University of Sydney
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The University of Sydney is an Australian public university in Sydney. Founded in 1850, it is Australia's first university and is regarded as one of its most prestigious, ranked as the world's 27th most reputable university.
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Plasma Asher Plasma Descum AW-105R
The AW-105R single-wafer photoresist asher and descum is an automated tool designed as a flexible 13.56MHz RF Parallel Plate plasma photoresist removal and descum system for high-volume wafer fabrication. The AW-105R is in direct response to manufacturer’s concerns for wafer uniformity, uptime, reliability and production-proven technology.
AW-105R Applications:
GaAs, InP, GaN, SiC wafer Strip (Mainly)
GaAs, InP, GaN, SiC wafer Descum (Mainly)
Thin Film Head Resist Cleaning
Opto-Electronic Devices Cleaning
MEMS
Photoresist Stripping
High dose implant (As+, B+, P+)
Rework
Post-polysilicon
Post-metal
Post-oxide
Controlled Resist Removal
Post-develop descum
Uniformity capability (<5% 1σ)
AW-105R Key Features:
Production-proven plasma Asher/Descum system.
Integrated solid robotic wafer handling, Single wafer process.
Up to 3%-5% Uniformity. Best for III-V Materials.
Frontside and backside isotropic removal.
Consistent wafer-to-wafer process cycle repeatability.
Element heating for up to 250oC.
50mm-150mm wafer capability. Up to 6.25” substrate.
Up to 4 wafer size capability without hardware change.
Fixed cassette station and wafer aligner/cooling station.
Can handle 50um thickness wafer.
PC controller with Advanced Allwin21 Software.
Endpoint detection (EOP) with Allwin21 SLOPE technology (Optional).
Up to 3 gas lines with MFC.
Air-Cooled 600W MKS 13.56 MHz RF Generator (300W Option).
Pressure control with Throttle Valve.
15-inch Touch screen monitor GUI.
EMO, Interlocks, and Watchdog function.
GEM/SECS II (optional).
Small Footprint: 27”W x 40”D x 59”H (280LBs)
Made in U.S.A.
Where are you
HCM Global Projects/Process. Whether you are thinking about a new HCM system, gone live with a new implementation or looking to make the most of your current HCM system, STG can help with it!
Recommended
Plasma Asher Plasma Descum AW-105R
The AW-105R single-wafer photoresist asher and descum is an automated tool designed as a flexible 13.56MHz RF Parallel Plate plasma photoresist removal and descum system for high-volume wafer fabrication. The AW-105R is in direct response to manufacturer’s concerns for wafer uniformity, uptime, reliability and production-proven technology.
AW-105R Applications:
GaAs, InP, GaN, SiC wafer Strip (Mainly)
GaAs, InP, GaN, SiC wafer Descum (Mainly)
Thin Film Head Resist Cleaning
Opto-Electronic Devices Cleaning
MEMS
Photoresist Stripping
High dose implant (As+, B+, P+)
Rework
Post-polysilicon
Post-metal
Post-oxide
Controlled Resist Removal
Post-develop descum
Uniformity capability (<5% 1σ)
AW-105R Key Features:
Production-proven plasma Asher/Descum system.
Integrated solid robotic wafer handling, Single wafer process.
Up to 3%-5% Uniformity. Best for III-V Materials.
Frontside and backside isotropic removal.
Consistent wafer-to-wafer process cycle repeatability.
Element heating for up to 250oC.
50mm-150mm wafer capability. Up to 6.25” substrate.
Up to 4 wafer size capability without hardware change.
Fixed cassette station and wafer aligner/cooling station.
Can handle 50um thickness wafer.
PC controller with Advanced Allwin21 Software.
Endpoint detection (EOP) with Allwin21 SLOPE technology (Optional).
Up to 3 gas lines with MFC.
Air-Cooled 600W MKS 13.56 MHz RF Generator (300W Option).
Pressure control with Throttle Valve.
15-inch Touch screen monitor GUI.
EMO, Interlocks, and Watchdog function.
GEM/SECS II (optional).
Small Footprint: 27”W x 40”D x 59”H (280LBs)
Made in U.S.A.
Where are you
HCM Global Projects/Process. Whether you are thinking about a new HCM system, gone live with a new implementation or looking to make the most of your current HCM system, STG can help with it!
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