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Slide 1-1
Key questions for this chapter
•What makes semiconductors so special?
•How do electrons arrange themselves (in energy) in an electronic system?
•What is the formal definition of thermal equilibrium? What are some of its
consequence?
•What are these “energy band diagrams”?
•What is this “Fermi energy”?
•What are these “holes”
Slide 1-2
1.1 Silicon Crystal Structure
• Crystalline solid = elemental
atomic arrangement, or unit
cell, repeated ad infinitum in
space in three dimensions.
• Unit cell of silicon crystal is
cubic.
• Each Si atom has 4 nearest
neighbors.
Chapter 1 Electrons and Holes
in Semiconductors
• Si lattice constant: 0.54 nm
• Si atomic spacing: 0.24 nm
• Si atomic density: 5.0 x 1022 cm-3
Slide 1-3
Silicon Wafers and Crystal Planes
• Silicon wafers are usually
cut along the (100) plane
with a flat or notch to help
orient the wafer during IC
fabrication.
• The standard notation for
crystal planes is based on
the cubic unit cell.
(100) (011) (111)
x
y y y
z z z
x x
Si (111) plane
• Miller indices: symbol [abc]
 The related symbol [abc]
indicates the direction in the
crystal normal to the (abc) plane.
For example, when an electron travels in the
[100] direction, it travel perpendicular to the
(100) plane, i.e., along the x axis
Slide 1-4
1.2 Bond Model of Electrons and Holes
Silicon crystal in
a two-dimensional
representation.
Si Si Si
Si Si Si
Si Si Si
 When an electron breaks loose and becomes a conduction
electron, a hole is also created.
(a) (b)
Si Si Si
Si Si Si
Si Si Si
Si Si Si
Si Si Si
Si Si Si
Slide 1-5
Dopants in Silicon
Si Si Si
Si Si
Si Si Si
Si Si Si
Si Si
Si Si Si
As B
As, a Group V element, introduces conduction electrons and creates
N-type silicon,
B, a Group III element, introduces holes and creates P-type silicon,
and is called an acceptor.
Donors and acceptors are known
as dopants. Dopant ionization
energy ~50meV (very low).
and is called a donor.
Hydrogen: E
ion
m0 q4
13.6 eV
=
=
8e0
2h2
N-type
dopant
P-type
dopant
Slide 1-6
GaAs, III-V Compound Semiconductors, and Their Dopants
As As
Ga
Ga
GaAs has the same crystal structure as Si.
GaAs, GaP, GaN are III-V compound semiconductors, important for
optoelectronics.
Wich group of elements are candidates for donors? acceptors?
Ga
As
As
Ga Ga
Slide 1-7
1.3 Energy Band Model
.
Slide 1-8
1.3.1 Energy Band Diagram
Conduction band Ec
Ev
Eg
Band gap
Valence band
Energy band diagram shows the bottom edge of conduction band,
Ec , and top edge of valence band, Ev .
Ec and Ev are separated by the band gap energy, Eg .
Slide 1-9
Measuring the Band Gap Energy by Light Absorption
photons
photon energy: h v > Eg
Ec
Ev
Eg
electron
hole
Bandgap energies of selected semiconductors
• Eg can be determined from the minimum energy (hn) of
photons that are absorbed by the semiconductor.
Semi-
conductor InSb Ge Si GaAs GaP ZnSe Diamond
Eg (eV) 0.18 0.67 1.12 1.42 2.25 2.7 6
Slide 1-10
1.3.2 Donor and Acceptor in the Band Model
Conduction Band Ec
Ev
Valence Band
Donor Level
Acceptor Level
Ed
Ea
Donor ionization energy
Acceptor ionization energy
Ionization energy of selected donors and acceptors in silicon
Acceptors
Dopant Sb P As B Al In
Ionization energy, E c –E d or E a –E v (meV) 39 44 54 45 57 160
Donors
Slide 1-11
1.4 Semiconductors, Insulators, and Conductors
Totally filled bands and totally empty bands do not allow
Metal conduction band is half-filled.
Ec
Ev
Eg=1.1 eV
Ec
Eg= 9 eV empty
Si (Semiconductor) SiO
2
(Insulator) Conductor
Ec
filled
Top of
conduction band
Ev
current flow. (Just as there is no motion of liquid in a
totally filled or totally empty bottle.)
.
Semiconductors have lower Eg's than insulators and can be
doped.
Slide 1-12
1.5 Electrons and Holes
Both electrons and holes tend to seek their lowest
Holes float up like bubbles in water.
Electrons tend to fall in the energy band diagram.
Ec
Ev
electron kinetic energy
hole kinetic energy
increasing
electron
energy
increasing
hole
energy
energy positions.
The electron wave function is the solution of the three
dimensional Schrodinger wave equation
Slide 1-13


 


 )
(
2m
2
0
2
r
V

The solution is of the form exp( k r)
k = wave vector = 2π/electron wavelength
 
1.5.1 Effective Mass
m
F
dk
E
d
q


 2
2
2
on
accelerati

e
2
2
2
/
mass
effective
dk
E
d


For each k, there is a corresponding E.
Slide 1-14
1.5.1 Effective Mass
In an electric field, E, an electron or a hole accelerates.
Electron and hole effective masses
electrons
holes
Si Ge GaAs InAs AlAs
mn/m0 0.26 0.12 0.068 0.023 2
mp/m0 0.39 0.3 0.5 0.3 0.3
Slide 1-15
1.6 Density of States
E
Dc
Dv
Ec
Ev
D
Ec
Ev
DE








D
D
 3
cm
eV
1
volume
in
states
of
number
)
(
E
E
E
Dc
 
2
8
)
( 3
h
E
E
m
m
E
D c
n
n
c



 
2
8
)
( 3
h
E
E
m
m
E
D
v
p
p
v


 Derived in Appendix I
If we count the number of
states in a small range of
energy, ΔE, in the
conduction band, we can
find the density of states:
Slide 1-16
1.7 Thermal Equilibrium and the Fermi Function
1.7.1 An Analogy for Thermal Equilibrium
There is a certain probability for the electrons in the
conduction band to occupy high-energy states under
the agitation of thermal energy.
Dish
Vibrating Table
Sand particles
Slide 1-17
1.7.2 Fermi Function–The Probability of an Energy State
Being Occupied by an Electron
Remember: there is only
one Fermi-level in a system
at equilibrium.
kT
E
E f
e
E
f /
)
(
1
1
)
( 


 Ef is called the Fermi energy or the
Fermi level.
 The probability of a state at energy E being
occupied by an electron.
  kT
E
E f
e
E
f



)
( kT
E
E f 

  kT
E
E f
e
E
f



1
)
( kT
E
E f 


Boltzmann approximation:
f(E)
0.5 1
Ef
Ef – kT
Ef – 2kT
Ef – 3kT
Ef + kT
E
f
Ef + 2kT
Ef + 3kT
E
  kT
E
E f
e
E
f



)
(
  kT
E
E f
e
E
f



1
)
(
Slide 1-18
1.8 Electron and Hole Concentrations


band
conduction
of
top
)
(
)
(
c
E
c dE
E
D
E
f
n
   
)
(
2
8
0
3
Ec
E
d
e
E
E
e
h
m
m kT
E
E
Ec
E
c
kT
E
E
n
n c
f
c


 






 
dE
e
E
E
h
m
m
n
kT
E
E
E
c
n
n f
c



 
 3
2
8
1.8.1 Derivation of n and p from D(E) and f(E)
Slide 1-19
Electron and Hole Concentrations
Remember: the closer Ef moves up to Nc, the larger n is;
the closer Ef moves down to Ev , the larger p is.
For Si, Nc = 2.8 ´1019
cm-3
and Nv = 1.04´1019
cm-3
.
kT
E
E
c
f
c
e
N
n
/
)
( 


2
3
2
2
2 






h
kT
m
N n
c

kT
E
E
v
v
f
e
N
p
/
)
( 


2
3
2
2
2 






h
kT
m
N
p
v

Nc is called the effective
density of states (of the
conduction band) .
Nv is called the effective
density of states of the
valence band.
Slide 1-20
Slide 1-21
Slide 1-22
1.8.2 The Fermi Level and Carrier Concentrations
kT
E
E
c
f
c
e
N
n
/
)
( 


    eV
6
14
.
0
10
/
10
8
.
2
ln
026
.
0
ln 17
19




 n
N
kT
E
E c
f
c
    eV
31
.
0
10
/
10
04
.
1
ln
026
.
0
ln 14
19




 p
N
kT
E
E v
v
f
Ec
Ef
Ev
0.146 eV
(a)
0.31 eV
Ec
Ef
Ev
(b)
Where is Ef for n =1017 cm-3? And for p = 1014 cm-3?
Solution: (a)
(b) For p = 1014cm-3, from Eq.(1.8.8),
Slide 1-23
1.8.2 The Fermi Level and Carrier Concentrations
1013
1014
1015
1016
1017
1018
1019
1020
Ev
Ec
Na or Nd (cm-3
)
kT
E
E
c
f
c
e
N
n
/
)
( 


 
n
N
kT
E
E c
c
f ln


Slide 1-24
1.8.3 The np Product and the Intrinsic Carrier Concentration
Slide 1-25
Question: What is the hole concentration in an N-type semiconductor
with 1015 cm-3 of donors?
Solution: n = 1015 cm-3.
After increasing T by 60C, n remains the same at 1015 cm-3 while p
increases by about a factor of 2300 because .
Question: What is n if p = 1017cm-3 in a P-type silicon wafer?
Solution:
EXAMPLE: Carrier Concentrations
3
-
5
3
15
-3
20
2
cm
10
cm
10
cm
10


 
n
n
p i
kT
E
i
g
e
n
/
2 

3
-
3
3
17
-3
20
2
cm
10
cm
10
cm
10


 
p
n
n i
Slide 1-26
EXAMPLE: Complete ionization of the dopant atoms
Nd = 1017 cm-3. What fraction of the donors are not ionized?
Solution: First assume that all the donors are ionized.
Probability of not
being ionized
04
.
0
2
1
1
1
2
1
1
1
meV
26
/
)
meV
)
45
146
((
/
)
(



 

e
e
kT
E
E f
d
Therefore, it is reasonable to assume complete ionization, i.e., n = Nd .
meV
146
cm
10 3
17




 
c
f
d E
E
N
n
Ec
Ef
Ev
146 meV
Ed
45meV
1.9 General Theory of n and p

Slide 1-27
2
i
n
np 
d
a N
p
N
n 


Charge neutrality:
2
/
1
2
2
2
2 













 


 i
d
a
d
a
n
N
N
N
N
p
2
/
1
2
2
2
2 













 


 i
a
d
a
d
n
N
N
N
N
n
1.9 General Theory of n and p
Slide 1-28
I. (i.e., N-type)
If ,
II. (i.e., P-type)
If ,
a
d N
N
n 

n
n
p i
2

i
a
d n
N
N 

a
d N
N  d
N
n  d
i N
n
p
2

and
i
d
a n
N
N 
 d
a N
N
p 

p
n
n i
2

d
a N
N  a
N
p  a
i N
n
n
2

and
1.9 General Theory of on n and p
Slide 1-29
EXAMPLE: Dopant Compensation
What are n and p in Si with (a) Nd = 61016 cm-3 and Na = 21016 cm-3
and (b) additional 61016 cm-3 of Na?
(a)
(b) Na = 21016 + 61016 = 81016 cm-3 > Nd
3
16
cm
10
4 



 a
d N
N
n
3
3
16
20
2
cm
10
5
.
2
10
4
/
10
/ 




 n
n
p i
3
16
16
16
cm
10
2
10
6
10
8 







 d
a N
N
p
3
3
16
20
2
cm
10
5
10
2
/
10
/ 




 p
n
n i
+ + + + + +
. . . . . .
. . . . . . . . . . .
Nd = 61016 cm-3
Na = 21016 cm-3
n = 41016 cm-3
+ + + + + +
- - - - - - - -
. . . . . .
. . . . . .
Nd = 61016 cm-3
Na = 81016 cm-3
p = 21016 cm-3
Slide 1-30
1.10 Carrier Concentrations at Extremely High
and Low Temperatures
intrinsic regime
n = Nd
freeze-out regime
ln
n
1/T
High
temp
Room temp Cryogenic temp
kT
E
v
c
i
g
e
N
N
n
p
n
2
/




kT
E
E
d
c d
c
e
N
N
n 2
/
)
(
2
/
1
2









high T:
low T:
Slide 1-31
Key Conclusion

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Ch1 slides-1

  • 1. Slide 1-1 Key questions for this chapter •What makes semiconductors so special? •How do electrons arrange themselves (in energy) in an electronic system? •What is the formal definition of thermal equilibrium? What are some of its consequence? •What are these “energy band diagrams”? •What is this “Fermi energy”? •What are these “holes”
  • 2. Slide 1-2 1.1 Silicon Crystal Structure • Crystalline solid = elemental atomic arrangement, or unit cell, repeated ad infinitum in space in three dimensions. • Unit cell of silicon crystal is cubic. • Each Si atom has 4 nearest neighbors. Chapter 1 Electrons and Holes in Semiconductors • Si lattice constant: 0.54 nm • Si atomic spacing: 0.24 nm • Si atomic density: 5.0 x 1022 cm-3
  • 3. Slide 1-3 Silicon Wafers and Crystal Planes • Silicon wafers are usually cut along the (100) plane with a flat or notch to help orient the wafer during IC fabrication. • The standard notation for crystal planes is based on the cubic unit cell. (100) (011) (111) x y y y z z z x x Si (111) plane • Miller indices: symbol [abc]  The related symbol [abc] indicates the direction in the crystal normal to the (abc) plane. For example, when an electron travels in the [100] direction, it travel perpendicular to the (100) plane, i.e., along the x axis
  • 4. Slide 1-4 1.2 Bond Model of Electrons and Holes Silicon crystal in a two-dimensional representation. Si Si Si Si Si Si Si Si Si  When an electron breaks loose and becomes a conduction electron, a hole is also created. (a) (b) Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si
  • 5. Slide 1-5 Dopants in Silicon Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si As B As, a Group V element, introduces conduction electrons and creates N-type silicon, B, a Group III element, introduces holes and creates P-type silicon, and is called an acceptor. Donors and acceptors are known as dopants. Dopant ionization energy ~50meV (very low). and is called a donor. Hydrogen: E ion m0 q4 13.6 eV = = 8e0 2h2 N-type dopant P-type dopant
  • 6. Slide 1-6 GaAs, III-V Compound Semiconductors, and Their Dopants As As Ga Ga GaAs has the same crystal structure as Si. GaAs, GaP, GaN are III-V compound semiconductors, important for optoelectronics. Wich group of elements are candidates for donors? acceptors? Ga As As Ga Ga
  • 7. Slide 1-7 1.3 Energy Band Model .
  • 8. Slide 1-8 1.3.1 Energy Band Diagram Conduction band Ec Ev Eg Band gap Valence band Energy band diagram shows the bottom edge of conduction band, Ec , and top edge of valence band, Ev . Ec and Ev are separated by the band gap energy, Eg .
  • 9. Slide 1-9 Measuring the Band Gap Energy by Light Absorption photons photon energy: h v > Eg Ec Ev Eg electron hole Bandgap energies of selected semiconductors • Eg can be determined from the minimum energy (hn) of photons that are absorbed by the semiconductor. Semi- conductor InSb Ge Si GaAs GaP ZnSe Diamond Eg (eV) 0.18 0.67 1.12 1.42 2.25 2.7 6
  • 10. Slide 1-10 1.3.2 Donor and Acceptor in the Band Model Conduction Band Ec Ev Valence Band Donor Level Acceptor Level Ed Ea Donor ionization energy Acceptor ionization energy Ionization energy of selected donors and acceptors in silicon Acceptors Dopant Sb P As B Al In Ionization energy, E c –E d or E a –E v (meV) 39 44 54 45 57 160 Donors
  • 11. Slide 1-11 1.4 Semiconductors, Insulators, and Conductors Totally filled bands and totally empty bands do not allow Metal conduction band is half-filled. Ec Ev Eg=1.1 eV Ec Eg= 9 eV empty Si (Semiconductor) SiO 2 (Insulator) Conductor Ec filled Top of conduction band Ev current flow. (Just as there is no motion of liquid in a totally filled or totally empty bottle.) . Semiconductors have lower Eg's than insulators and can be doped.
  • 12. Slide 1-12 1.5 Electrons and Holes Both electrons and holes tend to seek their lowest Holes float up like bubbles in water. Electrons tend to fall in the energy band diagram. Ec Ev electron kinetic energy hole kinetic energy increasing electron energy increasing hole energy energy positions.
  • 13. The electron wave function is the solution of the three dimensional Schrodinger wave equation Slide 1-13        ) ( 2m 2 0 2 r V  The solution is of the form exp( k r) k = wave vector = 2π/electron wavelength   1.5.1 Effective Mass m F dk E d q    2 2 2 on accelerati  e 2 2 2 / mass effective dk E d   For each k, there is a corresponding E.
  • 14. Slide 1-14 1.5.1 Effective Mass In an electric field, E, an electron or a hole accelerates. Electron and hole effective masses electrons holes Si Ge GaAs InAs AlAs mn/m0 0.26 0.12 0.068 0.023 2 mp/m0 0.39 0.3 0.5 0.3 0.3
  • 15. Slide 1-15 1.6 Density of States E Dc Dv Ec Ev D Ec Ev DE         D D  3 cm eV 1 volume in states of number ) ( E E E Dc   2 8 ) ( 3 h E E m m E D c n n c      2 8 ) ( 3 h E E m m E D v p p v    Derived in Appendix I If we count the number of states in a small range of energy, ΔE, in the conduction band, we can find the density of states:
  • 16. Slide 1-16 1.7 Thermal Equilibrium and the Fermi Function 1.7.1 An Analogy for Thermal Equilibrium There is a certain probability for the electrons in the conduction band to occupy high-energy states under the agitation of thermal energy. Dish Vibrating Table Sand particles
  • 17. Slide 1-17 1.7.2 Fermi Function–The Probability of an Energy State Being Occupied by an Electron Remember: there is only one Fermi-level in a system at equilibrium. kT E E f e E f / ) ( 1 1 ) (     Ef is called the Fermi energy or the Fermi level.  The probability of a state at energy E being occupied by an electron.   kT E E f e E f    ) ( kT E E f     kT E E f e E f    1 ) ( kT E E f    Boltzmann approximation: f(E) 0.5 1 Ef Ef – kT Ef – 2kT Ef – 3kT Ef + kT E f Ef + 2kT Ef + 3kT E   kT E E f e E f    ) (   kT E E f e E f    1 ) (
  • 18. Slide 1-18 1.8 Electron and Hole Concentrations   band conduction of top ) ( ) ( c E c dE E D E f n     ) ( 2 8 0 3 Ec E d e E E e h m m kT E E Ec E c kT E E n n c f c             dE e E E h m m n kT E E E c n n f c       3 2 8 1.8.1 Derivation of n and p from D(E) and f(E)
  • 19. Slide 1-19 Electron and Hole Concentrations Remember: the closer Ef moves up to Nc, the larger n is; the closer Ef moves down to Ev , the larger p is. For Si, Nc = 2.8 ´1019 cm-3 and Nv = 1.04´1019 cm-3 . kT E E c f c e N n / ) (    2 3 2 2 2        h kT m N n c  kT E E v v f e N p / ) (    2 3 2 2 2        h kT m N p v  Nc is called the effective density of states (of the conduction band) . Nv is called the effective density of states of the valence band.
  • 22. Slide 1-22 1.8.2 The Fermi Level and Carrier Concentrations kT E E c f c e N n / ) (        eV 6 14 . 0 10 / 10 8 . 2 ln 026 . 0 ln 17 19      n N kT E E c f c     eV 31 . 0 10 / 10 04 . 1 ln 026 . 0 ln 14 19      p N kT E E v v f Ec Ef Ev 0.146 eV (a) 0.31 eV Ec Ef Ev (b) Where is Ef for n =1017 cm-3? And for p = 1014 cm-3? Solution: (a) (b) For p = 1014cm-3, from Eq.(1.8.8),
  • 23. Slide 1-23 1.8.2 The Fermi Level and Carrier Concentrations 1013 1014 1015 1016 1017 1018 1019 1020 Ev Ec Na or Nd (cm-3 ) kT E E c f c e N n / ) (      n N kT E E c c f ln  
  • 24. Slide 1-24 1.8.3 The np Product and the Intrinsic Carrier Concentration
  • 25. Slide 1-25 Question: What is the hole concentration in an N-type semiconductor with 1015 cm-3 of donors? Solution: n = 1015 cm-3. After increasing T by 60C, n remains the same at 1015 cm-3 while p increases by about a factor of 2300 because . Question: What is n if p = 1017cm-3 in a P-type silicon wafer? Solution: EXAMPLE: Carrier Concentrations 3 - 5 3 15 -3 20 2 cm 10 cm 10 cm 10     n n p i kT E i g e n / 2   3 - 3 3 17 -3 20 2 cm 10 cm 10 cm 10     p n n i
  • 26. Slide 1-26 EXAMPLE: Complete ionization of the dopant atoms Nd = 1017 cm-3. What fraction of the donors are not ionized? Solution: First assume that all the donors are ionized. Probability of not being ionized 04 . 0 2 1 1 1 2 1 1 1 meV 26 / ) meV ) 45 146 (( / ) (       e e kT E E f d Therefore, it is reasonable to assume complete ionization, i.e., n = Nd . meV 146 cm 10 3 17       c f d E E N n Ec Ef Ev 146 meV Ed 45meV 1.9 General Theory of n and p 
  • 27. Slide 1-27 2 i n np  d a N p N n    Charge neutrality: 2 / 1 2 2 2 2                    i d a d a n N N N N p 2 / 1 2 2 2 2                    i a d a d n N N N N n 1.9 General Theory of n and p
  • 28. Slide 1-28 I. (i.e., N-type) If , II. (i.e., P-type) If , a d N N n   n n p i 2  i a d n N N   a d N N  d N n  d i N n p 2  and i d a n N N   d a N N p   p n n i 2  d a N N  a N p  a i N n n 2  and 1.9 General Theory of on n and p
  • 29. Slide 1-29 EXAMPLE: Dopant Compensation What are n and p in Si with (a) Nd = 61016 cm-3 and Na = 21016 cm-3 and (b) additional 61016 cm-3 of Na? (a) (b) Na = 21016 + 61016 = 81016 cm-3 > Nd 3 16 cm 10 4      a d N N n 3 3 16 20 2 cm 10 5 . 2 10 4 / 10 /       n n p i 3 16 16 16 cm 10 2 10 6 10 8          d a N N p 3 3 16 20 2 cm 10 5 10 2 / 10 /       p n n i + + + + + + . . . . . . . . . . . . . . . . . Nd = 61016 cm-3 Na = 21016 cm-3 n = 41016 cm-3 + + + + + + - - - - - - - - . . . . . . . . . . . . Nd = 61016 cm-3 Na = 81016 cm-3 p = 21016 cm-3
  • 30. Slide 1-30 1.10 Carrier Concentrations at Extremely High and Low Temperatures intrinsic regime n = Nd freeze-out regime ln n 1/T High temp Room temp Cryogenic temp kT E v c i g e N N n p n 2 /     kT E E d c d c e N N n 2 / ) ( 2 / 1 2          high T: low T: