Mems(Intro Presentation)

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Technical Seminar For BE Students
"MEMS Technology"

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Mems(Intro Presentation)

  1. 1. Micro-Electro-Mechanical Systems -The Future Technology, but Today’s choice Presented by… Vinayak Hegde Guide: Mrs. Priti Mishra
  2. 2. AIM OF THE PRESENTATION <ul><li>To introduce about the MEMS TECHNOLOGY </li></ul><ul><li>To introduce the MEMS Design process. </li></ul><ul><li>Applications, Advantages and Disadvantages of the MEMS . </li></ul>
  3. 3. Introduction <ul><li>What is MEMS Technology ? </li></ul><ul><ul><li>MEMS technology is based on a number of tools and methodologies, which are used to form small structures with dimensions in the micrometer scale </li></ul></ul><ul><ul><li>MEMS fabrication approach that conveys the advantages of miniaturization, multiple components, and microelectronics to the design and construction of integrated Electromechanical systems </li></ul></ul>
  4. 4. Introduction Conti… <ul><li>What are MEMS ? </li></ul><ul><ul><li>• Micro - Small size, microfabricated structures </li></ul></ul><ul><ul><li>• Electro - Electrical signal /control ( In / Out ) </li></ul></ul><ul><ul><li>• Mechanical - Mechanical functionality (Out/ In ) </li></ul></ul><ul><ul><li>• Systems - Structures, Devices, Systems controls </li></ul></ul><ul><li>What is the size of MEMS? </li></ul><ul><ul><li>They range in size from the sub micron level to the millimeter level, and there can be any number, from a few to millions, in a particular system. </li></ul></ul>
  5. 5. Building Blocks In MEMS <ul><li>How MEMS are prepared? </li></ul><ul><ul><li>There are three basic building blocks in MEMS technology. </li></ul></ul><ul><ul><ul><li>Deposition : The ability to deposit thin films of material on a substrate. </li></ul></ul></ul><ul><ul><ul><li>Lithography : To apply a patterned mask on top of </li></ul></ul></ul><ul><ul><ul><li>the films by photolithograpic imaging. </li></ul></ul></ul><ul><ul><ul><li>Etching : To etch the films selectively to the mask. </li></ul></ul></ul>
  6. 6. MEMS Deposition Technology <ul><li>MEMS deposition technology can be classified in two groups: </li></ul><ul><li>Depositions that happen because of a chemical reaction: </li></ul><ul><ul><ul><li>Chemical Vapor Deposition (CVD) </li></ul></ul></ul><ul><ul><ul><li>Electrodeposition </li></ul></ul></ul><ul><ul><ul><li>Epitaxy </li></ul></ul></ul><ul><ul><ul><li>Thermal oxidation </li></ul></ul></ul><ul><li>Depositions that happen because of a physical reaction: </li></ul><ul><ul><ul><li>Physical Vapor Deposition (PVD) </li></ul></ul></ul><ul><ul><ul><li>Casting </li></ul></ul></ul>
  7. 7. MEMS Lithography Technology <ul><li>MEMS lithography technology can be classified in two groups: </li></ul><ul><li>Pattern Transfer </li></ul><ul><li>Lithographic Module </li></ul><ul><ul><ul><li>Dehydration bake and HMDS prime </li></ul></ul></ul><ul><ul><ul><li>Resist spin/spray and Soft bake </li></ul></ul></ul><ul><ul><ul><li>Alignment, Exposure </li></ul></ul></ul><ul><ul><ul><li>Post exposure bake and Hard bake </li></ul></ul></ul><ul><ul><ul><li>Descum </li></ul></ul></ul>
  8. 8. MEMS Etching Technology <ul><li>There are two classes of etching process: </li></ul><ul><li>Wet etching : The material is dissolved when immersed in a chemical solution. </li></ul><ul><li>Dry etching : The material is sputtered or dissolved using reactive ions or a vapor phase etchant. </li></ul>
  9. 9. MEMS Applications <ul><li>Micro-engines –Micro Reactors, Vibrating Wheel </li></ul><ul><li>Inertial Sensors –Virtual Reality Systems </li></ul><ul><li>Accelerometers –Airbag Accelerometer </li></ul><ul><li>Pressure Sensors –Air Pressure Sensors </li></ul><ul><li>Optical MEMS –Pill Camera </li></ul><ul><li>Fluidic MEMS - Cartridges for Printers </li></ul><ul><li>Bio MEMS - Blood Pressure Sensors </li></ul><ul><li>MEMS Memory Units - Flash Memory </li></ul>
  10. 10. Advantages and Disadvantages <ul><li>Minimize energy and materials use in manufacturing </li></ul><ul><li>Cost/performance advantages </li></ul><ul><li>Improved reproducibility </li></ul><ul><li>Improved accuracy and reliability </li></ul><ul><li>Increased selectivity and sensitivity </li></ul><ul><li>Farm establishment requires huge investments </li></ul><ul><li>Micro-components are Costly compare to macro-components </li></ul><ul><li>Design includes very much complex procedures </li></ul><ul><li>Prior knowledge is needed to integrate MEMS devices </li></ul>
  11. 11. Conclusion <ul><li>The medical, wireless technology, biotechnology, computer, automotive and aerospace industries are only a few that will benefit greatly from MEMS. </li></ul><ul><li>This enabling technology promises to create entirely new categories of products </li></ul><ul><li>MEMS will be the indispensable factor for advancing technology in the 21 st century </li></ul>
  12. 12. My Next Presentation <ul><li>Includes, details about.. </li></ul><ul><ul><li>Historical Background </li></ul></ul><ul><ul><ul><ul><ul><li>(MEMS Evolution) </li></ul></ul></ul></ul></ul><ul><ul><li>Preparation Peocess of MEMS </li></ul></ul><ul><ul><ul><ul><ul><li>(Fabrication Process) </li></ul></ul></ul></ul></ul><ul><ul><li>Interrelationship between MEMS and Nano </li></ul></ul><ul><ul><ul><ul><ul><li>(Future Scope of MEMS) </li></ul></ul></ul></ul></ul><ul><ul><li>Applications of MEMS </li></ul></ul><ul><ul><ul><ul><ul><li>(Fields where MEMS Used ) </li></ul></ul></ul></ul></ul>
  13. 13. References for MEMS <ul><li>IEEE Explore http://ieeexplore.ieee.org/Xplore/DynWel.jsp </li></ul><ul><li>PDF Files http://www.scribd.com/mems/ </li></ul><ul><li>Introduction to Microengineering http://www.dbanks.demon.co.uk/ueng/ </li></ul><ul><li>MEMS Clearinghouse </li></ul><ul><li>http://www.memsnet.org/ </li></ul><ul><li>MEMS Exchange </li></ul><ul><li>http://www.mems-exchange.org/ </li></ul>
  14. 14. Thank You

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