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Arsenic is implanted into a lightly doped p-type Si substrate at an energy of 75keV. The dose is
1 times 10^14/cm^2. The Si substrate is tilted 7 degree with respect to the ion beam to make it
appear amorphous. The implanted region is assumed to be rapidly annealed so that complete
electrical activation is achieved. What is the peak electron concentration produced?
Solution
uploaded image

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Arsenic is implanted into a lightly doped p-type Si substrate at an e.pdf

  • 1. Arsenic is implanted into a lightly doped p-type Si substrate at an energy of 75keV. The dose is 1 times 10^14/cm^2. The Si substrate is tilted 7 degree with respect to the ion beam to make it appear amorphous. The implanted region is assumed to be rapidly annealed so that complete electrical activation is achieved. What is the peak electron concentration produced? Solution uploaded image