1. Bo-Yuan Su
12F.-6, No.1, Ln. 237, Tong’an Rd., Annan Dist.,
Tainan City 709, Taiwan (R.O.C.)
(06)2569970/0933-274054
SUMMARY
Process engineer with complete experience in a development of
Flexible thin film transistors fabrication. Areas of expertise include
the WAT electrical measurement of TFT device, TFT simulation and
process integration to improve the production yield.
TECHNOLOGY
 With the working involvement includes PECVD, DC-sputtering,
Implantation, Lithography, Etching process and WAT electrical
analysis.
 Extensive research experience: publish in famous journal as APL
and IEEE on TFT development and new material application.
EXPERIENCE
2013-present ITRI, Hsinchu
Process Engineer and Process Integration
 Involved in the process development of implantation and
PECVD for thin-film transistor fabrication on PI substrate.
 Responsible for WAT analysis and improvement of the TFT
process and reliability.
 AOI defect analysis to improve the particle issue of the product
 Troubleshoot entire process to improve the product yield of TFT
process (>70%) and transfer the RD results into baseline.
Summer TSMC, Tainan
2007 Engineering Intern
 CVD and CMP process learning and paper reading
 CVD recipe test and sort out the data
EDUCATION
 National Cheng Kung University, Tainan
Ph. D. of Electrical Engineering (Electrical materials major), 2013
 National University of Tainan, Tainan
Master of Materials Science, 2009
 National University of Kaohsiung, Kaohsiung
Bachelor of Life Science, 2007

2. Publish list in first author
Journal
1. Bo-Yuan Su, An-Hsiu Cheng, Jia-Ling Wu, Chun-Cheng Lin, Jian-Fu Tang,
Sheng-Yuan Chu, and Yung-Der Juang, “ UV-Ozone Process for Film
Densification of Solution-Processed InGaZnO Thin-Film Transistors”, IEEE/OSA
Journal of Display Technology, vol. 11, pp. 6, (2015) (SCI)
2. Bo-Yuan Su, Sheng-Yuan Chua*, Yung-Der Juang, Han-Chang Chen, “High-
performance Low-temperature Solution-processed InGaZnO Thin-film Transistors
via UV-ozone photo-annealing”, Applied Physics Letters, vol. 102, pp. 192101,
(2013) (SCI)
3. Bo-Yuan Su, Sheng-Yuan Chu*, Yung-Der Juang, and Han Lee, “Improved
Negative Bias Stress Stability of IZO Thin Film Transistors via Post-Vacuum
Annealing of Solution Method”, ECS Journal of Solid State Science and
Technology, vol. 2, pp. Q99-Q103, (2013) (SCI)
4. Bo-Yuan Su, Sheng-Yuan Chu*, Yung-Der Juang, and Ssu-Yin Liu, “Effects of Mg
doping on the Gate Bias and Thermal Stability of Solution-processed InGaZnO
Thin-film Transistors”, Journal of Alloys and Compounds, vol. 580, pp. 10-14,
(2013) (SCI)
5. Bo-Yuan Su, Meng-Chun Chen , Sheng-Yuan Chu*, Yung-Der Juang,
“Investigation of ZnO buffer for the optical and electrical characteristics of
polymer/carbon nanotube composite sol deposited on flexible substrates”,
Advanced Materials Research, vol. 747, pp 526-529, (2013) (SCI)
6. Bo-Yuan Su, Sheng-Yuan Chu*, Yung-Der Juang, Mei-Chun Lin, Chia-Chiang
Chang, and Chin-Jyi Wu, “Efficiency Enhancement of GaAs Photovoltaics Due to
Sol-Gel Derived Anti-Reflective AZO Films”, Journal of The Electrochemical
Society, vol. 159, pp. H312-H316, (2012) (SCI)
7 Bo-Yuan Su, Sheng-Yuan Chu*, and Yung-Der Juang, “Improved Electrical and
Thermal Stabilityof Solution-Processed Li-Doped ZnO Thin-Film Transistors”,
IEEE Transactions on Electron Devices, vol. 59, pp. 700, (2012) (SCI)
8 Bo-Yuan Su, Yan-Kuin Su, Chiao-Yang Cheng, Tzung-Han Wu, Chish-shan Wu,
Jia-Jing Yeh, Pei-Yi Ho, Yung-Der Juang, Sheng-Yuan Chu*, “Antireflective and
radiation resistant ZnO thin films for the efficiency enhancement of GaAs
photovoltaics”, Journal of The Electrochemical Society,vol. 158, pp. H267-H270,
(2011) (SCI)