This Application Note describes an editing process for: (1) precise nanometer-scale linear etching operations, including carbon nanotube (CNT) cutting, shortening, cleaning, and other operations involving individual CNTs, and (2) precise micron-scale area etching operations, including cleaning entire areas of unwanted nanotube overgrowth. All of these operations were achieved using the NanoBot® nanomanipulator equipped with Xidex’s Parallel Multi-Precursor Gas Delivery (Parallel MPGD) system.
Xidex manufactures and sells the NanoBot® system, an easy-to-use, highly versatile, user programmable nanomanipulator featuring specialized end-effectors for nanodevice fabrication and testing inside scanning electron microscopes (SEMs) and focused ion beam (FIB) tools.
Our mission is to enhance the R&D productivity of nanoscientists and nanotechnologists in both industry and academia. We offer best-in-class turnkey solutions to customers with well-defined requirements that are stable over time, and highly adaptable solutions to customers who need a system that can easily be augmented with additional plug-and-play nanopositioners and end-effectors as their needs evolve.
Este documento proporciona información sobre el 12o Simposio sobre Trastornos Bipolares que se llevará a cabo el 28 de enero de 2011 en Barcelona. Incluye detalles sobre los precios de inscripción, fecha límite, forma de pago y confirmación. Además, presenta la agenda científica con dos mesas redondas sobre nuevos retos clínicos y viejos retos terapéuticos en el trastorno bipolar.
The document discusses how humanity has a wild, primitive side that can be revealed in certain environments and situations. It analyzes Joseph Conrad's Heart of Darkness and the film Apocalypse Now, noting how they both depict how colonialism/imperialism and prolonged exposure to violence can corrupt human nature and bring out wild, savage behaviors. The conclusion is that civilization and ethics can be challenged when people are in primitive settings or engage in immorality, bringing their inner wildness to the surface.
Personal views on what Research Infrastructures really need for data - a more comprehensive version of the 5 minute presentation I have at XLDB-Europe, 8-10th June 2011 in Edinburgh
The document discusses sustainability practices in the tea and coffee industries. It outlines codes of conduct, certification standards, and responsible sourcing practices. It also describes various sustainable initiatives companies are undertaking related to energy use, transportation, waste management, packaging, and land use. These include using renewable energy, adopting low-carbon transportation, processing waste into fuels, reducing packaging waste, and using coffee waste to improve soil quality.
Este documento proporciona información sobre el 12o Simposio sobre Trastornos Bipolares que se llevará a cabo el 28 de enero de 2011 en Barcelona. Incluye detalles sobre los precios de inscripción, fecha límite, forma de pago y confirmación. Además, presenta la agenda científica con dos mesas redondas sobre nuevos retos clínicos y viejos retos terapéuticos en el trastorno bipolar.
The document discusses how humanity has a wild, primitive side that can be revealed in certain environments and situations. It analyzes Joseph Conrad's Heart of Darkness and the film Apocalypse Now, noting how they both depict how colonialism/imperialism and prolonged exposure to violence can corrupt human nature and bring out wild, savage behaviors. The conclusion is that civilization and ethics can be challenged when people are in primitive settings or engage in immorality, bringing their inner wildness to the surface.
Personal views on what Research Infrastructures really need for data - a more comprehensive version of the 5 minute presentation I have at XLDB-Europe, 8-10th June 2011 in Edinburgh
The document discusses sustainability practices in the tea and coffee industries. It outlines codes of conduct, certification standards, and responsible sourcing practices. It also describes various sustainable initiatives companies are undertaking related to energy use, transportation, waste management, packaging, and land use. These include using renewable energy, adopting low-carbon transportation, processing waste into fuels, reducing packaging waste, and using coffee waste to improve soil quality.
The document discusses various green certifications and organizations that have endorsed the XLERATOR hand dryer as meeting sustainability standards. It lists several LEED credits the hand dryer can help facilities obtain and notes the hand dryer is GreenSpec listed, endorsed by the Green Restaurant Association and Green Hotels Association, and listed in the Oikos Product Directory. The Green Building Initiative is also mentioned as an organization Excel Dryer supports.
Este documento presenta el programa de un simposio sobre las hermandades de Sevilla y su provincia que se llevará a cabo el 10 de noviembre de 2012. El simposio contará con 8 ponencias académicas sobre diversos temas relacionados con la religiosidad y patrimonio de las hermandades. Se celebrará en el Salón de Actos de la Fundación Cruzcampo y contará con la participación de doctores y licenciados universitarios.
O documento descreve a nova série ZT200 de impressoras da Zebra, projetada para oferecer design compacto, configuração simplificada, operação intuitiva e facilidade de serviço e manutenção. A série inclui os modelos ZT220 e ZT230, projetados para aplicações de etiquetagem que requerem código de barras em indústrias como manufatura, transporte, saúde e varejo.
Éxito de asistencia en las I Jornadas de Farmacia Activa en madridFarmacia Activa
Más de 500 farmacéuticos participaron en las primeras Jornadas de Farmacia Activa organizadas por STADA en Madrid para optimizar la gestión de las farmacias y mejorar el manejo de los equipos. Las claves del nuevo enfoque incluyen el liderazgo, el sentido de pertenencia y la autorresponsabilidad. STADA también presentó una nueva herramienta interactiva para el control y seguimiento de las farmacias.
Este documento presenta la carrera profesional de Jaime Martínez Verdú, un ingeniero industrial que actualmente cursa un doctorado. Describe sus expectativas sobre la vida profesional, incluyendo las líneas de investigación en las que trabaja como técnico de I+D en el área de ingeniería de procesos de AIDICO, que son procesos industriales, tecnología y sistemas en procesos, y eficiencia en procesos. También resume dos proyectos finales de carrera actuales sobre el desarrollo de un sistema
Este documento proporciona información sobre las Jornadas Medievales que se llevarán a cabo en Sigüenza del 8 al 10 de julio de 2011. Incluye una lista de patrocinadores y colaboradores del evento, como el Ayuntamiento de Sigüenza, empresas locales y asociaciones. El programa incluye actividades como una cabalgata de apertura, un mercado medieval, justas a caballo, un asalto al castillo, una noche embrujada y espectáculos de danzantes, juglares y conciertos.
This document is a newsletter announcing the registration deadlines and accompanying program for spouses for the XLVI Annual FELABAN Assembly in Lima, Peru from November 18-19, 2012. Registration costs $825 by May 31st and $1025 starting June 1st, and can be completed online or by email. The accompanying program for spouses includes tours of the Pachacamac Temple, Hacienda Mamacona with folklore show, Historic Lima, and Barranco neighborhood with lunch included on both days. Famous Peruvian author Mario Vargas Llosa will speak on November 19th.
XiLAN, a French wireless internet service provider, wanted to offer IPTV over its existing wireless network to remain competitive. It conducted a trial using Cambium equipment and was able to successfully stream high quality video without increasing bandwidth. Customers reported no degradation of the video stream even when using other bandwidth intensive services simultaneously. Based on the successful trial, XiLAN is signing up its first triple play customers and gaining additional revenue streams while ensuring customer loyalty through excellent quality of service across voice, data and video.
Gerhard Vorster, Headwinds – Disruption is Real • Xerocon 2014 keynoteXeroAccounting
Headwinds – Disruption is Real: Keynote by Gerhard Vorster, Deloitte Chief Strategy Officer, Australia and Asia Pacific. Presented at Xerocon Auckland 2014.
Xero is beautiful online accounting software that connects small businesses and their accountants together in the cloud.
The document discusses various green certifications and organizations that have endorsed the XLERATOR hand dryer as meeting sustainability standards. It lists several LEED credits the hand dryer can help facilities obtain and notes the hand dryer is GreenSpec listed, endorsed by the Green Restaurant Association and Green Hotels Association, and listed in the Oikos Product Directory. The Green Building Initiative is also mentioned as an organization Excel Dryer supports.
Este documento presenta el programa de un simposio sobre las hermandades de Sevilla y su provincia que se llevará a cabo el 10 de noviembre de 2012. El simposio contará con 8 ponencias académicas sobre diversos temas relacionados con la religiosidad y patrimonio de las hermandades. Se celebrará en el Salón de Actos de la Fundación Cruzcampo y contará con la participación de doctores y licenciados universitarios.
O documento descreve a nova série ZT200 de impressoras da Zebra, projetada para oferecer design compacto, configuração simplificada, operação intuitiva e facilidade de serviço e manutenção. A série inclui os modelos ZT220 e ZT230, projetados para aplicações de etiquetagem que requerem código de barras em indústrias como manufatura, transporte, saúde e varejo.
Éxito de asistencia en las I Jornadas de Farmacia Activa en madridFarmacia Activa
Más de 500 farmacéuticos participaron en las primeras Jornadas de Farmacia Activa organizadas por STADA en Madrid para optimizar la gestión de las farmacias y mejorar el manejo de los equipos. Las claves del nuevo enfoque incluyen el liderazgo, el sentido de pertenencia y la autorresponsabilidad. STADA también presentó una nueva herramienta interactiva para el control y seguimiento de las farmacias.
Este documento presenta la carrera profesional de Jaime Martínez Verdú, un ingeniero industrial que actualmente cursa un doctorado. Describe sus expectativas sobre la vida profesional, incluyendo las líneas de investigación en las que trabaja como técnico de I+D en el área de ingeniería de procesos de AIDICO, que son procesos industriales, tecnología y sistemas en procesos, y eficiencia en procesos. También resume dos proyectos finales de carrera actuales sobre el desarrollo de un sistema
Este documento proporciona información sobre las Jornadas Medievales que se llevarán a cabo en Sigüenza del 8 al 10 de julio de 2011. Incluye una lista de patrocinadores y colaboradores del evento, como el Ayuntamiento de Sigüenza, empresas locales y asociaciones. El programa incluye actividades como una cabalgata de apertura, un mercado medieval, justas a caballo, un asalto al castillo, una noche embrujada y espectáculos de danzantes, juglares y conciertos.
This document is a newsletter announcing the registration deadlines and accompanying program for spouses for the XLVI Annual FELABAN Assembly in Lima, Peru from November 18-19, 2012. Registration costs $825 by May 31st and $1025 starting June 1st, and can be completed online or by email. The accompanying program for spouses includes tours of the Pachacamac Temple, Hacienda Mamacona with folklore show, Historic Lima, and Barranco neighborhood with lunch included on both days. Famous Peruvian author Mario Vargas Llosa will speak on November 19th.
XiLAN, a French wireless internet service provider, wanted to offer IPTV over its existing wireless network to remain competitive. It conducted a trial using Cambium equipment and was able to successfully stream high quality video without increasing bandwidth. Customers reported no degradation of the video stream even when using other bandwidth intensive services simultaneously. Based on the successful trial, XiLAN is signing up its first triple play customers and gaining additional revenue streams while ensuring customer loyalty through excellent quality of service across voice, data and video.
Gerhard Vorster, Headwinds – Disruption is Real • Xerocon 2014 keynoteXeroAccounting
Headwinds – Disruption is Real: Keynote by Gerhard Vorster, Deloitte Chief Strategy Officer, Australia and Asia Pacific. Presented at Xerocon Auckland 2014.
Xero is beautiful online accounting software that connects small businesses and their accountants together in the cloud.
Gerhard Vorster, Headwinds – Disruption is Real • Xerocon 2014 keynote
Xidex application note vapor phase editing of carbon nanotube based nanodevices 110313
1. Xidex Vapor Phase Editing of Carbon
Nanotube Based Nanodevices:
Using the NanoBot ® System with Gas Delivery
Application Note
Vladimir Mancevski, Xidex Corporation
Precise Site Selective CNT Editing
This Application Note describes an editing process for: (1)
An extra CNT
precise nanometer-scale linear etching operations, including Lateral CNT to be removed
carbon nanotube (CNT) cutting, shortening, cleaning, and emitter
other operations involving individual CNTs, and (2) precise
micron-scale area etching operations, including cleaning
entire areas of unwanted nanotube overgrowth. All of these
operations were achieved using the NanoBot ® Si Post
nanomanipulator integrated with a gas delivery injection
module.
Si Post 500 nm
Applications that motivated this work include fabrication and
repair of CNT-based scanning probe microscope (SPM) tips Figure 2 – Example of a lateral (horizontal) CNT device
and CNT-based electron emitters. Figures 1-3 show examples fabricated by Xidex for use as a lateral field emitter.
of CNT cutting and area cleaning experiments performed in
related research. Figure 1 shows SEM images of two sets of
carbon nanotubes that have been cut using electron beam
induced etching process [1]. The CNTs in image a) were
etched using a line scan, and the CNTs in image c) were cut
in a box scan. Image d) illustrates the com petitive
contamination that can accompany the process. Figure 2 500 nm
shows an example of a lateral (horizontal) CNT device
fabricated by Xidex for use as a lateral field emitter. Figure 3 Figure 3 – An excess CNT strung from a silicon post
(viewed top down) and the surface, before (left) and after
shows the result of using selective CNT etching to remove an (right) it was removed using vapor phase editing.
extra CNT extending from a silicon post to the substrate.
Nanomanipulator-Based Gas Delivery Nozzles
It has been shown that operating a system of gas delivery
nozzles with the NanoBot ® unit results in an optimized,
localized precursor pressure and flux, while at reduced
chamber pressures. One important outcome with the use of
this gas delivery system is that the etching time and rate both
improve by minimizing the separation distance between the
sample surface and the gas nozzle. It has also been
observed that, for a smaller sample-nozzle gap, the probe
current decreases. This decrease in probe current is due to
ionization and competitive positive current flow, which
increases with decreased spacing because of enhanced local
pressure. The end-result is that the higher local pressure is
responsible for an increased and optimal etching rate. These
Figure 1 - SEM images of two sets of carbon nanotubes results demonstrate that a smaller nozzle gap leads to a
that have been cut using an electron beam induced faster etch rate and a lower sample current.
etching (EBIE) process.
1
2. Limitations of FIB Processing Xidex’s Parallel MPGD Module
The ability to edit materials at the nanoscale level is critical Xidex’s Parallel Multi-Precursor Gas Delivery (MPGD) module is
for the ongoing nanotechnology revolution. While standard available as an end-effector for the NanoBot® nanomanipulator, and
and emerging lithographic techniques will continue to play a can deliver water vapor locally to a sample inside an SEM. This
critical role in nano-fabrication processes, nano-fabrication enables a gas precursor-assisted electron beam-based process that
also requires highly directed materials editing techniques can be used for precise site-selective carbon nanotube (CNT)
which are site-selective. As geometries shrink and wafer editing. The result is a simple, effective, and damage-free way to
cost-of-ownership increases, nanoscale re-manufacturing and control fabrication and repair of CNT-based nanodevices.
repair techniques will be increasingly important. Currently Details of Xidex’s Parallel MPGD system can be downloaded in the
adopted methods for selectively depositing or etching micro- “Products” section at www.Xidex.com.
and nanoscale features utilize ion beam deposition and
The Parallel MPGD system can be configured with internally
etching, laser ablative etching (using far field and near field
mounted reservoirs, or with externally mounted reservoirs, as was
optics), and mechanical abrasion using a fine micro-tip. Of
done in this study (Figure 4). A multi-nozzle fixture is attached to a
these techniques, selective focused ion beam (FIB)
NanoBot X,Y,Z nanopositioning end-effector, located within the SEM
processing is probably the most mature technology that has
or FIB sample chamber. Up to four different gas precursors can be
been extended into the nanoscale. While suitable for some
accommodated. Examples include Pt, W, Au, TEOS, and O2, in
applications, FIB processing has several drawbacks that
addition to water vapor. Key capabilities of this MPGD system are:
make it difficult to extend into many other applications. The
most severe drawback when using a Ga+ FIB, is Ga+ (i) Valves mounted on the nanopositioner enable fast on-off control
implantation into the substrate material, which can of the gas flow within each individual nozzle.
deleteriously change the properties (optical, electrical, (ii) Each gas travels through a separate tube and nozzle, thereby
mechanical, and biological) of the material [2]. Additionally, precluding contamination from residual traces of a previously
charging inherent to the ion-solid interaction causes proximity used process gas. This separation eliminates unwanted
effects that can lead to “riverbed effects” which erode nearby reactions between incompatible gasses, as may be the case
features while the heavy ion beam is scattered, and induce when multiple gasses share the same tubing.
sputtering. Consequently, although focused ion beam (iii) Availability of separate delivery tubes for each gas enables fast
processing is a very effective technique in many nanoscale switching between multiple gasses; i.e., without having to wait
applications [3], an alternative damage-free site-selective to purge the previous gas that was used.
nanomaterials editing technique is needed for fabrication and
(iv) The gas delivery nozzle assembly can be moved in three
repair of CNT-based devices used in many emerging
orthogonal directions, using the X,Y,Z nanopositioning end
applications – enter the Xidex NanoBot system!
effector, providing access to larger areas of the sample. This
also allows better control of the nozzle-sample gap.
Figure 4 – Parallel MPGD System with External Reservoirs
2
3. System for Vapor Phase Editing 4 minutes. A summary of the beam energies, currents, and
A NanoBot system with an externally mounted water reservoir SEM settings investigated is provided in Table 2.
was used to for site selective vapor phase editing of CNTs (as
per Figure 4). The NanoBot unit and MPGD nozzle assembly
were mounted inside a Hitachi S 4000 SEM. This model is not
an environmental SEM, and many other SEM brands and
models are also compatible with the NanoBot system.
Water vapor was delivered to a Gauge 26 metal nozzle with 254
μm ID. With the help of the nanomanipulator, the nozzle could
be placed 1 mm - 10 μm from the sample, depending on the
angle of the nozzle with respect to the SEM stage. Relationship Between Nozzle-Sample Distance and
Etching Time and Rate
Relationship Between Nozzle-Sample Distance and The relationship between the nozzle-sample distance and the
Background Operating Pressure etching time and rate was investigated by measuring the
Improved etching of carbon nanotubes has been correlated with etching time and the sample current. The etching rate was
the small distance between the nozzle and the sample, proving computed by knowing the size of the etched CNT. For this
that the small distance between the nozzle and the sample experiment, the needle-sample distance was changed from 87
results in an increase of the localized gas pressure which in turn μm to 328 μm by doubling the gap each iteration, and then
is responsible for the improved etching of carbon nanotubes. returning back to the smallest gap that could be used for that
sample, 76 μm, to verify that some bias was not being built up.
Because it is impossible to directly measure the localized
Figure 6 shows the result of this trial. To be consistent, all CNT
precursor pressure at the sample, the local pressure has been
cuts were done on the same multi micron long carbon nanotube
computed by knowing the chamber pressure and the gas nozzle
where each cut was a few microns away from the other. For
geometry. To estimate the localized pressure/flux from the
example in Figure 6, for 164 μm it can be seen that the CNT
nozzle, a program initially developed by Kohlmann et al. [4] was
was cut in a segment. During these experiments the
used. The program inputs the flow rate of precursor gas (for
magnification was also kept the same for all trials, at 35 kx for
instance in standard cubic centimeters per second, as
imaging and 100 kx during etching. Table 3 lists all the
determined from the throughput calculations). To find the
parameters for this experiment.
approximate gas spot area and associated pressures, the gas
molecular weight and temperature are also required. Finally,
geometrical factors that determine the area to which the gas is
applied are input. Table 1 lists the parameters, units and some
notes regarding the model parameters.
One important conclusion from this experiment is that the
etching time and rate improved for a smaller gap between the
sample and the nozzle, as shown in Table 3. Further, for a
smaller gap the probe current decreased, as per Table 3. The
change in the probe current as a function of distance is
interpreted as ionization and competitive positive current flow,
The next issue to be resolved was to determine the most
which increases with a decrease in gap spacing, because of an
effective beam energy for etching, which turned out to be 5 keV.
enhanced local pressure. Because the smaller nozzle distance
CNTs can also be cut with modest sample currents of 10−80
shows faster etching rates and lower sample currents, the
pA, as shown in Figure 5. Although the etching process is
results from Table 3 lead to the conclusion that the local
slower at lower currents, one benefit of a low current is that the
pressure is responsible for the increased etching rate.
etching process is more selective. With currents of less than 10
pA a CNT could not be etched in a reasonable time of less than
3