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Elena Mikhonova

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The AccuThermo AW410 was derived from the AG Associates 610 production-proven design. Allwin21 Corp. is the exclusive manufacturer of the AG Associates Heatpulse 610 desktop atmospheric RTP (Rapid Thermal Processing) system. The system uses high intensity visible radiation to heat single wafer for short process periods of time at precisely controlled temperatures. The process periods are typically 1 600 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities, combined with the heating chamber's cold-wall design and superior heating uniformity, provide significant advantages over conventional furnace processing. AccuThermo AW 410 Applications: Silicon-dielectric growth Implant annealing Glass reflow Silicides formation and annealing Contact alloying Nitridation of metals Oxygen-donor annihilation Other heat treatment process AccuThermo AW 410 Typical Application Areas: Chip manufacture Compound industry: GaAs,GaN,GaP,GaINP,InP,SiC, III-V,II-VI Optronics, Planar optical waveguides, Lasers Nanotechnology Biomedical Battery MEMS Solar LED AccuThermo AW 410 Key Features: 35 years’ production-proven real RTP/RTA/RTO/RTN system. Scattered IR light by special gold plated Al chamber surface. Allwin21 advanced Software package with real time control technologies and many useful functions. Consistent wafer-to-wafer process cycle repeatability. Top and bottom High-intensity visible radiation Tungsten halogen lamp heating for fast heating rates with good repeatability performance and long lamp lifetime. Cooling N2 (Or CDA) flows around the lamps and quartz isolation tube for fast cooling rates Elimination of external contamination by Isolated Quartz Tube Up to six gas lines with MFCs and shut-off valves Energy efficient. Small Footprint. Made in U.S.A.

AccuThermo AW 410 Rapid Thermal Processing Equipment

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