1. Silicon Production Overview of the Production of Semiconductor Grade Silicon Ben Browning CMEN 413-001

5. High volatility

8. The TCS is diluted by pure H 2 when going into the reactor

10. The hyper-pure TCS is finally sent to the Siemens reactor after being diluted with H2

11. Deposited on U-shaped rods

12. Leaving stream contains H 2 , HCl, HSiCl 3 (TCS), SiCl 4 (TET), and H 2 SiCl 2

13. The TCS, TET, and HCl are recycled back into the process

14. Siemens Process