to detach the samples from a SiO2 surface.This was done by
using an AFM (in force mode) with a home-made cantilever having a
flatsilicontipof ≈50µminsize.Theadhesionbetweenoursamplesand
theflattipwasfoundtodependstronglyontheinitialpreloadand,forall
the measurements in Fig. 2, we used the same preload ≈10 mg (the
maximumallowedbyourcantilever).Wenotethatthispreloadwasnot
sufficient to provide an optimum contact and, even for densest arrays,
the adhesive force reached only≈10 µN.Comparisonof this value with
a typical adhesion of ≈200 nN measured between a standard AFM tip
and the top of an individual polyimide pillar shows that only a small
number(<100)of hairscouldactuallymakecontactwiththeflattip.
All data obtained in the above measurements (and repeated for
another preload) fall on a single smooth curve if plotted against the
separation between pillars P. Figure 2 clearly shows that F is
proportionaltothedensityof hairs(P–2
)anddependsonlyweaklyonH
andD.Althoughintuitivelyplausible,thisfindingisratherunexpected,
because both capillary and van der Waals forces depend2–6
on D.
We speculate that large polyimide pillars do not attach over the whole
top surface,but that each pillar makes a point-like mechanical contact,
which results in a fixed value of force per pillar, almost independent
of itsdiameter.
These results suggest that, for maximum adhesion, one has to
maximizethenumberofhairscapableofattachingtoasurface,andtheir
particular geometry is of less importance. One also has to consider
limitationsonthemaximumdensityofhairs.Forexample,hairsshould
be flexible enough to attach to uneven surfaces but should not break,
curl or tangle. Examination in a scanning electron microscope (SEM)
revealed that very thin pillars (D < 0.3 µm) tend to fall down, whereas
long, closely spaced hairs tend to bunch after being in contact with the
oppositesurface(Fig. 1b).Foranoptimalgeometry,wehaveeventually
chosenhairstobeaslongaswecouldmakethem(H≈2µm),reasonably
dense(P≈1.6µm)andnottoothin(D≈0.5µm)(Fig. 1a).
Totesttheadhesivepropertiesoftheoptimizedmimeticmaterialon
a macroscopic scale, we microfabricated a large (1 cm2
) sample of
polyimide pillars with the above parameters. With the polyimide
microstructure remaining on a silicon wafer, we pressed the sample
against a microscope glass slide with a preload force of ≈20 kg. Rather
discouragingly,thisresultedinaverysmalladhesiveforceof ≈0.01Nor
1 g. This shows that less than 1% of hairs were in actual contact with
the glass surface.To increase the number of‘active’,attaching hairs,the
microfabricatedpolyimidefilmwaspeeledoffthewaferandtransferred
onto a soft bonding substrate (see Methods), so that the resulting
material could be handled just as an adhesive tape. The use of a soft
ratherthansolidbasehasdramatically(bynearly1,000times)improved
F(arbitraryunits)
1
5
0.1
20.5 41
P (µm)
0.2/0.15
0.4/1.5
0.3/0.15
1.2/0.15
0.4/0.15
0.6/2.0
0.6/1.5
0.8/2.0
4.0/0.15
Figure 2 The perpendicular force F required for detaching various samples of
polyimide hairs from a silicon surface.The experimental points are marked by D/H,
indicating the hairs’ diameters D and heights H,respectively.The solid curve is the best
fit to F ∝ P–2
.
20
1.0
30100
0
0.5
S (mm2)
F(N)
Figure 3 The adhesive force F exhibited by‘gecko tape’ as a function of contact
area S.Squares are experimental data; the solid line is the best linear fit.
© 2003 Nature Publishing Group
LETTERS
nature materials | ADVANCE ONLINE PUBLICATION | www.nature.com/naturematerials 3
theadhesivecapacityof themicrostructure(Fig. 3).Webelievethatthe
addedflexibilityof thebaseallowedthemimetictapetocompensatefor
unevenness and dust particles on the surface, which could not be
compensatedforbytheflexibilityof polyimidepillarsalone.
Adhesive properties of the resulting‘gecko tape’were characterized
bymeasuringthedependenceof itsadhesiononcontactareaS byusing
millimetre-sized glass wedges and a laboratory balance. The force was
foundtovarylinearlywithS(Fig. 3),andtobevirtuallyindependentof
preload(forpreloads≥50Ncm–2
),whichprovesthatpracticallyallhairs
onthegeckotapecouldattachtomacroscopicsurfacessimultaneously.
Theaverageforceperhairwasfoundtobe≈70nN,andthewhole1cm2
patch was able to support 3 N. This number is comparable to the
estimatedadhesiveforceof10Ncm–2
forgeckofoot-hair2,3
.Notethat,in
control experiments, similar but unstructured polyimide films (both
freshly prepared and subjected to dry etching without patterning)
exhibitednegligiblysmalladhesion(<10–3
Ncm–2
).Figure 3alsoproves
that our experiment can be scaled up, that is, that larger areas of gecko
tape would support much heavier objects. For example, human palms
haveatotalareaof morethan200cm2
and,if coveredbysuchamaterial,
wouldbeabletosupporttheweightofanaveragehuman.Toemphasise
thispoint,weusedtheavailable(unfortunately,rathersmall)amountof
gecko tape to support the weight of a suitably light familiar object
(atoyinFig.4).
We found that the gecko tape could go through several
detachment–attachment cycles before we noticed a degradation of its
adhesive properties. A subsequent SEM analysis revealed that this was
related to fallen and broken hairs. Many hairs were lying on the
polyimide surface, presumably kept in this position by the capillary
force.We have also tested the tape on different surfaces and found that
theadhesionforcevariedonlybyafactorof threebetweenhydrophobic
GaAs and hydrophilic SiO2. This indicates that our microfabricated
adhesivemakesuseof bothcapillaryandvanderWaalsforces.
Regarding possible applications, we believe that, instead of
expensive and slow electron-beam lithography, other techniques (for
example,basedontheelectricalinstabilityof polymers7
)canbeapplied
to produce a similar material in large quantities. Our major concern is
the durability of such microfabricated adhesives, which limits the
number of successful re-attachments. Durability can probably be
improvedbytryingothermaterials,whichwouldbesufficientlyflexible
—similar to hydrophilic polyimide—but strongly hydrophobic
(keratin,as in gecko hair,is a possible candidate).In this case,the hairs
would not stick to each other or to the base surface, which should
improve the resistance to attachment–detachment cycles. In addition,
it would be possible to use denser arrays of pillars, thereby further
increasingtheiradhesivestrength.
METHODS
MICROFABRICATION
Arrays of submicrometre hairs were microfabricated by using the following set of procedures. First, we
prepared a 5-µm-thick polyimide film (pyromellitic dianhydride-oxydianiline polyimide; baked at
250 °C) on top of a silicon wafer. Next, by using electron-beam lithography, thermal evaporation of an
aluminium film (≈150 nm thick) and lift-off, we prepared an array of submicrometre aluminium disks.
The resulting aluminium pattern was then transferred in the polyimide film by dry etching in oxygen.
The oxygen plasma etching was essential, because it provided a large difference between etching rates of
aluminium oxide and polyimide, so that several micrometres of polyimide could be removed before the
aluminium mask disappeared. In addition, we applied a negative d.c. bias to the substrate, which allowed
us to achieve large aspect ratios (for example, see ref. 8), making the pillars sufficiently tall.
PEELING OFF AND TRANSFER OF POLYIMIDE FILMS ONTO ANOTHER SUBSTRATE
Polyimide films are very robust even when a few micrometres thick, and their peeling from the silicon
wafer does not require any special skills or accuracy. Several support materials and bonding methods were
tried (using unstructured films) before we finally opted for the use of scotch tape as the simplest and most
reliable scheme for placing the peeled-off microstructures on a soft base. Note that transfer onto another
substrate would not be required, if thicker (>50 µm) polyimide films were used. In our case of thin
(5 µm) films, the use of a thicker flexible substrate was advantageous because it simplified handling of the
microstructured material and made this more reliable.
Received 13 January 2003; accepted 27April 2003; published 1 June 2003.
References
1. Aristotle Historia Animalium Book IX (trans. Thompson, D. A. W.) (Clarendon, Oxford, 1918);
http://classics.mit.edu/Aristotle/history_anim.html.
2. Autumn, K. et al. Adhesive force of a single gecko foot-hair.Nature 405, 681–685 (2000).
3. Autumn, K. et al. Evidence for van der Waals adhesion in gecko setae. Proc. Natl Acad. Sci. USA 99,
12252–12256 (2002).
4. Cappella, B. & Dietler, G. Force-distance curves by atomic force microscope. Surf. Sci. Rep. 34, 1–104
(1999).
5. Yamamoto, K., Tanuma, C. & Gemma, N. Competition between electrostatic and capillary forces
acting on a single particle. Jpn J. Appl. Phys. 34, 4176–4184 (1995).
6. Stork, N. E. Experimental analysis of adhesion of Chrysolina polita (Chrysomelidae: Coleoptera) on a
variety of surfaces. J. Exp. Biol. 88, 91–107 (1980).
7. Schäffer, E., Thurn-Albrecht, T., Russell, T. P. & Steiner, U. Electrically induced structure formation
and pattern transfer. Nature 403, 874–877 (2000).
8. Sekine, M. Dielectric film etching in semiconductor device manufacturing: Development of SiO2
etching and the next generation plasma reactor. Appl. Surf. Sci. 192, 270–298 (2002).
Acknowledgements
This work was supported by EPSRC (Engineering and Physical Sciences Research Council) UK. S.V.D.,
A.A.Z. and S.Y.S. also acknowledge the financial support of the Russian Academy of Sciences.
Correspondence and requests for materials should be addressed to A.K.G.
Competing financial interests
The authors declare that they have no competing financial interests.
Figure 4Re-attachable dry adhesives based on the gecko principle can find a
variety of applications.The photo illustrates this point by showing a spider-man toy
clinging with one of its hands to a horizontal glass plate.The toy (15 cm high; weighing
40 g) has its hand covered with the microfabricated gecko tape,which provides a
≈0.5 cm2
contact with the glass and a carrying capacity of >100 g.Note that the toy
was already re-attached several times to various surfaces before this photo was taken.
© 2003 Nature Publishing Group

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[Dia,adh]2003 geim microfabricated adhesive mimicking gecko foot-hair

  • 1. LETTERS T heamazingclimbingabilityof geckoshasattractedtheinterestof philosophersandscientistsalikeforcenturies1–3 .However,onlyin thepastfewyears2,3 hasprogressbeenmadeinunderstandingthe mechanismbehindthisability,whichreliesonsubmicrometrekeratin hairscoveringthesolesof geckos.Eachhairproducesaminisculeforce ≈10–7 N(duetovanderWaalsand/orcapillaryinteractions)butmillions of hairs acting together create a formidable adhesion of ≈10 N cm–2 : sufficienttokeepgeckosfirmlyontheirfeet,evenwhenupsidedownon a glass ceiling. It is very tempting3 to create a new type of adhesive by mimicking the gecko mechanism. Here we report on a prototype of such‘gecko tape’made by microfabrication of dense arrays of flexible plastic pillars, the geometry of which is optimized to ensure their collective adhesion. Our approach shows a way to manufacture self- cleaning, re-attachable dry adhesives, although problems related to theirdurabilityandmassproductionareyettoberesolved. In principle,any submicrometre object—whether it is the tip of an atomic force microscope (AFM),a small piece of dust or a single gecko hair—sticks to a solid surface with an adhesive force in the range 10 to 1,000 nN, depending on the exact geometry and materials involved2–6 . In the case of hydrophilic materials, it is often an atomic layer of absorbed water (capillary force) that is responsible for the adhesion4,5 . ThecapillaryforcedecreaseswithdecreasingacharacteristicsizeRofan object,and canbeestimatedas Fc ≈σRwhere σisthesurfacetensionof water. On a submicrometre scale, van der Waals interaction is also no longer negligible and can compete with the capillary force. A typical valueofvanderWaalsforcesforasubmicrometreobjectis≈100nN,and thisforcebecomesdominantinthecaseof hydrophobicsurfaces2–5 .Itis interesting to note that diameters of gecko foot-hair (0.2 to 0.5 µm) fall exactly in the range where the two forces become comparable3 . This probably indicates that, in the course of evolution, geckos have developed their foot hairs to be of the most appropriate diameter to exploitboththevanderWaalsandcapillaryforces,andtoclimbsurfaces of varioushydrophilicities. Basedontheunderstandingof thegecko’sclimbingmechanism,an AFM tip has been used to produce a set of dimples on a wax surface, which was then used as a mould for making a number of mesoscopic polymerpyramids3 .Withthehelpof anotherAFMcantileverwithaflat tip,theadhesiveforcetoanindividualpyramidwasmeasured.Theforce nature materials | ADVANCE ONLINE PUBLICATION | www.nature.com/naturematerials 1 Microfabricated adhesive mimicking gecko foot-hair A. K. GEIM*1 , S.V. DUBONOS1,2 , I.V. GRIGORIEVA1 , K. S. NOVOSELOV1 ,A.A. ZHUKOV2 AND S.YU. SHAPOVAL2 1 Department of Physics &Astronomy,University of Manchester,Manchester M13 9PL,UK 2 Institute for MicroelectronicsTechnology,142432 Chernogolovka,Russia *e-mail:geim@man.ac.uk Published online:1 June 2003; doi:10.1038/nmat917 a b Figure 1Scanning electron micrographs of microfabricated polyimide hairs. a,A small area near the edge of a 1 cm2 array of polyimide hairs.This array was later used to evaluate macroscopic adhesive properties of the mimetic material.b,Bunching is found to be one of the mechanisms responsible for the reduction of adhesive strength of the artificial hair.This micrograph also demonstrates the high flexibility of polyimide pillars.Both scale bars are 2 µm. © 2003 Nature Publishing Group
  • 2. LETTERS 2 nature materials | ADVANCE ONLINE PUBLICATION | www.nature.com/naturematerials was found to be ≈200 nN,which is comparable to the average adhesive forceestimatedperindividualgeckohair2,3 . It would be natural to assume that large arrays of tip-like submicrometre objects would mimic gecko’s foot-hair and provide a similar adhesion. However, one has to take into account that real surfacesareneverideallyflat.Infact,ourearlierattempts(unpublished) to imitate gecko foot-hair by making large arrays of plastic tips (similar to the pyramids reported previously3 ) have failed. The reason was that only a small fraction of tips based on a solid substrate could make physicalcontactwiththeoppositesurface(seebelow).Thus,tocreatea gecko adhesive, one also has to find a way to make hairs sufficiently flexibleandtoplacethemonasoft,flexiblesubstrate,sothatindividual tipscanactinunisonandattachtounevensurfacesallatthesametime. To meet these non-trivial objectives, we have chosen to micropattern thinpolyimidefilms,whicharebothrobustandflexibleandallowawide rangeof microfabricationprocedures. Figure 1 shows two examples of polyimide hairs microfabricated usingelectron-beamlithographyanddryetchinginoxygenplasma(see Methods). While searching for the most suitable design for such artificialhairs,wefirsttestedhowtheiradhesiondependsongeometry. To this end, we prepared ten relatively small (≈50 × 50 µm2 ) arrays of hairshavingdiametersDrangingbetween0.2and4µm,heightsHfrom 0.15 to 2 µm, and periodicity P from 0.4 to 4.5 µm (parameters of all samplesaregiveninFig. 2).Then,wemeasuredtheperpendicularforce F required to detach the samples from a SiO2 surface.This was done by using an AFM (in force mode) with a home-made cantilever having a flatsilicontipof ≈50µminsize.Theadhesionbetweenoursamplesand theflattipwasfoundtodependstronglyontheinitialpreloadand,forall the measurements in Fig. 2, we used the same preload ≈10 mg (the maximumallowedbyourcantilever).Wenotethatthispreloadwasnot sufficient to provide an optimum contact and, even for densest arrays, the adhesive force reached only≈10 µN.Comparisonof this value with a typical adhesion of ≈200 nN measured between a standard AFM tip and the top of an individual polyimide pillar shows that only a small number(<100)of hairscouldactuallymakecontactwiththeflattip. All data obtained in the above measurements (and repeated for another preload) fall on a single smooth curve if plotted against the separation between pillars P. Figure 2 clearly shows that F is proportionaltothedensityof hairs(P–2 )anddependsonlyweaklyonH andD.Althoughintuitivelyplausible,thisfindingisratherunexpected, because both capillary and van der Waals forces depend2–6 on D. We speculate that large polyimide pillars do not attach over the whole top surface,but that each pillar makes a point-like mechanical contact, which results in a fixed value of force per pillar, almost independent of itsdiameter. These results suggest that, for maximum adhesion, one has to maximizethenumberofhairscapableofattachingtoasurface,andtheir particular geometry is of less importance. One also has to consider limitationsonthemaximumdensityofhairs.Forexample,hairsshould be flexible enough to attach to uneven surfaces but should not break, curl or tangle. Examination in a scanning electron microscope (SEM) revealed that very thin pillars (D < 0.3 µm) tend to fall down, whereas long, closely spaced hairs tend to bunch after being in contact with the oppositesurface(Fig. 1b).Foranoptimalgeometry,wehaveeventually chosenhairstobeaslongaswecouldmakethem(H≈2µm),reasonably dense(P≈1.6µm)andnottoothin(D≈0.5µm)(Fig. 1a). Totesttheadhesivepropertiesoftheoptimizedmimeticmaterialon a macroscopic scale, we microfabricated a large (1 cm2 ) sample of polyimide pillars with the above parameters. With the polyimide microstructure remaining on a silicon wafer, we pressed the sample against a microscope glass slide with a preload force of ≈20 kg. Rather discouragingly,thisresultedinaverysmalladhesiveforceof ≈0.01Nor 1 g. This shows that less than 1% of hairs were in actual contact with the glass surface.To increase the number of‘active’,attaching hairs,the microfabricatedpolyimidefilmwaspeeledoffthewaferandtransferred onto a soft bonding substrate (see Methods), so that the resulting material could be handled just as an adhesive tape. The use of a soft ratherthansolidbasehasdramatically(bynearly1,000times)improved F(arbitraryunits) 1 5 0.1 20.5 41 P (µm) 0.2/0.15 0.4/1.5 0.3/0.15 1.2/0.15 0.4/0.15 0.6/2.0 0.6/1.5 0.8/2.0 4.0/0.15 Figure 2 The perpendicular force F required for detaching various samples of polyimide hairs from a silicon surface.The experimental points are marked by D/H, indicating the hairs’ diameters D and heights H,respectively.The solid curve is the best fit to F ∝ P–2 . 20 1.0 30100 0 0.5 S (mm2) F(N) Figure 3 The adhesive force F exhibited by‘gecko tape’ as a function of contact area S.Squares are experimental data; the solid line is the best linear fit. © 2003 Nature Publishing Group
  • 3. LETTERS nature materials | ADVANCE ONLINE PUBLICATION | www.nature.com/naturematerials 3 theadhesivecapacityof themicrostructure(Fig. 3).Webelievethatthe addedflexibilityof thebaseallowedthemimetictapetocompensatefor unevenness and dust particles on the surface, which could not be compensatedforbytheflexibilityof polyimidepillarsalone. Adhesive properties of the resulting‘gecko tape’were characterized bymeasuringthedependenceof itsadhesiononcontactareaS byusing millimetre-sized glass wedges and a laboratory balance. The force was foundtovarylinearlywithS(Fig. 3),andtobevirtuallyindependentof preload(forpreloads≥50Ncm–2 ),whichprovesthatpracticallyallhairs onthegeckotapecouldattachtomacroscopicsurfacessimultaneously. Theaverageforceperhairwasfoundtobe≈70nN,andthewhole1cm2 patch was able to support 3 N. This number is comparable to the estimatedadhesiveforceof10Ncm–2 forgeckofoot-hair2,3 .Notethat,in control experiments, similar but unstructured polyimide films (both freshly prepared and subjected to dry etching without patterning) exhibitednegligiblysmalladhesion(<10–3 Ncm–2 ).Figure 3alsoproves that our experiment can be scaled up, that is, that larger areas of gecko tape would support much heavier objects. For example, human palms haveatotalareaof morethan200cm2 and,if coveredbysuchamaterial, wouldbeabletosupporttheweightofanaveragehuman.Toemphasise thispoint,weusedtheavailable(unfortunately,rathersmall)amountof gecko tape to support the weight of a suitably light familiar object (atoyinFig.4). We found that the gecko tape could go through several detachment–attachment cycles before we noticed a degradation of its adhesive properties. A subsequent SEM analysis revealed that this was related to fallen and broken hairs. Many hairs were lying on the polyimide surface, presumably kept in this position by the capillary force.We have also tested the tape on different surfaces and found that theadhesionforcevariedonlybyafactorof threebetweenhydrophobic GaAs and hydrophilic SiO2. This indicates that our microfabricated adhesivemakesuseof bothcapillaryandvanderWaalsforces. Regarding possible applications, we believe that, instead of expensive and slow electron-beam lithography, other techniques (for example,basedontheelectricalinstabilityof polymers7 )canbeapplied to produce a similar material in large quantities. Our major concern is the durability of such microfabricated adhesives, which limits the number of successful re-attachments. Durability can probably be improvedbytryingothermaterials,whichwouldbesufficientlyflexible —similar to hydrophilic polyimide—but strongly hydrophobic (keratin,as in gecko hair,is a possible candidate).In this case,the hairs would not stick to each other or to the base surface, which should improve the resistance to attachment–detachment cycles. In addition, it would be possible to use denser arrays of pillars, thereby further increasingtheiradhesivestrength. METHODS MICROFABRICATION Arrays of submicrometre hairs were microfabricated by using the following set of procedures. First, we prepared a 5-µm-thick polyimide film (pyromellitic dianhydride-oxydianiline polyimide; baked at 250 °C) on top of a silicon wafer. Next, by using electron-beam lithography, thermal evaporation of an aluminium film (≈150 nm thick) and lift-off, we prepared an array of submicrometre aluminium disks. The resulting aluminium pattern was then transferred in the polyimide film by dry etching in oxygen. The oxygen plasma etching was essential, because it provided a large difference between etching rates of aluminium oxide and polyimide, so that several micrometres of polyimide could be removed before the aluminium mask disappeared. In addition, we applied a negative d.c. bias to the substrate, which allowed us to achieve large aspect ratios (for example, see ref. 8), making the pillars sufficiently tall. PEELING OFF AND TRANSFER OF POLYIMIDE FILMS ONTO ANOTHER SUBSTRATE Polyimide films are very robust even when a few micrometres thick, and their peeling from the silicon wafer does not require any special skills or accuracy. Several support materials and bonding methods were tried (using unstructured films) before we finally opted for the use of scotch tape as the simplest and most reliable scheme for placing the peeled-off microstructures on a soft base. Note that transfer onto another substrate would not be required, if thicker (>50 µm) polyimide films were used. In our case of thin (5 µm) films, the use of a thicker flexible substrate was advantageous because it simplified handling of the microstructured material and made this more reliable. Received 13 January 2003; accepted 27April 2003; published 1 June 2003. References 1. Aristotle Historia Animalium Book IX (trans. Thompson, D. A. W.) (Clarendon, Oxford, 1918); http://classics.mit.edu/Aristotle/history_anim.html. 2. Autumn, K. et al. Adhesive force of a single gecko foot-hair.Nature 405, 681–685 (2000). 3. Autumn, K. et al. Evidence for van der Waals adhesion in gecko setae. Proc. Natl Acad. Sci. USA 99, 12252–12256 (2002). 4. Cappella, B. & Dietler, G. Force-distance curves by atomic force microscope. Surf. Sci. Rep. 34, 1–104 (1999). 5. Yamamoto, K., Tanuma, C. & Gemma, N. Competition between electrostatic and capillary forces acting on a single particle. Jpn J. Appl. Phys. 34, 4176–4184 (1995). 6. Stork, N. E. Experimental analysis of adhesion of Chrysolina polita (Chrysomelidae: Coleoptera) on a variety of surfaces. J. Exp. Biol. 88, 91–107 (1980). 7. Schäffer, E., Thurn-Albrecht, T., Russell, T. P. & Steiner, U. Electrically induced structure formation and pattern transfer. Nature 403, 874–877 (2000). 8. Sekine, M. Dielectric film etching in semiconductor device manufacturing: Development of SiO2 etching and the next generation plasma reactor. Appl. Surf. Sci. 192, 270–298 (2002). Acknowledgements This work was supported by EPSRC (Engineering and Physical Sciences Research Council) UK. S.V.D., A.A.Z. and S.Y.S. also acknowledge the financial support of the Russian Academy of Sciences. Correspondence and requests for materials should be addressed to A.K.G. Competing financial interests The authors declare that they have no competing financial interests. Figure 4Re-attachable dry adhesives based on the gecko principle can find a variety of applications.The photo illustrates this point by showing a spider-man toy clinging with one of its hands to a horizontal glass plate.The toy (15 cm high; weighing 40 g) has its hand covered with the microfabricated gecko tape,which provides a ≈0.5 cm2 contact with the glass and a carrying capacity of >100 g.Note that the toy was already re-attached several times to various surfaces before this photo was taken. © 2003 Nature Publishing Group