1. Thin Film Vacuum Chuck
semiXicon porous ceramic vacuum chucks are available for a wild array of shapes and sizes for
thin film substrates and other flat fragile materials, the chuck’s superb flat surface of porous
ceramic distributes the vacuum force equally to mitigate any potential deflection.
The chucks are of different flatness and parallelism depends upon customer’s applications, in
most of the cases we are talking about several microns on the entire surface.
The frames to hold the porous ceramic insert can be alumina, stainless steel, or ceramic, we
have specially developed the assembly technology which distinguish our chucks to brave harsh
working environment with high temperature and humidity.
Some standard designs are
Square: 2”,4”,6”,8”,9”,12”,20”
Round: 2”,4”,5”,6”,8”,9”,12”
Rectangle: 2”*4”,4”*6”,6”*12,12”*20