Handlers

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Wafer Handler Equipment

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Handlers

  1. 1. Handlers Semiconductor Wafer Handling HCL Technologies
  2. 2. Introduction HCL Technologies
  3. 3. HCL Technologies
  4. 4. Purpose HCL Technologies
  5. 5. Components Front End  Foup / Carrier / Cassette  Load Port  Interface Back End  Robots  Sensors - Power Cut Sensor - Slot Count Sensor - Load Port Sensor  Pre-Aligner  Stage HCL Technologies
  6. 6. Wafer HCL TechnologiesWafer
  7. 7. Foup / Carrier / Cassette Carrier HCL Technologies Carrier
  8. 8. Overhead Transport System Overhead Transport HCL Technologies
  9. 9. Robots Frogleg Robot Leapfrog Robot Quadra Robot Pre-Aligner Robot HCL Technologies
  10. 10. Working Recipe HCL Technologies
  11. 11. HCL Technologies Working Demo
  12. 12. Front End EFEM HCL Technologies
  13. 13. Carrier Contains Contains Wafer Handler’s Input Overhead Transport HCL Technologies
  14. 14. Back End HCL Technologies
  15. 15. HCL Technologies Backend Demo
  16. 16. Calibration & Testing  Vibration Test  Up Time of Handler System  Robot’s Accuracy  Sensors Test  Auto Calibration HCL Technologies
  17. 17. References  www.Kensigtonlaboratories.com  www.SEMI.org  www.wafercare.com  Owens Instruments HCL Technologies
  18. 18. THANK YOU !! HCL Technologies

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