Fiji islands

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The document is about the Fiji Islands and was created on July 6, 2010 at 10:04 by Rodica Madan. It likely contains information about the geography, people, culture, and history of the Fiji Islands in the South Pacific Ocean.

Problem statement: Challenges in achievement of critical layers CD stability in advanced flash processes are reaching significant complexity as result of tight process window imposed on expected focus/dose variation in lithography tool. Common way to perform feed forward prediction for focus/dose variation is creation of FE (Focus /Exposure) Map. In current methodology CD measurements is the only source of FE map construction. Taking in account that for critical layers significant amount of most sensitive features are created using OPC techniques which in turn impact shape/roughness of targeted CD with minimal variation of the focus/dose. Thus CD measurements could be highly unreliable for FE map predictor with commonly used quadratic approximation. Manual CD measurements data filtering is necessary condition in this case. Furthermore for some features quadratic approximation approach itself raising additional concerns about focus shifts for different dose levels. Also no well defined techniques exist for online focus performance tracing and focus trend detection partly due to the mentioned above approximation approach. Solution: The purpose of this paper is to discuss how to perform reliable feed forward FE prediction taking in account challenges in advanced flash processes. We introduce here additional variable for FE determination – pattern recognition score and thus elimination manual data preprocessing. Also modification in commonly used approximation techniques introduced with sole purpose to differentiate positive and negative focus trends as part of superposition of classical FE map with score FE maps. Description of general approach for algorithm stepping and various techniques for judgment of measurement validity presented in paper as well. Benefits results & summary: Elimination of manual data preprocessing and construction of reliable FE map predictor which could in turn be used for online FE drift estimation as part of routine DCCD/FCCD check as well as drastically reduction of FE measurement

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