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Thin film capacitor (2001-2005) 
• What for? 
– Low inductance capacitive devices in power 
supply decoupling applications. 
• As digital electronic systems continue to operate at 
higher and higher frequencies, the use of low 
inductance decoupling capacitors continues to increase. 
The parasitic inductance of the devices themselves can 
be reduced by the reverse-geometry multi-terminaltion 
design. The reverse-geometry design enables magnetic 
flux to be cancelled. 
1
Thin film capacitor (2001-2005) 
• What for? 
– Low inductance capacitive devices in power 
supply decoupling applications. 
2 
Electric Current 
(From top electrode) 
Electric Current 
(From botom electrode) 
Dielectric material 
Magnetic Ffux 
Solder ball 
+ - + 
-
Thin film capacitor (2001-2005) 
• What is the problem for the decoupling 
applications? … DC electrical degradation 
3
Thin film capacitor (2001-2005) 
• What for? 
– Tunable RF capacitors which are controlled through a 
bias voltage. 
4
Thin film capacitor (2001-2005) 
• What is the problem for tunable RF applications? 
... There is always a little bit of lag time for tuned 
capacitance to be settled after applying the 
bias. 
5
Thin film capacitor (2001-2005) 
• What is the problem for tunable RF applications? 
... Lag time resulting from the narrow depletion 
accompanied with the electron detrapping. 
6
Thin film capacitor (2001-2005) 
• What is the problem for tunable RF applications? 
... Lag time resulting from the narrow depletion 
accompanied with the electron detrapping. 
7
http://toruhara.page.tl/3-.--Solid_Solid-Interface.htm 
8 
Thin film capacitor (2001-2005)

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Thin film capacitor

  • 1. Thin film capacitor (2001-2005) • What for? – Low inductance capacitive devices in power supply decoupling applications. • As digital electronic systems continue to operate at higher and higher frequencies, the use of low inductance decoupling capacitors continues to increase. The parasitic inductance of the devices themselves can be reduced by the reverse-geometry multi-terminaltion design. The reverse-geometry design enables magnetic flux to be cancelled. 1
  • 2. Thin film capacitor (2001-2005) • What for? – Low inductance capacitive devices in power supply decoupling applications. 2 Electric Current (From top electrode) Electric Current (From botom electrode) Dielectric material Magnetic Ffux Solder ball + - + -
  • 3. Thin film capacitor (2001-2005) • What is the problem for the decoupling applications? … DC electrical degradation 3
  • 4. Thin film capacitor (2001-2005) • What for? – Tunable RF capacitors which are controlled through a bias voltage. 4
  • 5. Thin film capacitor (2001-2005) • What is the problem for tunable RF applications? ... There is always a little bit of lag time for tuned capacitance to be settled after applying the bias. 5
  • 6. Thin film capacitor (2001-2005) • What is the problem for tunable RF applications? ... Lag time resulting from the narrow depletion accompanied with the electron detrapping. 6
  • 7. Thin film capacitor (2001-2005) • What is the problem for tunable RF applications? ... Lag time resulting from the narrow depletion accompanied with the electron detrapping. 7