SlideShare a Scribd company logo
developed by Dr. Hyeung-Yun Kim
December 2012
3rd cassette: option
Wafer size: 2”~8”
Industry miniature with a super
vision inspection power
1. Smallest footprint
2. Very quiet and comfortable
operation
3. Highest defect recognition
and resolution
Edge Exclusion Particle Pattern loss
Scratch White Stain Shot Fail
[Common Info]
Inch Information
Edge Margin=1.500000
Contamination Define
Length Loss Define
Area Loss Define
Line Loss Define
Group Define
Shadow Define
Shot Fail Define
[TAB 1]
Contamination Threshold=-15
Contamination Min Size=10.000000
Pattern Loss Threshold=80
Pattern Loss Min Size=5.000000
Pattern Loss WH Ratio=100000.000000
Line Loss Max Depth=100000.000000
Scratch Min Size=10.000000
Scratch Radian Length=4.000000
Scratch Cont Count=10
Scratch Loss Count=10
Burnning Edge Margin=1.500000
Burn Upper Threshold=-20
Burn Under Threshold=-40
Burn FlatZone Position=2780
Burnning Length=1000
Burnning Count=0
Hazz Up Threshold=30
Hazz Min Size=1000000
Shot Fail Gap=20
Shot Fail WH Ratio=12.000000
Shot Fail Up Level=20.000000
Shot Fail Down Level=8.000000
Shot Fail Min Length=10
Shot Fail NG Line=0
[NG Count]
List 1 EA=4
List1 Size[0]=4
List1 Count[0]=100
List1 Size[1]=100
List1 Count[1]=50
List1 Size[2]=50
List1 Count[2]=10
List1 Size[3]=10
List1 Count[3]=0
List 2 EA=0
List2 Size[0]=3
List2 Count[0]=120
List2 Size[1]=40
List2 Count[1]=30
List2 Size[2]=120
List2 Count[2]=10
List2 Size[3]=200
List2 Count[3]=5
List2 Size[4]=500
List2 Count[4]=2
List 3 EA=5
Line Loss Total Length=2000
Scratch Total Length=3000
[TAB 2]
Vertical Area Pixel Size=2
Horizontal Area Pixel Size=2
S Area Count
M Area Count
L Area Count
O Area Count
Area Total Count
S Area Area
M Area Area
L Area Area
O Area Area
S Pattern Count
M Pattern Count
L Pattern Count
O Pattern Count
Wafer Area=2580.640000
List3 Size[0]=3
List3 Count[0]=120
List3 Size[1]=40
List3 Count[1]=30
List3 Size[2]=120
List3 Count[2]=10
List3 Size[3]=200
List3 Count[3]=5
List3 Size[4]=500
List3 Count[4]=2
List1 String Size[0]
List1 String Size[1]
List1 String Size[2]
List1 String Size[3]
List3 String Size[0]
List3 String Size[1]
List3 String Size[2]
List3 String Size[3]
List3 String Size[4]
Main Screen
Teaching Screen
Inspection Parameter Setting Defect Area Setting
Map Screen
Map Screen
NG Recipe Screen
Main Dialog Console Dialog
System Dialog
Tray Menu
Robot Setup DialogProgram Setup Dialog
Stage Setup
Dialog
Wafer Inspection Robot
Wafer Inspection Robot

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Wafer Inspection Robot

  • 1. developed by Dr. Hyeung-Yun Kim December 2012
  • 2.
  • 3. 3rd cassette: option Wafer size: 2”~8”
  • 4. Industry miniature with a super vision inspection power 1. Smallest footprint 2. Very quiet and comfortable operation 3. Highest defect recognition and resolution
  • 5.
  • 6.
  • 7.
  • 8. Edge Exclusion Particle Pattern loss Scratch White Stain Shot Fail
  • 9.
  • 10.
  • 11. [Common Info] Inch Information Edge Margin=1.500000 Contamination Define Length Loss Define Area Loss Define Line Loss Define Group Define Shadow Define Shot Fail Define [TAB 1] Contamination Threshold=-15 Contamination Min Size=10.000000 Pattern Loss Threshold=80 Pattern Loss Min Size=5.000000 Pattern Loss WH Ratio=100000.000000 Line Loss Max Depth=100000.000000 Scratch Min Size=10.000000 Scratch Radian Length=4.000000 Scratch Cont Count=10 Scratch Loss Count=10 Burnning Edge Margin=1.500000 Burn Upper Threshold=-20 Burn Under Threshold=-40 Burn FlatZone Position=2780 Burnning Length=1000 Burnning Count=0 Hazz Up Threshold=30 Hazz Min Size=1000000 Shot Fail Gap=20 Shot Fail WH Ratio=12.000000 Shot Fail Up Level=20.000000 Shot Fail Down Level=8.000000 Shot Fail Min Length=10 Shot Fail NG Line=0
  • 12. [NG Count] List 1 EA=4 List1 Size[0]=4 List1 Count[0]=100 List1 Size[1]=100 List1 Count[1]=50 List1 Size[2]=50 List1 Count[2]=10 List1 Size[3]=10 List1 Count[3]=0 List 2 EA=0 List2 Size[0]=3 List2 Count[0]=120 List2 Size[1]=40 List2 Count[1]=30 List2 Size[2]=120 List2 Count[2]=10 List2 Size[3]=200 List2 Count[3]=5 List2 Size[4]=500 List2 Count[4]=2 List 3 EA=5 Line Loss Total Length=2000 Scratch Total Length=3000 [TAB 2] Vertical Area Pixel Size=2 Horizontal Area Pixel Size=2 S Area Count M Area Count L Area Count O Area Count Area Total Count S Area Area M Area Area L Area Area O Area Area S Pattern Count M Pattern Count L Pattern Count O Pattern Count Wafer Area=2580.640000 List3 Size[0]=3 List3 Count[0]=120 List3 Size[1]=40 List3 Count[1]=30 List3 Size[2]=120 List3 Count[2]=10 List3 Size[3]=200 List3 Count[3]=5 List3 Size[4]=500 List3 Count[4]=2 List1 String Size[0] List1 String Size[1] List1 String Size[2] List1 String Size[3] List3 String Size[0] List3 String Size[1] List3 String Size[2] List3 String Size[3] List3 String Size[4]
  • 15. Inspection Parameter Setting Defect Area Setting Map Screen
  • 18. Main Dialog Console Dialog System Dialog Tray Menu
  • 19. Robot Setup DialogProgram Setup Dialog Stage Setup Dialog