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(12) United States Patent
Ellis et al.
US008809751B2
US 8,809,751 B2
*Aug. 19, 2014
(10) Patent N0.:
(45) Date of Patent:
(54)
(75)
(73)
(21)
(22)
(65)
(63)
(51)
(52)
(58)
MODULAR HEATER SYSTEM
Inventors: Eric Ellis, Columbia, MO (US); Troy
Ruben Bolton, Fulton, MO (US); Jacob
Lindley, St. Louis, MO (US)
Assignee: WatloW Electric Manufacturing
Company, St. Louis, MO (US)
Notice: Subject to any disclaimer, the term ofthis
patent is extended or adjusted under 35
U.S.C. 154(b) by 1094 days.
This patent is subject to a terminal dis
claimer.
Appl. N0.: 12/351,041
Filed: Jan. 9, 2009
Prior Publication Data
US 2009/0179022 A1 Jul. 16, 2009
Related US. Application Data
Continuation-in-part of application No. 11/520,130,
?led on Sep. 13, 2006, noW Pat. No. 7,919,733, Which
is a continuation-in-part of application No.
11/435,073, ?led on May 16, 2006, noW Pat. No.
7,964,826, Which is a continuation-in-part of
applicationNo. 11/199,832, ?led onAug. 9, 2005, noW
Pat. No. 7,626,146, applicationNo. 12/351,041, Which
is a continuation-in-part of application No.
11/777,709, ?led on Jul. 13, 2007.
Int. Cl.
H05B 3/44 (2006.01)
F16L 53/00 (2006.01)
US. Cl.
USPC .......... .. 219/535; 219/544; 219/550; 392/480
Field of Classi?cation Search
None
See application ?le for complete search history.
(56) References Cited
U.S. PATENT DOCUMENTS
1,674,488 A 6/1928
2,426,976 A 9/1947
2,809,268 A * 10/1957
3,296,415 A * 1/1967
3,955,601 A 5/1976
A
E
Tang
Taulman
Heron ......................... .. 219/522
Eisler .......................... .. 219/385
Plummer et 31.
3,971,416 7/1976 Johnson
RE29,322 7/1977 Nelson
(Continued)
FOREIGN PATENT DOCUMENTS
DE 35 44 589
DE 20 2005 004602
6/1987
7/2005
(Continued)
OTHER PUBLICATIONS
Of?ce Action ofcorresponding JPApp. No. 20 l l -5454l8, dated Feb.
8, 2013, pp. 1-3.
(Continued)
Primary Examiner * Joseph M Pelham
(74) Attorney, Agent, or Firm * Brinks Gilson & Lione
(57) ABSTRACT
A heater system is provided that includes a hybrid insulation
cover that has a ?rst cover disposed around hinged carrier
members and heat trace sections, and a second cover opera
tively engaged With the ?rst cover and adapted for detachable
placement around a heating target and its varying geometries.
A ?exible insulation jacket having a similar construction as
the second cover is also provided for use With connector
assemblies. Furthermore, a heater system is provided that
includes at least one heat trace section encapsulated Within
adjacent insulating members for use With heating gaslines
and pumplines of semiconductor processing systems.
21 Claims, 50 Drawing Sheets
US 8,809,751 B2
Page 2
(56) References Cited 6,222,165 B1* 4/2001 Schwarzkopf .............. .. 219/535
6,498,898 B2 12/2002 Schmitt
U.S. PATENT DOCUMENTS 6,727,481 B1 4/2004 Wilds
6,792,200 B2 9/2004 Hersh
4,123,837 A 11/1978 Homer 6,839,508 B2 1/2005 Biess et al.
4,152,577 A 5/1979 Leavines 7,034,254 B2* 4/2006 Grabowski et al. ......... .. 219/387
4,197,449 A 4/1980 Fessenden .................. .. 219/549 2003/0052121 A1 3/2003 SOPOYY
4,254,326 A 3/1981 Walkeret 31‘ 2006/0278631 A1* 12/2006 Lee etal. .................... .. 219/529
4,281,238 A 7/1981 Nomaetal. ................ .. 219/535 2007/0108176 A1 5/2007 E1118
4,293,763 A 10/1981 McMullan .. . 219/528
4,365,144 A 12/1982 Reich etal. ................. .. 219/535 FOREIGN PATENT DOCUMENTS
4,429,213 A 1/1984 Mathieu
4,575,617 A 3/1986 Cooper ....................... .. 219/494 EP 0625669 11/1994
4,638,510 A 1/1987 Hubbard EP 0 937 565 8/1999
4,791,277 A 12/1988 Montierthetal. FR 2559374 3/1985
4,849,611 A 7/1989 Whitney et al. FR 2 576 662 8/1936
5,086,836 A 2/1992 Barth etal. FR 2 599115 11/1937
5,286,952 A 2/1994 McMills etal. ............ .. 219/535 JP 55041646 3/1980
5,294,780 A 3/1994 Montierth etal. JP 03 326933 12/1996
5,296,081 A 3/1994 Morin etal. ................ .. 156/498 JP 10060958 3/1998
5,359,179 A 10/1994 Desloge etal. ............. .. 219/535 WO 90/10817 9/1990
5,390,961 A 2/1995 Guthrie WO 97/03540 1/1997
5,537,742 A 7/1996 Le etal. WO 01/56731 3/2001
5,632,919 A 5/1997 MacCracken
5,667,712 A 9/1997 Sutoriusetal. ............. .. 219/535 OTHER PUBLICATIONS
5,714,738 A 2/1998 HauschulZ et al. . 219/535
5,756,972 A 5/1998 anicar et 31, ,,,,,,,,,,,, ,, 219/541 International Search Report PCT/US2008/069712 (Dec. 18, 2008).
5,864,941 A 2/ 1999 Baichoo et 31, StarFleX Heaters. Glenn Electric Heater Corporation (accessed on
5,933,574 A 8/1999 Avansino Jul. 13, 2007); Retrieved from the internet: url: http://WWW.glen
5,974,227 A 10/ 1999 Schave ........................ .. 392/478 nelectricheater.com/star?ex.htrnl.
6,049,658 A 4/2000 Schave et al. .. . 392/472
6,111,234 A 8/2000 Batliwalla et al. .......... .. 219/549 * cited by examiner
US 8,809,751 B2Sheet 1 0f 50Aug. 19, 2014US. Patent
ESE
Ennaom
EBQW
iCQZBQmoo
mockmmmooLa
US. Patent Aug. 19, 2014 Sheet 2 0f50 US 8,809,751 B2
12 PriorArt
FIG.2
US. Patent Aug. 19, 2014 Sheet 3 0f50 US 8,809,751 B2
US. Patent Au .19 2014 Sheet4 0f50
US. Patent Aug. 19, 2014 Sheet 5 0f50 US 8,809,751 B2
US. Patent Aug. 19, 2014 Sheet 6 0f50 US 8,809,751 B2
72
US. Patent Aug. 19, 2014 Sheet 7 0f50 US 8,809,751 B2
64
i8
FIG.7
52
58645866
64
US. Patent Aug. 19, 2014 Sheet 8 0f50 US 8,809,751 B2
FIG. 8
US. Patent Aug. 19, 2014 Sheet 9 0f50 US 8,809,751 B2
FIG.9
US. Patent Aug. 19, 2014 Sheet 10 0f50 US 8,809,751 B2
400
52
FIG. TO
US. Patent Aug. 19, 2014 Sheet 11 0150 US 8,809,751 B2
422
425 FIG. 1 1
US. Patent Aug. 19, 2014 Sheet 12 0150 US 8,809,751 B2
450
FIG. 12
US. Patent Aug. 19, 2014 Sheet 13 0f50 US 8,809,751 B2
"444
FIG. 13
US. Patent Aug. 19, 2014 Sheet 14 0f50 US 8,809,751 B2
US. Patent Aug. 19, 2014 Sheet 15 0f50 US 8,809,751 B2
FIG.15
US 8,809,751 B2Sheet 16 0f 50Aug. 19, 2014US. Patent
US. Patent Aug. 19, 2014 Sheet 17 0150 US 8,809,751 B2
LO
L0
17
FIG.
US. Patent Aug. 19, 2014 Sheet 18 0f50 US 8,809,751 B2
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751
US Patent 8809751

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US Patent 8809751

  • 1. (12) United States Patent Ellis et al. US008809751B2 US 8,809,751 B2 *Aug. 19, 2014 (10) Patent N0.: (45) Date of Patent: (54) (75) (73) (21) (22) (65) (63) (51) (52) (58) MODULAR HEATER SYSTEM Inventors: Eric Ellis, Columbia, MO (US); Troy Ruben Bolton, Fulton, MO (US); Jacob Lindley, St. Louis, MO (US) Assignee: WatloW Electric Manufacturing Company, St. Louis, MO (US) Notice: Subject to any disclaimer, the term ofthis patent is extended or adjusted under 35 U.S.C. 154(b) by 1094 days. This patent is subject to a terminal dis claimer. Appl. N0.: 12/351,041 Filed: Jan. 9, 2009 Prior Publication Data US 2009/0179022 A1 Jul. 16, 2009 Related US. Application Data Continuation-in-part of application No. 11/520,130, ?led on Sep. 13, 2006, noW Pat. No. 7,919,733, Which is a continuation-in-part of application No. 11/435,073, ?led on May 16, 2006, noW Pat. No. 7,964,826, Which is a continuation-in-part of applicationNo. 11/199,832, ?led onAug. 9, 2005, noW Pat. No. 7,626,146, applicationNo. 12/351,041, Which is a continuation-in-part of application No. 11/777,709, ?led on Jul. 13, 2007. Int. Cl. H05B 3/44 (2006.01) F16L 53/00 (2006.01) US. Cl. USPC .......... .. 219/535; 219/544; 219/550; 392/480 Field of Classi?cation Search None See application ?le for complete search history. (56) References Cited U.S. PATENT DOCUMENTS 1,674,488 A 6/1928 2,426,976 A 9/1947 2,809,268 A * 10/1957 3,296,415 A * 1/1967 3,955,601 A 5/1976 A E Tang Taulman Heron ......................... .. 219/522 Eisler .......................... .. 219/385 Plummer et 31. 3,971,416 7/1976 Johnson RE29,322 7/1977 Nelson (Continued) FOREIGN PATENT DOCUMENTS DE 35 44 589 DE 20 2005 004602 6/1987 7/2005 (Continued) OTHER PUBLICATIONS Of?ce Action ofcorresponding JPApp. No. 20 l l -5454l8, dated Feb. 8, 2013, pp. 1-3. (Continued) Primary Examiner * Joseph M Pelham (74) Attorney, Agent, or Firm * Brinks Gilson & Lione (57) ABSTRACT A heater system is provided that includes a hybrid insulation cover that has a ?rst cover disposed around hinged carrier members and heat trace sections, and a second cover opera tively engaged With the ?rst cover and adapted for detachable placement around a heating target and its varying geometries. A ?exible insulation jacket having a similar construction as the second cover is also provided for use With connector assemblies. Furthermore, a heater system is provided that includes at least one heat trace section encapsulated Within adjacent insulating members for use With heating gaslines and pumplines of semiconductor processing systems. 21 Claims, 50 Drawing Sheets
  • 2. US 8,809,751 B2 Page 2 (56) References Cited 6,222,165 B1* 4/2001 Schwarzkopf .............. .. 219/535 6,498,898 B2 12/2002 Schmitt U.S. PATENT DOCUMENTS 6,727,481 B1 4/2004 Wilds 6,792,200 B2 9/2004 Hersh 4,123,837 A 11/1978 Homer 6,839,508 B2 1/2005 Biess et al. 4,152,577 A 5/1979 Leavines 7,034,254 B2* 4/2006 Grabowski et al. ......... .. 219/387 4,197,449 A 4/1980 Fessenden .................. .. 219/549 2003/0052121 A1 3/2003 SOPOYY 4,254,326 A 3/1981 Walkeret 31‘ 2006/0278631 A1* 12/2006 Lee etal. .................... .. 219/529 4,281,238 A 7/1981 Nomaetal. ................ .. 219/535 2007/0108176 A1 5/2007 E1118 4,293,763 A 10/1981 McMullan .. . 219/528 4,365,144 A 12/1982 Reich etal. ................. .. 219/535 FOREIGN PATENT DOCUMENTS 4,429,213 A 1/1984 Mathieu 4,575,617 A 3/1986 Cooper ....................... .. 219/494 EP 0625669 11/1994 4,638,510 A 1/1987 Hubbard EP 0 937 565 8/1999 4,791,277 A 12/1988 Montierthetal. FR 2559374 3/1985 4,849,611 A 7/1989 Whitney et al. FR 2 576 662 8/1936 5,086,836 A 2/1992 Barth etal. FR 2 599115 11/1937 5,286,952 A 2/1994 McMills etal. ............ .. 219/535 JP 55041646 3/1980 5,294,780 A 3/1994 Montierth etal. JP 03 326933 12/1996 5,296,081 A 3/1994 Morin etal. ................ .. 156/498 JP 10060958 3/1998 5,359,179 A 10/1994 Desloge etal. ............. .. 219/535 WO 90/10817 9/1990 5,390,961 A 2/1995 Guthrie WO 97/03540 1/1997 5,537,742 A 7/1996 Le etal. WO 01/56731 3/2001 5,632,919 A 5/1997 MacCracken 5,667,712 A 9/1997 Sutoriusetal. ............. .. 219/535 OTHER PUBLICATIONS 5,714,738 A 2/1998 HauschulZ et al. . 219/535 5,756,972 A 5/1998 anicar et 31, ,,,,,,,,,,,, ,, 219/541 International Search Report PCT/US2008/069712 (Dec. 18, 2008). 5,864,941 A 2/ 1999 Baichoo et 31, StarFleX Heaters. Glenn Electric Heater Corporation (accessed on 5,933,574 A 8/1999 Avansino Jul. 13, 2007); Retrieved from the internet: url: http://WWW.glen 5,974,227 A 10/ 1999 Schave ........................ .. 392/478 nelectricheater.com/star?ex.htrnl. 6,049,658 A 4/2000 Schave et al. .. . 392/472 6,111,234 A 8/2000 Batliwalla et al. .......... .. 219/549 * cited by examiner
  • 3. US 8,809,751 B2Sheet 1 0f 50Aug. 19, 2014US. Patent ESE Ennaom EBQW iCQZBQmoo mockmmmooLa
  • 4. US. Patent Aug. 19, 2014 Sheet 2 0f50 US 8,809,751 B2 12 PriorArt FIG.2
  • 5. US. Patent Aug. 19, 2014 Sheet 3 0f50 US 8,809,751 B2
  • 6. US. Patent Au .19 2014 Sheet4 0f50
  • 7. US. Patent Aug. 19, 2014 Sheet 5 0f50 US 8,809,751 B2
  • 8. US. Patent Aug. 19, 2014 Sheet 6 0f50 US 8,809,751 B2 72
  • 9. US. Patent Aug. 19, 2014 Sheet 7 0f50 US 8,809,751 B2 64 i8 FIG.7 52 58645866 64
  • 10. US. Patent Aug. 19, 2014 Sheet 8 0f50 US 8,809,751 B2 FIG. 8
  • 11. US. Patent Aug. 19, 2014 Sheet 9 0f50 US 8,809,751 B2 FIG.9
  • 12. US. Patent Aug. 19, 2014 Sheet 10 0f50 US 8,809,751 B2 400 52 FIG. TO
  • 13. US. Patent Aug. 19, 2014 Sheet 11 0150 US 8,809,751 B2 422 425 FIG. 1 1
  • 14. US. Patent Aug. 19, 2014 Sheet 12 0150 US 8,809,751 B2 450 FIG. 12
  • 15. US. Patent Aug. 19, 2014 Sheet 13 0f50 US 8,809,751 B2 "444 FIG. 13
  • 16. US. Patent Aug. 19, 2014 Sheet 14 0f50 US 8,809,751 B2
  • 17. US. Patent Aug. 19, 2014 Sheet 15 0f50 US 8,809,751 B2 FIG.15
  • 18. US 8,809,751 B2Sheet 16 0f 50Aug. 19, 2014US. Patent
  • 19. US. Patent Aug. 19, 2014 Sheet 17 0150 US 8,809,751 B2 LO L0 17 FIG.
  • 20. US. Patent Aug. 19, 2014 Sheet 18 0f50 US 8,809,751 B2