1. Dr. Markus Mengel Phone: ++49 7364 20 2771 (office)
Senior Scientist ++49 151 543 20 533 (mobile)
Carl Zeiss SMT AG Email: markus.mengel@zeiss.com
D-73446 Oberkochen, Germany
List of Publications
A. Patent Literature - sorted by PatBase patent family number. Date of first filing:
- blue: list of national filings (publication number)
1. PatBase 30283733 29 July 2002
U.Wegmann, M.Hartl, M.Mengel, M.Dahl, H.Haidner, M. Schriever, M. Totzeck,
Method and apparatus for determining the influencing of the state of polarization
by an optical system; and an analyzer.
DE10304822 A1 JP2004061515 A2 US2004114150 AA US2004262500 AA
US2008037905 AA US7286245 BB US7289223 BB
2. PatBase 31457200 5 July 2003
U.Wegmann, M.Mengel
Device for polarization-specific examination, an optical imaging system and
calibration method
AU2003304304 AA CN1584536 A EP1496398 A1 JP2005043353 A2
US2005146789 AA US2008252888 AA US7277182 BB WO05003862 A1
3. PatBase 32487273 6 April 2004
M.Mengel, U.Wegmann, A.Ehrmann, W.Emer, R.Clement, L.Mathijssen
System for measuring the image quality of an optical imaging system
CN100594430 C CN101833247 A+B CN1973246 A, EP1774405 A2+B1
JP2008502126 T2 JP4845880 B2 KR20070024561 A KR20120066055 A
KR101257960 B1 KR101368523 B1 TW200609689 A TW201341976 A
TWI406100 B US2008180688 AA US2008252876 AA US2010315651 AA
US2013293869AA US2014347654 AA US7760366 BB US7796274 BB
US8488127 BB US8823948 BB WO05119368 A2+A3

2. Page 2 List of publications Markus Mengel
4. PatBase 32557654 1 July 2004
M.Dahl, M.Goeppert, H.Haidner, M.Mengel, P.Kaufmann, D.Schumacher,
U.Wegmann
Illumination source, wavefront measuring device, and microlithography projection
illumination device (EUV)
WO06002859 A2+A3
5. PatBase 32814491 8. Sept. 2004
T.Gruner, V.Kamenov, M.Mengel, T.Muelders, U.Wegmann
Method for improving the imaging properties of a projection objective for a
microlithographic projection exposure apparatus
US2006077371 AA US7456933 BB
6. PatBase 35013064 8. Feb. 2006
M.Mengel, M.Totzeck
Method for approximating the influence of an optical system on the state of
polarisation of optical radiation
EP1818658 A1 JP2007212455 A2 JP5209880 B2 US2007182969 AA
US7924436 BB
7. PatBase 41515797 17 Aug. 2006
M.Mengel
Microlithographic projection exposure apparatus
DE102006038643 A1+B4 JP4730675 B2 JP20100501113 T2 TW200832073 A
US2009040498 AA TWI342470 WO08019936 A2+A3 US8675178 BB

3. Page 3 List of publications Markus Mengel
8. PatBase 43629629 15 Feb. 2008
M.Mengel
Optical system for a microlithographic projection exposure apparatus and
microlithographic exposure method
CN101952779 A DE102008009601 A1 JP2011512660 T2 KR20100124260 A
TW200941153 A US2011063597 AA WO09100862 A1
9. PatBase 49345728 28. Jan. 2010
U.Hempelmann, P.Huber, M.Mengel
Arrangement for and method of characterisin the polarization properties of an
optical system
CN10271361 A DE102010001336 B3 JP2013518418 T2 KR20120102098 AA
TW201140253 A US20133021592 WO11091891 A2+A3
10.PatBase 49783095 15. April 2010
R.Klaesges, M.Mengel, S.Oshemkov
Method and apparatus for modifying a substrate surface of a photolithographic
mask
KR20110115548 A US2011255065 AA US8735030 BB
11.PatBase 50498174 28. June 2010
V.Dmitriev, R.Klaesges, V.Kruglyakov, S.Labovitz, M.Mengel, S.Oshemkov, E.Zait,
G.Ben Zvi
Controllable transmission and phase compensation of transparent material
US2013209926 AA WO12009108 A2+A3

4. Page 4 List of publications Markus Mengel
12.PatBase 51714885 1. Feb. 2011
B.Doerband, M.Mengel, S.Oshemkov, F.J.Stickel, U.Wegmann
Method and apparatus for correcting errors in an EUV lithography system
WO12103933 A1
B. Journal articles and proceedings papers
1. K. Cummings; D. Ashworth; M. Bremer; R. Chin; Y. Fan; L. Girard; H. Glatzel; M.
Goldstein; E. Gullikson; J. Kennon; B. Kestner; L. Marchetti; P. Naulleau; R. Soufli;
J. Bauer; M. Mengel; J. Welker; M. Grupp; E. Sohmen; S. Wurm, Update on the
SEMATECH 0.5 NA Extreme-Ultraviolet Lithography (EUVL) Microfield Exposure
Tool (MET), Proceedings of the SPIE, Extreme Ultraviolet (EUV) Lithography, Vol.
9048 (2014)
2. B.Geh, J.Ruoff, J.Zimmermann, P.Graeupner, M.Totzeck, M.Mengel, U.
Hempelmann, E.Schmitt-Weaver, The impact of projection lens polarization
properties on lithographic process at hyper-NA, Proceedings of the SPIE, Optical
Microlithography, Vol. 6520 (2007)
3. M.Mengel, F.C.DeLucia and E. Herbst, Rate coefficients for rotationally inelastic
collisions of CO with H2, Can. J. Phys. 79, 589-595 (2001)
4. M.Mengel, B.P.Winnewisser and M.Winnewisser, Overtone Spectra of
parahydrogen in the liquid phase, Can. J. Phys. 78, 317-315 (2000)
5. M.Mengel and F.C. DeLucia, Helium and hydrogen induced rotational relaxation of
H2CO observed at temperatures of the interstellar medium, Astrophys. J. 543, 271-
274 (2000)
6. M.Mengel, D.C. Flatin and F.C. DeLucia, Theoretical and experimental
investigation of pressure broadening and line shift of carbon monoxide in collision
with hydrogen between 8 and 600 K, J. Chem. Phys. 112, 4069-4075 (2000)
7. C.D. Ball, M.Mengel and F.C. DeLucia, Quantum scattering calculations for H2S-
He between 1-600 K in comparison with pressure broadening shift, and time
resolved doble resonance experiments, J. Chem. Phys. 111, 8893-8903 (1999)
8. M.Mengel, B.P.Winnewisser and M.Winnewisser, Über para- und ortho-
Wasserstoff: Spektroskopie an einem molekularen Quantenkristall, Chem. Technik
50, 107-118 (1998)
9. M.Mengel, B.P.Winnewisser and M.Winnewisser, FTIR spectroscopy of solid para-
hydrogen in the NIR / VIS region, J. Low Temp. 111, 757-762 (1998)

5. Page 5 List of publications Markus Mengel
10.M.Mengel, B.P.Winnewisser and M.Winnewisser, New infrared transitions in solid
para-hydrogenin the MIR and NIR / VIS regions, J. Mol. Spectrosc. 188, 221-244
(1998)
11.M.Mengel, B.P.Winnewisser and M.Winnewisser, High resolution Fourier transform
spectroscopy of solid para-hydrogen in the first overtone region, Phys. Rev. B 55,
10420-10433 (1997)
12.V.Spirko, M.Mengel and P.Jensen, Calculation of rotation-vibration energy levels in
ground state C3 by a Born-Oppenheimer-type separation of vibrational motions, J.
Mol. Spectrosc. 183, 129-138 (1997)
13.M.Mengel and P.Jensen, A theoretical study of the Stark effect in triatomic
molecules. Application to H2O, J. Mol. Spectrosc. 169, 73-91 (1995)
C. Conference Presentations
1. M.Mengel, F.C. De Lucia, HELIUM AND HYDROGEN INDUCED ROTATIONAL
RELAXATION OF H2CO OBSERVED AT TEMPERATURES OF THE
INTERSTELLAR MEDIUM, Lecture MF01, 55th Symposium on Molecular
Sectroscopy, Ohio State University, Columbus, OH (June 12, 2000)
2. M.Mengel, C.D. Ball, F.C. De Lucia, TIME RESOLVED MMW/MMW DOUBLE
RESONANCE SPECTROSCOPY ON METHYL FLOURIDE: OBSERVATION OF
A K-CHANGING COLLISION PROCESS, Poster J8, 16th Colloquium on High
Resolution Molecular Spectroscopy, Université de Bourgogne, Dijon, France
(September 8, 1999)
3. M.Mengel, B.P.Winnewisser, M.Winnewisser, J.F. Justak, F.M. Caimi,
ABSORPTION SPECTRA OF LIQUID HYDROGEN AND THE DEVELOPMENT
OF A NEW OPTICAL MASS GAUGE SENSOR FOR ROCKET FUEL, Lecture
FD06, 54th Symposium on Molecular Sectroscopy, Ohio State University,
Columbus, OH (June 18, 1999)
4. M.Mengel, C.D. Ball, F.C. De Lucia, TIME RESOLVED MMW/MMW DOUBLE
RESONANCE SPECTROSCOPY ON METHYL FLOURIDE: OBSERVATION OF
A K-CHANGING COLLISION PROCESS, Lecture TC02, 54th Symposium on
Molecular Sectroscopy, Ohio State University, Columbus, OH (June 15, 1999)
5. M.Mengel, B.P.Winnewisser, M.Winnewisser, TRIPLE TRANSITIONS IN SOLID
HYDROGEN AND DEUTERIUM, Lecture FC02, 53rd Symposium on Molecular
Sectroscopy, Ohio State University, Columbus, OH (June 19, 1998)
6. M.Mengel, B.P.Winnewisser, M.Winnewisser, FTIR spectroscopy of solid para-
hydrogen in the NIR / VIS region, Lecture P2-12, 2nd International Conference on
Cryocrystals an Quantum Crystals, Polanica, Poland (September 12, 1997)
7. M.Mengel, B.P.Winnewisser, M.Winnewisser, OBSERVATION OF NEW
INFRARED TRANSITIONS IN SOLID PARAHYDROGEN, Poster N02, 15th
Colloquium on High Resolution Molecular Spectroscopy, University of Glasgow,
U.K. (September 10, 1997)

6. 8. C.D. Ball, F.C. De Lucia, M.Mengel, B.P.Winnewisser, M.Winnewisser,
DIAGNOSTIC TESTS OF A COLLISIONAL COOLING CELL USED IN AN FTIR
SPECTROMETER, Lecture FC12, 52nd Symposium on Molecular Sectroscopy,
Ohio State University, Columbus, OH (June 20, 1997)
9. M.Mengel, B.P.Winnewisser, M.Winnewisser, OBSERVATION OF NEW
INFRARED TRANSITIONS IN SOLID PARAHYDROGEN, Lecture WH04, 52nd
Symposium on Molecular Sectroscopy, Ohio State University, Columbus, OH
(June 18, 1997)
10.M.Mengel, B.P.Winnewisser, M.Winnewisser, NEW INFRARED TRANSITIONS
OF SOLID PARAHYDROGEN IN THE SPECTRAL REGION 7900 - 9900 CM-1,
Lecture RF02, 51st Symposium on Molecular Sectroscopy, Ohio State University,
Columbus, OH (June 13, 1996)
11.M.Mengel, B.P.Winnewisser, M.Winnewisser, EXTENDED OBSERVATION AND
ANALYSIS OF THE FIRST OVERTONE SPECTRUM OF SOLID PARA-
HYDROGEN, Lecture RF03, 51st Symposium on Molecular Sectroscopy, Ohio
State University, Columbus, OH (June 13, 1996)
12.M.Jung, M.Mengel, M.Winnewisser, Fourier transform spectrum and MORBID
calculations of Phosphaethyne (HCP), Poster B33, 14th Colloquium on High
Resolution Molecular Spectroscopy, Université de Bourgogne, Dijon, France
(September 13, 1995)
13.R.A. Steinhoff, M.Mengel, B.P.Winnewisser, M.Winnewisser, Fine structure of
infrared transitions in solid hydrogen, Poster B43, 14th Colloquium on High
Resolution Molecular Spectroscopy, Université de Bourgogne, Dijon, France
(September 13, 1995)
14.B.P.Winnewisser, M. Mengel, Intensity determination for an atlas of the infrared
spectrum of methanol, Lecture FA04, 50th Symposium on Molecular Sectroscopy,
Ohio State University, Columbus, OH (June 15, 1995)
15.M. Mengel The Stark Effect for the Water Molecule Calculated from First
Principles, Lecture P3, 13th International Conference on High Resolution
Molecular Spectroscopy, Poznan, Poland (September 9, 1994)
Status as of Jan. 10th
, .2015