Kanomax FMT and the Kanomax Group have unique aerosol expertise and can deliver powerful solutions to your nanoparticle measurement challenges. Let’s get started - connect with us today! Read the PDF of LNS Model 9310 Brochure!

1. Size Nano Colloids
Precisely and Quickly
Liquid Nanoparticle
Sizer (LNS) System
Model 9310
NANOPARTICLE MEASUREMENT SOLUTIONS
• 6 – 360 nm
measurement
range in under
5 minutes
• Actual
quantitative
concentrations
• Any particle,
any shape, any
composition,
any distribution
(including
multimodal)
• Great for CMP
slurry, resin rinse,
bio-pharma,
and filter
characterization,
monitoring,
and control
Industry Recognition
• C79-0113 Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
• C93-0217 Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water Systems
CMP Slurry Characterized with the LNS System
Multi-Mode CMP Slurry Measurement
Particle Diameter (nm)
DifferentialVolumeConcentration
d(nm3
/mL/dlog(DP
)
2.0e+16
1.8e+16
1.6e+16
1.4e+16
1.2e+16
1e+16
8e+15
6e+15
4e+15
2e+15
0
10 20 30 40 50 60 70 80 90100
Multi-mode colloids
are easily distinguished
30 nm Rated Water Filter
Challenged with 2E8 #/ml (6 ppm) 30 nm Particles
Fractional Coverage (Monolayers)
Retention(%)
100
80
60
40
20
0
0.000 0.025
Silica
PSL
Gold
0.050 0.075 0.100 0.125 0.150 0.175 0.200
Filter retention depends
on the challenge particle
UPW Rinse of Ion Exchange Resin
Flush Volume (Liters UPW)
CummulativeParticleConcentrationAdded
(#/mL10nm)
1e+9
1e+8
1e+7
1e+6
1e+5
1 10 100 1000
Resin A
Resin B
Resin C
Resin D
Resin E
Resin F
Spool
Resin rinse times
vary widely
Filter Performance Testing Resin Rinse Benchmarking
Data prepared and presented by CT Associates to the SEMI Ion Exchange
Task Force on 02/27/2014
Van Schooneveld et. al., American Filtration Society Spring Conference,
Minneapolis, MN, 2013
Van Schooneveld et. al., Nanotech 2011: Technical Proceedings of the 2011 Nanotechnology Conference and Expo

2. Kanomax FMT, Inc.
4104 Hoffman Road
White Bear Lake, Minnesota 55110-3708
USA
Phone +1 (651) 762-7762
Fax +1 (651) 762-7763
www.KanomaxFMT.com
Flaretek is a registered trademark of Entegris, Inc.
Swagelok is a registered trademark of Swagelok Company
Windows is a registered trademark of Microsoft Corporation
Printed in the USA. 6/2019
Copyright © 2019 Kanomax FMT
Distributed by:
Kanomax FMT and the Kanomax Group have unique aerosol expertise and can deliver powerful solutions
to your nanoparticle measurement challenges. Let’s get started - connect with us today!
+1 651.762.7762 • ContactUs@KanomaxFMT.com • www.KanomaxFMT.com • Follow us on Facebook and LinkedIn
Specifications
Particle size range: 6-360 nm
Particle size resolution: 64 channels per decade of size
Measurement time: 5 minutes
Inspection volume rate: 0.2-1.0 μL/min
Total liquid sample flow rate (online): 50-280 mL/min
Nebulizer flow rate: 0.5-3.0 mL/min (direct injection)
Dilution factor range: 50-20,000
Colloid concentration range (post dilution): 3E7-3E11 number/mL
Response time to concentration change: 90 seconds
Inlet water pressure (online): 140-300 kPa (20-45 psig)
Compressed air flow rate/pressure: 2.5 std L/min CDA or Nitrogen
2.8 bar (50-60 psi)
Wetted surfaces (before nebulization): PFA, PTFE, sapphire, 316L
stainless steel, PEEK
CPC working fluid: n-butyl alcohol (butanol)
I/O Communications: Ethernet, internal memory
Power requirements: 100/115/220/240 VAC; 50-60 Hz
Operating temperature: 10-35°C
Operating humidity: 0-90% RH non-condensing
Storage temperature: 5-35°C
Dimensions: 9.5 × 8 × 36 inches (D/W/H)
Software – computer operating system: Windows 10
Refer to individual product sheets for component details.
Computer not included.
Specifications subject to change without notice.
The LNS System was developed in collaboration with CT Associates, Inc.
The LNS System uses a soft X-ray charge conditioner.
Particle Diameter
Concentration
Aerosolization Particle Size Distribution Measurement
Colloid
Sample
Engineered
Nebulization
Condensation
Particle Counter
Evaporation Charge Conditioning,
Electrical Mobility-based
Particle Size Classification
Integrated Software Platform - Kanolysis
• All-in-one control of the LNS system
• Automated sampling sequence
• Real-time data analysis
Patent Protected
• Patent numbers 8,272,253 and 8,573,034 have been issued to CTA and licensed by Kanomax.
• Kanomax has applied for additional domestic and international patents for technology contained within the LNS System.
• Patent number 7,852,465 has been issued to Kanomax.
Principle of Operation
View Analysis
Kanolysis - View AnalysisK
500
400
300
200
100
0
1 2 5 10 2
Geometric Mean
Diameter (nm)
Statistics
GSD Total Concentration
(#/ml)
D10
(nm) D50
(nm) D90
(nm)
Diameter (nm)
Concentration(#/ml)
5 100 2 5 1000
Plot
Example
Measured Data 40.7 2.32 2.91e+4 14.4 34.5 132
44.3 2.14 2.72e+4 16.2 41.9 120
27.9 1.80 2.08e+4 12.9 26.2 61.0
114 1.54 6.75e+3 64.3 112 194
Single Mode Curve Fit
Mode 1 Curve Fit
Mode 2 Curve Fit