1. The Study of Disk Concentrator VOCs Abatement System Optimal Running
Li Der Chen* Chun Ming Wang* Chinggaam Lin*
Kungyao Chung** Y F Chuang** Chun Hung Tsai**
Abstract
The disk concentrator VOCs (Volatile Organic Compounds) abatement system (honeycomb VOCs
concentrator combine with gas oxidation) is successfully applied for VOCs exhaust treatment in semi-
conductor plan, and it has been proved to be a viable solution for VOCs emission to comply with the
laws.
Many different system operation parameters (include rotation speed, concentration ratio, regeneration
temperature) play important roles on treatment eff i c i e n c y. In this paper, we discuss the relationship
between different operation parameters and removal efficiency, and contribute our experience for system
operation. We also provide our experience for troubleshooting when system removal efficiency was
decayed. In our experience, the removal efficiency can keep above 95% during a long period running by
system operation parameters optimal adjustment.

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