1. NATIONAL TSING HUA UNIVERSITY
A Y-AXIS SOI-MEMS GYROSCOPE WITH A
ZIGZAG-SHAPED Z-ELECTRODE
SUPPORTED BY THREE-DIMENSIONALLY-
INTERSECTED Z-BEAMS
Presenter : Chun-You Liu (劉峻佑)
Instructor : Cheng-Hsien Liu (劉承賢)
Midterm Project Presentation
Presentation I
April 14, 2014
National Tsing Hua University
HsinChu, Taiwan
2. NATIONAL TSING HUA UNIVERSITY
Outline
Introduction
Principle
Purpose
Design concept
Experiment result
Conclusion
3. NATIONAL TSING HUA UNIVERSITY
Outline
Introduction
Principle
Purpose
Design concept
Experiment result
Conclusion